Lubricating system and cleaning equipment

Abstract

The utility model discloses a lubricating system and cleaning equipment, and belongs to the technical field of lubricating systems. The lubricating system comprises an oil way distributor, the oil way distributor is provided with a regulating valve and an outlet, and the regulating valve and the outlet are distributed on the two sides of the oil way distributor; the joint is connected with the outlet; the connecting pipe is located on the side, away from the oil way distributor, of the connector and connected with the oil way distributor through the connector. By adjusting the adjusting valve of the oil way distributor, a plurality of connecting pipes with different lengths can fill lubricating oil into a plurality of areas at the same time, batch filling is not needed, omission is avoided, and the maintenance accuracy is improved. According to the lubricating system, the moving mechanism and the sliding mechanism can be lubricated in a narrow space, other parts do not need to be dismantled, maintenance is more convenient, maintenance time is shortened, working efficiency is improved, lubricating oil can enter the moving mechanism and the sliding mechanism, lubricating is more uniform, and the lubricating effect is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of lubricating system and cleaning equipment, belong to lubricating system technical field. BACKGROUND

[0002] In the semiconductor field, cleaning equipment is essential, mainly used to remove various impurities that may exist in the process of silicon wafer manufacturing, wafer manufacturing and packaging testing, to avoid these impurities affecting the yield of chips and product performance. In these cleaning equipment, to achieve the transmission and guidance of the equipment, a lead screw nut and a slider are usually provided in the equipment. However, during use, the lead screw nut and the slider need to be well lubricated to ensure smooth operation, reduce wear and prolong service life.

[0003] Currently, in the prior art, when maintaining the lead screw nut and the slider, the manual application of lubricating oil is usually adopted. Since the lead screw nut and the slider are installed inside the equipment, and the space at the installation position is narrow, a large number of components need to be removed before the lubricating oil can be applied, increasing the difficulty of maintenance and prolonging the working time. Moreover, the manual application method may result in uneven application or application only on the surface of the lead screw nut and the slider, causing insufficient lubrication in some areas and affecting the lubrication effect. In addition, when there are many areas to be applied, the problem of missed application may also occur. SUMMARY

[0004] The utility model provides a kind of lubricating system and cleaning equipment, to solve the problem that the space at the installation position of the lead screw nut and the slider is narrow, a large number of components need to be removed before the lubricating oil can be applied, causing difficulty in maintenance, prolonging the working time of workers, and uneven application or missed application, causing insufficient lubrication in some areas and affecting the lubrication effect.

[0005] The utility model is implemented by the following technical solutions:

[0006] In a first aspect, the utility model provides a kind of lubricating system, comprising:

[0007] An oil path distributor is provided with an adjusting valve and an outlet, and the adjusting valve and the outlet are distributed on both sides of the oil path distributor;

[0008] A joint is connected with the outlet;

[0009] A connecting pipe is located on the side of the joint away from the oil path distributor and is connected with the oil path distributor through the joint.

[0010] In an embodiment of the utility model, the oil path distributor is further provided with an inlet. The inlet is used to supplement lubricating oil into the oil path distributor, and without removing other components, the function of lubricating the moving mechanism and the sliding mechanism can be completed, improving the convenience of equipment maintenance.

[0011] In an embodiment of the utility model, still include the oil pipe lining, the oil pipe lining install in the end of connecting pipe. The oil pipe lining can make the joint and connecting pipe connection more firm, play the role of locking connecting pipe.

[0012] In an embodiment of the utility model, the connecting pipe is hose. It is convenient to bend, pass through narrow space, make the oil way distributor and mobile mechanism and sliding mechanism connect more convenient.

[0013] In an embodiment of the utility model, the number of connecting pipe is same with the number of outlet.

[0014] In an embodiment of the utility model, the joint is the sleeve type oil pipe joint. It can avoid the problem of loosing of joint in the use process under the influence of pipe internal pressure.

[0015] Secondly, the utility model provides a kind of cleaning equipment, including the lubricating system, the cleaning equipment further include mounting plate, mobile mechanism and sliding mechanism, the mobile mechanism and the sliding mechanism are all installed on the mounting plate, and the oil way distributor is connected with the mounting plate.

[0016] In an embodiment of the utility model, the mobile mechanism is provided with joint, and the connecting pipe is connected with the mobile mechanism by the joint.

[0017] In an embodiment of the utility model, the sliding mechanism includes slider and guide rail, the slider is slidably connected with the guide rail, the slider is provided with the joint, and the slider is connected with the connecting pipe by the joint.

[0018] In an embodiment of the utility model, the number of outlet is adapted to the number of mobile mechanism and slider.

[0019] Beneficial effects

[0020] The oil way distributor of the lubricating system has multiple outlets, and the multiple outlets are connected with the mobile mechanism and the sliding mechanism by multiple connecting pipes. Lubricating oil is injected into the oil way distributor to lubricate the mobile mechanism and the sliding mechanism. Each outlet is provided with an adjusting valve. By adjusting the adjusting valve, multiple connecting pipes of different lengths can simultaneously lubricate multiple areas without batch lubrication, and no area is missed, improving the accuracy of maintenance. The lubricating system can lubricate the mobile mechanism and the sliding mechanism in a narrow space without removing other parts, making maintenance more convenient, shortening the maintenance time, improving the work efficiency, and allowing lubricating oil to enter the interior of the mobile mechanism and the sliding mechanism, making lubrication more uniform and improving the lubrication effect. BRIEF DESCRIPTION OF DRAWINGS

[0021] Fig. 1 A front view of the lubricating system provided by the present application.

[0022] Fig. 2 A rear view of the lubricating system provided by the present application.

[0023] Fig. 3 A sectional view of the joint and the oil pipe lining cooperation provided by the present application.

[0024] In the figure: 1, mounting plate; 2, moving mechanism; 3, joint; 4, oil path distributor; 41, inlet; 42, regulating valve; 43, outlet; 5, sliding mechanism; 51, sliding block; 52, guide rail; 6, connecting pipe; 7, oil pipe lining. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0026] In the present application, unless explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0027] In the present application, unless explicitly specified and limited, the first feature "on" or "below" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0028] As Figs. 1 to 3As shown, the present application provides a lubricating system for lubricating the moving mechanism 2 and the sliding mechanism 5. The lubricating system comprises an oil path distributor 4, a connecting pipe 6 and a joint 3. The oil path distributor 4 is used to control the flow direction and distribution of the lubricating oil in the pipeline. The joint 3 is installed at one end of the oil path distributor 4, and the connecting pipe 6 is located on the side of the joint 3 away from the oil path distributor 4 and is connected to the oil path distributor 4 through the joint 3. The end of the connecting pipe 6 away from the oil path distributor 4 is connected to the moving mechanism 2 and the sliding mechanism 5 through the joint 3.

[0029] Further, in some embodiments, the oil path distributor 4 is provided with an inlet 41, an adjusting valve 42 and an outlet 43. The inlet 41 is installed on one side of the oil path distributor 4, and only one inlet 41 is provided on one oil path distributor 4, which is used to supplement the lubricating oil into the oil path distributor 4. When adding lubricating oil, only the inlet 41 needs to be added with lubricating oil, without the need to disassemble other parts, so as to complete the function of adding lubricating oil to the moving mechanism 2 and the sliding mechanism 5, thereby improving the convenience of equipment maintenance. The oil path distributor 4 is provided with a plurality of outlets 43, which are perpendicular to the inlet 41. The plurality of outlets 43 can be arranged side by side on the same side of the oil path distributor 4, or can be arranged on different sides. The outlet 43 is connected to the connecting pipe 6 through the joint 3, which is used to distribute the lubricating oil supplemented by the inlet 41 to a plurality of filling points through the connecting pipe 6, so as to achieve the purpose of simultaneously adding lubricating oil to a plurality of filling points, thereby avoiding the problem of omission and effectively improving the accuracy of filling. The adjusting valve 42 is located on the opposite side of the outlet 43, and one adjusting valve 42 is arranged corresponding to each outlet 43. The adjusting valve 42 is used to adjust the oil output of the lubricating oil discharged from each outlet.

[0030] Further, in some embodiments, the connecting pipe 6 comprises a plurality of connecting pipes, which are respectively connected to the outlets 43 of the oil path distributor 4 and the moving mechanism 2 and the sliding mechanism 5 through the joint 3, so as to transport the lubricating oil supplemented from the inlet 41 to the moving mechanism 2 and the sliding mechanism 5. Specifically, in this embodiment, the connecting pipe 6 is provided with 5 branches, and the 5 branches respectively lead to 5 filling points. By adjusting the adjusting valve 42, it is ensured that the plurality of connecting pipes 6 of different lengths can simultaneously add lubricating oil to the 5 filling points, without the need for batch filling, thereby improving the accuracy of maintenance.

[0031] As Fig. 3 Further, in some embodiments, the end of the connecting pipe 6 is provided with an oil pipe lining 7, which can make the joint 3 and the connecting pipe 6 more firmly connected, thereby playing a role of locking the connecting pipe 6.

[0032] Optionally, in this embodiment, the connecting pipe 6 adopts a flexible pipe, which is convenient to bend and pass through narrow spaces, so that the connection between the oil path distributor 4 and the moving mechanism 2 and the sliding mechanism 5 is more convenient.

[0033] Optionally, the joint 3 is a box-type tubing joint, and the joint is connected more firmly by using the box-type tubing joint, especially in the embodiment, the lubricating oil is solid lubricating oil, and the joint can avoid loosening caused by the pressure in the pipe during use.

[0034] In addition, the application further provides a cleaning device, which comprises the lubricating system, and in some embodiments, the cleaning device further comprises a mounting plate 1, a moving mechanism 2 and a sliding mechanism 5, wherein the moving mechanism 2 and the sliding mechanism 5 are fixedly connected with the mounting plate 1, the moving mechanism 2 is installed at the middle position of the mounting plate 1, the sliding mechanism 5 is symmetrically distributed on both sides of the moving mechanism 2, and the moving mechanism 2 and the sliding mechanism 5 can drive the mounting plate 1 to move together. The oil way distributor 4 is installed on the mounting plate 1 and located on the opposite side of the moving mechanism 2 and the sliding mechanism 5, and can move together with the mounting plate 1. The moving mechanism 2 and the sliding mechanism 5 are both provided with the joint 3, and the oil way distributor 4 is connected with the joints 3 on the moving mechanism 2 and the sliding mechanism 5 through the connecting pipe 6, so as to realize the purpose of filling the moving mechanism 2 and the sliding mechanism 5 with lubricating oil by the oil way distributor 4.

[0035] Further, in some embodiments, the sliding mechanism 5 comprises a sliding block 51 and a guide rail 52, the number of the guide rails 52 is two, which are symmetrically distributed on both sides of the moving mechanism 2, the number of the sliding blocks 51 is four, which are installed on the guide rails 52, two sliding blocks 51 are installed on each guide rail 52, one side of the sliding block 51 is connected with the mounting plate 1, and the mounting plate 1 and the oil way distributor 4 can move along the guide rail 52. One side of the sliding block 51 is provided with the joint 3, and the sliding block 51 is connected with the connecting pipe 6 through the joint 3, so as to facilitate the filling of the lubricating oil into the sliding block 51, and make the sliding mechanism 5 fully lubricated.

[0036] The working principle of the utility model is: before first use, lubricating oil is filled into the oil way distributor 4 first, the lubricating oil flows into the connecting pipe 6 from the outlet 43 after being adjusted by the adjusting valve 42 of the oil way distributor 4, and the joint 3 in the lubricating system is detected for loosening, and the connecting pipe 6 is detected for rupture, so as to avoid affecting the later use. After confirming that the lubricating system is correct, the oil way distributor 4 is installed on the mounting plate 1, and the connecting pipe 6 is connected with the joints 3 of the moving mechanism 2 and the sliding mechanism 5. When in use, the lubricating oil is injected into the inlet 41, the lubricating oil is distributed into the connecting pipes 6 by the oil way distributor 4, and then is injected into the moving mechanism 2 and the sliding mechanism 5 through the connecting pipes 6, so as to realize the lubrication of the moving mechanism 2 and the sliding mechanism 5. By using the above lubricating system, the moving mechanism 2 and the sliding mechanism 5 can be lubricated in a narrow space, without the need of disassembling parts, so that the maintenance is more convenient, the maintenance time is shortened, the working efficiency is improved, the lubricating oil can enter the moving mechanism 2 and the sliding mechanism 5, the lubrication is more uniform, and the lubricating effect is improved.

[0037] Any combination of the technical features in the above embodiments can be made, and for the sake of brevity, not all possible combinations are described above. However, any combination of features described above is deemed to be within the scope of the present application, as long as such a combination is not obviously contradictory.

[0038] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the present application. It should be pointed out that, for ordinary skilled persons in the art, some modifications and improvements can be made without departing from the concept of the present application, and these modifications and improvements are within the protection scope of the present application.

[0039] The principles and implementation manners of the present application are described by using specific embodiments in the present application, and the above embodiments are only used to help understand the method and core idea of the present application. It should be pointed out that, for ordinary skilled persons in the art, some modifications and improvements can be made without departing from the principles of the present application, and these modifications and improvements also fall within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A lubrication system characterized in that, Comprising: an oil line distributor (4) provided with regulating valves (42) and outlets (43) distributed on both sides of the oil line distributor (4); a joint (3) connected with the outlets (43); a connecting pipe (6) located on the side of the joint (3) away from the oil line distributor (4) and connected with the oil line distributor (4) through the joint (3).

2. A lubrication system according to claim 1, wherein The oil line distributor (4) is further provided with an inlet (41).

3. A lubrication system according to claim 1, wherein Further comprising an oil pipe lining (7) installed at the end of the connecting pipe (6).

4. A lubrication system according to claim 3, wherein The connecting pipe (6) is a hose.

5. A lubrication system according to claim 4, wherein The number of the connecting pipes (6) is the same as the number of the outlets (43).

6. A lubrication system according to claim 1, wherein The joint (3) is a snap-on oil pipe joint.

7. A cleaning apparatus characterized by, Comprising the lubricating system of any one of claims 1-6, the cleaning device further comprises a mounting plate (1), a moving mechanism (2) and a sliding mechanism (5), the moving mechanism (2) and the sliding mechanism (5) are both mounted on the mounting plate (1), and the oil line distributor (4) is connected with the mounting plate (1).

8. The cleaning apparatus of claim 7, wherein, The moving mechanism (2) is provided with a joint (3), and the connecting pipe (6) is connected with the moving mechanism (2) through the joint (3).

9. The cleaning apparatus of claim 8, wherein, The sliding mechanism (5) comprises a sliding block (51) and a guide rail (52), the sliding block (51) is slidingly connected with the guide rail (52), the sliding block (51) is provided with the joint (3), and the sliding block (51) is connected with the connecting pipe (6) through the joint (3).

10. The cleaning apparatus of claim 9, wherein, The number of the outlets (43) is adapted to the number of the moving mechanism (2) and the sliding block (51).

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