Heightening and oxygen-reducing ring for czochralski single crystal furnace
By designing a Czochralski single crystal furnace with an added oxygen-reducing ring and utilizing the structural connection of insulation plates and support plates, the problem of oxygen diffusion during the single crystal silicon pulling process was solved, achieving optimized thermal energy management and structural stability, thereby improving the quality and production safety of single crystal silicon rods.
Patent Information
- Application Number
- CN202422424868.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-09
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2034-10-09
AI Technical Summary
During the single-crystal silicon pulling process, the rate at which oxygen atoms diffuse from the quartz crucible into the molten silicon increases with increasing temperature. Existing oxygen reduction methods do not concentrate heat sufficiently, resulting in excessive oxygen production and affecting the quality of the single crystal rod.
Design a height-reducing oxygen ring for a Czochralski single crystal furnace, comprising insulation board, support plate, groove, slot and other structures. The insulation effect is enhanced by the nested connection of the arc-shaped insulation board and the groove, and the stable fixation under high temperature and high pressure environment is ensured by the fasteners and disassembly ring.
It effectively reduces heat loss, improves process efficiency and consistency, enhances structural stability and safety, reduces equipment failure risk, and ensures the stability and reliability of deoxidation rings under high temperature and high pressure environments.
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Figure CN223561750U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field related to photovoltaic industry, concretely relates to a high straight pull single crystal furnace ring that reduces oxygen. BACKGROUND
[0002] With the development of photovoltaic industry, the monocrystalline silicon of solar cell is the leading product in the world at present, and the biggest advantage of monocrystalline silicon is high conversion efficiency and relatively low production cost, and to obtain high-quality monocrystalline silicon cell, the monocrystalline silicon rod produced in the front end needs to have high life, uniform resistivity and low oxygen content, in addition, with the increasing demand for N-type silicon wafer, the low oxygen requirement of N-type monocrystalline silicon wafer is relatively high, therefore, the demand for monocrystalline silicon with low oxygen content is also increasing.
[0003] But in the process of pulling monocrystalline silicon, oxygen atoms play a decisive role in the quality of monocrystalline rods, and the main source is the oxygen produced by quartz crucible at high temperature, which diffuses into the silicon liquid, and with the increase of temperature, the oxygen production rate also increases, and the main way to reduce oxygen at present is to reduce the radiation of heat to the bottom of the crucible, but the heat is not concentrated enough, and the oxygen production is still too much. UTILIZY MODEL CONTENT
[0004] The utility model discloses a kind of straight pull single crystal furnace ring that reduces oxygen, to solve the problem that oxygen atoms play a decisive role in the quality of monocrystalline rods in the process of pulling monocrystalline silicon, and the main source is the oxygen produced by quartz crucible at high temperature, which diffuses into the silicon liquid, and with the increase of temperature, the oxygen production rate also increases, and the main way to reduce oxygen at present is to reduce the radiation of heat to the bottom of the crucible, but the heat is not concentrated enough, and the oxygen production is still too much.
[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of straight pull single crystal furnace ring that reduces oxygen, including oxygen ring main part;
[0006] The upper support ring is arranged at the upper position of the oxygen ring main part, the lower support ring is arranged at the bottom position of the oxygen ring main part, and the clamping groove is formed in the left and right sides of the oxygen ring main part.
[0007] The heat preservation plate is arranged at the inner position of the oxygen ring main part, and the support plate is arranged at the inner side of the heat preservation plate.
[0008] Preferably, the embedding groove is arranged at the inner position of the oxygen ring main part, and the embedding groove is connected with the heat preservation plate.
[0009] Preferably, the insertion slot is arranged at the middle position of the inner side of the oxygen ring main part, and the insertion slot corresponds to the support plate.
[0010] Preferably, the heat preservation plate is in a circular arc structure, and the support plate is integrally connected with the heat preservation plate.
[0011] Preferably, a fixing member is arranged at an inner position of the oxygen reduction ring body, a dismounting ring is arranged at a top position of the fixing member, and a fixing plate is arranged at a bottom position of the dismounting ring.
[0012] Preferably, an installation groove is arranged at a top position of the upper support ring, a fixing groove is arranged at a top position of the heat preservation plate, the installation groove corresponds to the dismounting ring, and the heat preservation plate is fixedly connected with the oxygen reduction ring body through the fixing member.
[0013] Preferably, the oxygen reduction ring body is made of steel material, and the heat preservation plate is made of compressed asbestos board.
[0014] Compared with the prior art, the utility model provides a high oxygen reduction ring for a straight pulling single crystal furnace, which has the following beneficial effects:
[0015] 1. The circular arc structure of the heat preservation plate and the nesting connection of the heat preservation plate and the embedded groove ensure good heat preservation effect, the design effectively reduces the loss of heat energy, maintains the stability of the operating environment, helps to improve the efficiency and consistency of the process, the support plate is integrally connected with the heat preservation plate, the corresponding design of the insertion groove and the support plate enhances the structural stability of the oxygen reduction ring body, the connection mode ensures the reliability and durability in the high temperature and high pressure environment, reduces the damage risk caused by vibration or thermal expansion and cold contraction, the existence of the support plate not only strengthens the structure, but also provides additional security, which effectively prevents displacement or deformation of the oxygen reduction ring during use, reduces the risk of equipment failure or production interruption, and the heat preservation plate and the support plate inside the oxygen reduction ring body not only optimize the heat management and structural stability of the furnace environment, but also improve the safety and reliability of the operation.
[0016] 2. The setting of the fixing member, the dismounting ring, the fixing plate, the installation groove and the fixing groove makes the installation and dismounting of the oxygen reduction ring more convenient and efficient, and the operator can easily install and dismount the oxygen reduction ring without wasting too much time and human resources, the corresponding installation groove and dismounting ring and the fixing groove at the top of the heat preservation plate ensure that the heat preservation plate and the oxygen reduction ring body are fixedly connected through the fixing member, which ensures that the oxygen reduction ring is stably fixed in place under the high temperature and high pressure environment of the single crystal furnace and will not be loosened or displaced due to vibration or thermal expansion and cold contraction, the dismounting ring at the top of the fixing member and the fixing plate at the bottom improve the safety of the operation, the existence of the dismounting ring makes the operation safer when maintenance or replacement is needed, and the design of the fixing plate prevents the risk of accidental loosening or falling, effectively reducing the safety hazards in the operation of the equipment. BRIEF DESCRIPTION OF DRAWINGS
[0017] Figure 1 It is the structure schematic view of the utility model.
[0018] Figure 2 It is the structure schematic view of the utility model main body of oxygen ring.
[0019] Figure 3 It is the structure schematic view of the utility model insulation board.
[0020] Figure 4 It is the structure schematic view of the utility model fixed part.
[0021] In the drawing: 1, oxygen ring main body;2, lower support ring;3, clamping groove;4, insulation board;5, fixed part;6, upper support ring;7, installation slot;8, insertion slot;9, embedding slot;10, fixed slot;11, support plate;12, dismounting ring;13, fixed plate. Specific implementation
[0022] The technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model, and obviously, the described embodiments are only a part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor are within the protection scope of the utility model.
[0023] The utility model provides a kind of heightening oxygen ring of direct pulling single crystal furnace as shown in Figures 1-4 Including oxygen ring main body 1;
[0024] Upper support ring 6 is provided at the position of oxygen ring main body 1 top, lower support ring 2 is provided at the position of oxygen ring main body 1 bottom, and clamping groove 3 is respectively provided at the left and right sides of oxygen ring main body 1.
[0025] Insulation board 4 is provided at the position inside oxygen ring main body 1, and support plate 11 is provided at the position inside insulation board 4.
[0026] Embedding slot 9 is provided at the position inside oxygen ring main body 1, and embedding slot 9 is nestedly connected with insulation board 4.
[0027] Insertion slot 8 is provided at the middle position inside oxygen ring main body 1, and insertion slot 8 corresponds with support plate 11.
[0028] Insulation board 4 is of arc structure, and support plate 11 is integrally connected with insulation board 4.
[0029] Fixed part 5 is provided at the position inside oxygen ring main body 1, dismounting ring 12 is provided at the top position of fixed part 5, and fixed plate 13 is provided at the bottom position of dismounting ring 12.
[0030] An installation slot 7 is provided at the top of the upper support ring 6, and a fixing slot 10 is provided at the top of the heat preservation plate 4, the installation slot 7 corresponds to the dismounting ring 12, and the heat preservation plate 4 is fixedly connected to the oxygen reduction ring body 1 through the fixing member 5.
[0031] The oxygen reduction ring body 1 is made of steel material, and the heat preservation plate 4 is made of pressed asbestos board.
[0032] In this embodiment, the specific implementation steps of the high oxygen reduction ring of the Czochralski single crystal furnace are as follows: placing the oxygen reduction ring body 1 at the desired position, ensuring that the upper support ring 6 and the lower support ring 2 are correctly installed above and at the bottom position, the support ring will ensure the stable support and positioning of the oxygen reduction ring body 1, placing the circular arc-shaped heat preservation plate 4 in the embedding slot 9 inside the oxygen reduction ring body 1, ensuring the nesting connection of the heat preservation plate 4 and the embedding slot 9, the inner side of the heat preservation plate 4 will be provided with support plates 11, which are integrally connected with the heat preservation plate 4 to provide additional structural support, installing the fixing member 5 at the appropriate position inside the oxygen reduction ring body 1, ensuring that they are correctly fixed on the main body, the fixing member 5 is provided with a dismounting ring 12 at the top and a fixing plate 13 at the bottom, a part of the oxygen reduction ring is clamped between the lower and middle heat preservation plates, under the premise of not hindering the crucible stroke, by raising the height of the oxygen reduction ring, the heat radiation downward of the oxygen reduction ring is reduced.
[0033] As shown in Figures 1-3 , the heat preservation plate 4 is arranged at the inner position of the oxygen reduction ring body 1, the support plates 11 are arranged at the inner side position of the heat preservation plate 4, the embedding slot 9 is arranged at the inner position of the oxygen reduction ring body 1, the embedding slot 9 is nested with the heat preservation plate 4, the insertion slot 8 is arranged at the middle inner position of the oxygen reduction ring body 1, the insertion slot 8 corresponds to the support plate 11, the heat preservation plate 4 is of a circular arc structure, and the support plate 11 is integrally connected with the heat preservation plate 4.
[0034] Preferably, the circular arc structure of the heat preservation plate 4 and the nesting connection with the embedding slot 9 ensure good heat preservation effect, this design effectively reduces the loss of heat energy, maintains the stability of the operating environment, helps to improve the efficiency and consistency of the process, the support plate 11 is integrally connected with the heat preservation plate 4, the corresponding design of the insertion slot 8 and the support plate enhances the structural stability of the oxygen reduction ring body, this connection mode ensures the reliability and durability in high temperature and high pressure environment, at the same time, reduces the risk of damage caused by vibration or thermal expansion and cold contraction, the existence of the support plate not only strengthens the structure, but also provides additional security guarantee, they effectively prevent the displacement or deformation of the oxygen reduction ring during use, reduce the risk of equipment failure or production interruption, the design of the heat preservation plate and the support plate inside the oxygen reduction ring body 1 not only optimizes the heat management and structural stability of the furnace environment, but also improves the safety and reliability of the operation.
[0035] As shown in Figure 1 and Figure 4As shown, the fixed part 5 is arranged at the inner position of the oxygen-reducing ring body 1, the dismounting ring 12 is arranged at the top position of the fixed part 5, the fixed plate 13 is arranged at the bottom position of the dismounting ring 12, the mounting groove 7 is arranged at the top position of the upper supporting ring 6, the fixed groove 10 is arranged at the top position of the heat preservation plate 4, the mounting groove 7 corresponds to the dismounting ring 12, and the heat preservation plate 4 is fixedly connected with the oxygen-reducing ring body 1 through the fixed part 5.
[0036] Preferably, the fixed part 5, the dismounting ring 12 and the fixed plate 13 make the installation and dismounting of the oxygen-reducing ring more convenient and efficient, and the operator can easily install and dismount the oxygen-reducing ring without wasting too much time and human resources, the corresponding mounting groove 7 and the dismounting ring 12, and the fixed groove 10 at the top of the heat preservation plate 4, the heat preservation plate is firmly connected with the oxygen-reducing ring body 1 through the fixed part 5, which ensures that the oxygen-reducing ring can be stably fixed in position under the high temperature and high pressure environment of the single crystal furnace, and will not be loose or displaced due to vibration or thermal expansion and contraction, the dismounting ring 12 arranged at the top of the fixed part 5 and the fixed plate 13 at the bottom improve the safety of operation, the existence of the dismounting ring 12 makes the operation safer when maintenance or replacement is needed, and the design of the fixed plate 13 prevents the risk of accidental loosening or falling off, effectively reducing the safety hazards in the operation of the equipment.
[0037] As shown in the drawings, Figures 1-4 The oxygen-reducing ring body 1 is made of steel material, and the heat preservation plate 4 is made of pressed cotton board.
[0038] Optionally, the oxygen-reducing ring body 1 made of steel material has excellent high temperature resistance, can maintain stable structure and performance under the high temperature operating environment of the single crystal furnace, the heat preservation plate 4 made of pressed cotton board has good thermal stability, can effectively reduce heat loss, maintain stable temperature inside the single crystal furnace, and is conducive to process control and product quality stability.
[0039] Finally, it should be noted that: the above only describes preferred embodiments of the present application, and is not intended to limit the present application, although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application, shall be included in the protection scope of the present application.
Claims
1. A vertical single crystal furnace is added to the oxygen ring, comprising oxygen ring body (1); The upper support ring (6) is arranged at the upper position of the oxygen ring body (1), the lower support ring (2) is arranged at the bottom position of the oxygen ring body (1), and the clamping groove (3) is arranged at the left and right sides of the oxygen ring body (1) respectively; characterized in that The heat preservation plate (4) is arranged at the inner position of the oxygen ring body (1), the supporting plate (11) is arranged at the inner side of the heat preservation plate (4), the embedding groove (9) is arranged at the inner position of the oxygen ring body (1), the embedding groove (9) is nested with the heat preservation plate (4), and the insertion groove (8) is arranged at the middle position of the inner side of the oxygen ring body (1). The insertion groove (8) corresponds to the supporting plate (11).
2. The oxygen-reducing ring for a Czochralski furnace according to claim 1, characterized in that: The heat preservation plate (4) is a circular arc structure, and the supporting plate (11) is integrally connected with the heat preservation plate (4).
3. The oxygen-reducing ring of claim 1, wherein: The fixing part (5) is arranged at the inner position of the oxygen ring body (1), the dismounting ring (12) is arranged at the top position of the fixing part (5), and the fixing plate (13) is arranged at the bottom position of the dismounting ring (12).
4. The oxygen-reducing ring of claim 3, wherein: The mounting groove (7) is arranged at the top position of the upper support ring (6), the fixing groove (10) is arranged at the top position of the heat preservation plate (4), the mounting groove (7) corresponds to the dismounting ring (12), and the heat preservation plate (4) is fixedly connected with the oxygen ring body (1) through the fixing part (5).
5. The oxygen-reducing ring of claim 1, wherein: The oxygen ring body (1) is made of steel material, and the heat preservation plate (4) is made of compressed asbestos board.