Automatic cleaning probe assembly and probing device
By designing an automated cleaning probe assembly that integrates grinding, cleaning, and drying in both dry and wet cleaning zones, the problem of cumbersome probe cleaning processes has been solved. This achieves highly efficient and automated probe cleaning, reduces equipment downtime and manpower and material investment, and improves production efficiency.
Patent Information
- Application Number
- CN202422934134.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-28
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2034-11-28
AI Technical Summary
The probe cleaning process in the existing technology is cumbersome and time-consuming, which leads to increased equipment downtime, low production efficiency, and high labor and equipment idle costs.
Design an automated cleaning probe assembly comprising a dry cleaning zone and a wet cleaning zone. The dry cleaning zone includes sandpaper, and the wet cleaning zone includes an ultrasonic cleaning tank and a drying tank. The automated cleaning of the probe is achieved through an integrated operation of grinding, cleaning, and drying.
Without disassembling the probe card, it effectively removes impurities from the probes, shortens downtime, reduces cleaning costs, and improves production line efficiency.
Smart Images
Figure CN223565757U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present disclosure relates to the technical field of semiconductor testing equipment, in particular to an automatic cleaning probe assembly and a needle testing device. BACKGROUND
[0002] In a wafer testing process, probes are used to test the electrical properties of dies on a wafer to ensure that the dies are qualified products before packaging. To ensure the accuracy of the wafer test results, the probes need to be cleaned after a certain number of tests to remove impurities adhering to the surface of the probes, so as to avoid errors in the test results caused by impurities and reduce the accuracy of the wafer test results.
[0003] On the existing test probe table, probe cleaning is usually achieved by grinding the probes, i.e. using sandpaper to grind the probes to remove impurities on the needle tip. However, when the substances adhering to the needle tip are not easy to remove, the probes need to be clamped down, and then the needle tip is cleaned by ultrasonic waves, followed by a series of operations such as drying, measuring the level, and loading the probe head, etc. The entire process involves a long maintenance time, is complicated to operate, consumes a large amount of time, and increases the downtime of the equipment, thereby reducing the production efficiency. Long-term equipment downtime means higher labor costs and equipment idle costs, resulting in increased testing costs. The whole process requires frequent human intervention, which increases the work intensity of the operators and can affect the test results and the stability of the equipment due to human operation errors.
[0004] Therefore, how to effectively clean the probes and improve the cleaning efficiency has become a technical problem to be solved by those skilled in the art. CONTENT OF THE INVENTION
[0005] To solve the above technical problems, the present disclosure provides an automatic cleaning probe assembly and a needle testing device for realizing automatic cleaning of the probes and improving the cleaning efficiency.
[0006] In a first aspect, the present disclosure provides an automatic cleaning probe assembly, comprising:
[0007] a dry cleaning area and a wet cleaning area, the wet cleaning area being located on one side of the dry cleaning area along a first direction, and the wet cleaning area being adjacent to the dry cleaning area along the first direction, the first direction being parallel to the plane where the dry cleaning area is located;
[0008] the dry cleaning area comprises sandpaper,
[0009] the wet cleaning area comprises an ultrasonic cleaning tank and a drying tank, the drying tank being located on one side of the ultrasonic cleaning tank along a second direction, the second direction being parallel to the plane where the dry cleaning area is located, and the second direction intersecting the first direction.
[0010] Optionally, the length of the ultrasonic cleaning tank and the length of the drying tank in the second direction are equal to the length of the dry cleaning area.
[0011] Optionally, the cleaning tank contains cleaning liquid.
[0012] Optionally, the wet cleaning area includes a liquid level sensor, which is located on the outer wall of the ultrasonic cleaning tank.
[0013] Optionally, the wet cleaning area includes a cleaning liquid storage tank, which is connected to the ultrasonic cleaning tank by a pipeline.
[0014] Optionally, the drying tank is connected to an air pressure pipe, which is used to input compressed air, and the air pressure pipe includes an adjusting valve near one end of the drying tank.
[0015] Optionally, the wet cleaning area includes a cover plate, which is connected to the ultrasonic cleaning tank and the drying tank by a connecting piece.
[0016] Optionally, the cover plate includes an open state and a closed state,
[0017] In the open state, the cover plate is located on the side of the wet cleaning area facing away from the dry cleaning area in the first direction.
[0018] In the closed state, the cover plate covers the side of the ultrasonic cleaning tank and the drying tank containing the opening.
[0019] In a second aspect, based on the same technical concept, the present disclosure provides a probe device, which includes a bearing table including the automatic cleaning probe assembly as described in the first aspect.
[0020] The probe device includes a probe unit, which includes at least one probe, and the bearing table is movable relative to the probe unit.
[0021] The technical solution provided by the embodiments of the present disclosure has the following advantages compared with the prior art:
[0022] Without disassembling the probe card, effective cleaning of the probe can be achieved, the probe card time is reduced, and the downtime is shortened.
[0023] Through a series of operations such as grinding, cleaning, and drying, automatic cleaning of the needle tip can be achieved, cleaning time and cost are reduced, and production line efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS
[0024] The accompanying drawings, which are incorporated herein and constitute part of the specification, illustrate embodiments consistent with the present disclosure and serve to explain the principles of the present disclosure together with the specification.
[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the accompanying drawings needed to be used in the embodiments or prior art description will be briefly introduced here. Obviously, those skilled in the art can obtain other drawings according to these drawings without any creative effort.
[0026] Figure 1 Fig. 1 shows a schematic diagram of the relative position relationship of an automatic cleaning probe assembly provided by an embodiment of the present disclosure;
[0027] Figure 2 Fig. 2 shows a schematic diagram of the relative position relationship of an automatic cleaning probe assembly containing a cover plate provided by an embodiment of the present disclosure;
[0028] Figure 3 Fig. 3 shows a side view of an automatic cleaning probe assembly containing a cover plate provided by an embodiment of the present disclosure;
[0029] Figure 4 Fig. 4 shows a top view of a needle measurement device provided by an embodiment of the present disclosure;
[0030] Figure 5 Fig. 5 shows a diagram of the relative position relationship between a probe and an automatic cleaning probe assembly provided by an embodiment of the present disclosure;
[0031] Figure 6 Fig. 6 shows a perspective view of a needle measurement device provided by an embodiment of the present disclosure. DETAILED DESCRIPTION
[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the accompanying drawings needed to be used in the embodiments or prior art description will be briefly introduced here. Obviously, those skilled in the art can obtain other drawings according to these drawings without any creative effort.
[0033] In the following description, many specific details are set forth in order to provide a thorough understanding of the present disclosure. However, the present disclosure can be practiced without the specific details. In other instances, well-known methods, procedures and components have not been described in detail so as not to obscure the present disclosure.
[0034] Figure 1 Fig. 1 shows a schematic diagram of the relative position relationship of an automatic cleaning probe assembly provided by an embodiment of the present disclosure, Figure 2 Fig. 2 shows a schematic diagram of the relative position relationship of an automatic cleaning probe assembly containing a cover plate provided by an embodiment of the present disclosure, Figure 3The figure shows a side view of an automatic cleaning probe assembly including a cover plate provided by an embodiment of the present disclosure. Figure 4 The figure shows a top view of a needle detection device provided by an embodiment of the present disclosure; please refer to Figures 1 to 4 , the present disclosure provides an automatic cleaning probe assembly 10, including: a dry cleaning area 11 and a wet cleaning area 12. The dry cleaning area 11 and the wet cleaning area 12 share a cleaning needle platform drive for operation. The dry cleaning area 11 and the wet cleaning area 12 are in a "field" structure. The wet cleaning area 12 is located on one side of the dry cleaning area 11 along the first direction D1, and the wet cleaning area 12 is adjacent to the dry cleaning area 11 along the first direction D1. The first direction D1 is parallel to the plane where the dry cleaning area 11 is located; in the figure, only the case where the dry cleaning area 11 is located in the left "square" part of the "field" structure and the wet cleaning area 12 is located in the right "square" part of the "field" structure is shown, which does not represent the specific positions of the dry cleaning area 11 and the wet cleaning area 12 in the actual process. Optionally, the dry cleaning area 11 can be the right "square" part of the "field" structure and the wet cleaning area 12 is located in the left "square" part of the "field" structure; or, the dry cleaning area 11 can be the upper "square" part of the "field" structure and the wet cleaning area 12 is located in the lower "square" part of the "field" structure, or, the dry cleaning area 11 can be the lower "square" part of the "field" structure and the wet cleaning area 12 is located in the upper "square" part of the "field" structure; the present disclosure only defines the relative positions of the dry cleaning area 11 and the wet cleaning area 12, and only needs to satisfy that the dry cleaning area 11 is located on one side of the wet cleaning area 12 along the first direction D1 and is adjacent to the wet cleaning area 12.
[0035] It should be noted that Figure 1 only the first direction D1 is schematically shown as the X direction, which does not represent the specific direction of the first direction D1 in the actual process. It can be understood that the first direction D1 can also be other directions parallel to the plane where the dry cleaning area 11 is located and intersecting with the X direction.
[0036] In an optional embodiment provided by the present disclosure, the dry cleaning area 11 includes sandpaper, which can grind the tip of the probe 02 to remove debris on the tip.
[0037] In an optional embodiment provided by the present disclosure, the wet cleaning area 12 includes an ultrasonic cleaning tank 13 and a drying tank 14. The drying tank 14 is located on one side of the ultrasonic cleaning tank 13 along the second direction D2. The second direction D2 is parallel to the plane where the dry cleaning area 11 is located, and the second direction D2 intersects with the first direction D1. The ultrasonic cleaning tank 13 is used to clean substances that are not easily removed from the tip of the probe 02, and the drying tank is used to dry the cleaned probe 02.
[0038] Figure 1Only the case where the second direction D2 is the Y direction is shown. Optionally, the second direction D2 can also be the X direction. In this case, the first direction D1 is the Y direction. The present disclosure does not specifically limit the direction of the second direction D2, as long as it satisfies that the dry cleaning area 11 and the wet cleaning area 12 are in a "field" structure, and the ultrasonic cleaning tank 13 is located on one side of the drying tank 14 along the second direction D2.
[0039] Thus, by providing the automatic cleaning probe assembly 10 including the dry cleaning area 11 and the wet cleaning area 12, debris on the tip of the probe 02 can be removed by grinding, and debris that is not easily removed on the tip can be cleaned by the ultrasonic cleaning tank 13, and then dried by the drying tank 14 to improve the cleaning effect of the tip of the probe 02. There is no need to perform a lower card operation on the probe 02 that is not cleaned properly, which can reduce the downtime, save manpower and material resources, and improve the production line efficiency.
[0040] Please continue to refer to Figure 1 , in an optional embodiment provided by the present disclosure, along the second direction D2, the sum of the lengths of the ultrasonic cleaning tank 13 and the drying tank 14 is equal to the length of the dry cleaning area 11.
[0041] For example, the area of the dry cleaning area 11 is 20 cm * 10 cm, the area of the wet cleaning area 12 is 20 cm * 10 cm. Among them, the area of the ultrasonic cleaning tank 13 is 10 cm * 10 cm, and the area of the drying tank 14 is 10 cm * 10 cm. That is, in the second direction D2, the length 10 cm of the ultrasonic cleaning tank 13 is half of the length 20 cm of the dry cleaning area 11, and the length 10 cm of the drying tank 14 is half of the length 20 cm of the dry cleaning area 11.
[0042] Figure 1 Only the case where the ultrasonic cleaning tank 13 and the drying tank 14 each account for half of the area of the wet cleaning area 12 is shown, which does not represent the actual sizes of the ultrasonic cleaning tank 13 and the drying tank 14. Specifically, it can be designed according to actual process requirements. It can be understood that the lengths of the ultrasonic cleaning tank 13 and the drying tank 14 along the second direction D2 can also be unequal.
[0043] Please continue to refer to Figures 1 to 4 , in an optional embodiment provided by the present disclosure, the ultrasonic cleaning tank 13 contains cleaning liquid. When the tip of the probe 02 is immersed in the cleaning liquid, the cleaning liquid can clean the tip, soften and remove the substances that are not easily removed and adhered to the tip. At the same time, the cavitation effect of the ultrasonic wave is used to make the tiny bubble nuclei in the cleaning liquid vibrate under the action of the ultrasonic wave. When the sound pressure reaches a certain value, the bubbles expand rapidly and then suddenly close. The shock wave generated when the bubbles close can effectively remove the contaminants on the tip of the probe 02 to achieve the purpose of cleaning.
[0044] It should be noted that the composition of the cleaning liquid is not limited in the present disclosure, and the corresponding cleaning liquid can be used according to the actual process needs. For example, the cleaning liquid can be a surfactant capable of removing non-polar contaminants such as oil stains on the surface of the probe 02, can be an inhibitor capable of protecting the probe 02 from damage, can be an isopropyl alcohol solution for softening and removing contaminants on the needle tip of the probe 02, and the like. Here, they are not listed one by one, as long as the selected cleaning agent can remove the contaminants on the surface of the needle tip.
[0045] In this way, by injecting the cleaning liquid into the ultrasonic cleaning tank 13, combined with the cavitation effect of the ultrasonic wave, the contaminants that cannot be cleaned by grinding can be effectively cleaned, and the cleaning effect is improved.
[0046] Figure 5 The relative position relationship diagram of the probe and the automatic cleaning probe assembly provided by the embodiment of the present disclosure is shown, Figure 6 The three-dimensional schematic diagram of the needle measurement device provided by the embodiment of the present disclosure is shown. Please refer to Figures 4 to 6 In an optional embodiment provided by the present disclosure, the needle measurement device 100 includes a carrier plate 30 for placing a probe card 01, and the probe card 01 includes at least one probe 02; the needle measurement device 100 further includes a wafer carrier table 31 for placing a wafer; when the wafer carrier table 31 places the wafer and the carrier plate 30 places the probe card, the wafer carrier table 31 can move the carried wafer to the corresponding position of the probe 02 on the probe card 01 and ascend along the third direction D3, and the probe 02 performs needle measurement on the wafer placed on the wafer carrier table 31. After the needle measurement is completed, the needle cleaning platform drives the automatic cleaning probe assembly 10 to move to the corresponding position of the probe 02 for integrated cleaning of grinding, cleaning and drying of the probe 02. The wet cleaning area 12 includes a liquid level sensor 131 located on the outer side wall of the ultrasonic cleaning tank 13. For example, the liquid level sensor 131 can adopt an external liquid level sensor 131, which can use the reflection and transmission characteristics of ultrasonic waves or capacitive sensing technology to measure the liquid level inside the ultrasonic cleaning tank 13.
[0047] Optionally, the liquid level sensor 131 further includes an alarm device, which can alarm when the liquid level of the cleaning liquid inside the ultrasonic cleaning tank 13 is lower than the set minimum value, so as to remind the staff to add cleaning liquid in time. For example, the alarm device includes but is not limited to a sound and light alarm, a buzzer and the like capable of playing a warning role.
[0048] In this way, by arranging the liquid level sensor 131 on the outer side wall of the ultrasonic cleaning tank 13, the liquid level of the cleaning liquid can be measured in real time during the cleaning of the probe 02, so as to supplement the cleaning liquid in time and ensure the smooth progress of the cleaning process.
[0049] Please continue to refer toFigure 4 In an optional embodiment provided by the present disclosure, the automatic cleaning probe assembly 10 comprises a cleaning liquid storage tank 20 connected to the ultrasonic cleaning tank 13 through a pipeline for supplementing cleaning liquid to the ultrasonic cleaning tank 13.
[0050] Figure 4 Only the case that the cleaning liquid storage tank 20 is fixed on one side of the machine tool is shown, and it can be understood that the cleaning liquid storage tank 20 can also be located at other positions of the needle testing device 100, and the actual needs can be met.
[0051] Please continue to refer to Figure 4 In an optional embodiment provided by the present disclosure, the drying tank 14 is connected to an air pressure pipe for inputting compressed air, and the end of the air pressure pipe close to the drying tank 14 comprises an adjusting valve (not shown in the figure), which can be used to adjust the flow of air in the air pressure pipe. The compressed air transmitted from the air pressure pipe to the drying tank 14 can be used to dry the probe 02 needle tip.
[0052] Optionally, the bottom and inner side wall of the drying tank 14 can comprise a plurality of air outlets, and the plurality of air outlets can simultaneously blow air to dry the probe 02 needle tip in all directions. The shape of the air outlet includes but is not limited to circular, square, diamond, etc. The present disclosure does not make specific limitations on the shape and position of the air outlet, as long as it can meet the air outlet function.
[0053] It can be understood that the air pressure pipe can be connected to the existing compressed air main pipeline port of the probe machine tool, so as to simplify the structure of the probe machine tool.
[0054] In this way, by connecting the air pressure pipe connected to the drying tank 14 to the compressed air main pipeline port of the probe machine tool, the structure of the probe machine tool can be simplified, and by setting the adjusting valve on the air pressure pipe, the air pressure can be adjusted to control the drying effect.
[0055] Please refer to Figure 2 and Figure 3 In an optional embodiment provided by the present disclosure, the wet cleaning area 12 comprises a cover plate 15 connected to the ultrasonic cleaning tank 13 and the drying tank 14 through a connecting piece.
[0056] Specifically, the cover plate 15 is connected to the wet cleaning area 12 through a connecting piece, and further, the connecting part of the cover plate 15 and the ultrasonic cleaning tank 13 and the drying tank 14 is located on the side wall of the ultrasonic cleaning tank 13 away from the dry cleaning area 11 in the first direction D1. The cover plate 15 is connected to the ultrasonic cleaning tank 13 and the drying tank 14 through a connecting piece, which can be a hinge, a hinge, etc. When the ultrasonic cleaning tank 13 cleans the probe 02, the cover plate 15 is opened, and after cleaning, the cover plate 15 is covered to avoid pollution or leakage of cleaning liquid caused by other processes of the probe machine tool.
[0057] Thus, by adding the cover plate 15 in the wet cleaning area 12, the leakage of cleaning liquid can be reduced, and the pollution of the cleaning liquid by other processes of the probe machine is reduced.
[0058] Please continue to refer to Figure 2 and Figure 3 In an optional embodiment provided by the present disclosure, the cover plate 15 includes an open state and a closed state. In the open state, the cover plate 15 is located on the side of the wet cleaning area 12 away from the dry cleaning area 11 along the first direction D1. In the closed state, the cover plate 15 covers the side of the ultrasonic cleaning tank 13 and the drying tank 14 containing the opening.
[0059] Please refer to Figures 4 to 6 The present disclosure provides a needle testing device 100, which includes a carrying table 00, and the carrying table 00 includes the automatic cleaning probe assembly 10 as described above.
[0060] The needle testing device 100 includes a probe unit, which includes a probe card 01 and at least one probe 02. The carrying table 00 is movable relative to the probe unit along a first direction D1, a second direction D2, and a third direction D3 perpendicular to the plane on which the carrying table 00 is located.
[0061] Specifically, when the probe 02 needs to be cleaned, the carrying table 00 carrying the automatic cleaning probe assembly 10 moves to the corresponding position of the probe 02, the carrying table 00 rises along the third direction D3, and the cover plate 15 on the wet cleaning area 12 automatically opens. The probe tip 02 is first cleaned in the dry cleaning area 11 by friction with sandpaper, and then the carrying table 00 carrying the wet cleaning area 12 moves the ultrasonic cleaning tank 13 in the wet cleaning area 12 to the corresponding position of the probe 02 along the horizontal direction. When the probe tip 02 is immersed in the cleaning liquid, the ultrasonic device is started to clean the probe tip 02 by using the cavitation effect of ultrasonic waves. The cleaning liquid can be added in time according to the alarm of the liquid level sensor 131 during the cleaning process. After the cleaning is completed, the carrying table 00 carrying the wet cleaning area 12 moves the drying tank 14 in the wet cleaning area 12 to the corresponding position of the probe 02 along the horizontal direction. The drying tank 14 is connected to compressed air for drying operation. After drying is completed, the carrying table 00 descends along the third direction D3, and the cover plate 15 automatically closes, completing the entire cleaning and drying process.
[0062] Thus, by providing the needle testing device 100 including the automatic cleaning probe assembly 10, the probe card 01 can be directly operated in the probe machine cavity without being removed during cleaning of the probe tip 02. The cleaning time is saved, and the cleaning efficiency is improved.
[0063] It should be noted that the above is only an example, and does not represent the actual cleaning sequence. The size and cleaning steps of the dry cleaning area 11 and the wet cleaning area 12 can be set according to the actual situation of the probe machine, and the cleaning time can be controlled by adjusting the lifting stop parameter of the machine.
[0064] In summary, the automatic cleaning probe assembly and needle testing device provided by the present disclosure includes a dry cleaning area and a wet cleaning area. The dry cleaning area includes sandpaper, and the wet cleaning area includes an ultrasonic cleaning tank and a drying tank. The dry cleaning area can remove debris on the probe tip, and the ultrasonic cleaning tank can clean debris that is difficult to remove from the probe tip. The drying tank can dry the probe tip to improve the cleaning effect of the probe tip. The probe card does not need to be removed during cleaning, and the integrated operation can be realized directly in the probe table cavity. This reduces downtime, saves manpower and resources, and improves production line efficiency.
[0065] By injecting cleaning liquid into the ultrasonic cleaning tank and combining the cavitation effect of ultrasonic waves, contaminants that cannot be cleaned by grinding can be effectively cleaned, improving the cleaning effect.
[0066] By providing a liquid level sensor on the outer wall of the ultrasonic cleaning tank, the liquid level of the cleaning liquid can be measured in real time during the cleaning of the probe, so that the cleaning liquid can be replenished in time to ensure the smooth progress of the cleaning process.
[0067] By connecting the air pressure pipe connected to the drying tank to the compressed air main pipe of the probe table, the structure of the probe table can be simplified. By providing an adjusting valve on the air pressure pipe, the air pressure can be adjusted to control the drying effect.
[0068] By adding a cover plate to the wet cleaning area, the leakage of cleaning liquid can be reduced, and the contamination of cleaning liquid by other processes of the probe table can be reduced.
[0069] The above is only a specific implementation of the present disclosure, which enables those skilled in the art to understand or implement the present disclosure. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present disclosure. Therefore, the present disclosure will not be limited to these embodiments described herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. An automatically cleaning probe assembly, characterized by, The automatic cleaning probe assembly comprises: a dry cleaning area and a wet cleaning area, the wet cleaning area being located on one side of the dry cleaning area along a first direction, and being adjacent to the dry cleaning area along the first direction, the first direction being parallel to the plane on which the dry cleaning area is located; the dry cleaning area comprises sandpaper, the wet cleaning area comprises an ultrasonic cleaning tank and a drying tank, the drying tank being located on one side of the ultrasonic cleaning tank along a second direction, the second direction being parallel to the plane on which the dry cleaning area is located, and the second direction intersecting the first direction.
2. The self-cleaning probe assembly of claim 1, wherein, The length of the ultrasonic cleaning tank and the length of the drying tank along the second direction are equal to the length of the dry cleaning area.
3. The self-cleaning probe assembly of claim 1, wherein, The cleaning tank contains cleaning liquid.
4. The self-cleaning probe assembly of claim 3, wherein, The wet cleaning area comprises a liquid level sensor, the liquid level sensor being located on the outer wall of the ultrasonic cleaning tank.
5. The self-cleaning probe assembly of claim 3, wherein, The wet cleaning area comprises a cleaning liquid storage tank, the cleaning liquid storage tank being connected to the ultrasonic cleaning tank through a pipeline.
6. The self-cleaning probe assembly of claim 1, wherein, The drying tank is connected to an air pressure pipe, the air pressure pipe being used for inputting compressed air, and the air pressure pipe comprising an adjusting valve at the end close to the drying tank.
7. The self-cleaning probe assembly of claim 1, wherein, The wet cleaning area comprises a cover plate, the cover plate being connected to the ultrasonic cleaning tank and the drying tank through a connecting piece.
8. The self-cleaning probe assembly of claim 7, wherein, The cover plate comprises an open state and a closed state, in the open state, the cover plate is located on the side of the wet cleaning area away from the dry cleaning area along the first direction; in the closed state, the cover plate covers the side of the ultrasonic cleaning tank and the drying tank containing the opening.
9. A needle gauge device characterized by, The probe measuring device comprises a probe unit, the probe unit comprising at least one probe, and the carrying table is movable relative to the probe unit. The probe measuring device comprises a probe unit, the probe unit comprising at least one probe, and the carrying table is movable relative to the probe unit.