Magnetron sputtering equipment

Abstract

The utility model belongs to the technical field of coating equipment, in particular relates to magnetron sputtering equipment, and aims to solve the problems that a target material is mostly fixed by bolts and threads when the target material is mounted in the conventional magnetron sputtering equipment, and the steps of mounting and dismounting the target material are too complicated, so that more time is consumed in the step of mounting the target material during coating operation, and the working efficiency is high. In order to greatly prolong the working procedure duration of coating operation and reduce the efficiency of magnetron sputtering coating, the utility model provides the following scheme that the magnetron sputtering coating device comprises a box body, one side of the box body is connected with a box door through a hinge, an observation window is formed in the box door, a sealing module is arranged on the box door, and a control cabinet is arranged outside the box body. According to the magnetron sputtering equipment disclosed by the utility model, a target material can be quickly disassembled and replaced when different materials are coated on a substrate, so that the working procedure waiting time of a sputtering coating process is greatly shortened, and the working efficiency of the equipment is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coating equipment technical field especially relates to a magnetron sputtering equipment. BACKGROUND

[0002] Magnetron sputtering is a kind of physical vapor deposition. General sputtering method can be used to prepare metal, semiconductor, insulator and other multi-materials, has the advantages such as simple equipment, easy control, large plating area and strong adhesion, because it is carried out at low pressure under high-speed sputtering, must effectively improve the ionization rate of gas. Magnetron sputtering introduces magnetic field on the surface of target cathode, uses the constraint of magnetic field to charged particles to improve plasma density to increase sputtering rate.

[0003] The existing magnetron sputtering equipment mostly adopts bolt and thread fixing when installing target material, and the steps of installing and disassembling target material are too cumbersome, which leads to the consumption of more time in the step of installing target material when carrying out coating operation, greatly prolongs the process time of coating operation, and reduces the efficiency of magnetron sputtering coating. UTILITY MODEL CONTENTS

[0004] The utility model discloses a magnetron sputtering equipment, aims at solving the technical problem of the too cumbersome target material installation of the existing magnetron sputtering equipment in the background art.

[0005] The utility model discloses a magnetron sputtering equipment, including the box, the one side of box is connected with the box door through the hinge, is seted up with the observation window on the box door, and is provided with sealing module on the box door, and the outside of box is provided with control cabinet, the bottom inner wall of box is fixedly connected with the bearing platform, is provided with quick installation module on the bearing platform, is provided with target material in quick installation module, and the side fixedly connected with containing frame of box is away from the box door, is provided with argon cylinder in containing frame, is provided with gas pipe on argon cylinder, the one end of gas pipe is passed through the outside of box and enters the box in, and the upside fixedly connected with vacuum pump of containing frame, the output of vacuum pump is connected with exhaust pipe through the pipeline, and the one end of exhaust pipe is entered into the box away from vacuum pump, be provided with calibration module in the box, the bottom of calibration module is provided with the wafer, and the wafer is located above quick installation module.

[0006] Through being provided with box, box door, observation window, control cabinet, bearing platform, quick installation module, calibration module, sealing module, wafer, partition frame, containing frame, argon cylinder, gas pump, gas pipe and target material, the quick dismounting and replacement of target material can be realized when carrying out different material coating to wafer by the equipment using quick installation module, greatly reduce the process waiting time of sputtering coating process, improve the work efficiency of equipment.

[0007] In a preferred scheme, the quick installation module comprises a mounting ring, the bottom of the mounting ring is fixedly connected with the upper side of the bearing platform, the inner wall of the mounting ring is rotatably connected with a support rod through external threads, the upper side of the support rod is fixedly connected with a base, the base and the support rod are both provided with an insertion hole, the same conductive rod is arranged in the insertion hole, the upper side of the conductive rod is fixedly connected with a stabilizing plate, and the upper side of the base is provided with a plurality of circumferentially equidistantly distributed grooves, the same stabilizing plate is clamped in the grooves, and the side opposite to the conductive rod of the stabilizing plate is fixedly connected; the upper side of the stabilizing plate is fixedly connected with a matching frame, the bottom of the matching frame is provided with a circular slot, a magnet is slidably connected in the circular slot, the upper side of the matching frame is fixedly connected with a mounting seat, the upper side of the mounting seat is provided with four circumferentially equidistantly distributed sliding grooves, the sliding grooves are all slidably connected with limiting blocks, the upper sides of the limiting blocks are all fixedly connected with short shafts, and the sides opposite to the four limiting blocks are all attached to the outer part of the target material, the upper side of the mounting seat is movably connected with an adjusting frame, the adjusting frame is provided with four circumferentially equidistantly distributed curved grooves, the inner walls of the four curved grooves are respectively slidably connected with the outer parts of the four short shafts, the inner wall of the adjusting frame is fixedly connected with a coil spring, and the end away from the adjusting frame of the coil spring is fixedly connected with the upper side of the mounting seat; the outer part of the base, the stabilizing plate, the matching frame and the mounting seat is slidably connected with the same isolation cover, the upper side of the isolation cover is provided with a sputtering hole, the sputtering hole and the target material are located on the same axis, the bottom of the base is fixedly connected with four circumferentially equidistantly distributed restraining guide rails, the restraining guide rails are all slidably connected with clamping fasteners, the outer part of the isolation cover is provided with four circumferentially equidistantly distributed cutting grooves, the inner walls of the cutting grooves are all fixedly connected with racks one, the outer parts of the four clamping fasteners are respectively clamped with the four racks one, and the outer part of the support rod is slidably connected with a connecting ring; the upper side of the connecting ring is movably connected with four circumferentially equidistantly distributed push-pull rods, the ends away from the connecting ring of the four push-pull rods are respectively movably connected with the ends away from the racks one of the four clamping fasteners, the outer parts of the push-pull rods are slidably connected with the inner walls of the restraining guide rails, and the outer part of the support rod is fixedly connected with a fixing ring, the fixing ring is located below the connecting ring, the side opposite to the connecting ring of the fixing ring is fixedly connected with a spring one, the spring one is wound around the outer part of the support rod, the outer part of the support rod is fixedly connected with a rotating ring, the rotating ring is located below the fixing ring, and the upper side of the mounting ring.

[0008] By arranging the quick installation module, the quick installation module can quickly and conveniently fix the target material by means of the curved grooves and the limiting blocks, and the target material can be stably maintained at the position during sputtering operation without changing, thereby improving the stability of the equipment during installation of the target material, and the clamping fasteners and the racks one which can be quickly unlocked can help the workers save a lot of disassembly and assembly time, reduce the workload of the workers, and improve the work efficiency.

[0009] In a preferred scheme, the calibration module comprises a sliding rod and a lead screw, the box is fixedly connected with a partition frame on the inner wall of the two sides away from the box door, two symmetric circular holes are formed in the two partition frames, the two circular holes on the same side are movably connected with the sliding rod and the lead screw respectively, the sliding rod and the lead screw are provided with sliding blocks, the opposite sides of the two sliding blocks are movably connected with a same threaded rod, the outer side of the threaded rod is provided with two symmetric limiting rods, the opposite sides of the two limiting rods are fixedly connected with the two sliding blocks, the outer sides of the limiting rod and the threaded rod are provided with a same transmission block, the inner wall of one of the partition frames is fixedly connected with a motor one, the output end of the motor one is connected with the side of the lead screw through a shaft coupling; the outer side of the sliding block on the lead screw is fixedly connected with a motor two, the output end of the motor two is connected with a gear through a shaft coupling, the outer side of the threaded rod is fixedly connected with a gear ring one, the gear ring one is engaged with the gear, the bottom of the transmission block is fixedly connected with a hydraulic rod, the output end of the hydraulic rod is fixedly connected with an isolation frame, the top inner wall of the isolation frame is fixedly connected with a motor three, the output end of the motor three is connected with a containing frame through a shaft coupling, the containing frame is provided with a pump, the output end of the pump is connected with a suction disc through a pipeline, the bottom of the suction disc is attached to the upper side of the substrate, and the outer side of the containing frame is fixedly connected with a baffle, the baffle is located above the substrate.

[0010] By setting the calibration module, the calibration module can automatically calibrate the position of the substrate according to the position of the target material by using the lead screw and the threaded rod, so that the positions of the substrate and the target material are kept consistent, thereby improving the accuracy of the material on the target material when the equipment is used for sputtering film on the substrate, and the material on the target material can be more uniformly covered on the surface of the substrate, and the quality of the film is improved.

[0011] In a preferred scheme, the sealing module comprises a sealing gasket one, the side of the box close to the box door is fixedly connected with the outer side of the sealing gasket one, the side of the box door close to the box is fixedly connected with a sealing gasket two, the opposite sides of the sealing gasket one and the sealing gasket two are attached, the side of the box away from the control cabinet is fixedly connected with a locking block, the side of the box door away from the control cabinet is fixedly connected with a connecting block, the locking block and the connecting block are both provided with an embedded hole, and a same bolt is arranged in the two embedded holes; the outer side of the bolt is provided with a gear ring two, the gear ring two is located on the side of the connecting block away from the locking block, the opposite side of the gear ring two and the connecting block is movably connected, the side of the gear ring two away from the connecting block is fixedly connected with a knob, and the knob is located on the outer side of the bolt; the outer side of the gear ring two is provided with a ring frame, the inner wall of the ring frame is slidably connected with a stop block, the opposite side of the stop block and the connecting block is fixedly connected, the side of the stop block away from the gear ring two is fixedly connected with two symmetric springs two, the ends of the two springs two away from the stop block are fixedly connected with the inner wall of the ring frame, the outer side of the gear ring two is clamped with a rack two, the opposite side of the rack two and the inner wall of the ring frame is fixedly connected, and the connecting block is provided with a pushing groove.

[0012] By setting the sealing module, the sealing module can continuously pressurize the sealing gasket one and the sealing gasket two by the bolt, the connecting block and the locking block, so that the compactness of the sealing gasket one and the sealing gasket two is quickly increased, the sealing property of the box body is kept sufficient, the impurities from the outside are reduced to enter the box body, the purity of the argon gas in the box body is improved, the thin film sputtered on the substrate is not polluted, and the quality of the film plating of the equipment is improved.

[0013] As can be seen from the above, the magnetron sputtering equipment provided by the utility model has the effects of realizing quick dismounting and replacement of the target material when different materials are plated on the substrate, greatly reducing the process waiting time of the sputtering plating process, and improving the working efficiency of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 The utility model provides a kind of whole structure schematic diagram of magnetron sputtering equipment proposed by the utility model;

[0015] Figure 2 The utility model provides a kind of sectional structure schematic diagram of magnetron sputtering equipment proposed by the utility model;

[0016] Figure 3 The utility model provides a kind of quick installation module structure schematic diagram of magnetron sputtering equipment proposed by the utility model;

[0017] Figure 4 The utility model provides a kind of support rod structure schematic diagram of magnetron sputtering equipment proposed by the utility model;

[0018] Figure 5 The utility model provides a kind of base structure schematic diagram of magnetron sputtering equipment proposed by the utility model;

[0019] Figure 6 The utility model provides a kind of mounting seat structure schematic diagram of magnetron sputtering equipment proposed by the utility model;

[0020] Figure 7 The utility model provides a kind of calibration module structure schematic diagram of magnetron sputtering equipment proposed by the utility model;

[0021] Figure 8 The utility model provides a kind of sealing module structure schematic diagram of magnetron sputtering equipment proposed by the utility model;

[0022] Figure 9 The utility model provides a kind of connecting block structure schematic diagram of magnetron sputtering equipment proposed by the utility model.

[0023] In the figure: 1, box; 2, box door; 3, observation window; 4, control cabinet; 5, bearing plate; 6, quick installation module; 601, installation ring; 602, isolation cover; 603, base; 604, insertion hole; 605, conductive rod; 606, rotating ring; 607, fixed ring; 608, connecting ring; 609, spring one; 610, restraint guide rail; 611, clamping fastener; 612, push-pull rod; 613, rack one; 614, support rod; 615, stabilizing plate; 616, magnet; 617, fitting frame; 618, sputtering hole; 619, mounting seat; 620, round notch; 621, sliding groove; 622, limiting block; 623, adjusting frame; 624, curved groove; 625, coil spring; 7, calibration module; 701, sliding rod; 702, lead screw; 703, sliding block; 704, motor one; 705, threaded rod; 706, transmission block; 707, limiting rod; 708, gear ring one; 709, motor two; 710, gear; 711, hydraulic rod; 712, isolation frame; 713, motor three; 714, containing frame; 715, pump; 716, suction cup; 717, baffle; 8, sealing module; 801, sealing gasket one; 802, sealing gasket two; 803, link block; 804, locking block; 805, dial slot; 806, fitting hole; 807, bolt; 808, gear ring two; 809, annular frame; 810, rack two; 811, stop block; 812, spring two; 813, knob; 9, base sheet; 10, partition frame; 11, containing frame; 12, argon cylinder; 13, gas delivery pump; 14, gas delivery pipe; 15, target material; 16, vacuum pump. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all embodiments.

[0025] Reference Figures 1-9A kind of magnetron sputtering equipment, including box 1, the side of box 1 is connected with box door 2 by hinge, box door 2 is opened with observation window 3, and sealing module 8 is arranged on box door 2, the outside of box 1 is provided with control cabinet 4, the bottom inner wall of box 1 is connected with bearing platform 5 by bolt, bearing platform 5 is provided with quick installation module 6, target material 15 is arranged in quick installation module 6, and box 1 is connected with containing frame 11 by bolt on the side away from box door 2, containing frame 11 is provided with argon cylinder 12, argon cylinder 12 is provided with gas pipe 14, one end of gas pipe 14 away from argon cylinder 12 passes through the outside of box 1 and enters into box 1, and the upper side of containing frame 11 is connected with vacuum pump 16 by bolt, the output end of vacuum pump 16 is connected with exhaust pipe by conduit, one end of exhaust pipe away from vacuum pump 16 enters into box 1, calibration module 7 is provided in box 1, the bottom of calibration module 7 is provided with wafer 9, wafer 9 is located above quick installation module 6.

[0026] Specifically, before opening box door 2, start vacuum pump 16 and input air into box 1, so as to balance the air pressure in box 1 and the outside, open box door 2 using sealing module 8, fix target material 15 in the equipment using quick installation module 6, ensure that quick installation module 6 is connected stably with bearing platform 5, contact well, put wafer 9 into the equipment, adsorb wafer 9 using calibration module 7 and adjust the position of calibration wafer 9 and target material 15, so that wafer 9 and target material 15 are on the same axis, close box door 2 using sealing module 8 and ensure sealing, start vacuum pump 16 to exhaust air in box 1 to achieve vacuum state, start gas pump 13, so that gas pump 13 injects argon in argon cylinder 12 into box 1 through gas pipe 14, and start magnetron sputtering coating operation on wafer 9;The equipment can realize quick disassembly and replacement of target material 15 when coating wafer 9 with different materials using quick installation module 6, greatly reduce the process waiting time of sputtering coating process, and improve the working efficiency of the equipment.

[0027] Refer to Figure 2 , Figure 3 , Figure 4 , Figure 5 And Figure 6In a preferred embodiment, the quick mounting module 6 comprises a mounting ring 601, the bottom of the mounting ring 601 is bolted to the upper side of the bearing platform 5, the inner wall of the mounting ring 601 is externally threaded and rotatably connected with a support rod 614, the upper side of the support rod 614 is bolted with a base 603, the base 603 and the support rod 614 are both provided with an insertion hole 604, the same conductive rod 605 is arranged in the insertion hole 604, the upper side of the conductive rod 605 is bolted with a stabilizing plate 615, and the upper side of the base 603 is provided with a plurality of circumferentially equidistant recesses, the same stabilizing plate 615 is clamped in the recesses, and the side opposite to the conductive rod 605 of the stabilizing plate 615 is bolted; the upper side of the stabilizing plate 615 is bolted with a fitting frame 617, the bottom of the fitting frame 617 is provided with a circular slot 620, the circular slot 620 is slidably connected with a magnet 616, the upper side of the fitting frame 617 is bolted with a mounting seat 619, the upper side of the mounting seat 619 is provided with four circumferentially equidistant sliding grooves 621, the sliding grooves 621 are all slidably connected with limiting blocks 622, the upper side of the limiting blocks 622 is all bolted with a short shaft, and the side opposite to the four limiting blocks 622 is all attached to the outside of the target material 15, the upper side of the mounting seat 619 is rotatably connected with an adjusting frame 623 through a bearing, the adjusting frame 623 is provided with four circumferentially equidistant curved grooves 624, the inner walls of the four curved grooves 624 are respectively slidably connected with the outside of the four short shafts, the inner wall of the adjusting frame 623 is bolted with a coil spring 625, and the end of the coil spring 625 away from the adjusting frame 623 is bolted with the upper side of the mounting seat 619; the outside of the base 603, the stabilizing plate 615, the fitting frame 617 and the mounting seat 619 is slidably connected with the same isolation cover 602, the upper side of the isolation cover 602 is provided with a sputtering hole 618, the sputtering hole 618 and the target material 15 are located on the same axis, the bottom of the base 603 is bolted with four circumferentially equidistant restraint guide rails 610, the restraint guide rails 610 are all slidably connected with clamping buckles 611, the outside of the isolation cover 602 is provided with four circumferentially equidistant cutting grooves, the inner walls of the cutting grooves are all bolted with a rack one 613, the outside of the four clamping buckles 611 is respectively clamped with the four rack ones 613, and the outside of the support rod 614 is slidably connected with a connecting ring 608.The upper side of the connecting ring 608 is rotatably connected with four circumferentially equidistantly distributed push-pull rods 612 through bearings, the ends of the four push-pull rods 612 away from the connecting ring 608 are rotatably connected with the ends of the four clamping fasteners 611 away from the rack 613 through bearings, the outsides of the push-pull rods 612 are slidably connected with the inner walls of the restraint guide rails 610, and the outside of the support rod 614 is connected with a fixing ring 607 through bolts, the fixing ring 607 is located below the connecting ring 608, the side opposite to the connecting ring 608 of the fixing ring 607 is connected with a spring 609 through bolts, the spring 609 surrounds the outside of the support rod 614, the outside of the support rod 614 is connected with a rotating ring 606 through bolts, the rotating ring 606 is located below the fixing ring 607 and above the mounting ring 601.

[0028] Specifically, before the target material 15 is fixed on the equipment, the support rod 614 is inserted into and rotated with the rotating ring 606 to make the support rod 614 screw into the mounting ring 601 and be fixed on the bearing platform 5, the conductive rod 605 connected with the stabilizing plate 615 is inserted into the insertion hole 604 to make the bottom of the stabilizing plate 615 clamped with the groove on the base 603 and ensure that the bottom of the conductive rod 605 is in close contact with the bearing platform 5, the adjusting frame 623 on the embedded frame 617 rotatably connected with the stabilizing plate 615 is rotated, the inner wall of the curved groove 624 pushes the short shaft on the limiting block 622 when the adjusting frame 623 is rotated against the torsion of the coil spring 625, so that the limiting block 622 moves to the outside of the mounting seat 619, the target material 15 is placed in the cavity in the center of the mounting seat 619, the adjusting frame 623 is loosened, and the limiting block 622 quickly clamps and fixes the target material 15 under the torsion of the coil spring 625, the isolation cover 602 is picked up, aligned with the target material 15, and then put from top to bottom, so that the isolation cover 602 slides downward outside the embedded frame 617, the connecting ring 608 is grabbed and pushed upward, so that the connecting ring 608 drives the push-pull rods 612 to push the clamping fasteners 611 to move to the outside of the base 603, after the isolation cover 602 is completely lowered, the connecting ring 608 is loosened, and under the pulling of the spring 609, the connecting ring 608 drives the push-pull rods 612 to reset, so that the clamping fasteners 611 connected with the push-pull rods 612 can be clamped with the rack 613 on the isolation cover 602, so that the isolation cover 602 is fixed on the base 603, and the isolation cover 602 wraps the argon cylinder 12, when it is necessary to replace the target material 15, the above steps are operated in reverse.

[0029] In a specific application scenario, the quick installation module 6 is mainly suitable for the quick installation link in the quick installation process, that is, the quick installation module 6 can quickly and conveniently fix the target material 15 by using the curved groove 624 and the limiting block 622, and can stably maintain the position of the target material 15 during sputtering operation, thereby improving the stability of the equipment during installation of the target material 15. Meanwhile, the quick unlocking clamping buckle 611 and the rack 613 can help the workers save a lot of disassembly and assembly time, reduce the workload of the workers, and improve the work efficiency.

[0030] With reference to Figure 7 In a preferred embodiment, the calibration module 7 comprises a sliding rod 701 and a lead screw 702. The box 1 is provided with a partition frame 10 on the inner wall of each side away from the box door 2. Two symmetric circular holes are formed in each partition frame 10. The two circular holes on the same side are rotatably connected with the outside of the sliding rod 701 and the lead screw 702 by bearings. The sliding rod 701 and the lead screw 702 are provided with sliding blocks 703. The opposite sides of the two sliding blocks 703 are rotatably connected with a same threaded rod 705 by bearings. The outside of the threaded rod 705 is provided with two symmetric limiting rods 707. The opposite sides of the two limiting rods 707 and the two sliding blocks 703 are connected by bolts. The limiting rod 707 and the threaded rod 705 are provided with a same transmission block 706. The inner wall of one of the partition frames 10 is provided with a motor one 704 connected by a bolt. The output end of the motor one 704 is connected with one side of the lead screw 702 through a shaft coupling. The outside of the sliding block 703 on the lead screw 702 is provided with a motor two 709 connected by a bolt. The output end of the motor two 709 is connected with a gear 710 through a shaft coupling. The outside of the threaded rod 705 is provided with a gear ring one 708 connected by a bolt. The gear ring one 708 is engaged with the gear 710. The bottom of the transmission block 706 is provided with a hydraulic rod 711 connected by a bolt. The output end of the hydraulic rod 711 is provided with an isolation frame 712 connected by a bolt. The top inner wall of the isolation frame 712 is provided with a motor three 713 connected by a bolt. The output end of the motor three 713 is connected with a containing frame 714 through a shaft coupling. The containing frame 714 is provided with a pump 715. The output end of the pump 715 is connected with a suction disc 716 through a pipeline. The bottom of the suction disc 716 is attached to the upper side of the substrate 9. The outside of the containing frame 714 is provided with a baffle 717 above the substrate 9.

[0031] Specifically, after the target material 15 is fixed in the device, the pump 715 is started to drive the suction cup 716 to adsorb and fix the substrate 9, the motor I 704 is started to drive the screw rod 702 to rotate, so that the sliding block 703 on the sliding rod 701 and the screw rod 702 can drive the transmission block 706 to move horizontally, the motor II 709 is started to drive the gear ring I 708 meshing with the gear 710 to rotate, so that the threaded rod 705 rotates, and under the restraint of the limiting rod 707, the transmission block 706 can move longitudinally on the threaded rod 705, under the adjustment of the horizontal and longitudinal directions, the transmission block 706 finally moves to the position directly above the target material 15, the hydraulic rod 711 is started, and the output end of the hydraulic rod 711 drives the substrate 9 to descend to the position close to the target material 15 and then stop, and when the device performs the sputtering film coating operation, the motor III 713 is started to drive the containing frame 714 to rotate, so that the substrate 9 adsorbed on the suction cup 716 can rotate.

[0032] In a specific application scenario, the calibration module 7 is mainly suitable for the calibration link in the calibration process, that is, the calibration module 7 can make the device automatically calibrate the position of the substrate 9 according to the position of the target material 15 by using the screw rod 702 and the threaded rod 705, so that the positions of the substrate 9 and the target material 15 are kept consistent, thereby improving the accuracy of the material on the target material 15 when the device performs the sputtering film coating on the substrate 9, and the material on the target material 15 can be more uniformly covered on the surface of the substrate 9, and the quality of the film coating is improved.

[0033] Referring to Figure 8 and Figure 9In a preferred embodiment, the sealing module 8 comprises a sealing pad one 801, the side of the box body 1 close to the box door 2 is connected to the outside of the sealing pad one 801 by bolts, the side of the box door 2 close to the box body 1 is connected to the sealing pad two 802 by bolts, the side of the sealing pad one 801 opposite to the sealing pad two 802 is attached, the side of the box body 1 away from the control cabinet 4 is connected to the locking block 804 by bolts, the side of the box door 2 away from the control cabinet 4 is connected to the connecting block 803 by bolts, and the engaging holes 806 are arranged on the connecting block 803 and the locking block 804, and the same bolt 807 is arranged in the two engaging holes 806; the outside of the bolt 807 is provided with a gear ring two 808, the gear ring two 808 is located on the side of the connecting block 803 away from the locking block 804, the side of the gear ring two 808 opposite to the connecting block 803 is rotatably connected by bearings, and the side of the gear ring two 808 away from the connecting block 803 is connected to the knob 813 by bolts, and the knob 813 is located on the outside of the bolt 807; the outside of the gear ring two 808 is provided with a ring frame 809, the inner wall of the ring frame 809 is slidably connected to the stop block 811, the side of the stop block 811 opposite to the connecting block 803 is connected by bolts, the side of the stop block 811 away from the gear ring two 808 is connected to two symmetrical springs two 812 by bolts, the ends of the two springs two 812 away from the stop block 811 are connected to the inner wall of the ring frame 809 by bolts, and the outside of the gear ring two 808 is connected to the gear rack two 810, the side of the gear rack two 810 opposite to the inner wall of the ring frame 809 is connected by bolts, and the driving groove 805 is arranged on the connecting block 803.

[0034] Specifically, when closing the box door 2, the bolt 807 on the connecting block 803 is inserted into the engaging hole 806 on the locking block 804, the ring frame 809 is pushed down, the gear rack two 810 is disengaged from the gear ring two 808 when the ring frame 809 overcomes the tension of the spring two 812, the knob 813 is rotated, the knob 813 drives the gear ring two 808 to rotate, so that the bolt 807 is screwed into the locking block 804, and as the bolt 807 is screwed in, the sealing pad one 801 and the sealing pad two 802 between the box body 1 and the box door 2 are continuously attached and extruded, after the bolt 807 is completely screwed in, the ring frame 809 is loosened, the gear rack two 810 and the gear ring two 808 are reconnected under the pushing of the spring two 812, and the gear ring two 808 is no longer rotated under the restraint of the stop block 811.

[0035] In a specific application scenario, the sealing module 8 is mainly suitable for the sealing link in the sealing process, that is, the sealing module 8 can continuously pressurize the sealing gasket one 801 and the sealing gasket two 802 by means of the bolts 807, the connecting blocks 803 and the locking blocks 804, so as to quickly increase the compaction degree of the sealing gasket one 801 and the sealing gasket two 802, thereby keeping the box body 1 fully sealed, reducing the impurities from the outside into the box body 1, improving the purity of the argon gas in the box body 1, and preventing the thin film sputtered on the substrate 9 from being polluted, thereby improving the quality of the film plating of the equipment.

[0036] Working principle: before the box door 2 is opened, the vacuum pump 16 is started to input air into the box body 1, so as to balance the air pressure in the box body 1 with the outside, after opening 2, the support rod 614 is inserted into the installation ring 601 and the rotating ring 606 is rotated, so that the support rod 614 is screwed into the installation ring 601 and fixed on the bearing platform 5, the conductive rod 605 connected with the stabilizing plate 615 is inserted into the insertion hole 604, so that the bottom of the stabilizing plate 615 is clamped with the groove on the base 603, the bottom of the conductive rod 605 is ensured to be in close contact with the bearing platform 5, the adjusting frame 623 on the embedded frame 617 connected with the stabilizing plate 615 is rotated, the inner wall of the curved groove 624 pushes the short shaft on the limiting block 622 when the adjusting frame 623 is rotated against the torsion of the coil spring 625, so that the limiting block 622 moves outwardly to the mounting seat 619, the target material 15 is placed into the cavity in the center of the mounting seat 619, the adjusting frame 623 is loosened, under the torsion of the coil spring 625, the limiting block 622 quickly clamps and fixes the target material 15, the isolation cover 602 is lifted and is sleeved from top to bottom on the target material 15, so that the isolation cover 602 slides downwardly outside the embedded frame 617, the connecting ring 608 is gripped and pushed upwardly, so that the connecting ring 608 drives the push-pull rod 612 to push the clamping buckle 611 to move outwardly to the base 603, after the isolation cover 602 is completely lowered, the connecting ring 608 is loosened, under the pulling of the spring one 609, the connecting ring 608 drives the push-pull rod 612 to reset, so that the clamping buckle 611 connected with the push-pull rod 612 can be clamped with the rack one 613 on the isolation cover 602, so that the isolation cover 602 is fixed on the base 603, the isolation cover 602 wraps the argon cylinder 12, when the target material 15 needs to be replaced, the above steps are reversed, after the target material 15 is fixed in the equipment, the pump 715 is started, the pump 715 drives the suction cup 716 to adsorb and fix the substrate 9, the motor one 704 is started, the motor one 704 drives the screw rod 702 to rotate, so that the sliding block 703 on the sliding rod 701 and the screw rod 702 can drive the transmission block 706 to move horizontally, the motor two 709 is started, the motor two 709 drives the gear ring one 708 meshed with the gear 710 to rotate, so that the threaded rod 705 rotates, under the restraint of the limiting rod 707, the transmission block 706 can move vertically on the threaded rod 705, under the horizontal and vertical adjustment, the transmission block 706 finally moves to the top of the target material 15, the hydraulic rod 711 is started, the output end of the hydraulic rod 711 drives the substrate 9 to descend to the position close to the target material 15 and then stops, when the equipment performs sputtering coating operation, the motor three 713 is started, the motor three 713 drives the containing frame 714 to rotate, so that the substrate 9 adsorbed on the suction cup 716 can rotate with it, when the box door 2 is closed, the bolt 807 on the connecting block 803 is inserted into the embedded hole 806 on the locking block 804, the annular frame 809 is pushed downwardly, so that the rack two 810 releases the clamping of the gear ring two 808 when the annular frame 809 overcomes the pulling force of the spring two 812, the knob 813 is rotated,The knob 813 drives the gear ring 808 to rotate, so that the bolt 807 is screwed into the locking block 804. With the screwing of the bolt 807, the sealing gasket 1 801 and the sealing gasket 2 802 between the box body 1 and the box door 2 are continuously pressed against each other. After the bolt 807 is completely screwed in, the annular frame 809 is loosened. Under the pushing of the spring 2 812, the gear rack 2 810 and the gear ring 2 808 are re-coupled. Under the restraint of the stop block 811, the gear ring 2 808 no longer rotates. The vacuum pump 16 is started to exhaust the air in the box body 1 to reach a vacuum state. The gas delivery pump 13 is started to make the gas delivery pump 13 inject the argon in the argon cylinder 12 into the box body 1 through the gas delivery pipe 14, and the magnetron sputtering coating operation on the substrate 9 is started.

[0037] The above is only the preferred specific implementation of the present application, but the protection scope of the present application is not limited to this. Any skilled person in the art, according to the technical scheme and the inventive concept of the present application, makes equivalent replacement or change within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A magnetron sputtering apparatus, comprising a housing (1), characterized in that, The box (1) is connected to a door (2) by a hinge on one side. The door (2) has an observation window (3) and a sealing module (8). The box (1) is equipped with a control cabinet (4) on the outside. The bottom inner wall of the box (1) is fixedly connected to a support plate (5). The support plate (5) is equipped with a quick installation module (6). The quick installation module (6) contains a target material (15). The side of the box (1) away from the door (2) is fixedly connected to a receiving frame (11). The receiving frame (11) contains an argon cylinder (12).

2. The magnetron sputtering apparatus according to claim 1, characterized in that, An argon cylinder (12) is provided with a gas delivery pipe (14). The end of the gas delivery pipe (14) away from the argon cylinder (12) passes through the outside of the box (1) and enters the box (1). A vacuum pump (16) is fixedly connected to the upper side of the housing frame (11). The output end of the vacuum pump (16) is connected to an exhaust pipe through a conduit. The end of the exhaust pipe away from the vacuum pump (16) enters the box (1). A calibration module (7) is provided inside the box (1). A substrate (9) is provided at the bottom of the calibration module (7). The substrate (9) is located above the quick-installation module (6).

3. The magnetron sputtering apparatus according to claim 2, characterized in that, The quick-installation module (6) includes an installation ring (601). The bottom of the installation ring (601) is fixedly connected to the upper side of the support plate (5). The inner wall of the installation ring (601) is rotatably connected to a support rod (614) via an external thread. The upper side of the support rod (614) is fixedly connected to a base (603). Both the base (603) and the support rod (614) are provided with insertion holes (604). The same conductive rod (605) is provided in the insertion hole (604). The upper side of the conductive rod (605) is fixedly connected to a stabilizing plate (615). The upper side of the base (603) is provided with multiple circumferentially distributed grooves. The same stabilizing plate (615) is snapped into each groove. The stabilizing plate (615) is fixedly connected to the side opposite to the conductive rod (605).

4. The magnetron sputtering apparatus according to claim 3, characterized in that, The upper side of the stabilizing plate (615) is fixedly connected to a fitting frame (617), the bottom of the fitting frame (617) is provided with a circular slot (620), a magnet (616) is slidably connected in the circular slot (620), the upper side of the fitting frame (617) is fixedly connected to a mounting base (619), and the upper side of the mounting base (619) is provided with four circumferentially distributed sliding grooves (621).

5. The magnetron sputtering apparatus according to claim 4, characterized in that, Each groove (621) is slidably connected to a limiting block (622). Each limiting block (622) is fixedly connected to a short shaft on its upper side. The opposite sides of the four limiting blocks (622) are in contact with the outside of the target material (15). An adjustment frame (623) is movably connected to the upper side of the mounting base (619). The adjustment frame (623) has four circumferentially distributed curved grooves (624). The inner walls of the four curved grooves (624) are slidably connected to the outside of the four short shafts. A coil spring (625) is fixedly connected to the inner wall of the adjustment frame (623). The end of the coil spring (625) away from the adjustment frame (623) is fixedly connected to the upper side of the mounting base (619).

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