ALD cantilever type boat entering and exiting device

Abstract

The utility model discloses an ALD cantilever type boat entering and exiting device which comprises a boat carrying plate, one end of the boat carrying plate is fixedly connected with a furnace door, the furnace door is made of 316L stainless steel materials, supporting feet are arranged at the bottom of the furnace door, the supporting feet are movably connected with a furnace door base, the furnace door base is made of 304 stainless steel materials, and universal wheels are fixedly installed at the bottom of the furnace door base. The left side and the right side of the upper part of the boat carrying plate are respectively and movably connected with a block-up strip; and one end of each block-up strip close to the furnace door is movably connected with a flow uniformizing plate. The boat carrying plate and the furnace door are fixedly connected, the furnace door and the furnace door base are connected, a stable integral structure is formed, the boat carrying plate can be fed into the ALD furnace by pushing the furnace door base, and therefore the situation that rolling steel wheels at the bottom of the boat carrying plate and the furnace tube wall are in rolling friction, metal powder impurities are generated, and then solar cells are polluted is avoided; and the problems of EL black edges and dark films are solved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to solar cell ALD process equipment technical field, especially ALD cantilever type in and out boat device. BACKGROUND

[0002] Solar cell ALD process is the process of forming thin film on solar cell by atomic layer deposition technology, ALD process can significantly improve the stability and life of solar cell, enhance light absorption, and solve the problem of lattice mismatch, which is an important technology in solar cell manufacturing.

[0003] In the existing TOPCon crystalline silicon solar cell ALD process, the TOPCon crystalline silicon solar cell is inserted in the aluminum boat, and then the aluminum boat is placed on the boat loading plate, the bottom of the boat loading plate is provided with a rolling steel wheel, the aluminum boat is sent into the ALD furnace through the sliding of the rolling steel wheel in the furnace tube to deposit the TOPCon crystalline silicon solar cell, but in the process of entering and leaving the boat, the rolling steel wheel is in contact with the wall of the furnace tube, which is easy to produce metal powder, pollute the TOPCon crystalline silicon solar cell, cause EL black edge and dark piece, and reduce the production qualified rate of the TOPCon crystalline silicon solar cell, and increase the production cost of the enterprise. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of ALD cantilever type in and out boat device to solve the above-mentioned background technology in the process of entering and leaving the boat of the rolling steel wheel installed at the bottom of boat loading plate and the contact friction of furnace tube wall, which can produce metal powder, cause the pollution of TOPCon crystalline silicon solar cell, cause EL black edge and dark piece, and reduce the production qualified rate of the TOPCon crystalline silicon solar cell.

[0005] To solve the above problems, the specific technical scheme of the utility model of a kind of ALD cantilever type in and out boat device is as follows:

[0006] A kind of ALD cantilever type in and out boat device, including boat loading plate, the boat loading plate is horizontally placed rectangular flat plate, one end of the boat loading plate is fixedly connected with furnace door, the furnace door is rectangular frame structure, the bottom of the furnace door is provided with support leg, the support leg is movably connected with furnace door base, the bottom of the furnace door base is fixedly installed with universal wheel, left and right sides of the upper portion of the boat loading plate are movably connected with pad strip respectively, and the pad strip is movably connected with uniform flow plate at one end close to the furnace door.

[0007] Further, a plurality of grooves are respectively arranged on the left and right sides of the boat loading plate, a through hole penetrating the upper and lower portions of the groove is arranged in the groove, a threaded rod matched with the through hole is fixedly arranged on the bottom of the pad strip, and a nut matched with the threaded rod is arranged in the groove.

[0008] Further, the boat carrier plate and the furnace door are made of 316L stainless steel.

[0009] Further, the support foot is fixedly connected with the bottom surface of the boat carrier plate and is provided with a supporting foot, the supporting foot is a rectangular plate with a trapezoidal longitudinal section, two inclined surfaces of the trapezoidal longitudinal section are respectively attached to the front vertical surface of the support foot and the bottom surface of the boat carrier plate, and the supporting foot is made of 316L stainless steel.

[0010] Further, the furnace door is fixedly connected with the top surface of the boat carrier plate and is provided with a cable-stayed support rod, the cable-stayed support rod is a rectangular straight rod with a trapezoidal longitudinal section, two inclined surfaces of the trapezoidal longitudinal section are respectively attached to the front vertical surface of the furnace door and the top surface of the boat carrier plate, and the cable-stayed support rod is made of 316L stainless steel.

[0011] Further, the height pad is provided with a clamping groove matched with the flow uniformizing plate, a threaded hole one is arranged on one side of the clamping groove, and a fastening bolt one is arranged in the threaded hole one.

[0012] Further, the height pad is a long strip with a rectangular cross section and is made of aluminum alloy.

[0013] Further, the flow uniformizing plate is a rectangular plate made of aluminum alloy, and a plurality of long holes are linearly arranged on the flow uniformizing plate.

[0014] Further, the support foot is a square tube, the furnace door base upper surface is fixedly provided with a plug rod matched with the support foot, a threaded hole two is arranged on one side of the vertical wall of the support foot, a fastening bolt two is arranged in the threaded hole two, and the furnace door base is provided with a pushing support rod.

[0015] Further, the furnace door base is made of 304 stainless steel, the furnace door base upper surface is provided with a positioning rod, and a plurality of counterweights are sleeved on the positioning rod.

[0016] Compared with the prior art, the utility model has the following beneficial effects:

[0017] Before entering the ALD furnace, the TOPCon crystalline silicon solar cell is placed in the aluminum boat, then the aluminum boat is placed on the height pad, the height pad is adjusted to an appropriate height, the furnace door base is pushed, the boat carrier plate is sent into the ALD furnace, the fixed connection of the boat carrier plate and the furnace door and the connection of the furnace door and the furnace door base form a stable cantilever structure, the rolling steel wheels at the bottom of the boat carrier plate are cancelled, the boat carrier plate does not contact the furnace wall, the problem that metal powder is produced by the friction between the rolling steel wheels and the furnace wall and pollutes the TOPCon crystalline silicon solar cell, causes EL black edge and dark piece is avoided, the qualified rate of products is improved, and the production efficiency of enterprises is increased. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1The three-dimensional structure schematic diagram of the embodiment of the utility model;

[0019] Figure 2 The assembly explosion drawing of the furnace door and the furnace door base in the embodiment of the utility model;

[0020] Figure 3 The assembly explosion drawing of the boat carrying plate and the height increasing strip in the embodiment of the utility model;

[0021] Figure 4 The Figure 3 The local enlarged schematic diagram of A in the embodiment of the utility model;

[0022] Figure 5 The assembly explosion drawing of the height increasing strip and the uniform flow plate in the embodiment of the utility model;

[0023] Figure 6 The Figure 5 The local enlarged schematic diagram of B in the embodiment of the utility model;

[0024] Figure 7 The assembly explosion drawing of the furnace door base and the counterweight in the embodiment of the utility model;

[0025] Reference signs:

[0026] 1, boat carrying plate; 11, through hole; 12, recess; 13, nut;

[0027] 2, furnace door; 21, supporting leg; 22, threaded hole two; 23, fastening bolt two;

[0028] 3, furnace door base; 31, universal wheel; 32, pushing support rod; 33, positioning rod; 34, counterweight; 35, inserting rod;

[0029] 4, height increasing strip; 41, threaded rod; 42, clamping groove; 43, threaded hole one; 44, fastening bolt one;

[0030] 5, uniform flow plate; 51, long hole;

[0031] 6, supporting leg;

[0032] 7, cable-stayed supporting rod. DETAILED DESCRIPTION

[0033] In order to better understand the purpose, structure and function of the utility model, the technical scheme in the embodiment of the utility model will be described clearly and completely in combination with the drawings.

[0034] In the description of the utility model, it is understood that the orientation or position relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top" and "bottom" is based on the drawings. Figure 1The shown orientation or positional relationship is only for the convenience of describing the utility model and simplifying the description, and is not indicative or suggestive of the device or element indicated having a specific orientation, being constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0035] In an embodiment, refer to Figures 1 to 7 The embodiment discloses an ALD cantilever type in-out boat device, which comprises a boat loading plate 1, the boat loading plate 1 is a rectangular flat plate placed horizontally, one end of the boat loading plate 1 is fixedly connected with a furnace door 2, the furnace door 2 is a rectangular frame structure, the width of the furnace door 2 is the same as the width of the boat loading plate 1, the bottom of the furnace door 2 is provided with a supporting leg 21, the supporting leg 21 is movably connected with a furnace door base 3, the furnace door base 3 is used for supporting the boat loading plate 1 and the furnace door 2, universal wheels 31 are fixedly installed at the bottom of the furnace door base 3, the furnace door base 3 is conveniently pushed, and the boat loading plate 1 is sent into an ALD furnace pipe, a height increasing strip 4 is movably connected at the upper left and right sides of the boat loading plate 1, an aluminum boat is placed on the height increasing strip 4, the height of the height increasing strip 4 is adjusted, the aluminum boat is placed in the middle position of the ALD furnace pipe, the TOPCon crystalline silicon solar cell pieces placed in the aluminum boat are uniformly heated, a uniform flow plate 5 is movably connected at one end of the height increasing strip 4 close to the furnace door 2, the height of the uniform flow plate 5 is kept consistent with the aluminum boat placed on the height increasing strip 4, and the gas passing through the uniform flow plate 5 can uniformly flow through the aluminum boat.

[0036] A plurality of grooves 12 are arranged at the left and right sides of the boat loading plate 1, through holes 11 penetrating the upper and lower portions of the grooves 12 are arranged in the grooves 12, screw rods 41 matched with the through holes 11 are fixedly arranged at the bottom of the height increasing strip 4, nuts 13 matched with the screw rods 41 are arranged in the grooves 12, and the height of the height increasing strip 4 can be adjusted by screwing the nuts 13.

[0037] The boat loading plate 1 and the furnace door 2 are made of 316L stainless steel, have high strength and good corrosion resistance.

[0038] The supporting leg 21 and the bottom surface of the boat loading plate 1 are fixedly connected with a supporting leg 6, the supporting leg 6 is a rectangular plate with a trapezoidal longitudinal section, the two inclined surfaces of the trapezoid are respectively attached to the front vertical surface of the supporting leg 21 and the bottom surface of the boat loading plate 1, the supporting leg 6 is made of 316L stainless steel, has high strength and good corrosion resistance, and can be connected with the supporting leg 21 and the boat loading plate 1 made of 316L stainless steel by welding, so that the stability of the overall structure is improved.

[0039] The furnace door 2 and the top surface of the boat carrying plate 1 are fixedly connected with a diagonal pull support rod 7, the diagonal pull support rod 7 is a rectangular straight rod with a trapezoidal longitudinal section, two inclined surfaces of the trapezoid are respectively matched with the front vertical surface of the furnace door 2 and the top surface of the boat carrying plate 1, the diagonal pull support rod 7 is made of 316L stainless steel, has high strength and good corrosion resistance, and can be connected with the furnace door 2 and the boat carrying plate 1 made of 316L stainless steel by welding, thereby increasing the stability of the boat carrying plate 1.

[0040] The upper part of the pad strip 4 is provided with a clamping groove 42 matched with the flow uniformizing plate 5, a threaded hole 43 is arranged on one side of the clamping groove 42, a fastening bolt 44 is arranged in the threaded hole 43, the flow uniformizing plate 5 can be fixed on the pad strip 4 by screwing the fastening bolt 44, or the flow uniformizing plate 5 can be removed or the position of the flow uniformizing plate 5 on the pad strip 4 can be adjusted by loosening the fastening bolt 44.

[0041] The pad strip 4 is a long strip with a rectangular cross section, is made of aluminum alloy, has good heat conduction and corrosion resistance, and as a light metal, can reduce the weight borne by the boat carrying plate 1, so that the overall structure is more stable.

[0042] The flow uniformizing plate 5 is a rectangular plate made of aluminum alloy, is corrosion resistant, and as a light metal, can also reduce the weight borne by the boat carrying plate 1, so that the overall structure is more stable, a plurality of long holes 51 are linearly arranged on the flow uniformizing plate 5, and air flow can uniformly flow into the solar cell pieces placed in the aluminum boat through the long holes 51.

[0043] The foot 21 is a square tube, the upper surface of the furnace door base 3 is fixedly provided with a plug rod 35 matched with the foot 21, the foot 21 is sleeved on the plug rod 35, so that the height of the furnace door 2 can be adjusted, a threaded hole 22 is arranged on one side vertical wall of the foot 21, a fastening bolt 23 is arranged in the threaded hole 22, the position of the foot 21 is fixed by screwing the fastening bolt 23 to abut against the plug rod 35, the furnace door base 3 is provided with a pushing support rod 32, so that the operator can push the furnace door base 3 to send the boat carrying plate 1 into the ALD furnace pipe.

[0044] The furnace door base 3 is made of 304 stainless steel, has high strength and corrosion resistance, can cope with the environment outside the ALD furnace pipe, and is cheaper than 316L stainless steel, so that the equipment cost can be saved, the upper surface of the furnace door base 3 is provided with a positioning rod 33, a plurality of counterweight blocks 34 are sleeved on the positioning rod 33, the weight of the furnace door base 3 is increased, so that the boat carrying plate 1 is prevented from tilting forward due to excessive weight, and a handle is arranged on the counterweight block 34, so that the user can take and place the counterweight block 34 conveniently.

[0045] Working principle: before entering the ALD furnace, first put the TOPCon crystalline silicon solar cell into the aluminum boat, then place the aluminum boat on the pad strip 4, adjust the pad strip 4 to the appropriate height, make the aluminum boat in the middle position of the furnace tube, push the furnace door base 3, send the boat loading plate 1 into the ALD furnace, the boat loading plate 1 is fixedly connected with the furnace door 2, the furnace door 2 is connected with the furnace door base 3, and the support leg 21 is fixedly connected with the support leg 6 on the bottom surface of the boat loading plate 1 and the inclined pull support rod 7 is fixedly connected with the furnace door 2 and the top surface of the boat loading plate 1, forming a stable cantilever structure, canceling the rolling steel wheel arranged at the bottom of the boat loading plate 1, making the boat loading plate 1 not contact with the furnace tube wall, avoiding the problem that the metal powder pollutes the TOPCon crystalline silicon solar cell because of the friction between the rolling steel wheel and the furnace tube wall, causing EL black edge and dark piece.

[0046] The above is only the preferred specific implementation of the present application, but the protection scope of the present application is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. An ALD cantilevered in-out boat device, characterized by: Including the boat board (1), the boat board (1) is the rectangular flat that is placed transversely, one end of the boat board (1) is fixedly connected with the furnace door (2), the furnace door (2) is the rectangular frame structure, the bottom of the furnace door (2) is equipped with the supporting leg (21), the supporting leg (21) is movably connected with the furnace door base (3), the bottom of the furnace door base (3) is fixedly installed with the universal wheel (31), the left and right sides of the upper portion of the boat board (1) are movably connected with the pad height strip (4) respectively, the one end of the pad height strip (4) near the furnace door (2) is movably connected with the uniform flow plate (5).

2. The ALD cantilevered boat access device of claim 1, wherein, A plurality of recesses (12) are arranged on the left and right sides of the boat board (1), the recess (12) is provided with a through hole (11) penetrating the upper and lower portions of the recess (12), the bottom of the pad height strip (4) is fixedly provided with a threaded rod (41) matched with the through hole (11), and the recess (12) is provided with a nut (13) matched with the threaded rod (41).

3. The ALD cantilevered boat access device of claim 1, wherein, The boat board (1) and the furnace door (2) are made of 316L stainless steel.

4. The ALD cantilevered load / unload boat apparatus according to claim 3, wherein, The bottom surface of the supporting leg (21) and the boat board (1) are fixedly connected with the supporting leg (6), the supporting leg (6) is a rectangular plate with a trapezoidal longitudinal section, the two inclined surfaces of the trapezoid are respectively attached to the front vertical surface of the supporting leg (21) and the bottom surface of the boat board (1), and the supporting leg (6) is made of 316L stainless steel.

5. The ALD cantilevered load / unload boat apparatus according to claim 3, wherein, The top surface of the furnace door (2) and the boat board (1) are fixedly connected with the inclined pull support rod (7), the inclined pull support rod (7) is a rectangular straight rod with a trapezoidal longitudinal section, the two inclined surfaces of the trapezoid are respectively attached to the front vertical surface of the furnace door (2) and the top surface of the boat board (1), and the inclined pull support rod (7) is made of 316L stainless steel.

6. The ALD cantilevered boat access device of claim 1, wherein, The upper portion of the pad height strip (4) is provided with a clamping groove (42) matched with the uniform flow plate (5), one side of the clamping groove (42) is provided with a threaded through hole (43), and the threaded through hole (43) is provided with a fastening bolt (44).

7. The ALD boom loading and unloading apparatus of claim 6, wherein, The pad height strip (4) is a long strip with a rectangular cross section, and is made of aluminum alloy.

8. The ALD boom loading and unloading apparatus of claim 7, wherein, The uniform flow plate (5) is a rectangular plate made of aluminum alloy, and a plurality of long holes (51) are linearly arranged on the uniform flow plate (5).

9. The ALD boom loading and unloading apparatus of claim 1, wherein, The supporting leg (21) is a square tube, the upper surface of the furnace door base (3) is fixedly provided with a plug rod (35) matched with the supporting leg (21), one side of the supporting leg (21) is provided with a threaded through hole (22), the threaded through hole (22) is provided with a fastening bolt (23), and the furnace door base (3) is provided with a pushing support rod (32).

10. The ALD boom loading and unloading apparatus of claim 9, wherein, The furnace door base (3) is made of 304 stainless steel, the upper surface of the furnace door base (3) is provided with a positioning rod (33), and the positioning rod (33) is provided with a plurality of counterweight blocks (34).

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