Clamping device for heating plate machining

Abstract

The utility model relates to the technical field of heating plate machining, in particular to a clamping device for heating plate machining, which comprises a base, the base is annularly arranged, a through hole is formed in the middle of the base, a plurality of adjusting grooves are uniformly distributed in the top of the base in the circumferential direction, and the adjusting grooves are formed in the radial direction of the base. A clamping block is arranged in the adjusting groove in a sliding mode, and a tooth-shaped face is arranged on the side, facing the through hole, of the clamping block. A clamping block is arranged on the base, a clinging block is fixedly arranged at the top of the clamping block, an arc-shaped surface is arranged on the side, facing the through hole, of the clinging block, the arc-shaped surface is matched with the peripheral wall of the heating disc, and a driving assembly is further arranged on the base and used for driving the clamping block to slide and fixing the clamping block. The clamp has the effects that the clamp cost is reduced, and the heating disc machining efficiency and quality are improved.

Description

Technical Field

[0001] This application relates to the field of heating plate processing technology, and in particular to a clamping device for heating plate processing. Background Technology

[0002] In the semiconductor manufacturing industry, heating plates are often used to soften and bake wafers after the spin coating process. With the continuous development of semiconductor technology, the quality requirements for heating plates are also increasing, especially the requirements for their surface flatness, uniformity and precision are extremely strict.

[0003] The existing heating plate requires two processes during processing: roughing and finishing. Different fixtures are needed for each process: the fixture used for roughing needs to provide a stable clamping force, while the fixture used for finishing needs to ensure accurate alignment and minimize damage. Using different fixtures for roughing and finishing not only increases fixture costs but also complicates the process, and frequent fixture changes on the machine tool reduce production efficiency. Utility Model Content

[0004] In order to reduce fixture costs and improve the efficiency and quality of heating plate processing, this application provides a clamping device for heating plate processing.

[0005] The clamping device for processing heating plates provided in this application adopts the following technical solution:

[0006] A clamping device for processing a heating plate includes a base, which is annularly arranged with a through hole in the center. Several adjusting grooves are evenly distributed along the circumference of the top of the base, and these grooves are radially arranged. A clamping block is slidably disposed within each adjusting groove, and the clamping block has a toothed surface on the side facing the through hole. A retaining block is fixedly disposed on the top of the clamping block, and the retaining block has an arc-shaped surface on the side facing the through hole, which matches the peripheral wall of the heating plate. A driving assembly is also provided on the base, which drives the clamping block to slide and fix it in place.

[0007] By adopting the above technical solution, during use, the clamping blocks can slide along the adjustment groove under the drive of the drive assembly to adjust the distance between each clamping block. When all clamping blocks are close to each other, all clamping blocks or clamping blocks together clamp and fix the heating plate's peripheral wall. During rough machining, the toothed surface on the clamping block abuts against the heating plate's peripheral wall. The toothed surface increases the friction between the clamping block and the heating plate, ensuring that the heating plate will not slide or shift during machining. During finish machining, the arc-shaped surface on the clamping block abuts against the heating plate's peripheral wall. The arc-shaped surface on the clamping block that matches the heating plate's peripheral wall can tightly fit the heating plate, effectively reducing errors and minimizing damage to the heating plate's peripheral wall. Thus, only one fixture is needed to clamp the heating plate for both rough and finish machining, reducing fixture costs and improving the efficiency and quality of heating plate machining.

[0008] Preferably, a set of guide strips are integrally formed on both sides of the adjustment groove, and guide grooves are provided on both sides of the clamping block. The guide grooves and guide strips are adapted to each other and slide together.

[0009] By adopting the above technical solution, the cooperation between the guide bar and the guide groove provides a stable guiding effect for the sliding of the clamping block within the adjustment groove. During the movement of the clamping block, the guide bar restricts the swaying and offset of the clamping block in directions other than the sliding direction, ensuring that the clamping block can move along a predetermined straight trajectory.

[0010] Preferably, the top of the clamping block is provided with a support surface, which is parallel to the horizontal plane and can abut against the bottom of the heating plate. The support surface is located between the through hole and the arc-shaped surface in the horizontal direction.

[0011] By adopting the above technical solution, when the clamping block clamps the heating plate, the heating plate is first placed on the support surface, which provides support for the heating plate. Then, the driving component drives all the clamping parts to move closer to each other, so that the arc-shaped surface and toothed surface can fit against and abut against the peripheral wall of the heating plate. In this process, the support surface makes the horizontal alignment of the heating plate more accurate.

[0012] Preferably, the clamping block is detachably fixed to the top of the clamping block by bolts.

[0013] By adopting the above technical solution, when it is necessary to process heating plates of different specifications or shapes, the clamping block can be removed from the top of the clamping block for replacement without replacing the entire clamping device, so as to adapt to new processing requirements and improve the versatility of the clamping device.

[0014] Preferably, the drive assembly includes a rotating disk and a vortex gear. The rotating disk is rotatably disposed within the base, and the vortex gear is fixedly disposed on the upper surface of the rotating disk. The bottom of all the clamping blocks meshes with the vortex gear.

[0015] By adopting the above technical solution, when the rotating disk rotates, the volute teeth on the surface of the rotating disk rotate accordingly, driving all the clamping blocks to slide radially within the adjusting groove. By controlling the rotation direction and angle of the rotating disk, all the clamping blocks are driven to move synchronously, ensuring that the moving distance and speed between each clamping block are consistent.

[0016] Preferably, the drive assembly further includes a worm gear, a worm, a fixed frame, and a power component. The fixed frame is fixedly installed on the side wall of the base, the worm rotates on the fixed frame, the power component is used to drive the worm to rotate, the worm gear is fixedly connected to the rotating disk, and the worm gear and the worm mesh with each other.

[0017] By adopting the above technical solution, when the power component drives the worm to rotate, the worm drives the worm wheel to rotate, which in turn drives the rotating disk fixedly connected to the worm wheel to rotate. Furthermore, the worm gear transmission has a self-locking function, which can effectively prevent the rotating disk from reversing when the power component stops working, ensuring the stability of the clamping block's position.

[0018] Preferably, the power component is a motor, which is fixed on a mounting frame, and the drive shaft of the base is coaxially fixed with the worm gear.

[0019] By adopting the above technical solution, the motor can provide stable and controllable power output, directly driving the worm gear to rotate, reducing energy loss and errors in the intermediate transmission links.

[0020] Preferably, a protective box is fixedly installed on the side wall of the base, and the motor and worm gear are both located inside the protective box.

[0021] By adopting the above technical solution, the protective box can prevent external dust and impurities from entering the area where the motor and worm gear are located, minimizing corrosion and damage to the motor and worm gear and extending their service life. At the same time, the protective box also protects the motor and worm gear, reducing the risk of external impacts and accidental damage.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] 1. By setting sliding clamping blocks, arc-shaped surfaces, and toothed surfaces, a single fixture can meet the needs of roughing and finishing of the heating plate, reducing fixture costs and avoiding the efficiency reduction caused by frequent fixture changes, thereby improving the efficiency and quality of heating plate processing.

[0024] 2. By setting a rotary disk and vortex gears, multiple clamping blocks can be driven to move synchronously, ensuring the consistency and stability of the clamping action, and further improving the clamping effect and machining accuracy;

[0025] 3. By setting up a worm gear, fixed frame, worm, and motor, a stable and reliable power source is provided for the rotation of the rotary table. Moreover, the worm gear transmission has a self-locking function, which can effectively prevent the clamping block from accidentally loosening and ensure the stability of the processing. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of a clamping device for processing a heating plate provided in the embodiments of this application.

[0027] Figure 2 This is a cross-sectional structural diagram of a clamping device for processing a heating plate provided in an embodiment of this application.

[0028] Figure 3 This is a schematic diagram of the structure of the driving component in the embodiments of this application.

[0029] Explanation of reference numerals in the attached drawings: 1. Base; 11. Through hole; 12. Adjustment groove; 121. Guide bar; 2. Clamping block; 21. Toothed surface; 22. Guide groove; 23. Support surface; 3. Adhesive block; 31. Arc-shaped surface; 4. Rotating disk; 41. Scroll tooth; 42. Worm gear; 5. Protective box; 51. Fixing frame; 52. Worm; 53. Motor. Detailed Implementation

[0030] The following is in conjunction with the appendix Figure 1-3 This application will be described in further detail.

[0031] This application discloses a clamping device for processing a heating plate. (Refer to...) Figure 1 The system includes a base 1, which is annularly arranged with a through hole 11 in the center. Several adjusting grooves 12 are evenly distributed along the circumference of the top of the base 1, and these grooves are radially arranged. In this embodiment, three adjusting grooves 12 are provided. A clamping block 2 is slidably disposed within the adjusting groove 12, and a toothed surface 21 is provided on the side of the clamping block 2 facing the through hole 11. The toothed surface 21 is composed of several teeth evenly formed on its surface. A set of guide strips 121 are integrally formed on both sides of the adjusting groove 12, and guide grooves 22 are provided on both sides of the clamping block 2. The guide grooves 22 and guide strips 121 are mutually adapted and slidably engaged, providing stable guidance for the sliding of the clamping block 2 within the adjusting groove 12.

[0032] Reference Figure 1A clamping block 3 is fixedly mounted on the top of the clamping block 2. The clamping block 3 has an arc-shaped surface 31 on the side facing the through hole 11, which matches the peripheral wall of the heating plate. The clamping block 3 is detachably connected to the top of the clamping block 2 by bolts, so as to replace the clamping block 3 with different arc-shaped surfaces 31, thereby adapting to heating plates of different sizes. A driving assembly is also provided on the base 1, which is used to drive the clamping block 2 to slide and fix the clamping block 2. A support surface 23 is provided on the top of the clamping block 2. The support surface 23 is parallel to the horizontal plane and can abut against the bottom of the heating plate. The support surface 23 is located between the through hole 11 and the arc-shaped surface 31 in the horizontal direction.

[0033] Reference Figure 1 The clamping blocks 2 slide along the adjusting groove 12 under the drive of the drive assembly to adjust the distance between each clamping block 2. During rough machining, the toothed surface 21 on the clamping block 2 abuts against the peripheral wall of the heating plate to ensure friction when the clamping block 2 contacts the heating plate. During finish machining, the heating plate is placed on the support surface 23, and then the clamping blocks 2 are driven closer to each other so that the arc-shaped surface 31 on the contact block 3 abuts against the peripheral wall of the heating plate, minimizing damage to the peripheral wall of the heating plate and ensuring the alignment accuracy of the heating plate in the horizontal position.

[0034] To drive all clamping components to slide synchronously, refer to Figures 1 to 3 The driving assembly includes a rotating disk 4 and a vortex gear 41. The base 1 has an annular groove at its center in the height direction, which communicates with the bottom of the adjusting groove 12. The rotating disk 4 is rotatably mounted within the annular groove of the base 1, and the vortex gear 41 is fixedly mounted on the upper surface of the rotating disk 4. The bottoms of all the clamping blocks 2 mesh with the vortex gear 41. When the rotating disk 4 rotates, the vortex gear 41 on the surface of the rotating disk 4 rotates, causing all the clamping blocks 2 to slide radially within the adjusting groove 12.

[0035] To facilitate the rotation of the rotating disk 4 and to lock the rotating disk 4, refer to... Figure 1 and Figure 3 The drive assembly also includes a worm gear 42, a worm 52, a fixed frame 51, and a power component. The fixed frame 51 is fixedly mounted on the side wall of the base 1. The worm 52 rotates on the fixed frame 51. The power component drives the worm 52 to rotate. The worm gear 42 is fixedly connected to the rotating disk 4, and the worm gear 42 meshes with the worm 52. The drive component is a motor 53, which is fixed to the fixed frame 51. The drive shaft of the base 1 is coaxially fixed with the worm 52. A protective box 5 is fixedly mounted on the side wall of the base 1, and the motor 53 and worm 52 are both located inside the protective box 5. During processing, the motor 53 drives the worm 52 to rotate. The worm 52 meshes with the worm gear 42 and drives the rotating disk 4 to rotate. The self-locking function of the worm gear 42 and the worm 52 ensures that the rotating disk 4 will not accidentally reverse.

[0036] Reference Figure 1 and Figure 3 In this embodiment, the fixing frame 51 includes a base plate and a support. The base plate is fixedly connected to the side wall of the base 1, the support is fixed on the base 1, and the worm gear 52 rotates on the support. The protective box 5 is composed of a base plate and a protective shell detachably connected to the base plate. The protective shell and the base plate are connected by bolts.

[0037] The implementation principle of the clamping device for processing a heating plate according to this application embodiment is as follows: When processing the heating plate, a suitable clamping block 3 is first selected according to the peripheral wall size of the heating plate and installed on the top of the clamping block 2. The heating plate is supported at the through hole 11 of the base 1. If rough machining is performed, the toothed surface 21 of the clamping block 2 abuts against the peripheral wall of the heating plate, and the toothed surface 21 abuts against the peripheral wall of the heating plate stably. If fine machining is performed, the heating plate is placed on the support surface 23, and then the motor 53 is started. The motor 53 drives the worm gear 52 to rotate, and the worm gear 52 drives the worm wheel 42 to rotate, thereby rotating the rotating disk 4. The volute teeth 41 on the rotating disk 4 drive all the clamping blocks 2 to slide in the adjusting groove 12, so that the clamping blocks 2 or the clamping blocks 3 clamp and fix the heating plate. In this way, the same fixture can be used to clamp the heating plate for fine machining and rough machining respectively, reducing the fixture cost and improving the efficiency and quality of heating plate processing.

[0038] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A clamping device for processing a heating plate, comprising a base (1), the base (1) being annularly arranged, a through hole (11) being provided in the middle of the base (1), and a plurality of adjusting grooves (12) being evenly distributed along the circumferential direction on the top of the base (1), the adjusting grooves (12) being radially arranged along the base (1), and a clamping block (2) being slidably disposed within the adjusting groove (12), characterized in that: The clamping block (2) has a toothed surface (21) on the side facing the through hole (11); a clamping block (3) is fixedly provided on the top of the clamping block (2), and an arc-shaped surface (31) is provided on the side facing the through hole (11). The arc-shaped surface (31) matches the peripheral wall of the heating plate. A driving component is also provided on the base (1). The driving component is used to drive the clamping block (2) to slide and fix the clamping block (2).

2. The clamping device for processing a heating plate according to claim 1, characterized in that: The adjusting groove (12) has a set of guide strips (121) integrally formed on both sides, and the clamping block (2) has guide grooves (22) on both sides. The guide grooves (22) and the guide strips (121) are adapted to each other and slide together.

3. The clamping device for processing a heating plate according to claim 1, characterized in that: The clamping block (2) has a support surface (23) on its top. The support surface (23) is parallel to the horizontal plane and can abut against the bottom of the heating plate. The support surface (23) is located between the through hole (11) and the arc-shaped surface (31) in the horizontal direction.

4. The clamping device for processing a heating plate according to claim 1, characterized in that: The fastening block (3) is detachably fixed to the top of the clamping block (2) by bolts.

5. The clamping device for processing a heating plate according to claim 1, characterized in that: The drive assembly includes a rotating disk (4) and a vortex tooth (41). The rotating disk (4) is rotatably disposed within the base (1), and the vortex tooth (41) is fixedly disposed on the upper surface of the rotating disk (4). The bottom of all the clamping blocks (2) meshes with the vortex tooth (41).

6. The clamping device for processing a heating plate according to claim 5, characterized in that: The drive assembly also includes a worm gear (42), a worm (52), a fixed frame (51), and a power component. The fixed frame (51) is fixedly installed on the side wall of the base (1). The worm (52) rotates on the fixed frame (51). The power component is used to drive the worm (52) to rotate. The worm gear (42) is fixedly connected to the rotating disk (4). The worm gear (42) and the worm (52) mesh with each other.

7. A clamping device for processing a heating plate according to claim 6, characterized in that: The power component is a motor (53), which is fixed on a mounting frame (51). The drive shaft of the base (1) is coaxially fixed with the worm gear (52).

8. A clamping device for processing a heating plate according to claim 7, characterized in that: A protective box (5) is fixedly installed on the side wall of the base (1), and the motor (53) and worm gear (52) are both located inside the protective box (5).

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