Mask cleaning circulating device with anti-blocking function

Abstract

The utility model belongs to the technical field of cleaning instruments, and particularly relates to a mask cleaning circulating device with an anti-blocking function. According to the mask cleaning circulating device with the anti-blocking function, the filtering unit, the heating unit, the recycling unit, the power piece and the switch piece are arranged on the circulating pipeline, so that after fluid in the cleaning tank enters the filtering unit through the circulating pipeline, the mask in the fluid is intercepted by the filtering unit, and then the mask is recycled. The residual fluid flows back into the cleaning tank through the power part; when the filtering unit needs to be dredged, the switch part close to the cleaning tank is closed, the switch part close to the recycling unit is opened, and the filtering unit is heated through the heating unit, so that masks accumulated in the filtering unit are melted and flow into the recycling unit under the action of gravity, and the masks in the filtering unit can be automatically dredged and recycled. Manual dredging is not needed, and treatment is convenient and safe.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of cleaning equipment, especially relates to a mask cleaning circulation device with anti -blocking function. BACKGROUND

[0002] In the production process of photovoltaic semiconductor products, it is usually necessary to prepare fine circuit patterns. Such fine patterns usually require the use of patterning technology, that is, the use of masks, and then the deposition of corresponding materials combined with technologies such as electroplating film deposition, and finally the removal of the mask layer to obtain the corresponding fine pattern. The general way of patterning in the past is to expose and develop to prepare a mask layer. Many new mask technologies such as inkjet printing, nano-imprinting, screen printing, etc. are developing very rapidly. Some of these technologies use new hot melt materials other than exposure glue as masks, and how to remove them at low cost and high efficiency is an important issue.

[0003] The mask is cleaned relatively quickly by organic solvents, but the cleaning cost is high and the treatment capacity of the wastewater after cleaning is large, so the substrate mask is usually first cleaned with hot water. After the substrate is cleaned with hot water, the mask adhering to the surface of the substrate falls off in the water to form flocculent suspended matter, which is then intercepted by manual fishing or filter screen.

[0004] For example, the Chinese utility model patent with patent announcement number CN214918917U and announcement date of 2021.11.30 discloses a wax removal and cleaning tank. The structure includes a heat-conducting tank body filled with alcohol. The tank body is spirally wrapped with a heat exchange pipe, and the heat exchange pipe is filled with a heat exchange liquid. The heat exchange pipe is connected with a heater. The tank body is provided with a water inlet at the upper end and a water outlet at the lower end. The water inlet and the water outlet are connected by a circulating pipeline. The circulating pipeline is connected with a water pump. The circulating pipeline is provided with a filter.

[0005] The general structure and principle of the wax removal and cleaning tank in the utility model patent are as follows: the heat exchange pipe and the heater heat the alcohol in the heat-conducting tank body, so that the wax on the ceramic substrate is cleaned and separated. The sewage is discharged through the outlet and filtered by the wax filter to remove the wax. The water pump is used to transport the alcohol liquid to the water inlet for recycling.

[0006] However, the wax removal and cleaning tank has at least the following disadvantages in actual use, that is, the technical problem to be solved by the utility model.

[0007] The wax removal and cleaning tank only intercepts wax, which easily clogs the filter and requires frequent replacement of the filter, making the process complex.

[0008] Therefore, as described above, there is an urgent need for a new filter device that does not require replacement of the filter screen. UTILITY MODEL CONTENTS

[0009] The utility model provides a kind of mask cleaning circulation device with anti-blocking function, it can be by the mode that filter unit, heating unit, recovery unit, power component and switch piece are set on circulation pipeline, so that: fluid in cleaning tank enters filter unit after passing through circulation pipeline, and filter unit intercepts mask in fluid, and the remaining fluid flows back into cleaning tank by power component;When it is needed to dredge filter unit, close the switch piece near cleaning tank, and open the switch piece near recovery unit, heat filter unit by heating unit, so that the mask accumulated in filter unit is melted, and the mask flows into recovery unit under gravity, so that the mask in filter unit can be automatically dredged and recovered, without artificial dredging, convenient and safe processing.

[0010] The utility model discloses a kind of mask cleaning circulation device with anti-blocking function, structure includes cleaning tank, circulation pipeline, further include filter unit being set on the circulation pipeline, heating unit is set on the filter unit, and is used to melt solid mask intercepted by the filter unit, recovery unit for collecting fluid mask generated in the filter unit, power component is set on the circulation pipeline, and is used to drive the fluid flow in the circulation pipeline, and switch piece is respectively set between the filter unit and the cleaning tank, the filter unit and the recovery unit.

[0011] Further preferred technical solutions are that the filter unit includes a barrel, a water inlet and a water outlet disposed on the barrel, a drain port disposed on the barrel for connecting the recovery unit, and a filter screen disposed on the inner cavity of the barrel.

[0012] Further preferred technical solutions are that the heating unit includes a heating element disposed on the barrel for heating the filter screen.

[0013] Further preferred technical solutions are that the heating unit further includes a hot air blower, and a hot air duct disposed on the hot air blower for delivering hot air above the filter screen.

[0014] Further preferred technical solutions are that the filter unit further includes an opening disposed on the barrel, and the heating unit further includes an inner coil disposed on the opening, in communication with the heating element, and for supporting the filter screen.

[0015] Further preferred technical solutions are that the filter unit further includes a mounting groove disposed on the inner annular surface of the barrel for clamping the inner coil.

[0016] Further preferred technical solutions are that the filter unit further includes a funnel tube disposed on the barrel for connecting the drain port.

[0017] Further preferred technical solutions are that the filter unit is provided with at least two.

[0018] Further preferred technical solutions are that the filter unit is provided with a condenser arranged on the circulating pipeline and used for cooling the fluid entering the filter unit.

[0019] Further preferred technical solutions are that the filter unit is provided with a water supply tank arranged on the circulating pipeline and used for connecting the power member. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a connection diagram of the utility model.

[0021] Figure 2 It is a front view of the filter unit and the heating unit in the utility model.

[0022] Figure 3 It is a partial structure diagram of the filter unit and the heating unit in the utility model.

[0023] Figure 4 It is a top view connection diagram of the filter unit and the heating unit in the utility model.

[0024] Figure 5 It is a position diagram of the utility model.

[0025] Figure 6 It is a position connection diagram of the condenser in the utility model.

[0026] In the drawing, the meaning of each mark is as follows:

[0027] The cleaning tank 11, the circulating pipeline 12;

[0028] The filter unit 1, the heating unit 2, the recovery unit 3, the power member 4, the switch member 5, the condenser 6, the water supply tank 7;

[0029] The barrel body 101, the water inlet 102, the water outlet 103, the liquid discharge port 104, the filter screen 105, the opening 106, the mounting groove 107, the funnel pipe 108, the heating member 201, the hot air machine 202, the hot air pipeline 203, the inner coil pipe 204. DETAILED DESCRIPTION

[0030] The following description is only the preferred embodiment of the utility model, and does not limit the scope of the utility model.

[0031] As shown in the accompanying drawings Figures 1-6As shown, a mask cleaning circulation device with anti-blocking function, which comprises a cleaning tank 11, a circulation pipeline 12, a filter unit 1 arranged on the circulation pipeline 12, a heating unit 2 arranged on the filter unit 1 and used for melting the solid mask intercepted by the filter unit 1, a recovery unit 3 used for collecting the fluid mask generated in the filter unit 1, a power member 4 arranged on the circulation pipeline 12 and used for driving the fluid flow in the circulation pipeline 12, and a switch member 5 arranged between the filter unit 1 and the cleaning tank 11 and between the filter unit 1 and the recovery unit 3, respectively.

[0032] In the embodiment, after the substrate is subjected to mask processing, the outer mask layer needs to be cleaned, which usually requires several cleaning processes. The switch member 5 near the cleaning tank 11 is closed, the substrate with the mask is placed in the cleaning tank 11, and a cleaning agent (i.e. fluid) is arranged in the cleaning tank 11, which is usually water. A heating device or an ultrasonic cleaner for heating the cleaning agent can be arranged in the cleaning tank 11, so as to quickly separate the mask on the substrate and form certain flocculation. When the solid mask in the sewage is filtered, the switch member 5 near the cleaning tank 11 is opened, and the switch member 5 near the recovery unit 3 is closed, so that the fluid is filtered through the filter unit 1, thereby intercepting the solid mask in the fluid. The filtered fluid is sent back to the cleaning tank 11 by the power member 4, so as to be recycled by the cleaning tank 11, thereby saving resources.

[0033] In addition, the filter unit 1 is used for filtering the fluid in the cleaning tank 11, intercepting the solid mask in the fluid, so that the fluid in the cleaning tank 11 can be recycled, thereby saving resources.

[0034] In addition, the heating unit 2 is used to heat the filter unit 1, so that the solid mask intercepted by the filter unit 1 is melted into a fluid mask, and the fluid mask is separated from the filter unit 1 under the action of gravity, thereby achieving the effect of dredging and preventing blockage. The heating method of the heating unit 2 is not limited to infrared lamp tube, heating wire, ceramic heater, heat conducting oil, hot air heating and the like. The melted hot melt material is affected by gravity and is recovered by the recovery unit 3. When the filter unit 1 is intercepted to a certain extent, the switch part 5 near the cleaning tank 11 is closed, the switch part 5 on the recovery unit 3 is opened, and the filter unit 1 is heated by the heating unit 2. The solid mask in the filter unit 1 is heated and falls into the recovery unit 3. After completion, the heating unit 2 is closed, the switch part 5 near the recovery unit 3 is closed, and the switch part 5 near the cleaning tank 11 is opened, so that the filter unit 1 can continue to filter the water in the cleaning tank 11. The heating unit 2 can effectively dredge the filter unit 1, and the filter unit 1 affects the filtering effect and the use effect of the fluid flowing back to the cleaning tank 11.

[0035] Finally, the switch part 5 is used to control the opening and closing of the circulation pipeline 12, the filter unit 1 and the recovery unit 3, and the flow of fluid, prevent the fluid in the cleaning tank 11 from interfering with the recovery unit 3, or the fluid in the cleaning tank 11 from interfering with the heating unit 2 to heat the filter unit 1, control the use state of each pipeline, and control the filter unit 1 to be in a filtering state or a dredging state.

[0036] The filter unit 1 comprises a barrel body 101, a water inlet 102 and a water outlet 103 arranged on the barrel body 101, a liquid outlet 104 arranged on the barrel body 101 and used to connect the recovery unit 3, and a filter screen 105 arranged in the inner cavity of the barrel body 101.

[0037] In the embodiment, the shape of the barrel 101 is not unique, and is mainly used for filtering the fluid passing through the filtering unit 1 and intercepting the solid mask in the fluid. The water inlet 102 is connected with the water outlet of the cleaning tank through the circulating pipeline 12, the water outlet 103 is connected with the water inlet of the cleaning tank through the circulating pipeline 12, and the circulating pipeline 12 on the path is provided with the power member 4 for sending the filtered fluid back to the cleaning tank 11. The liquid outlet 104 is connected with the recycling unit 3, and is used for conveying the melted fluid mask into the recycling unit 3. The liquid outlet 104 can be arranged at the lower end of the barrel 101, so that the melted fluid mask directly falls into the recycling unit 3 under the action of gravity. The liquid outlet 104 can be arranged on the side wall of the barrel 101, so as to prevent the fluid mask from falling into the water outlet 103. The filter screen 105 is arranged in the barrel 101, and can be arranged individually or in plurality with intervals along the barrel 101, so as to increase the filtering effect of the filtering unit 1.

[0038] The heating unit 2 comprises a heating member 201 arranged on the barrel 101 and used for heating the filter screen 105.

[0039] In the embodiment, the heating member 201 is mainly used for heating the filter screen 105, so that the mask attached to the filter screen 105 can be heated and fallen off, so as to achieve the dredging effect. The heating member 201 can be arranged on the outer wall of the barrel 101 for heating, or can be arranged in the barrel 101 for directly heating the filter screen 105.

[0040] The heating unit 2 further comprises a hot air machine 202, and a hot air pipeline 203 arranged on the hot air machine 202 and used for conveying hot air above the filter screen 105.

[0041] In the embodiment, the hot air machine 202 can be an existing commercially available product, and can prepare hot air. The hot air pipeline 203 connected with the hot air machine 202 is arranged in the barrel 101, so that the hot air in the hot air machine 202 can be directly conveyed above the filter screen 105. On one hand, the filter screen 105 can be heated, and on the other hand, the hot air flow can accelerate the falling off of the mask on the filter screen 105, so as to improve the dredging efficiency. The part of the hot air pipeline 203 entering the barrel 101 can be provided with a downward inclined structure in a splash-proof manner. The hot air pipeline 203 can be directly embedded on the side wall in the barrel 101, or can directly penetrate the barrel 101, but attention should be paid to the sealing and the condition of the fluid entering the hot air pipeline 203.

[0042] The filter unit 1 further comprises an opening 106 arranged on the barrel 101; the heating unit 2 further comprises a heating element 201 arranged on the opening 106 and in communication with the inner coil 204 for supporting the heating of the filter screen 105.

[0043] In the embodiment, the inner coil 203 can be arranged in X shape, spider web shape, etc., and can be supported in the barrel 101 so as to filter the fluid passing through the barrel 101. The opening 106 is used for the inner coil 203 to communicate with the heating element 201, so that the inner coil 204 can be attached to the heating of the filter screen 105, increasing the dredging effect, and the inner coil 204 can support the filter screen 105, preventing the filter screen 105 from being deformed after being impacted by the fluid.

[0044] The filter unit 1 further comprises a mounting groove 107 arranged on the annular surface in the barrel 101 and used for clamping the inner coil 204.

[0045] In the embodiment, the mounting groove 107 is used for clamping the inner coil 204, so that the inner coil 204 can stably support the filter screen 105.

[0046] The filter unit 1 further comprises a funnel pipe 108 arranged on the barrel 101 and used for connecting the drain port 104.

[0047] In the embodiment, the solid-state mask melts and falls off. If the bottom of the barrel 101 is a flat surface, the fluid-shaped mask after melting is easy to further adhere to the bottom of the barrel 101. The funnel pipe 108 is used to make the hot melt material after melting flow into the recovery unit 3 through the drain port 104 along the funnel pipe 108.

[0048] The filter unit 1 is provided with at least two.

[0049] In the embodiment, the filter unit 1 is provided with at least two, so that multiple filter units 1 can filter the cleaning tank 11 at the same time, and the filter units 1 can also staggered dredging. The filter unit 1 can be offline filtering, or online filtering. Offline filtering means that the filter unit 1 can be dredged only when the cleaning tank 11 is closed, or the fluid in the cleaning tank 11 can be filtered only when the recovery unit 3 is closed, which can only be operated in single mode. Online filtering means that more than two filter units 1 are used, part of the filter units 1 are in filtering state, and the other filter units 1 can be used for dredging operation, so that the cleaning efficiency of the substrate is higher, and the time-consuming problem caused by the interference between processes is reduced. The online filtering mode is realized as shown in FIG. 2B or FIG. 2C. Figure 5 orFigure 6 , closing the switch 5 on the left filter unit 1 near the cleaning tank 11, opening the switch 5 on the left filter unit 1 near the recycling unit 3, and opening the heating unit 2 of the left filter unit 1, so that the left filter unit 1 can be unclogged; opening the switch 5 on the right filter unit 1 near the cleaning tank 11 and closing the switch 5 on the right filter unit 1 near the recycling unit 3, so that the fluid in the cleaning tank 11 flows into the right filter unit 1 and is filtered, ensuring that the right filter unit 1 can filter, thereby realizing online filtering and ensuring that the cleaning tank 11 can be continuously filtered without affecting the unclogging ability of each filter unit 1, and each filter unit 1 can alternately perform unclogging or filtering work. To improve the control effect of fluid or mask entering or exiting the filter unit 1, a valve for controlling fluid outflow can be added to the circulation pipeline 12 near the water outlet 103. Multiple filter units 1 and the cleaning tank 11 can be connected one-to-one by the circulation pipeline 12, or can share the circulation pipeline 12, as long as a control valve for regulating fluid outflow in each filter unit 1 is added according to the needs, without affecting the filtering or unclogging work of each filter unit 1.

[0050] The condenser 6 is further arranged on the circulation pipeline 12 and used for cooling the fluid entering the filter unit 1.

[0051] In this embodiment, the condenser 6 is used to cool the fluid flowing out of the cleaning tank 11, thereby increasing the flocculation effect of the mask in the fluid, and facilitating the interception and filtration of the mask in the fluid by the filter unit 1.

[0052] The water supply tank 7 is further arranged on the circulation pipeline 12 and used for connecting the power member 4.

[0053] In this embodiment, since the fluid in the cleaning tank 11 is mainly water, the water supply tank 7 is used to supply fluid to the cleaning tank 11. The water supply tank 7 can also be replaced in real time according to the fluid in the cleaning tank 11, preventing the cleaning effect from being affected due to insufficient fluid in the cleaning tank 11.

[0054] The embodiments of the present application are described in detail above with reference to the drawings, but the present application is not limited to the above embodiments, and various modifications can be made within the knowledge of those skilled in the art in the technical field without departing from the spirit of the present application. These are all modifications without creativity, and are protected by the patent law as long as they are within the scope of the claims of the present application.

Claims

1. A mask cleaning and circulation device with anti-clogging function, comprising a cleaning tank (11) and a circulation pipeline (12), characterized in that: It also includes a filter unit (1) disposed on the circulation pipeline (12), a heating unit (2) disposed on the filter unit (1) and used to melt the solid mask intercepted by the filter unit (1), a recovery unit (3) used to collect the fluid mask generated in the filter unit (1), a power component (4) disposed on the circulation pipeline (12) and used to drive the flow of fluid in the circulation pipeline (12), and a switch (5) disposed between the filter unit (1) and the cleaning tank (11), and between the filter unit (1) and the recovery unit (3).

2. The mask cleaning circulation device with anti-clogging function according to claim 1, characterized in that: The filtration unit (1) includes a barrel (101), an inlet (102) and an outlet (103) provided on the barrel (101), a drain outlet (104) provided on the barrel (101) and used to connect the recycling unit (3), and a filter screen (105) provided on the inner cavity of the barrel (101).

3. A mask cleaning circulation device with anti-clogging function according to claim 2, characterized in that: The heating unit (2) includes a heating element (201) disposed on the barrel (101) and used to heat the filter screen (105).

4. A mask cleaning circulation device with anti-clogging function according to claim 3, characterized in that: The heating unit (2) also includes a hot air blower (202) and a hot air duct (203) disposed on the hot air blower (202) and used to deliver hot air to the filter screen (105).

5. A mask cleaning circulation device with anti-clogging function according to claim 3, characterized in that: The filter unit (1) further includes an opening (106) provided on the barrel (101); the heating unit (2) further includes an inner coil (204) provided on the opening (106), communicating with the heating element (201), and used to support the heating of the filter screen (105).

6. A mask cleaning circulation device with anti-clogging function according to claim 5, characterized in that: The filter unit (1) also includes a mounting groove (107) disposed on the inner annular surface of the barrel (101) and used to engage the inner coil (204).

7. A mask cleaning circulation device with anti-clogging function according to claim 2, characterized in that: The filter unit (1) also includes a funnel tube (108) disposed on the barrel (101) and used to connect to the drain port (104).

8. A mask cleaning circulation device with anti-clogging function according to claim 1, characterized in that: The filter unit (1) is provided with at least two units.

9. A mask cleaning circulation device with anti-clogging function according to claim 1, characterized in that: It also includes a condenser (6) disposed on the circulation pipeline (12) and used to cool the fluid entering the filter unit (1).

10. A mask cleaning circulation device with anti-clogging function according to any one of claims 1-9, characterized in that: It also includes a water supply tank (7) installed on the circulation pipeline (12) and used to connect the power unit (4).

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