Electric valve unit

Abstract

A flow rate control valve (22) is provided with: a first valve body (44) which faces a first valve seat (40) and which restricts the flow rate of a chemical solution through a gap formed between the first valve body (44) and the first valve seat (40), and a second valve body (44) which restricts the flow rate of the chemical solution through the gap formed between the first valve body (44) and the first valve seat (40); a first shaft member (46) that supports the first valve body (44) and is displaced in the second direction; and a first electric motor (28) for driving the first shaft member (46), the first shaft member (46) being separated from the first electric motor (28) and displacing the first valve body (44) toward the first valve seat (40) when air pressure is supplied when a power failure occurs.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of electric valve unit with flow regulating valve. BACKGROUND

[0002] For example, in the manufacture of semiconductor devices and liquid crystal display devices, substrates are microfabricated. In microfabrication, a valve unit is used to supply etching liquid or photoresist liquid and other treatment liquids. As a valve unit for supplying liquid medicine, a valve unit is known, for example, as in Japanese Patent No. 7175366, which has a flow regulating valve that regulates the flow of liquid and a back suction valve that has a back suction function.

[0003] The valve unit of Japanese Patent No. 7175366 drives the flow regulating valve by compressed air. The opening of the flow regulating valve is adjusted by a screw mechanism.

[0004] The valve unit of Japanese Patent No. 7175366 requires manual operation by an operator in the adjustment of the flow regulating valve. The adjustment of the flow regulating valve is difficult and requires high skills and experience. Therefore, to make the adjustment of the valve unit easy, it is considered to motorize the valve unit and drive the flow regulating valve by a stepper motor.

[0005] However, if the flow regulating valve is motorized, in the case where the supply of power is stopped for some reason in the open state of the valve, the problem that the supply of liquid medicine cannot be stopped occurs. SUMMARY

[0006] The purpose of the present utility model is to solve the above technical problems.

[0007] One aspect of the following utility model is an electric valve unit having a flow regulating valve, wherein the flow regulating valve comprises: a first valve chamber communicating with an inlet flow path; a first valve seat formed in the first valve chamber and having an opening portion of a first flow path; a first valve core opposing the first valve seat and regulating the flow of liquid by forming a gap between the first valve core and the first valve seat; a first shaft member supporting the first valve core and displacing in a second direction; and a first motor driving the first shaft member, the first shaft member generating a thrust toward the first valve seat in the second direction by air pressure, thereby causing the first valve core to abut against the first valve seat.

[0008] The electric valve unit of the above aspect can stop the supply of liquid by closing the flow regulating valve by air pressure when the supply of power is stopped.

[0009] The above objects, features, and advantages will be easily understood from the following description of the embodiments with reference to the attached drawings. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 is a diagram showing a configuration example of a liquid supply system.

[0011] Figure 2 is a sectional view of the electric valve unit of Figure 1

[0012] Figure 3A is a partial enlarged sectional view of the flow regulating valve of Figure 2 Figure 3B is a partial enlarged sectional view of the back suction valve of Figure 2

[0013] Figure 4A is a sectional view of the flow regulating valve in an open position, Figure 4B is an action explanatory diagram of the flow regulating valve at the time of air pressure supply.

[0014] Figure 5A is a sectional view of the flow regulating valve in an open position according to the second embodiment, Figure 5B Figure 5A is an action explanatory diagram of the flow regulating valve of

[0015] Figure 6A is a sectional view of the flow regulating valve in an open position according to the third embodiment, Figure 6B Figure 6A is a sectional view at the VIB-VIB position of

[0016] Figure 7 Figure 6A is an action explanatory diagram of the flow regulating valve of

[0017] Figure 8A is a sectional view of the flow regulating valve in an open position according to the fourth embodiment, Figure 8B Figure 8A is a sectional view at the VIIIB-VIIIB position of

[0018] Figure 9 is an action explanatory diagram of the flow regulating valve of Figure 8A

[0019] Figure 10A is a sectional view of the flow regulating valve in an open position according to the fifth embodiment, Figure 10B Figure 10A is an action explanatory diagram of the flow regulating valve of DETAILED DESCRIPTION

[0020] (First Embodiment)

[0021] ​​​​​​​​​The electric valve unit 10 involved in this embodiment is used as an example for... Figure 1 The illustrated liquid supply system 12 includes a liquid tank 14, a collection tank 16, a distributor pump 18, an electric valve unit 10, a nozzle 20, a control circuit 21, and a gas supply source 45.

[0022] The medicine tank 14 stores the medicine solution. For example, nitrogen gas is supplied to the medicine tank 14, and the medicine solution is transported to the collection tank 16 by gas pressure. The collection tank 16 removes air bubbles from the medicine solution and stores a predetermined amount of medicine solution. A distributor pump 18 is connected downstream of the collection tank 16. The distributor pump 18 draws medicine solution from the collection tank 16 and delivers the medicine solution toward the nozzle 20. An electric valve unit 10 is provided in the medicine solution supply flow path 18a connecting the distributor pump 18 and the nozzle 20.

[0023] As an example, the gas supply source 45 has a accumulator tank and a valve that opens during a power outage. When the power supply to the liquid medicine supply system 12 is cut off, the valve of the gas supply source 45 opens, supplying compressed gas stored in the accumulator tank to the electric valve unit 10.

[0024] The control circuit 21 includes, for example, a processor and a memory that stores commands executed by the processor. The control circuit 21 controls the operation of various parts of the liquid supply system 12 and the operation of the electric valve unit 10 by executing the commands stored in the memory through the processor.

[0025] The electric valve unit 10 is, for example, an integrated assembly of a flow control valve 22 and a backflow valve 24. In the electric valve unit 10, the flow control valve 22 regulates the supply and stop of the medicine solution and the flow rate of the medicine solution. Additionally, the backflow valve 24 performs a backflow action to suction back any medicine solution remaining at the tip of the nozzle 20 after the medicine solution supply stops. In the medicine solution supply system 12, the electric valve unit 10 correctly regulates the amount of medicine solution supplied. The structure of each part of the electric valve unit 10 will be described below.

[0026] In the following description, to illustrate the positional relationship and operation of the various parts of the electric valve unit 10, as follows: Figure 2 As shown, the terms "first direction" and "second direction" are used. The first direction and the second direction are orthogonal to each other. The first direction is the direction in which the inlet port 34 and outlet port 36 of the liquid are configured, and it is approximately consistent with the direction of liquid flow. The second direction is orthogonal to the first direction and is approximately consistent with the displacement direction of the first valve core 44. In addition, one side of the second direction is also referred to as downward, below, or lower side, and the other side of the second direction is also referred to as above or upper side. Furthermore, the terms "upper" and "lower" in this specification basically refer to the arrangement relationship or movement direction of the internal components of the electric valve unit 10, and do not limit the arrangement direction of the electric valve unit 10.

[0027] likeFigure 2 As shown in FIG. 1, the electric valve unit 10 has a main body portion 26 that houses the flow rate regulating valve 22 and the back suction valve 24, a drive portion 32 that houses the first electric motor 28 and the second electric motor 30, and a gas flow path member 33. The gas flow path member 33 is a plate-shaped member disposed between the main body portion 26 and the drive portion 32. The gas flow path member 33 has a gas flow path 33a through which compressed gas supplied at the time of a power failure passes.

[0028] The main body portion 26 has an inlet port 34 and an outlet port 36 disposed along a first direction. The inlet port 34 is open at a first end portion 26a of the main body portion 26 in the first direction. A liquid tube extending from the dispenser pump 18 (refer to FIG. 1) is connected to the inlet port 34. The inlet port 34 introduces liquid into the electric valve unit 10. The outlet port 36 is open at a second end portion 26b of the main body portion 26 in the first direction. The outlet port 36 discharges liquid from the electric valve unit 10. A liquid tube connecting the nozzle 20 (refer to FIG. 1) and the electric valve unit 10 is connected to the outlet port 36. Figure 1 Figure 1

[0029] The main body portion 26 has the flow rate regulating valve 22 and the back suction valve 24 between the inlet port 34 and the outlet port 36. The flow rate regulating valve 22 is disposed adjacent to the inlet port 34, and the back suction valve 24 is disposed adjacent to the outlet port 36.

[0030] As shown in FIG. 2, the flow rate regulating valve 22 has a first valve chamber 38, a first valve seat 40, a first cylinder chamber 42, a first valve core 44, a first shaft member 46, and a first screw mechanism 48. The first valve chamber 38 is formed in the interior of the main body portion 26 near the lower end thereof in the second direction. An opening communicating with an inlet flow path 54 is provided at the lower end portion of the first valve chamber 38. The inlet flow path 54 is a flow path extending from the inlet port 34 in the first direction, and communicates the inlet port 34 with the first valve chamber 38. Figure 3A

[0031] The first valve seat 40 is provided to the first valve chamber 38. The first valve seat 40 has a cylindrical shape that protrudes relatively short toward the upper side from the lower end of the first valve chamber 38. A first flow path 56 is formed at the center portion of the first valve seat 40. A first opening portion 56a of the first flow path 56 is formed at the upper end of the first valve seat 40. The first flow path 56 is bent in an L shape in the interior of the main body portion 26, and extends in the first direction toward the outlet port 36. The first flow path 56 communicates the first valve chamber 38 with a second valve chamber 64 of the back suction valve 24 (refer to FIG. 3). Figure 2

[0032] ​​​​A first cylinder chamber 42 is formed above the first valve chamber 38. The first cylinder chamber 42 extends in the second direction inside the main body portion 26, and is open at the upper portion 26c of the main body portion 26. The first cylinder chamber 42 houses the first shaft member 46 so as to be displaceable in the second direction.

[0033] A gas flow path member 33 is disposed above the main body portion 26. The gas flow path member 33 has a first through-hole 33b that communicates with the upper portion of the first cylinder chamber 42. A gas flow path 33a of the gas flow path member 33 communicates with the first cylinder chamber 42 through the first through-hole 33b.

[0034] A first valve core 44 is disposed between the first valve chamber 38 and the first cylinder chamber 42. The first valve core 44 is formed of an elastic material such as rubber. The first valve core 44 has a shaft portion 44a and a diaphragm 44b. The shaft portion 44a is located at the center portion of the first valve core 44, and extends in a rod shape in the second direction. The shaft portion 44a, when depressed downward, abuts against the first valve seat 40 to liquid-tightly close the first opening portion 56a. When the shaft portion 44a is separated from the first valve seat 40, a liquid medicine corresponding to the flow rate of the gap between the shaft portion 44a and the first valve seat 40 flows from the first valve chamber 38 toward the first flow path 56.

[0035] The diaphragm 44b covers the upper portion of the first valve chamber 38, and separates the first valve chamber 38 and the first cylinder chamber 42. The diaphragm 44b prevents leakage of the liquid medicine to the first cylinder chamber 42.

[0036] The first shaft member 46 supports the first valve core 44 so as to displace the first valve core 44 in the second direction. The first shaft member 46 has a first retainer portion 46a and a first piston portion 46b. The first retainer portion 46a is located at the lower portion of the first shaft member 46, and retains the shaft portion 44a of the first valve core 44. The first piston portion 46b is located above the first retainer portion 46a, and is joined to the first retainer portion 46a.

[0037] The first piston portion 46b is in airtight contact with the inner wall 42c of the first cylinder chamber 42, and slides on the inner wall 42c of the first cylinder chamber 42. The first piston portion 46b divides the first cylinder chamber 42 into a first empty chamber 42a on the upper side and a second empty chamber 42b on the lower side. The first empty chamber 42a communicates with the gas flow path 33a, and the second empty chamber 42b is open to the atmosphere through a not-illustrated air passage.

[0038] The first piston portion 46b has a first housing chamber 46c that houses the first screw mechanism 48 at the center portion thereof. The first housing chamber 46c is a substantially cylindrical empty chamber. An upper end wall 46d is formed at the upper end of the first housing chamber 46c, and a lower end wall 46e is formed at the lower end. The surfaces of the upper end wall 46d and the lower end wall 46e are smoothly formed.

[0039] The first screw mechanism 48 has an internally threaded portion 58 and a threaded rod 60. The internally threaded portion 58 is formed in a cylindrical shape by a member capable of elastically deforming. A thread groove is formed in an inner peripheral portion 58c of the internally threaded portion 58, and engages with a thread formed in an outer peripheral surface 60a of the threaded rod 60. The internally threaded portion 58 converts rotational displacement of the threaded rod 60 into linear displacement in the second direction, and displaces the first piston portion 46b in the second direction.

[0040] An upper end portion 58a of the internally threaded portion 58 abuts against an upper end wall 46d of the first housing chamber 46c. The upper end portion 58a is able to slide in the radial direction with respect to the upper end wall 46d. In addition, a lower end portion 58b of the internally threaded portion 58 abuts against a lower end wall 46e of the first housing chamber 46c. The lower end portion 58b is able to slide in the radial direction with respect to the lower end wall 46e. When a pushing force in the second direction is generated in the first piston portion 46b, the internally threaded portion 58 expands in a manner such that the thread groove of the inner peripheral portion 58c further engages with the thread of the threaded rod 60 described later. The first housing chamber 46c allows expansion of the internally threaded portion 58. The internally threaded portion 58 is displaced with respect to the threaded rod 60 in a manner such that it slides in the second direction by the pushing force of the first piston portion 46b, and is displaced together with the first piston portion 46b toward the lower side in the second direction. That is, the flow rate regulating valve 22 of the present embodiment, when supplied with the gas pressure of the first air chamber 42a above the first piston portion 46b, slides in the second direction by the first screw mechanism 48, and releases the connection of the first shaft member 46 and the first motor 28 (refer to Figure 2 ).

[0041] As shown in Figure 2 , the threaded rod 60 extends toward the upper side in the second direction. The upper portion of the threaded rod 60 is connected to the rotational shaft 28a of the first motor 28 through the first through-hole 33b of the gas flow path member 33. The threaded rod 60 rotates integrally with the rotational shaft 28a.

[0042] The first motor 28 is, for example, a stepping motor, and rotates at a prescribed number of rotations and at a prescribed rotational speed based on a control signal. The first motor 28 is housed in the drive portion 32.

[0043] As shown in Figure 3B , the back suction valve 24 has a second valve chamber 64, a second cylinder chamber 66, a second valve core 68, a second shaft member 70, and a second screw mechanism 72. The second valve chamber 64 is located on the lower side of the main body portion 26. An opening that communicates with the first flow path 56 and an opening that communicates with an outlet flow path 76 are provided in the second valve chamber 64. The second valve chamber 64 communicates with the first valve chamber 38 through the first flow path 56. In addition, the second valve chamber 64 communicates with the outlet port 36 via the outlet flow path 76.

[0044] A second cylinder chamber 66 is formed above the second valve chamber 64. The second cylinder chamber 66 extends in the second direction. An upper portion of the second cylinder chamber 66 communicates with the second through-hole 33c of the gas flow path member 33.

[0045] A second spool 68 is disposed between the second valve chamber 64 and the second cylinder chamber 66. The second spool 68 has a second shaft portion 68a and a second diaphragm 68b. The second shaft portion 68a is located at a central portion of the second spool 68. The second spool 68 extends in a rod shape in the second direction, and an upper portion thereof is connected to a second shaft member 70. The second diaphragm 68b is composed of a flexible film, and liquid-tightly and air-tightly separates the second valve chamber 64 and the second cylinder chamber 66.

[0046] The second shaft member 70 has a holder portion 70a that holds the second shaft portion 68a, and a second piston portion 70b that slides in the second cylinder chamber 66. The holder portion 70a is integrally connected to and displaced with the second piston portion 70b. In the present embodiment, the second piston portion 70b divides the second cylinder chamber 66 into a third empty chamber 66a on the upper side and a fourth empty chamber 66b on the lower side. The third empty chamber 66a communicates with the gas flow path 33a via the second through-hole 33c. The fourth empty chamber 66b is open to the atmosphere through a not-illustrated vent hole.

[0047] A threaded hole 70c that constitutes a part of a second screw mechanism 72 is formed at a central portion of the second piston portion 70b. A threaded groove is formed on an inner peripheral surface of the threaded hole 70c. In addition, a second screw rod 78 that constitutes another part of the second screw mechanism 72 is inserted into the threaded hole 70c. The second screw rod 78 has a threaded tooth formed thereon, and is screwed with the threaded hole 70c. The second screw rod 78 extends in the second direction. As shown in Figure 2 the upper portion of the second screw rod 78 is connected to a rotation shaft 30a of a second motor 30.

[0048] The second motor 30 is composed of, for example, a stepping motor, and under a prescribed control signal, raises and lowers the second spool 68, and performs a back-suction operation.

[0049] The electric valve unit 10 of the present embodiment is configured as described above. Hereinafter, the operation of the electric valve unit 10 will be described.

[0050] The electric valve unit 10 is in an initial state, as shown in Figure 3A the first spool 44 of the flow rate adjusting valve 22 is in abutment with the first valve seat 40, and closes the first open portion 56a of the first flow path 56. Therefore, in the initial state, the electric valve unit 10 blocks the passage of the medical liquid.

[0051] The flow rate adjusting valve 22 shifts from the initial state (valve-closed state) shown in Figure 3A to a state shown in Figure 4AThe valve for supplying the medicinal liquid is shown in the open state. At this time, the first electric motor 28 (refer to...) Figure 2 When rotated by a predetermined angle, the first valve core 44 separates from the first valve seat 40. As a result, the electric valve unit 10 directs the liquid medicine toward the nozzle 20 at a flow rate corresponding to the gap between the first valve core 44 and the first valve seat 40.

[0052] When the prescribed amount of medicine solution has been supplied, the electric valve unit 10, based on the control signal from the control device, causes the flow regulating valve 22 to switch to... Figure 3A The valve is in the closed state. Subsequently, the electric valve unit 10 performs a back-suction action. The back-suction action is to... Figure 2 The second motor 30 of the suction valve 24 rotates, causing the second valve core 68 to be displaced in an upward suction direction. When the second valve core 68 is suctioned upward, the volume of the second valve chamber 64 increases, remaining in the nozzle 20 (see reference). Figure 1 The liquid medicine is drawn into the back suction valve 24. This prevents leakage of the liquid medicine from the nozzle 20 and the generation of particles caused by the drying of the liquid medicine in the nozzle 20.

[0053] Subsequently, the electric valve unit 10 switches to the operation of supplying the medicine, and the flow regulating valve 22 opens. At this time, the second valve core 68 of the back suction valve 24 returns to its initial position. Thereafter, the electric valve unit 10 repeatedly performs the opening and closing operation of the flow regulating valve 22 and the back suction operation of the back suction valve 24, repeatedly supplying the medicine.

[0054] Next, the operation of the electric valve unit 10 when a power outage occurs while the valve is open will be explained.

[0055] When in Figure 4A When a power outage occurs while the valve is open, the power supply to the valve is cut off. Figure 2 The first motor 28 is supplied with drive current. Therefore, during a power outage, the first valve core 44 cannot be displaced to the closed position by the first motor 28. In this case, Figure 1 The valve of the gas supply source 45 is opened, supplying compressed gas, such as nitrogen, from the accumulator to the electric valve unit 10. The compressed gas then... Figure 4B The gas flows into the first empty chamber 42a of the first cylinder chamber 42 through the gas flow path 33a.

[0056] like Figure 4BAs shown, when compressed gas is supplied to the first chamber 42a above the first piston portion 46b, the pressure in the first chamber 42a is greater than the pressure in the second chamber 42b. As a result, a downward thrust is generated in the first piston portion 46b (first shaft member 46). This thrust is applied to the meshing portion of the thread groove of the internal thread portion 58 and the thread teeth of the threaded rod 60. When a thrust exceeding a predetermined value is applied, the inner circumference 58c of the internal thread portion 58 expands in diameter to further mesh the thread groove with the thread teeth of the threaded rod 60. As a result, the internal thread portion 58 displaces relative to the threaded rod 60 in a sliding manner in a second direction, moving downward in the second direction together with the first piston portion 46b.

[0057] Subsequently, the first valve core 44 and the first shaft component 46 move downward together, and the first valve core 44 abuts against the first valve seat 40 to close the first flow path 56. Therefore, the electric valve unit 10 can stop the supply of liquid medicine when a power failure occurs.

[0058] (Second Implementation)

[0059] like Figure 5A As shown, the flow regulating valve 22A involved in this embodiment is located at the first shaft component 46A and the internal thread portion 58A, which is connected to the flow regulating valve 22 (of the first embodiment). Figure 3A The following describes the details of the flow control valve 22A, but in the structure of the flow control valve 22A, there are differences compared to the reference. Figure 2 and Figure 3A The flow control valve 22 described herein has the same structure and is marked with the same symbols, and its detailed description is omitted.

[0060] like Figure 5A As shown, in the flow regulating valve 22A of this embodiment, the first shaft member 46A has a vent 46f that opens the first receiving chamber 46c to the atmosphere. As shown, the vent 46f is located near the outer periphery of the first receiving chamber 46c and extends in a second direction. The vent 46f connects the first receiving chamber 46c to the second empty chamber 42b. The second empty chamber 42b opens to the atmosphere through a venting path (not shown). Therefore, the first receiving chamber 46c opens to the atmosphere via the second empty chamber 42b.

[0061] Further, the inner thread portion 58A of the present embodiment has a first seal member 59a and a second seal member 59b. The first seal member 59a is provided to the upper end portion 58a of the inner thread portion 58A. The first seal member 59a is configured by, for example, an O-ring or the like, and seals a gap between the upper end wall 46d and the upper end portion 58a of the inner thread portion 58A airtightly. The second seal member 59b is provided to the lower end portion 58b of the inner thread portion 58A. The second seal member 59b is configured by, for example, an O-ring or the like, and seals a gap between the lower end wall 46e and the lower end portion 58b of the inner thread portion 58A airtightly.

[0062] The flow regulating valve 22A of the present embodiment configured as above acts as follows when a power failure occurs.

[0063] With the occurrence of the power failure, when the compressed gas is supplied through the gas flow path 33a, the pressure of the first chamber 42a rises. A part of the compressed gas mixes into the inner peripheral portion 58c of the inner thread portion 58A through a gap between the threaded rod 60 and the inner peripheral portion 58c of the inner thread portion 58A. As a result, as shown in FIG. 8, the inner thread portion 58A is deformed in a manner of expanding toward the radial outside or the like by the air pressure of the compressed gas, and the inner peripheral portion 58c of the inner thread portion 58A is separated from the outer peripheral surface 60a of the threaded rod 60. Thus, the coupling of the first shaft member 46A and the first motor 28 (refer to FIG. 1) is released, and the first shaft member 46A is able to displace in the second direction. Subsequently, the first shaft member 46A is displaced downward by the pressure difference between the first chamber 42a into which the compressed air is introduced and the second chamber 42b which is open to the atmosphere, and the first spool 44 is brought into abutment with the first valve seat 40. Figure 5B Figure 2 ) is released, and the first shaft member 46A is able to displace in the second direction. Subsequently, the first shaft member 46A is displaced downward by the pressure difference between the first chamber 42a into which the compressed air is introduced and the second chamber 42b which is open to the atmosphere, and the first spool 44 is brought into abutment with the first valve seat 40.

[0064] As described above, the flow regulating valve 22A of the present embodiment is also able to stop the supply of the liquid when a power failure occurs.

[0065] (Third Embodiment)

[0066] Figure 6A The flow regulating valve 22B of the present embodiment shown in FIG. 12 differs from the flow regulating valve 22 (refer to FIG. 1) at the inner thread portion 58B. Hereinafter, the details of the flow regulating valve 22B will be described, but in the structure of the flow regulating valve 22B, the same symbols are attached to the structures which are the same as the structure of the flow regulating valve 22 described with reference to FIGS. 1 to 8, and detailed description thereof will be omitted. Figure 3A Figure 2 Figure 3A

[0067] As described above, the flow regulating valve 22B of the present embodiment is also able to stop the supply of the liquid when a power failure occurs. Figure 6B ​​​​As shown, the internal thread portion 58B of this embodiment has multiple blocks 58d divided circumferentially and an elastic member 61. As shown, each block 58d is fan-shaped when viewed from above, and has a threaded groove in its inner peripheral portion 58c. The inner peripheral portion 58c of the block 58d is disposed facing the outer peripheral surface 60a of the threaded rod 60. The block 58d is received in the first receiving chamber 46c of the first piston portion 46b. Figure 6A As shown, each block 58d can be guided by the upper end wall 46d and the lower end wall 46e of the first receiving chamber 46c and displaced radially.

[0068] The elastic member 61 can be, for example, a coil spring. The elastic member 61 is disposed between the outer periphery of the block 58d and the side wall of the first receiving chamber 46c. The elastic member 61 exerts force on the block 58d toward the threaded rod 60 through its elasticity. When no air pressure is supplied to the first chamber 42a, the threaded groove of the block 58d engages with the threaded teeth of the threaded rod 60. The internal threaded portion 58B, composed of multiple blocks 58d, engages with the threaded rod 60 to connect the first motor 28 (see reference 60). Figure 2 The rotational displacement of the first shaft component 46 is converted into linear displacement, causing the first shaft component 46 to move along the second direction.

[0069] The flow regulating valve 22B of this embodiment, configured as described above, operates as follows when a power outage occurs.

[0070] In the event of a power outage, compressed gas is supplied to the first chamber 42a through gas flow path 33a. For example... Figure 7 As shown, the first shaft component 46 generates a downward thrust through the pressure difference between the first chamber 42a and the second chamber 42b. When a thrust of a specified magnitude or greater is generated, the threaded groove of the block 58d passes over the threaded teeth of the threaded rod 60, and the block 58d displaces radially outward against the elastic force of the elastic member 61. As a result, the internal thread portion 58B can be displaced relative to the threaded rod 60 in a sliding manner in a second direction. That is, the connection between the first shaft component 46 and the first motor 28 is released.

[0071] Subsequently, the first shaft component 46 moves downward, and the first valve core 44 supported on the first shaft component 46 abuts against the first valve seat 40, sealing the first flow path 56. Therefore, the flow regulating valve 22B of this embodiment can prevent the flow of liquid medicine even in the event of a power outage.

[0072] (Fourth Implementation)

[0073] Figure 8A The flow regulating valve 22C shown in this embodiment is located at the first shaft component 46C and the internal thread portion 58C, where it is connected to the flow regulating valve 22 ( Figure 3A The following describes the details of the flow control valve 22C, but in the structure of the flow control valve 22C, there are differences compared to the reference.Figure 2 and Figure 3A The same components of the flow regulating valve 22 are designated by the same reference numerals and detailed description thereof is omitted.

[0074] As shown in Figure 8B , the first shaft member 46C has a plurality of divided housing chambers 46g divided in the circumferential direction. The respective divided housing chambers 46g are arranged at equal intervals in the circumferential direction. In the illustrated example, one divided housing chamber 46g is arranged at every 90° in the circumferential direction. The respective divided housing chambers 46g extend in the radial direction of the first shaft member 46C. As shown in Figure 8A , an air vent hole 46f is provided below the divided housing chamber 46g. The air vent hole 46f is located in the outer peripheral portion of the divided housing chamber 46g, and communicates the divided housing chamber 46g with the second chamber 42b. Thus, the outer peripheral portion of the divided housing chamber 46g is open to the atmosphere via the second chamber 42b.

[0075] The female screw portion 58C includes a plurality of blocks 58e and a plurality of elastic members 61C. In the illustrated example, the female screw portion 58C has four blocks 58e. The respective blocks 58e are housed in the divided housing chambers 46g. The blocks 58e have a sealing member 63 around the periphery. The sealing member 63 hermetically seals the gap between the divided housing chamber 46g and the block 58e. The blocks 58e are movable like pistons in the radial direction along the divided housing chamber 46g. A thread groove is formed in the inner peripheral portion 58c of the block 58e.

[0076] The elastic members 61C are arranged in the outer peripheral portion of the blocks 58e. The elastic members 61C apply force to the blocks 58e toward the inner side of the threaded rod 60 by the elastic force thereof. The thread groove of the inner peripheral portion 58c of the block 58e is engaged with the thread teeth of the outer peripheral surface 60a of the threaded rod 60 by the force of the elastic members 61C in the normal state where no gas pressure is supplied.

[0077] The flow regulating valve 22C of the present embodiment thus configured operates as follows when a power failure occurs.

[0078] When a power failure occurs, the compressed gas is supplied to the first chamber 42a through the gas flow path 33a. As shown in Figure 9 , the compressed gas enters the inner peripheral portion 58c of the block 58e. The block 58e generates a thrust toward the radial outside by the pressure difference between the first chamber 42a and the outer peripheral portion of the divided housing chamber 46g (open to the atmosphere). When the prescribed thrust is exceeded, the block 58e is displaced to the radial outside against the elastic force of the elastic members 61C, and the inner peripheral portion 58c of the block 58e is separated from the outer peripheral surface 60a of the threaded rod 60. As a result, the coupling of the first shaft member 46C to the first motor 28 is released.

[0079] Subsequently, the first shaft member 46C is displaced downward, and the first spool 44 supported by the first shaft member 46C comes into abutment with the first valve seat 40, closing the first flow passage 56. Thus, the flow regulating valve 22C of the present embodiment can prevent the flow of the chemical liquid even in the case where a power failure occurs.

[0080] (Fifth Embodiment)

[0081] Figure 10A The flow regulating valve 22D of the present embodiment shown in the drawing differs from the flow regulating valve 22 in the first shaft member 46D and the internally threaded portion 58D. Figure 3A Hereinafter, the details of the flow regulating valve 22D will be described, but in the structure of the flow regulating valve 22D, the same symbols are affixed to the structures identical to those of the flow regulating valve 22 described with reference to Figure 2 and Figure 3A the details thereof will be omitted.

[0082] As shown in Figure 10A , the first shaft member 46D has a first piston portion 80. In the example shown in the drawing, the first piston portion 80 is integrated with the first holder portion 46a that holds the first spool 44 (refer to Figure 3A ). Further, the first piston portion 80 can be formed separately from the portion that supports the first spool 44 and the portion that separates the first chamber 42a and the second chamber 42b. The first piston portion 80 is disposed inside the first cylinder chamber 42, and separates the first cylinder chamber 42 into the first chamber 42a on the upper side and the second chamber 42b on the lower side, in airtight manner. The first piston portion 80 generates a thrust in the second direction by the pressure difference between the first chamber 42a and the second chamber 42b.

[0083] The first piston portion 80 has a fitting piece 82 protruding upward in the second direction at the upper portion 80a thereof. The fitting piece 82 is formed in a rod shape with a constant outer diameter. An enlarged diameter portion 82a having a larger outer diameter than the other portions is formed at the upper end portion of the fitting piece 82. The fitting piece 82 is housed in a fitting portion 84 of the internally threaded portion 58D described later.

[0084] The internal thread portion 58D is cylindrical. The internal thread portion 58D has an inner peripheral portion 58c with a threaded groove formed at its center that engages with the threaded rod 60. The outer diameter of the internal thread portion 58D can, for example, be smaller than the outer diameter of the first piston portion 80, and the outer peripheral portion of the internal thread portion 58D can separate from the inner wall 42c of the first cylinder chamber 42. The internal thread portion 58D has a plurality of engaging portions 84 at its lower part. Each engaging portion 84 has a hole extending in a second direction to receive an engaging piece 82 extending from the first piston portion 80. The inner diameter of the engaging portion 84 is larger than the outer diameter of the engaging piece 82. The engaging portion 84 has an inwardly protruding annular protrusion 84a at a predetermined location. The inner diameter of the annular protrusion 84a is smaller than the outer diameter of the expanded diameter portion 82a of the engaging piece 82. In the initial state, the expanded diameter portion 82a of the engaging piece 82 is positioned on the annular protrusion 84a, and the expanded diameter portion 82a is hooked onto the annular protrusion 84a. This maintains the connection between the internal thread portion 58D and the first piston portion 80.

[0085] The flow regulating valve 22D of this embodiment, configured as described above, operates as follows when a power outage occurs.

[0086] like Figure 10B As shown, when a power outage occurs, compressed gas is supplied to the first chamber 42a through the gas flow path 33a, creating a pressure difference between the first chamber 42a and the second chamber 42b. The first piston 80 generates a downward thrust due to the pressure difference between the first chamber 42a and the second chamber 42b. When the thrust of the first piston 80 exceeds a predetermined value, as shown, the expanded diameter portion 82a of the engaging piece 82 passes over the annular protrusion 84a of the engaging portion 84, and the connection between the internal thread portion 58D and the first piston 80 is released.

[0087] Subsequently, the first piston portion 80 moves downward, pressing the first valve core 44 downward. As a result, the first valve core 44 abuts against the first valve seat 40, closing the first flow path 56. As described above, the flow regulating valve 22D of this embodiment can stop the supply of liquid medicine when a power outage occurs.

[0088] Furthermore, while the above description illustrates an example of the engaging tab 82 protruding from the first piston portion 80, this embodiment is not limited to this. The engaging tab 82 may also be structured to protrude downwards from the internal thread portion 58D toward the first piston portion 80. Alternatively, the engaging tab 82 may be configured separately from the internal thread portion 58D and the first piston portion 80.

[0089] Furthermore, this utility model is not limited to the above-described utility model, and various structures can be adopted without departing from the spirit of this utility model. The following appendices are also disclosed regarding the above-described utility model.

[0090] (Postscript 1)

[0091] The utility model discloses a kind of electric valve units 10, with flow regulating valve 22, 22A, 22B, 22C, 22D, wherein, the flow regulating valve 22, 22A, 22B, 22C, 22D has: first valve chamber 38, which is communicated with inlet flow path 54;First valve seat 40 is formed in the first valve chamber 38, with the opening portion 56a of first flow path 56;First valve core 44, which is opposite to the first valve seat 40, forms gap between the first valve core and the first valve seat 40 to regulate the flow of liquid medicine;First shaft component 46, 46A, 46B, 46C, 46D, which supports the first valve core 44 and is displaced in the second direction;And first motor 28, which drives the first shaft component 46, 46A, 46B, 46C, 46D, the first shaft component 46, 46A, 46B, 46C, 46D generates the thrust in the second direction towards the first valve seat 40 by air pressure, so that the first valve core 44 and the first valve seat 40 are in contact.

[0092] The above-mentioned electric valve unit can stop the supply of liquid medicine by displacing the first valve core to the closed position by using air pressure even when power failure occurs.

[0093] (Attachment 2)

[0094] In the electric valve unit 10 described in Attachment 1, it can also have a first screw mechanism 48 that converts rotational displacement of the first motor 28 to linear displacement in the second direction, and the first shaft component 46, 46A, 46B, 46C, 46D is connected to the first motor 28 via the first screw mechanism 48. Such an electric valve unit quantitatively controls the operation of the first shaft component by the first screw mechanism in the general case where power failure does not occur.

[0095] (Attachment 3)

[0096] In the electric valve unit 10 described in Attachment 2, the first screw mechanism 48 can have a threaded rod 60 connected to the first motor 28 and an internal thread portion 58, 58A, 58B, 58C that is screwed with the threaded rod 60 and can expand in the direction of expanding diameter. Such an electric valve unit makes it possible for the first shaft component to be displaced in the second direction due to air pressure by expanding the internal thread portion.

[0097] (Attachment 4)

[0098] In the electric valve unit 10 described in the supplementary note 3, it can also be that, when subjected to the gas pressure, the internally threaded portions 58, 58B and the threaded rod 60 slide in the second direction by the pushing force of the first shaft members 46, 46B, whereby the coupling of the first shaft members 46, 46B to the first electric motor 28 is released. This electric valve unit can achieve a configuration capable of closing the first valve chamber by gas pressure with a simple device structure.

[0099] (Supplementary note 5)

[0100] In the electric valve unit 10 described in the supplementary note 3, it can also be that the first shaft member 46A has a first housing chamber 46c that airtightly houses the outer circumferential portion of the internally threaded portion 58A, and when the internally threaded portion 58A whose internally threaded portion is formed with a threaded groove is subjected to the gas pressure, the internally threaded portion expands to the radially outer side, whereby the coupling of the first shaft member 46A to the first electric motor 28 is released. This electric valve unit can expand the internally threaded portion by gas pressure, and thus can further reliably release the screwed state of the internally threaded portion and the threaded rod when a power outage occurs.

[0101] (Supplementary note 6)

[0102] In the electric valve unit 10 described in the supplementary note 3, it can also be that the internally threaded portion 58B has a plurality of blocks 58d divided in the circumferential direction and an elastic member 61 that applies a force to the blocks 58d toward the threaded rod 60, and when subjected to the gas pressure, the blocks 58d and the threaded rod 60 slide in the second direction by the pushing force of the first shaft member 46B, whereby the coupling of the first shaft member 46B to the first electric motor 28 is released. This electric valve unit can adjust the release of the coupling of the internally threaded portion to the first electric motor by adjusting the force of the elastic member, and thus can perform more stable operation.

[0103] (Supplementary note 7)

[0104] In the electric valve unit 10 described in the supplementary note 3, it can also be that the internally threaded portion 58C has a plurality of blocks 58e divided in the circumferential direction and an elastic member 61C that applies a force to the blocks 58e toward the threaded rod 60, and the first shaft member 46C has a divided housing chamber 46g that airtightly houses each of the blocks 58e so as to be able to displace in the radial direction, and when subjected to the gas pressure, the blocks 58e of the internally threaded portion 58C displace in a direction away from the threaded rod 60 against the force of the elastic member 61C, whereby the coupling of the first shaft member 46C to the first electric motor 28 is released. This electric valve unit can adjust the release of the coupling of the internally threaded portion to the first electric motor by adjusting the force of the elastic member, and thus can perform more stable operation.

[0105] (Supplementary note 8)

[0106] In the electric valve unit 10 described in the supplementary note 2, the first screw mechanism 48 can have a threaded rod 60 coupled to the first motor 28, and an internally threaded portion 58D screwed to the threaded rod 60, and the first shaft member 46D and the internally threaded portion 58D can be coupled via an engagement piece 82 that is uncoupled from the first shaft member 46D and the internally threaded portion 58D by a pushing force of the first shaft member 46D when subjected to the gas pressure. Since the electric valve unit can adjust uncoupling of the first motor with a simple structure, manufacturing cost can be reduced.

[0107] (Supplementary note 9)

[0108] In the electric valve unit 10 described in the supplementary note 1, there can be provided a main body 26 having a first cylinder chamber 42 that houses the first shaft members 46, 46A, 46B, 46C, 46D so as to be displaceable in the second direction, and a gas flow path member 33 disposed between the main body 26 and the first motor 28 to direct the gas pressure to the first cylinder chamber 42. The electric valve unit can reliably drive the first shaft members when a power outage occurs.

[0109] (Supplementary note 10)

[0110] The electric valve unit 10 described in any one of the supplementary notes 1 to 9 can further have a back suction valve 24 connected downstream of the flow rate adjusting valve 22, 22A, 22B. The electric valve unit can compactly achieve a flow rate adjusting function and a back suction function of a medical liquid.

Claims

1. An electric valve unit comprising a flow regulating valve, characterized in that, The flow regulating valve includes: The first valve chamber is connected to the inlet flow path; A first valve seat is formed in the first valve chamber and has an opening for a first flow path; A first valve core is opposite to the first valve seat, and a gap is formed between the first valve core and the first valve seat to regulate the flow rate of the medicine; A first shaft component supports the first valve core and is displaced along a second direction; as well as A first electric motor drives the first shaft component. The first shaft component generates a thrust toward the first valve seat in the second direction through air pressure, thereby causing the first valve core to abut against the first valve seat.

2. The electric valve unit according to claim 1, characterized in that, It has a first threaded mechanism that converts the rotational displacement of the first motor into linear displacement in the second direction. The first shaft component is connected to the first motor via the first threaded mechanism.

3. The electric valve unit according to claim 2, characterized in that, The first threaded mechanism has a threaded rod connected to the first motor and an internal thread portion that engages with the threaded rod and is capable of expanding in the direction of expansion.

4. The electric valve unit according to claim 3, characterized in that, When subjected to the air pressure, the internal thread and the threaded rod slide in the second direction by the thrust of the first shaft component, thereby disengaging the connection between the first shaft component and the first motor.

5. The electric valve unit according to claim 3, characterized in that, The first shaft component has a first receiving chamber that hermetically accommodates the outer periphery of the internally threaded portion. When the inner circumference of the internal threaded portion, which has a threaded groove, is subjected to air pressure, the internal threaded portion expands radially outward, thereby detaching the first shaft component from the first motor.

6. The electric valve unit according to claim 3, characterized in that, The internal thread portion has multiple blocks divided circumferentially and an elastic member that applies force to the blocks toward the threaded rod. When subjected to the air pressure, the block and the threaded rod slide in the second direction due to the thrust of the first shaft component, thereby disengaging the first shaft component from the first motor.

7. The electric valve unit according to claim 3, characterized in that, The internal thread portion has multiple blocks divided circumferentially and an elastic member that applies force to the blocks toward the threaded rod. The first shaft component has a hermetically sealed compartment that houses each of the blocks into a radially displaceable chamber. When subjected to the air pressure, the block of the internal thread portion overcomes the force of the elastic member and moves away from the threaded rod, thereby releasing the connection between the first shaft component and the first motor.

8. The electric valve unit according to claim 2, characterized in that, The first thread mechanism has: A threaded rod, which is connected to the first motor; and The internal thread portion engages with the threaded rod. The first shaft component and the internal threaded portion are connected via a locking tab. When subjected to the air pressure, the locking piece releases the connection between the first shaft component and the internal thread by the thrust of the first shaft component.

9. The electric valve unit according to claim 1, characterized in that, have: The main body has a first cylinder chamber that houses the first shaft component and is capable of displacement along the second direction; and A gas flow path component is disposed between the main body and the first motor to guide the gas pressure to the first cylinder chamber.

10. The electric valve unit according to any one of claims 1 to 9, characterized in that, It also has a backflow valve connected downstream of the flow control valve.

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