Nanoimprint device

Abstract

The utility model discloses a nanoimprint device which comprises a base, an imprint mechanism, a feeding mechanism, a feeding adjusting mechanism, a receiving mechanism and a receiving adjusting mechanism. The base is provided with a supporting frame and a sample table used for containing a template or a substrate; the impressing mechanism comprises an impressing roller movably connected to the supporting frame; the feeding mechanism comprises a feeding roller arranged on the supporting frame, and the feeding roller is used for winding a template or a substrate and conveying the template or the substrate to the impressing roller; the feeding adjusting mechanism comprises a feeding adjusting roller movably connected to the supporting frame. The material receiving mechanism comprises a material receiving roller arranged on the supporting frame; the material receiving adjusting mechanism comprises a material receiving adjusting roller movably connected to the supporting frame. According to the nanoimprint device disclosed by the utility model, the demolding angle can be adjusted, so that the influence of the required adhesive force and friction force on the demolding process in the demolding process is reduced, and the nanoimprint device is suitable for templates with different micro-nano structure patterns.

Description

Technical Field

[0001] This invention belongs to the field of nanoimprint technology, specifically relating to a nanoimprint device. Background Technology

[0002] Nanoimprint lithography involves first applying a thermal nanoimprint adhesive or a UV nanoimprint adhesive to a substrate, then bringing it into contact with a template containing a micro / nanostructure pattern. Mechanical force is applied to the template to imprint the thermal or UV nanoimprint adhesive. After imprinting, the imprinted area is cured under high temperature or UV light irradiation, followed by demolding. The demolding process is one of the decisive factors affecting the quality of the imprinted structure.

[0003] During the demolding process, there are adhesive and frictional forces between the template and the imprinted structure. Excessive adhesion and friction can lead to tearing or damage at the boundaries of the micro / nanostructure pattern, resulting in reduced pattern accuracy and even damage to the template. The demolding angle is one of the demolding process parameters. For each type of imprinted micro / nanostructure pattern template, there is an optimal demolding angle that effectively reduces adhesive and frictional forces during demolding. When the substrate and template separate during demolding, the demolding stress in the contact area between the mold and the imprinted material changes accordingly with the change in the demolding angle. Therefore, selecting a suitable demolding angle is a crucial factor in determining the accuracy and resolution of the nanostructure pattern obtained after imprinting.

[0004] In existing nanoimprinting devices, the release angle between the template and the substrate is a single fixed angle. However, different templates are often used in the imprinting device, and the corresponding optimal release angle will also change. The fixed angle in the nanoimprinting device is difficult to change, which leads to tearing of the micro-nano structure pattern or damage at the boundary, resulting in reduced pattern accuracy and even damage to the template.

[0005] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0006] The purpose of this invention is to provide a nanoimprinting device that can adjust the demolding angle, thereby reducing the influence of adhesion and friction on the demolding process, making the nanoimprinting device suitable for templates with different micro- and nano-structure patterns.

[0007] To achieve the above objectives, a specific embodiment of this utility model provides the following technical solution: a nanoimprinting device, comprising:

[0008] The base has a support frame and a sample stage for holding templates or substrates.

[0009] An imprinting mechanism includes an imprinting roller movably connected to the support frame, the imprinting roller being located above the sample stage, and the side of the imprinting roller facing the sample stage being used for winding a template or substrate;

[0010] The feeding mechanism includes a feeding roller disposed on the support frame, the feeding roller being used for winding the template or substrate and conveying the template or substrate to the impression roller;

[0011] The feeding adjustment mechanism includes a feeding adjustment roller movably connected to the support frame. The feeding adjustment roller is located between the feeding roller and the imprinting roller and is used to wind the template or substrate and adjust the imprinting angle between the template or substrate and the imprinting roller.

[0012] The receiving mechanism includes a receiving roller disposed on the support frame, the receiving roller being used to collect templates or substrates;

[0013] The receiving adjustment mechanism includes a receiving adjustment roller movably connected to the support frame. The receiving adjustment roller is located between the receiving roller and the impression roller. The receiving adjustment roller is used for winding the template or substrate, and the receiving adjustment roller can adjust its position on the support frame to adjust the demolding angle between the template or substrate and the impression roller.

[0014] In one or more embodiments of this utility model, the imprinting mechanism further includes a first adjusting component, the first adjusting component comprising:

[0015] The first X-axis slide is mounted on the support frame;

[0016] The first X-axis drive mechanism is mounted on the first X-axis slide.

[0017] The first Y-axis slide is connected to the output end of the first X-axis drive mechanism. The first X-axis drive mechanism is used to drive the first Y-axis slide to move along the X direction.

[0018] The first Y-axis drive mechanism is mounted on the first Y-axis slide. The first Y-axis drive mechanism is connected to the impression roller and is used to drive the impression roller to move along the Y direction.

[0019] In one or more embodiments of the present invention, the first X-axis slide is provided with a first X-axis slide rail, and the first Y-axis slide is slidably connected to the first X-axis slide rail;

[0020] The first Y-axis slide is provided with a first Y-axis slide rail, and the first Y-axis slide rail is slidably connected to a first sliding seat. The impression roller is mounted on the first sliding seat.

[0021] In one or more embodiments of this utility model, the feeding adjustment mechanism further includes a second adjustment component, the second adjustment component comprising:

[0022] The second X-axis slide is mounted on the support frame;

[0023] The second X-axis drive mechanism is mounted on the second X-axis slide.

[0024] The second Y-axis slide is connected to the output end of the second X-axis drive mechanism. The second X-axis drive mechanism is used to drive the second Y-axis slide to move along the X direction.

[0025] The second Y-axis drive mechanism is mounted on the second Y-axis slide. The second Y-axis drive mechanism is connected to the feeding adjustment roller and is used to drive the feeding adjustment roller to move along the Y direction.

[0026] In one or more embodiments of this utility model, a second X-axis slide rail is provided on the second X-axis slide table, and the second Y-axis slide table is slidably connected to the second X-axis slide rail;

[0027] The second Y-axis slide is provided with a second Y-axis slide rail, and the second Y-axis slide rail is slidably connected to a second sliding seat. The feeding adjustment roller is installed on the second sliding seat.

[0028] In one or more embodiments of this utility model, the receiving adjustment mechanism further includes a third adjustment component, the third adjustment component comprising:

[0029] The third X-axis slide is mounted on the support frame;

[0030] The third X-axis drive mechanism is mounted on the third X-axis slide.

[0031] The third Y-axis slide is connected to the output end of the third X-axis drive mechanism, which is used to drive the third Y-axis slide to move along the X direction.

[0032] The third Y-axis drive mechanism is mounted on the third Y-axis slide. The third Y-axis drive mechanism is connected to the take-up adjustment roller and is used to drive the take-up adjustment roller to move along the Y direction.

[0033] In one or more embodiments of this utility model, the third X-axis slide is provided with a third X-axis slide rail, and the third Y-axis slide is slidably connected to the third X-axis slide rail;

[0034] The third Y-axis slide is provided with a third Y-axis slide rail, and the third Y-axis slide rail is slidably connected to a third sliding seat. The material receiving adjustment roller is installed on the third sliding seat.

[0035] In one or more embodiments of the present invention, the feeding mechanism further includes a feeding drive mechanism mounted on the support frame, the output end of which is connected to the feeding roller and is used to drive the feeding roller to rotate.

[0036] In one or more embodiments of the present invention, the receiving mechanism further includes a receiving drive mechanism mounted on the support frame, the output end of which is connected to the receiving roller and is used to drive the receiving roller to rotate.

[0037] In one or more embodiments of this utility model, the placement portion on the sample stage for holding the template or substrate is a transparent placement portion, and an ultraviolet lamp is provided inside the sample stage. The ultraviolet lamp can irradiate the template or substrate on the placement portion through the transparent placement portion to cure the template or substrate; or,

[0038] The sample stage is equipped with a heater, which is used to heat the template or substrate on the sample stage to cure the template or substrate.

[0039] Compared with the prior art, the nanoimprinting device of this invention adjusts the position of the receiving adjustment roller on the support frame through the receiving adjustment mechanism, thereby changing the demolding angle between the substrate and the template, thereby reducing the influence of adhesion and friction on the demolding process, making the nanoimprinting device of this invention suitable for templates with different micro and nano structure patterns. Attached Figure Description

[0040] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0041] Figure 1 This is a perspective view of the nanoimprint device in one embodiment of the present invention;

[0042] Figure 2 This is a front view of the nanoimprint apparatus in one embodiment of the present invention;

[0043] Figure 3 This is a rear view of the nanoimprint apparatus in one embodiment of the present invention;

[0044] Figure 4 This is a perspective view of the first adjustment component in one embodiment of the present invention.

[0045] Explanation of key figure labels:

[0046] 1. Base; 11. Support frame; 12. Sample stage; 21. Imprint roller; 22. First adjustment component; 221. First X-axis slide; 222. First X-axis drive mechanism; 223. First Y-axis slide; 224. First Y-axis drive mechanism; 225. First X-axis slide rail; 226. First Y-axis slide rail; 227. First sliding seat; 31. Feeding roller; 32. Feeding drive mechanism; 41. Feeding adjustment roller; 42. First adjustment component; 51. Receiving roller; 52. Receiving drive mechanism; 61. Receiving adjustment roller; 62. First adjustment component; 7. Template. Detailed Implementation

[0047] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0048] like Figures 1-3 As shown, a nanoimprinting device according to one embodiment of the present invention includes a base 1, an imprinting mechanism, a feeding mechanism, a feeding adjustment mechanism, a receiving mechanism, and a receiving adjustment mechanism. The base 1 is provided with a support frame 11 and a sample stage 12 for holding a template 7 or a substrate. The imprinting mechanism includes an imprinting roller 21 movably connected to the support frame 11, the imprinting roller 21 being located above the sample stage 12, and the side of the imprinting roller 21 facing the sample stage 12 being used for winding the template 7 or substrate. The feeding mechanism includes a feeding roller 31 disposed on the support frame 11, the feeding roller 31 being used for winding the template 7 or substrate and conveying the template 7 or substrate to the imprinting roller 21. The feeding adjustment mechanism includes a feeding roller 31 movably connected to the support frame 11. The support frame 11 includes a feeding adjustment roller 41 located between the feeding roller 31 and the impression roller 21. The feeding adjustment roller 41 is used to wind the template 7 or substrate and adjust the impression angle between the template 7 or substrate and the impression roller 21. The receiving mechanism includes a receiving roller 51 located on the support frame 11. The feeding roller 31 is used to collect the template 7 or substrate. The receiving adjustment mechanism includes a receiving adjustment roller 61 movably connected to the support frame 11. The receiving adjustment roller 61 is located between the receiving roller 51 and the impression roller 21. The receiving adjustment roller 61 is used to wind the template 7 or substrate, and the receiving adjustment roller 61 can adjust its position on the support frame 11 to adjust the demolding angle between the template 7 or substrate and the impression roller 21.

[0049] It is understood that the nanoimprinting device of this invention adjusts the position of the receiving adjustment roller 61 on the support frame 11 through the receiving adjustment mechanism, thereby changing the demolding angle between the substrate and the template 7, thereby reducing the influence of the adhesion and friction forces required in the demolding process on the demolding process, making the nanoimprinting device of this invention suitable for templates 7 with different micro and nano structure patterns.

[0050] like Figures 1-3 As shown, the support frame 11 is plate-shaped, and has spaces on it for the imprint roller 21, the feeding adjustment roller 41 and the receiving adjustment roller 61 to move. The imprint roller 21 can move closer to or further away from the sample stage 12 within the space, so that the imprint roller 21 cooperates with the sample stage 12 to apply pressure to the template and the substrate.

[0051] One of the template and the substrate is set on the sample stage 12, and the other is wound on the imprinting mechanism, the feeding mechanism, the feeding adjustment mechanism, the receiving mechanism and the receiving adjustment mechanism. The winding includes partial winding and complete winding. Complete winding means that the template or substrate is wound on each roller at least once, while partial winding means that the template or substrate is wound on the circumference of each roller less than once.

[0052] In this embodiment, the template is a soft template, which is wound around each roller, and the substrate is placed on the sample stage 12.

[0053] In addition, this invention can also adjust the position of the feeding roller 31 to adjust the die release angle of the embossing die and the stress of the soft template 7, which can also effectively improve the embossing accuracy.

[0054] like Figure 4 As shown, specifically, the imprinting mechanism further includes a first adjustment component 22, which includes a first X-axis slide 221, a first X-axis drive mechanism 222, a first Y-axis slide 223, and a first Y-axis drive mechanism 224. The first X-axis slide 221 is mounted on the support frame 11; the first X-axis drive mechanism 222 is mounted on the first X-axis slide 221; the first Y-axis slide 223 is connected to the output end of the first X-axis drive mechanism 222, and the first X-axis drive mechanism 222 is used to drive the first Y-axis slide 223 to move along the X direction; the first Y-axis drive mechanism 224 is mounted on the first Y-axis slide 223, and the first Y-axis drive mechanism 224 is connected to the imprinting roller 21, and the first Y-axis drive mechanism 224 is used to drive the imprinting roller 21 to move along the Y direction.

[0055] The above structure controls the movement of the impression roller 21 in the X and Y directions through the first X-axis drive mechanism 222 and the first Y-axis drive mechanism 224. The movement in the X direction is to drive the impression roller 21 closer to or away from the sample stage 12, and the movement in the Y direction is to align the impression roller 21 with the template or substrate on the sample stage 12.

[0056] Specifically, the first X-axis drive mechanism 222 can be a drive motor, which can be connected to the first Y-axis slide 223 through common connecting components, thereby controlling the first Y-axis slide 223 to move along the X direction. For example, the connecting component can include a screw, which is connected to the output end of the drive motor. The drive motor controls the screw to rotate, and the screw is rotatably mounted on the first X-axis slide 221. The first Y-axis slide 223 is threadedly connected to the screw. Since the first Y-axis slide 223 is slidably connected to the first X-axis slide rail 225, the drive motor controls the screw to rotate, which can make the first Y-axis slide 223 move.

[0057] Furthermore, the first X-axis slide 221 is provided with a first X-axis slide rail 225, and the first Y-axis slide 223 is slidably connected to the first X-axis slide rail 225; the first Y-axis slide 223 is provided with a first Y-axis slide rail 226, and the first Y-axis slide rail 226 is slidably connected to a first sliding seat 227, and the impression roller 21 is mounted on the first sliding seat 227. The shaft of the impression roller 21 is rotatably mounted on the first sliding seat 227.

[0058] The first X-axis slide rail 225 extends in the X direction, and the first Y-axis slide rail 226 extends in the Y direction. The first X-axis slide rail 225 mainly restricts the sliding direction of the first Y-axis slide table 223, and the first Y-axis slide rail 226 mainly restricts the sliding direction of the first sliding seat 227.

[0059] In a specific example, the first X-axis drive mechanism 222 can be a drive motor, which can be connected to the first Y-axis slide 223 through a common connecting component, thereby controlling the first Y-axis slide 223 to move in the X direction. For example, the connecting component can include a screw, which is connected to the output end of the drive motor. The drive motor controls the screw to rotate, and the screw is rotatably mounted on the first X-axis slide 221. The first Y-axis slide 223 is threadedly connected to the screw. Since the first Y-axis slide 223 is slidably connected to the first X-axis slide rail 225, the drive motor controls the screw to rotate, and the screw drives the first Y-axis slide 223 to move in the X direction.

[0060] In another specific example, the first X-axis drive mechanism 222 can be a pneumatic cylinder or an electric cylinder, which can directly control the first Y-axis slide 223 to move along the X direction.

[0061] Similarly, the structure of the first Y-axis drive mechanism 224 is the same as or similar to that of the first X-axis drive mechanism 222, and its function is to drive the first sliding seat 227 to slide along the Y direction.

[0062] In one specific example, the feeding adjustment mechanism further includes a second adjustment component 42, which includes a second X-axis slide, a second X-axis drive mechanism, a second Y-axis slide, and a second Y-axis drive mechanism. The second X-axis slide is mounted on the support frame 11. The second X-axis drive mechanism is mounted on the second X-axis slide. The second Y-axis slide is connected to the output end of the second X-axis drive mechanism, which drives the second Y-axis slide to move along the X direction. The second Y-axis drive mechanism is mounted on the second Y-axis slide and is connected to the feeding adjustment roller 41, which drives the feeding adjustment roller 41 to move along the Y direction.

[0063] Specifically, the second X-axis slide is provided with a second X-axis slide rail, and the second Y-axis slide is slidably connected to the second X-axis slide rail; the second Y-axis slide is provided with a second Y-axis slide rail, and the second Y-axis slide rail is slidably connected to a second sliding seat, and the feeding adjustment roller 41 is installed on the second sliding seat.

[0064] The feeding adjustment roller 41 has its shaft rotatably mounted on the second sliding seat. The second X-axis slide rail extends in the X direction, and the second Y-axis slide rail extends in the Y direction. The second X-axis slide rail mainly restricts the sliding direction of the second Y-axis slide table, and the second Y-axis slide rail mainly restricts the sliding direction of the second sliding seat.

[0065] It is understandable that the structure of the second X-axis drive mechanism can be similar to or the same as that of the first X-axis drive mechanism 222, and the same applies to the second Y-axis drive mechanism.

[0066] In one specific example, the receiving adjustment mechanism further includes a third adjustment component 62, which includes a third X-axis slide, a third X-axis drive mechanism, a third Y-axis slide, and a third Y-axis drive mechanism. The third X-axis slide is mounted on the support frame 11. The third X-axis drive mechanism is mounted on the third X-axis slide. The third Y-axis slide is connected to the output end of the third X-axis drive mechanism, which drives the third Y-axis slide to move along the X direction. The third Y-axis drive mechanism is mounted on the third Y-axis slide and is connected to the receiving adjustment roller 61, which drives the receiving adjustment roller 61 to move along the Y direction.

[0067] Specifically, the third X-axis slide is provided with a third X-axis slide rail, and the third Y-axis slide is slidably connected to the third X-axis slide rail; the third Y-axis slide is provided with a third Y-axis slide rail, and the third Y-axis slide rail is slidably connected to a third sliding seat, and the material receiving adjustment roller 61 is installed on the third sliding seat.

[0068] The receiving adjusting roller 61 has its shaft rotatably mounted on the third sliding seat. The third X-axis slide rail extends in the X direction, and the third Y-axis slide rail extends in the Y direction. The third X-axis slide rail mainly restricts the sliding direction of the third Y-axis slide table, and the third Y-axis slide rail mainly restricts the sliding direction of the third sliding seat.

[0069] It is understandable that the structure of the third X-axis drive mechanism can be similar to or the same as that of the first X-axis drive mechanism 222, and the same applies to the third Y-axis drive mechanism.

[0070] In one specific example, the feeding mechanism further includes a feeding drive mechanism 32 mounted on the support frame 11. The output end of the feeding drive mechanism 32 is connected to the feeding roller 31 and is used to drive the feeding roller 31 to rotate. The feeding drive mechanism 32 can be a common drive motor, used to control the rotation of the feeding roller 31, facilitating the feeding of materials during the printing process, and adjusting the tightness of the template 7 or substrate between the rollers.

[0071] In one specific example, the receiving mechanism further includes a receiving drive mechanism 52 mounted on the support frame 11. The output end of the receiving drive mechanism 52 is connected to the receiving roller 51 and is used to drive the receiving roller 51 to rotate. The receiving drive mechanism 52 can be a common drive motor, used to control the rotation of the receiving roller 51, facilitating the receiving of the printed material and adjusting the tightness of the template 7 or substrate between the rollers.

[0072] In one specific example, the placement part on the sample stage 12 for holding the template 7 or the substrate is a transparent placement part. The sample stage 12 is equipped with an ultraviolet lamp, which can irradiate the template 7 or the substrate on the placement part through the transparent placement part to cure the template 7 or the substrate.

[0073] The sample stage 12 is equipped with a heater, which is used to heat the template 7 or substrate on the sample stage 12 to solidify the template 7 or substrate.

[0074] The heater and UV lamp are both commonly used heaters or UV lamps on the market, thereby enabling UV curing or thermal curing of the template 7 or substrate during imprinting.

[0075] In a specific example, the imprinting process of the nanoimprinting device of this invention can be as follows:

[0076] The substrate is placed on the sample stage 12. The position of the impression roller 21 in the Y direction is adjusted by the first adjustment component 22 so that it is above and aligned with the substrate. Then, the template 7 (soft template 7) is wound around the feeding roller 31. One end of the template 7 is wound sequentially from the feeding roller 31 through the feeding adjustment roller 41, the impression roller 21, and the take-up adjustment roller 61 and is received and wound on the take-up adjustment roller 61 (e.g., Figure 1 and 2 (As shown).

[0077] The second adjustment component 42 adjusts the position of the feeding adjustment roller 41 in the X and / or Y directions, thereby controlling the film placement angle of the template 7 and the substrate to the optimal angle. Then, the first adjustment component 22 moves the imprinting roller 21 closer to the sample stage 12 and applies imprinting pressure to the substrate and template 7. The heater in the sample stage 12 heats the substrate and template 7 to complete thermal nanoimprinting and realize pattern transfer.

[0078] After the imprinting is completed, the position of the feeding adjustment roller in the X and / or Y directions is adjusted by the third adjustment component 62, thereby controlling the demolding angle of the template 7 and the substrate to the optimal angle. Then, the imprinting roller 21 is moved away from the sample stage 12 by the first adjustment component 22, and the receiving roller 51 is driven by the receiving drive mechanism 52 to realize the demolding process of the template 7 and the substrate.

[0079] The template on the sample stage 12 can be replaced, and the above steps can be repeated to achieve a continuous nanoimprinting process.

[0080] In summary, the nanoimprinting device of this invention, through the position-adjustable feeding adjustment roller 41 and the unloading adjustment roller, can arbitrarily adjust the film feeding angle and the demolding angle, and is suitable for the optimal film feeding angle and the optimal demolding angle of the template 7 with different micro-nano structure patterns. It can effectively reduce the adhesion and friction during the demolding process, improve the demolding quality, and increase the yield.

[0081] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0082] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A nanoimprinting device, characterized in that, include: The base has a support frame and a sample stage for holding templates or substrates. An imprinting mechanism includes an imprinting roller movably connected to the support frame, the imprinting roller being located above the sample stage, and the side of the imprinting roller facing the sample stage being used for winding a template or substrate; The feeding mechanism includes a feeding roller disposed on the support frame, the feeding roller being used for winding the template or substrate and conveying the template or substrate to the impression roller; The feeding adjustment mechanism includes a feeding adjustment roller movably connected to the support frame. The feeding adjustment roller is located between the feeding roller and the imprinting roller and is used to wind the template or substrate and adjust the imprinting angle between the template or substrate and the imprinting roller. The receiving mechanism includes a receiving roller disposed on the support frame, the receiving roller being used to collect templates or substrates; The receiving adjustment mechanism includes a receiving adjustment roller movably connected to the support frame. The receiving adjustment roller is located between the receiving roller and the impression roller. The receiving adjustment roller is used for winding the template or substrate, and the receiving adjustment roller can adjust its position on the support frame to adjust the demolding angle between the template or substrate and the impression roller.

2. The nanoimprint apparatus according to claim 1, characterized in that, The imprinting mechanism further includes a first adjustment component, the first adjustment component comprising: The first X-axis slide is mounted on the support frame; The first X-axis drive mechanism is mounted on the first X-axis slide. The first Y-axis slide is connected to the output end of the first X-axis drive mechanism. The first X-axis drive mechanism is used to drive the first Y-axis slide to move along the X direction. The first Y-axis drive mechanism is mounted on the first Y-axis slide. The first Y-axis drive mechanism is connected to the impression roller and is used to drive the impression roller to move along the Y direction.

3. The nanoimprint apparatus according to claim 2, characterized in that, The first X-axis slide is provided with a first X-axis slide rail, and the first Y-axis slide is slidably connected to the first X-axis slide rail; The first Y-axis slide is provided with a first Y-axis slide rail, and the first Y-axis slide rail is slidably connected to a first sliding seat. The impression roller is mounted on the first sliding seat.

4. The nanoimprint apparatus according to claim 1, characterized in that, The feeding adjustment mechanism further includes a second adjustment component, the second adjustment component comprising: The second X-axis slide is mounted on the support frame; The second X-axis drive mechanism is mounted on the second X-axis slide. The second Y-axis slide is connected to the output end of the second X-axis drive mechanism. The second X-axis drive mechanism is used to drive the second Y-axis slide to move along the X direction. The second Y-axis drive mechanism is mounted on the second Y-axis slide. The second Y-axis drive mechanism is connected to the feeding adjustment roller and is used to drive the feeding adjustment roller to move along the Y direction.

5. The nanoimprint apparatus according to claim 4, characterized in that, The second X-axis slide is provided with a second X-axis slide rail, and the second Y-axis slide is slidably connected to the second X-axis slide rail; The second Y-axis slide is provided with a second Y-axis slide rail, and the second Y-axis slide rail is slidably connected to a second sliding seat. The feeding adjustment roller is installed on the second sliding seat.

6. The nanoimprint apparatus according to claim 1, characterized in that, The receiving adjustment mechanism further includes a third adjustment component, which includes: The third X-axis slide is mounted on the support frame; The third X-axis drive mechanism is mounted on the third X-axis slide. The third Y-axis slide is connected to the output end of the third X-axis drive mechanism, which is used to drive the third Y-axis slide to move along the X direction. The third Y-axis drive mechanism is mounted on the third Y-axis slide. The third Y-axis drive mechanism is connected to the take-up adjustment roller and is used to drive the take-up adjustment roller to move along the Y direction.

7. The nanoimprint apparatus according to claim 6, characterized in that, The third X-axis slide is provided with a third X-axis slide rail, and the third Y-axis slide is slidably connected to the third X-axis slide rail; The third Y-axis slide is provided with a third Y-axis slide rail, and the third Y-axis slide rail is slidably connected to a third sliding seat. The material receiving adjustment roller is installed on the third sliding seat.

8. The nanoimprint apparatus according to claim 1, characterized in that, The feeding mechanism also includes a feeding drive mechanism mounted on the support frame. The output end of the feeding drive mechanism is connected to the feeding roller and is used to drive the feeding roller to rotate.

9. The nanoimprint apparatus according to claim 1, characterized in that, The receiving mechanism also includes a receiving drive mechanism mounted on the support frame. The output end of the receiving drive mechanism is connected to the receiving roller and is used to drive the receiving roller to rotate.

10. The nanoimprint apparatus according to claim 1, characterized in that, The sample stage has a transparent placement section for holding the template or substrate. The sample stage contains an ultraviolet lamp, which illuminates the template or substrate through the transparent placement section to cure it; or... The sample stage is equipped with a heater, which is used to heat the template or substrate on the sample stage to cure the template or substrate.

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