Crystal growth equipment

Abstract

The utility model discloses crystal growing equipment, and belongs to the technical field of crystal manufacturing. The crystal growth equipment comprises a first lifting assembly, a plurality of second lifting assemblies, a plurality of weighing units, a plurality of leveling assemblies, a plurality of leading-down pipes and a crystal growth furnace. In the crystal production process, the first lifting assembly can drive the multiple second lifting assemblies and the leveling assemblies and the leading-down pipes located on the second lifting assemblies to ascend to the preset positions, and then the corresponding leading-down pipes are subjected to leveling treatment through the multiple leveling assemblies; the coaxiality of each leading-down pipe and the corresponding assembling through hole can be improved, and then the corresponding leading-down pipes are driven by the multiple second lifting assemblies to stretch into a furnace cavity of the crystal growing furnace through the assembling through holes of the crystal growing furnace. The assembly precision of each leading-down pipe and the corresponding assembly through hole of the crystal growth furnace can be improved through the leveling assembly, so that the reliability of the crystal growth equipment can be improved.

Description

Technical Field

[0001] This utility model relates to the field of crystal manufacturing technology, and in particular to a crystal growth device. Background Technology

[0002] Crystal growth is the process by which a substance forms crystals from a gaseous, liquid, or solid phase under specific physical and chemical conditions. A crystal growth apparatus is a device used to produce crystals, typically including a drop tube and a crystal growth furnace. The material for crystal growth is placed in a crucible, which is then fed into the crystal growth furnace through the drop tube. The crucible is heated, melting the material. The crucible is then continuously lowered, causing the temperature at the bottom to drop below its melting point, at which point the material begins to crystallize. The crystal continues to grow as the crucible descends.

[0003] Multi-crucible crystal growth furnaces can grow multiple crystals at once, which can improve crystal growth efficiency. However, in the process of feeding multiple crucibles into the crystal growth furnace through multiple guide tubes, due to the differences between the different guide tubes, some guide tubes may have difficulty entering the crystal growth furnace, resulting in low reliability of the crystal growth equipment. Utility Model Content

[0004] This utility model provides a crystal growth apparatus. The technical solution is as follows:

[0005] The crystal growth equipment includes:

[0006] A first lifting assembly and a plurality of second lifting assemblies, wherein the plurality of second lifting assemblies are located on the first lifting assembly;

[0007] Multiple weighing units are provided, each weighing unit corresponding to one of the multiple second lifting components. Each weighing unit includes a weighing sensor and a display that are electrically connected. The weighing sensor in the weighing unit is located between the corresponding second lifting component and the first lifting component, and the display in the weighing unit is mounted on the corresponding second lifting component.

[0008] Multiple leveling components, each corresponding to one of the multiple second lifting components, and the leveling components are installed on the side of the corresponding second lifting component that is away from the first lifting component;

[0009] Multiple guide tubes, each guide tube corresponding to one of the multiple leveling components, with each guide tube located on the side of the corresponding leveling component away from the second lifting component;

[0010] A crystal growth furnace is located on the side of the plurality of down tubes away from the first lifting assembly. The crystal growth furnace includes a connected upper shell and a multi-layer heat-insulating base plate. The multi-layer heat-insulating base plate has a plurality of assembly through holes, which correspond one-to-one with the plurality of down tubes.

[0011] The weight displayed on the weighing unit's screen is used to indicate whether the guide tube scrapes against the side wall of the assembly through hole and / or abuts against the multi-layer heat insulation base plate during its insertion into the assembly through hole.

[0012] Optionally, the leveling assembly includes: a first adjusting plate, a second adjusting plate, and a plurality of adjusting bolts;

[0013] The first adjusting plate is connected to the side of the second lifting assembly opposite to the first lifting assembly;

[0014] The second adjusting plate is located on the side of the first adjusting plate opposite to the second lifting assembly, and the second adjusting plate has multiple threaded through holes;

[0015] The plurality of adjusting bolts correspond one-to-one with the plurality of threaded through holes. The adjusting bolts are assembled in the corresponding threaded through holes, and one end of the adjusting bolts is in contact with the first adjusting plate.

[0016] Optionally, the leveling assembly further includes: a scale, the scale being located on one side of the first adjusting plate and the second adjusting plate in a first direction, the first direction being a direction parallel to the surface of the first adjusting plate;

[0017] The scale is connected to the first adjustment plate. The scale has multiple scale lines, and the arrangement direction of the multiple scale lines is perpendicular to the surface of the first adjustment plate.

[0018] Optionally, the second adjusting plate has four corners, and the second adjusting plate has four threaded through holes, which correspond one-to-one with the four corners, and the threaded through holes are located at the corresponding corner positions.

[0019] The number of adjusting bolts is four.

[0020] Optionally, the second lifting assembly includes: a first support base, a second support base, a telescopic structure, and a drive structure;

[0021] The first support is located on the side of the second support that is away from the first lifting assembly;

[0022] The telescopic structure is located between the first support base and the second support base, with one end of the telescopic structure connected to the first support base and the other end of the telescopic structure connected to the second support base;

[0023] The driving structure is connected to the telescopic structure to drive the telescopic unit to extend and retract in a second direction, which is parallel to the arrangement direction of the first support and the second support.

[0024] Optionally, the crystal growth apparatus further includes a cooling element, a first pipeline, a second pipeline, and a cold source, wherein the cooling element is connected to the cold source through the first pipeline and the second pipeline;

[0025] The second adjusting plate is thermally conductive, and the cooling element is located on the side of the second adjusting plate close to the first adjusting plate and is connected to the second adjusting plate.

[0026] Optionally, the second adjusting plate has a mounting groove on the side near the first adjusting plate, and the cooling element is located in the mounting groove.

[0027] Optionally, the cooling component includes cooling pipes, the orthographic projection of which on the direction perpendicular to the surface of the second adjusting plate is S-shaped or U-shaped.

[0028] Optionally, the first pipe has a first end and a second end, the first end of the first pipe is mounted on the second support, and the second end of the first pipe is mounted on the cooling element;

[0029] The second pipe has a third end and a fourth end, the third end of the second pipe is mounted on the second support, and the fourth end of the second pipe is mounted on the cooling element;

[0030] Both the first pipeline and the second pipeline include corrugated hoses.

[0031] Optionally, the weighing unit further includes a weighing plate located between the second support and the weighing sensor.

[0032] The beneficial effects of the technical solution provided by this utility model embodiment are:

[0033] A crystal growth apparatus is provided, comprising a first lifting assembly, multiple second lifting assemblies, multiple weighing units, multiple leveling assemblies, multiple guide tubes, and a crystal growth furnace. During crystal production, the first lifting assembly drives multiple second lifting assemblies, along with leveling assemblies and guide tubes located on the second lifting assemblies, to rise to a preset position. Then, the multiple leveling assemblies level their respective guide tubes, improving the coaxiality between each guide tube and its corresponding assembly through-hole. The multiple second lifting assemblies then drive their respective guide tubes through the assembly through-holes of the crystal growth furnace into the furnace cavity. During the insertion of the guide tubes into the assembly through-holes, the weighing units monitor the rising status of the guide tubes in real time. The leveling assemblies improve the assembly accuracy of each guide tube and its corresponding assembly through-hole, ensuring that all guide tubes can smoothly pass through the assembly through-holes and enter the furnace cavity, thus improving the reliability of the crystal growth apparatus. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the structure of a crystal growth apparatus provided in an embodiment of the present invention;

[0036] Figure 2 This is a partial structural schematic diagram of a crystal growth apparatus provided in an embodiment of this utility model;

[0037] Figure 3 yes Figure 2 A schematic diagram of a cross-sectional structure of the leveling component along position A1-A2;

[0038] Figure 4 This is a schematic diagram of another leveling component and a second lifting component provided in this embodiment of the present invention;

[0039] Figure 5 This is a schematic diagram of another leveling component and a second lifting component provided in this embodiment of the present invention;

[0040] Figure 6 This is a partial structural schematic diagram of another crystal growth apparatus provided in an embodiment of the present invention;

[0041] Figure 7 This is a schematic diagram of the structure of a cooling component and a second adjusting plate provided in an embodiment of this utility model. Detailed Implementation

[0042] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0043] Please refer to Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the structure of a crystal growth apparatus 10 provided in an embodiment of the present invention. Figure 2 This is a partial structural diagram of a crystal growth apparatus 10 provided in an embodiment of the present invention. Figure 2 The structure of the second lifting assembly 12, weighing unit 12a and leveling assembly 13 in the crystal growth apparatus 10 is shown. The crystal growth apparatus 10 may include: a first lifting assembly 11 and a plurality of second lifting assemblies 12, a plurality of weighing units 12a, a plurality of leveling assemblies 13, a plurality of lead-down tubes 14 and a crystal growth furnace 15.

[0044] Multiple second lifting components 12 can be located on the first lifting component 11, and the first lifting component 11 can drive the multiple second lifting components 12 to move uniformly along a second direction. The crystal growth apparatus 10 may also include an apparatus mounting frame, and the side of the first lifting component 11 facing away from the second lifting components 12 can be fixedly connected to the apparatus mounting frame so that the first lifting component 11 can be mounted on the apparatus mounting frame, that is, the apparatus mounting frame can provide support for the first lifting component 11. The second direction is the lifting direction of the first lifting component 11.

[0045] Multiple weighing units 12a correspond one-to-one with multiple second lifting assemblies 12. Each weighing unit 12a includes a weighing sensor 12b and a display 12c. The weighing sensor 12b in the weighing unit 12a is located between the corresponding second lifting assembly 12 and the first lifting assembly 11. The display 12c in the weighing unit 12a is mounted on the corresponding second lifting assembly 12. The weighing sensor 12b can be connected to the second lifting assembly 12; the display 12c is mounted on the second lifting assembly 12 and is electrically connected to the weighing sensor 12b. The display 12c of the weighing unit 12a is used to display the weight detected by the weighing sensor 12b.

[0046] Multiple leveling components 13 can correspond one-to-one with multiple second lifting components 12, and the leveling component 13 is installed on the side of the corresponding second lifting component 12 away from the first lifting component 11. The second lifting component 12 can drive the corresponding leveling component 13 to move along a second direction, and the lifting direction of the second lifting component 12 can be the same as the lifting direction of the first lifting component 11. That is, the second lifting component 12 can drive the corresponding leveling component 13 to move away from the first lifting component 11, or the second lifting component 12 can drive the corresponding leveling component 13 to move closer to the first lifting component 11.

[0047] Multiple down-feed tubes 14 correspond one-to-one with multiple leveling components 13. The down-feed tubes 14 are located on the side of the corresponding leveling component 13 away from the second lifting component 12. The down-feed tubes 14 can be used to assemble crucibles. During crystal production, the crystal seed material can be placed in the crucible first, and then the crucible containing the crystal seed material can be placed in the down-feed tube 14. The down-feed tube pre-loaded with the crucible can then be placed on the corresponding leveling component 13. The second lifting component 12 can drive the corresponding leveling component 13 and the down-feed tube 14 corresponding to the leveling component 13 to move along the second direction.

[0048] The crystal growth furnace 15 is located on the side of the plurality of downpipes 14 opposite to the first lifting assembly 11. The crystal growth furnace 15 may include a connected multi-layer heat-insulating base plate 151 and an upper shell 152. The upper shell 152 has a bottom opening, and the multi-layer heat-insulating base plate 151 may be located at the bottom opening of the upper shell 152. The multi-layer heat-insulating base plate 151 and the upper shell 152 can form a furnace cavity k1. The heat-insulating base plate 151 is located on the side of the upper shell 152 closer to the second lifting assembly 12. The multi-layer heat-insulating base plate 151 has mounting through holes K2. The plurality of mounting through holes k2 correspond one-to-one with the plurality of downpipes 14, and the inner diameter of the mounting through hole k2 matches the outer diameter of the corresponding downpipe 14.

[0049] During the assembly of the crystal growth equipment 10, the first lifting component 11 drives multiple second lifting components 12, as well as the leveling components 13 and the guide tube 14 located on the second lifting components 12, to rise to a preset position. At this time, there is still a certain distance between the guide tube 14 and the crystal growth furnace 15, and the guide tube 14 has not yet extended into the assembly through hole k2 of the crystal growth furnace 15. Then, the multiple leveling components 13 respectively perform leveling treatment on their respective guide tubes 14 to improve the coaxiality of each guide tube 14 and the corresponding assembly through hole k2. Then, the multiple second lifting components 12 respectively drive their respective guide tubes 14 to extend into the furnace cavity k1 of the crystal growth furnace 15 through the assembly through hole k2 of the crystal growth furnace 15.

[0050] The weight value displayed on the display 12c of the weighing unit 12a is used to indicate whether the down-leading pipe 14 scrapes against the side wall of the assembly through hole k2 and / or abuts against the multi-layer heat insulation base plate 151 during the process of extending into the assembly through hole k2.

[0051] The multi-layer heat-insulating base plate 151 of the crystal growth furnace 15 includes a first heat-insulating base plate 1511 and a second heat-insulating base plate 1512. Both the first heat-insulating base plate 1511 and the second heat-insulating base plate 1512 have mounting through holes k2. In related technologies, during the assembly of the crystal growth equipment 10, that is, during the process of inserting the down-lead tube 14 into the crystal growth furnace 15 through the mounting through hole k2, since the operator cannot directly observe the internal situation of the crystal growth furnace 15, during the rising process of the down-lead tube 14, the side wall of the down-lead tube 14 may rub against the mounting through hole k2, or the end of the down-lead tube 14 may push up the second heat-insulating base plate 1512, which will seriously affect the levelness of the down-lead tube 14.

[0052] In this embodiment of the invention, a weighing sensor 12b and a display 12c are provided in the crystal growth equipment 10. During the ascent of the down-lead tube 14, when the down-lead tube 14 scrapes against the heat insulation base plate 151 or pushes up the second heat insulation base plate 1512, the monitoring result of the weighing sensor 12b used to monitor the weight of the down-lead tube 14 will change. Therefore, by monitoring the weight of the down-lead tube in real time through the weighing sensor 12b and displaying the monitoring result on the display 12c, the operator can intuitively observe the ascent of the down-lead tube 14 based on the weight change and take timely countermeasures according to the specific situation.

[0053] In related technologies, during the process of feeding multiple down-lead tubes 14 into the crystal growth furnace 15, due to differences between the different down-lead tubes 14, if the verticality of some down-lead tubes 14 is poor, the down-lead tube with poor verticality will scrape when entering the assembly through-hole k2, making it difficult for the down-lead tube 14 to enter the crystal growth furnace 15. In this embodiment of the present invention, the leveling component 13 improves the assembly accuracy of each down-lead tube 14 and the corresponding assembly through-hole k2 of the crystal growth furnace 15, and during the process of the down-lead tube 14 extending into the assembly through-hole k2, the weighing unit 12a observes the rising status of the down-lead tube 14 in real time, so that multiple down-lead tubes 14 can smoothly pass through the assembly through-hole k2 and enter the furnace cavity k1 of the crystal growth furnace 15.

[0054] In summary, this utility model provides a crystal growth apparatus comprising a first lifting assembly, multiple second lifting assemblies, multiple leveling assemblies, multiple guide tubes, and a crystal growth furnace. During crystal production, the first lifting assembly drives multiple second lifting assemblies, along with the leveling assemblies and guide tubes located on the second lifting assemblies, to a preset position. Then, the multiple leveling assemblies level their respective guide tubes, improving the coaxiality between each guide tube and its corresponding assembly through-hole. The multiple second lifting assemblies then drive their respective guide tubes through the assembly through-holes of the crystal growth furnace into the furnace cavity. During the insertion of the guide tubes into the assembly through-holes, a weighing unit can monitor the rising status of the guide tubes in real time. The leveling assemblies improve the assembly accuracy of each guide tube and its corresponding assembly through-hole, ensuring that all guide tubes can smoothly pass through the assembly through-holes into the furnace cavity, thus improving the reliability of the crystal growth apparatus.

[0055] Please refer to Figure 1 , Figure 2 and Figure 3 , Figure 3 yes Figure 2 The diagram shows a cross-sectional structure of the leveling component 13 along the A1-A2 position. Figure 2 The diagram shows a portion of the structure of the adjusting bolt 133 located in the threaded through hole k3 of the second adjusting plate 132, indicated by dashed lines. In one optional embodiment, the leveling assembly 13 may include: a first adjusting plate 131, a second adjusting plate 132, and a plurality of adjusting bolts 133. The first adjusting plate 131 may be connected to the side of the second lifting assembly 12 opposite to the first lifting assembly 11; the second adjusting plate 132 may be located on the side of the first adjusting plate 131 opposite to the second lifting assembly 12, and the second adjusting plate 132 has a plurality of threaded through holes k3; the plurality of adjusting bolts 133 may correspond one-to-one with the plurality of threaded through holes k3, and the adjusting bolts 133 are assembled in the corresponding threaded through holes k3, with one end of the adjusting bolt 133 contacting the first adjusting plate 131.

[0056] The first adjusting plate 131 and the second adjusting plate 132 can be stacked on the second lifting assembly 12 along the side away from the second lifting assembly 12. The first adjusting plate 131 can be bonded or bolted to the side of the second lifting assembly 12 opposite to the first lifting assembly 11.

[0057] Since the adjusting bolt 133 is connected to the second adjusting plate 132 through the threaded through hole k3 on the second adjusting plate 132, the operator can rotate the adjusting bolt 133 around the central axis of the screw of the adjusting bolt 133 by turning the adjusting bolt 133, so as to drive the position on the second adjusting plate 132 corresponding to the adjusting bolt 133 to move in the length direction of the screw of the adjusting bolt 133, thereby adjusting the tilt angle of the second adjusting plate 132 relative to the first adjusting plate 131, that is, adjusting the tilt angle of the down pipe 14 located on the second adjusting plate 132.

[0058] Users can use a level to measure the levelness of the downpipe 14, and then use the level to adjust the second adjustment plate 132 to a horizontal state.

[0059] In one exemplary embodiment, the rotation of the adjusting bolt 133 about the central axis of the screw of the adjusting bolt 133 includes two cases: rotation about a first target direction and rotation about a second target direction. The first target direction can be one of clockwise rotation and counterclockwise rotation, and the second target direction can be the other of clockwise rotation and counterclockwise rotation.

[0060] When the adjusting bolt 133 rotates around its central axis in the first target direction, it can cause a portion of the second adjusting plate 132 to move towards the first adjusting plate 131. When the adjusting bolt 133 rotates around its central axis in the second target direction, it can cause a portion of the second adjusting plate 132 to move away from the first adjusting plate 131. It should be noted that the direction in which the adjusting bolt 133 rotates clockwise and counterclockwise around its central axis, causing the second adjusting plate 132 to move, depends on the direction of the thread on the adjusting bolt 133 and the direction of the thread in the threaded through hole k3 of the second plate.

[0061] In one exemplary embodiment, the adjusting bolt 133 includes a wing screw.

[0062] Please refer to Figure 2 In an optional embodiment, the leveling assembly 13 may further include a limiting baffle 134, which is located on both sides of the first adjusting plate 131 and the second adjusting plate 132 perpendicular to the second direction; or the limiting baffle 134 surrounds the first adjusting plate 131 and the second adjusting plate 132; the limiting baffle 134 is fixedly connected to at least two sides of the first adjusting plate 131; or the limiting baffle 134 is fixedly connected to the side of the second lifting assembly 12 opposite to the first lifting assembly 11. For example, the first direction is horizontal, the second direction is vertical, and the limiting baffle 134 is located on both sides of the first adjusting plate 131 and the second adjusting plate 132 in the horizontal direction.

[0063] The thickness of the limiting baffle 134 in the second direction is greater than the thickness of the first adjusting plate 131 in the second direction. The limiting baffle 134 can limit the second adjusting plate 132 in the direction parallel to the plate surface of the first adjusting plate 131, so as to prevent the second adjusting plate 132 from translating in the direction perpendicular to the second direction during the adjustment process.

[0064] Please refer to Figure 4 , Figure 4 This is a schematic diagram of another leveling component 13 and a second lifting component 12 provided in an embodiment of the present invention. In an optional embodiment, the leveling component 13 may further include a scale 135, which is located on one side of the first adjusting plate 131 and the second adjusting plate 132 in a first direction. The scale 135 is located on both sides of the first adjusting plate 131 and the second adjusting plate 132 in the horizontal direction. The first direction is parallel to the surface of the first adjusting plate 131. The scale 135 is connected to the first adjusting plate 131 and has multiple scale lines. The arrangement direction of the multiple scale lines is perpendicular to the surface of the first adjusting plate 131, that is, the arrangement direction of the multiple scale lines is the second direction.

[0065] The length of the scale 135 in the second direction can be greater than the thickness of the first adjusting plate 131 in the second direction. It should be noted that the first adjusting plate 131 may include a bottom surface and a top surface opposite to each other, as well as a side surface connected to the bottom and top surfaces. The bottom surface of the first adjusting plate 131 is located on the side of its top surface facing away from the second adjusting plate 132. In this embodiment of the invention, the surface of the first adjusting plate 131 refers to either its top or bottom surface. The scale 135 can be connected to the side surface of the first adjusting plate 131.

[0066] In this embodiment of the utility model, the level of the second adjusting plate 132 is adjusted by bolt structure, which makes it easier for the operator to control the distance of movement of the second adjusting plate 132. Furthermore, by setting a scale 135 on one side of the first adjusting plate 131 and the second adjusting plate 132, it is easier for the operator to accurately control the precision of the adjustment and reduce the difficulty of operation.

[0067] Please refer to Figure 5 , Figure 5 This is a schematic diagram of another leveling component 13 and a second lifting component 12 provided in this embodiment of the present invention. Figure 5The schematic diagram shown is a view of the leveling assembly 13 and the second lifting assembly 12 from a direction perpendicular to the second adjusting plate 132. In an optional embodiment, the second adjusting plate 132 may have four corner portions b1, and the number of threaded through holes k3 on the second adjusting plate 132 is four. The four threaded through holes k3 correspond one-to-one with the four corner portions b1, and the threaded through holes k3 are located at the corresponding corner portion b1. The number of adjusting bolts 133 may also be four. That is, the plate body of the second adjusting plate 132 may be a rectangular plate body. By connecting the four adjusting bolts 133 to the four corner portions b1 of the second adjusting plate 132 respectively, the levelness of the second adjusting plate 132 can be adjusted. Furthermore, the adjusting bolts 133 can also avoid affecting the guide pipe 14 placed on the second adjusting plate 132.

[0068] In one exemplary embodiment, the first adjusting plate 131 has a limiting groove on the side near the second adjusting plate 132, and the end of the adjusting bolt 133 is located in the limiting groove, which is used to limit the adjusting bolt 133 in a direction perpendicular to the panel of the first adjusting plate 131, thereby reducing the difficulty for the operator to adjust the level of the second adjusting plate 132 by adjusting the adjusting bolt 133.

[0069] Please refer to Figure 1 and Figure 4 In one optional embodiment, the second lifting assembly 12 may include: a first support base 121, a second support base 122, a telescopic structure 123, and a drive structure 124. The first support base 121 and the second support base 122 are disposed opposite to each other, with the first support base 121 located on the side of the second support base 122 away from the first lifting assembly 11; the telescopic structure 123 is located between the first support base 121 and the second support base 122, with one end of the telescopic structure 123 connected to the first support base 121 and the other end of the telescopic structure 123 connected to the second support base 122; the drive structure 124 is connected to the telescopic structure 123 to drive the telescopic unit to extend and retract in a second direction, which is parallel to the arrangement direction of the first support base 121 and the second support base 122.

[0070] The telescopic structure 123 may include a first connecting rod and a second connecting rod, which may be cross-connected. The two ends of the first connecting rod may be slidably connected to the first support base 121 and the second support base 122, respectively. Similarly, the two ends of the second connecting rod may also be slidably connected to the first support base 121 and the second support base 122, respectively. The output end of the drive structure 124 may be connected to one end of the first connecting rod. The drive structure 124 may also include an adjustment knob, allowing the operator to control the telescopic structure 123 to extend or retract, thereby controlling the second lifting assembly 12 to move the guide tube 14 in the second direction. The second lifting assembly 12 may be a scissor-type lifting mechanism.

[0071] Please refer to Figure 6 , Figure 6 This is a partial structural schematic diagram of another crystal growth apparatus 10 provided in this embodiment of the present invention. Figure 6 The diagram shows the structure of the leveling assembly 13, the second lifting assembly 12, the cooling component 16, the first pipeline 17, and the second pipeline 18 in the crystal growth apparatus 10. It should be noted that... Figure 6 The cooling element 16 located inside the structure is shown by a dashed line. The crystal growth equipment 10 may also include the cooling element 16, a first pipe 17, a second pipe 18 and a cold source (not shown in the figure). The cooling element 16 is connected to the cold source through the first pipe 17 and the second pipe 18. The second adjusting plate 132 may be thermally conductive. The cooling element 16 is located on the side of the second adjusting plate 132 close to the first adjusting plate 131 and is connected to the second adjusting plate 132. The material of the second regulating plate 132 may include metal. The cold source can provide refrigerant and deliver the refrigerant to the cooling component 16 through the first pipe 17 and the second pipe 18. The interior of the cooling component 16 can form a cooling channel for the refrigerant to flow. The second regulating plate 132 can contact the cooling component 16 and the down pipe 14 respectively. The second regulating plate 132 has the function of heat conduction, which allows the down pipe 14 and the cooling component 16 to exchange heat through the second regulating plate 132. Moreover, heat can be transferred between parts of different temperatures on the second regulating plate 132 without relative macroscopic displacement, so as to cool the down pipe 14 through the cooling component 16 within a preset time.

[0072] Furthermore, by placing the cooling component 16 on the side of the second adjusting plate 132 away from the downpipe 14, it can be ensured that the surface of the second adjusting plate 132 is in direct contact with the downpipe 14, thereby improving the levelness of the downpipe 14.

[0073] In this embodiment of the invention, by placing the cooling element 16 at the lower end of the down-lead tube 14, the heat dissipation effect at the bottom of the down-lead tube 14 can be enhanced, thereby improving the crystal growth quality. The first pipe 17 continuously supplies refrigerant to the cooling element 16, and the refrigerant absorbs heat from the down-lead tube 14 before flowing out through the second pipe 18.

[0074] For example, the refrigerant can be a gas or a liquid, such as nitrogen, air or water.

[0075] Please refer to Figure 7 , Figure 7This is a schematic diagram of the structure of a cooling component 16 and a second adjusting plate provided in an embodiment of the present invention. In an optional embodiment, the second adjusting plate 132 has a mounting groove c1 on the side near the first adjusting plate 131, and the cooling component 16 is located in the mounting groove c1. In this way, the distance between the first adjusting plate 131 and the second adjusting plate 132 can be reduced, improving the stability of the leveling assembly 13. It can also reduce the distance between the cooling component 16 and the down-lead pipe 14, improving the heat dissipation effect of the cooling component 16 on the down-lead pipe 14.

[0076] Please refer to Figure 6 and Figure 7 In one optional embodiment, the cooling component 16 includes a cooling pipe 161, the orthographic projection of which onto the surface of the second adjusting plate 132 is S-shaped or U-shaped. A cold source forms a cooling circuit with the cooling pipe 161 via a first pipe 17 and a second pipe 18. The cold source can be a device that provides chilled water, such as a chiller. By arranging the cooling pipe 161 in an S-shape or U-shape, the heat absorption area of ​​the cooling pipe 161 can be increased; that is, this pipe layout and fluid flow path can improve heat dissipation and reduce flow resistance and noise.

[0077] In one alternative embodiment, the first pipe 17 has a first end and a second end, the first end of the first pipe 17 is mounted on the second support 122, and the second end of the first pipe 17 is mounted on the cooling element 16; the second pipe 18 has a third end and a fourth end, the third end of the second pipe 18 is mounted on the second support 122, and the fourth end of the second pipe 18 is mounted on the cooling element 16; both the first pipe 17 and the second pipe 18 may include corrugated hoses.

[0078] Since the cooling component 16 is mounted on the second adjusting plate 132 located on the side of the first support 121 opposite to the second support 122, the distance between the first end and the second end of the first pipe 17 will change with the distance between the first support 121 and the second support 122 in the second lifting assembly 12. The length of the corrugated hose is telescopic, which can prevent the corrugated hose from being squeezed during the lifting and lowering of the second lifting assembly 12. For example, the material of the first pipe 17 and the second pipe 18 can both include copper.

[0079] Please refer to Figure 6 In an optional embodiment, the weighing unit 12a may further include a weighing plate 12d, which is located between the second support 122 and the load cell 12b. The size of the weighing plate 12d may be larger than the size of the second support 122, so that the load cell 12b can be subjected to uniform force and the measurement accuracy of the load cell 12b can be improved.

[0080] In one exemplary embodiment, the use of the crystal growth apparatus 10 may include the following steps:

[0081] Step 201: Place multiple guide tubes 14 containing crystal seeds on multiple leveling components 13 respectively. Raise multiple guide tubes 14 to a preset position using the first lifting component 11. Check whether the guide tubes 14 are vertical using a level. If the guide tubes 14 are slightly tilted, use the leveling component 13 to adjust the verticality of the guide tubes 14.

[0082] Step 202: The second lifting component 12 drives the down tube 14 to move toward the crystal growth furnace 15. During this process, the weighing unit 12a monitors in real time whether the down tube 14 scrapes against the heat insulation floor of the crystal growth furnace 15.

[0083] Step 203: After the lead tube 14 successfully enters the crystal growth furnace 15, the crystal descent growth begins. During the crystal growth process, the heat generated during crystal growth can be removed by the circulating water cooling device (including cooling component 16, first pipeline 17, second pipeline 18 and cold source) to improve the crystal quality. In addition, it can also reduce the temperature in the space where the crystal growth equipment 10 is located, and improve the safety of the operators.

[0084] In summary, this utility model provides a crystal growth apparatus comprising a first lifting assembly, multiple second lifting assemblies, multiple leveling assemblies, multiple guide tubes, and a crystal growth furnace. During crystal production, the first lifting assembly drives multiple second lifting assemblies, along with the leveling assemblies and guide tubes located on the second lifting assemblies, to a preset position. Then, the multiple leveling assemblies level their respective guide tubes, improving the coaxiality between each guide tube and its corresponding assembly through-hole. The multiple second lifting assemblies then drive their respective guide tubes through the assembly through-holes of the crystal growth furnace into the furnace cavity. During the insertion of the guide tubes into the assembly through-holes, a weighing unit can monitor the rising status of the guide tubes in real time. The leveling assemblies improve the assembly accuracy of each guide tube and its corresponding assembly through-hole, ensuring that all guide tubes can smoothly pass through the assembly through-holes into the furnace cavity, thus improving the reliability of the crystal growth apparatus.

[0085] It should be noted that the dimensions of the areas may have been exaggerated in the accompanying drawings for clarity. Furthermore, it is understood that when an element is referred to as "on top of" another element, it can be directly on the other element, or there may be intermediate elements. Additionally, it is understood that when an element is referred to as "below" another element, it can be directly below the other element, or there may be more than one intermediate element. Furthermore, it is also understood that when an element is referred to as "between" two elements, it can be the only layer between the two elements, or there may be more than one intermediate element. Similar reference numerals throughout indicate similar elements.

[0086] In this invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The term "multiple" refers to two or more unless otherwise expressly defined.

[0087] The above description is only an optional embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A crystal growth apparatus, characterized in that, include: A first lifting assembly and a plurality of second lifting assemblies, wherein the plurality of second lifting assemblies are located on the first lifting assembly; Multiple weighing units are provided, each weighing unit corresponding to one of the multiple second lifting components. Each weighing unit includes a weighing sensor and a display that are electrically connected. The weighing sensor in the weighing unit is located between the corresponding second lifting component and the first lifting component, and the display in the weighing unit is mounted on the corresponding second lifting component. Multiple leveling components, each corresponding to one of the multiple second lifting components, and the leveling components are installed on the side of the corresponding second lifting component that is away from the first lifting component; Multiple guide tubes, each guide tube corresponding to one of the multiple leveling components, with each guide tube located on the side of the corresponding leveling component away from the second lifting component; A crystal growth furnace is located on the side of the plurality of down tubes away from the first lifting assembly. The crystal growth furnace includes a connected upper shell and a multi-layer heat-insulating base plate. The multi-layer heat-insulating base plate has a plurality of assembly through holes, which correspond one-to-one with the plurality of down tubes. The weight displayed on the weighing unit's screen is used to indicate whether the guide tube scrapes against the side wall of the assembly through hole and / or abuts against the multi-layer heat insulation base plate during its insertion into the assembly through hole.

2. The crystal growth apparatus according to claim 1, characterized in that, The leveling assembly includes: a first adjusting plate, a second adjusting plate, and multiple adjusting bolts; The first adjusting plate is connected to the side of the second lifting assembly opposite to the first lifting assembly; The second adjusting plate is located on the side of the first adjusting plate opposite to the second lifting assembly, and the second adjusting plate has multiple threaded through holes; The plurality of adjusting bolts correspond one-to-one with the plurality of threaded through holes. The adjusting bolts are assembled in the corresponding threaded through holes, and one end of the adjusting bolts is in contact with the first adjusting plate.

3. The crystal growth apparatus according to claim 2, characterized in that, The leveling assembly further includes a scale, which is located on one side of the first adjusting plate and the second adjusting plate in a first direction, the first direction being a direction parallel to the surface of the first adjusting plate. The scale is connected to the first adjustment plate. The scale has multiple scale lines, and the arrangement direction of the multiple scale lines is perpendicular to the surface of the first adjustment plate.

4. The crystal growth apparatus according to claim 2, characterized in that, The second adjusting plate has four corners, and the second adjusting plate has four threaded through holes, which correspond one-to-one with the four corners, and the threaded through holes are located at the corresponding corner positions. The number of adjusting bolts is four.

5. The crystal growth apparatus according to any one of claims 2-4, characterized in that, The second lifting assembly includes: a first support base, a second support base, a telescopic structure, and a drive structure; The first support is located on the side of the second support that is away from the first lifting assembly; The telescopic structure is located between the first support base and the second support base, with one end of the telescopic structure connected to the first support base and the other end of the telescopic structure connected to the second support base; The driving structure is connected to the telescopic structure to drive the telescopic unit to extend and retract in a second direction, which is parallel to the arrangement direction of the first support and the second support.

6. The crystal growth apparatus according to claim 5, characterized in that, The crystal growth equipment further includes a cooling component, a first pipeline, a second pipeline, and a cold source. The cooling component is connected to the cold source through the first pipeline and the second pipeline. The second adjusting plate is thermally conductive, and the cooling element is located on the side of the second adjusting plate close to the first adjusting plate and is connected to the second adjusting plate.

7. The crystal growth apparatus according to claim 6, characterized in that, The second adjusting plate has a mounting groove on the side near the first adjusting plate, and the cooling component is located in the mounting groove.

8. The crystal growth apparatus according to claim 6, characterized in that, The cooling component includes cooling pipes, and the orthographic projection of the cooling pipes in the direction perpendicular to the surface of the second adjusting plate is S-shaped or U-shaped.

9. The crystal growth apparatus according to claim 6, characterized in that, The first pipe has a first end and a second end, the first end of the first pipe is mounted on the second support, and the second end of the first pipe is mounted on the cooling element; The second pipe has a third end and a fourth end, the third end of the second pipe is mounted on the second support, and the fourth end of the second pipe is mounted on the cooling element; Both the first pipeline and the second pipeline include corrugated hoses.

10. The crystal growth apparatus according to claim 5, characterized in that, The weighing unit also includes a weighing plate, which is located between the second support and the weighing sensor.

Images