Exposure device

The roll material is clamped by upper and lower glass clamping components, and the flatness of the exposure area is ensured by driving components and vacuum suction components. This solves the flatness problem of thin materials and poor roll material condition in the prior art, and improves the exposure quality and cleanliness.

CN223566032UActive Publication Date: 2025-11-18HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
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Patent Information

Application Number
CN202423309294.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-31
Publication Date
2025-11-18
Estimated Expiration
2034-12-31

AI Technical Summary

Technical Problem

Existing roll-to-roll exposure machines cannot meet the flatness requirements of very thin materials or materials in poor roll condition during the exposure process, resulting in poor exposure quality.

Method used

The roll material is clamped by an upper glass clamp and a lower glass clamp, and the upper glass clamp is driven to rotate by a first drive assembly. Combined with a vacuum suction assembly and a tensioning assembly, the flatness of the roll material in the exposure area is ensured.

Benefits of technology

It enables flatness control of thin and poorly formed roll materials, improves exposure quality and efficiency, and facilitates cleaning and maintenance.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses an exposure device. The exposure device comprises a machine table; the glass clamping assembly is arranged on the machine table, the glass comprises an upper glass clamping piece and a lower glass clamping piece, the upper glass clamping piece and the lower glass clamping piece are oppositely arranged so as to be suitable for clamping materials between the upper glass clamping piece and the lower glass clamping piece, and one end of the upper glass clamping piece can rotate upwards relative to the lower glass clamping piece. Therefore, the upper glass clamping piece and the lower glass clamping piece are arranged to clamp the material at the position to be exposed, so that the roll material can be clamped, the flatness of the roll material in an exposure area can be ensured, and the exposure quality can be ensured.
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Description

TECHNICAL FIELD

[0001] The utility model relates to flexible material production technical field especially is related to a exposure device. BACKGROUND

[0002] The roll-to-roll mode is adopted to process the material, that is, the photosensitive material is sent into the exposure equipment in the form of roll, the exposure process is completed in the continuous movement process, and then the roll is collected. This mode can realize high speed and large area continuous pattern transfer.

[0003] The existing double-sided roll-to-roll exposure machine is provided with a supporting rod at the middle part of the suspended substrate, so that the substrate is in close contact with the supporting rod during the exposure process, and then the exposure is carried out. The advantage of this mode is to avoid cleaning, but the current structure cannot meet the requirements for very thin roll stock (such as roll stock with a thickness of less than 0.1 mm) and materials with poor roll stock state (such as roll stock with bulges in the middle). SUMMARY

[0004] The utility model discloses at least one of the technical problems existing in the prior art. To this end, the utility model provides an exposure device, which can ensure the flatness of the roll stock.

[0005] According to the exposure device provided in the utility model, the two tensioning components are arranged at the two ends of the machine table in the first direction, so that the material passing through the two tensioning components is tensioned, and the two tensioning components are selectively lifted or lowered at the same time. The glass clamping component is arranged on the machine table and located between the two tensioning components. The glass clamping component includes an upper glass clamping piece and a lower glass clamping piece. The upper glass clamping piece and the lower glass clamping piece are arranged oppositely to clamp the material therebetween. One end of the upper glass clamping piece can be rotated upward relative to the lower glass clamping piece.

[0006] Therefore, the utility model clamps the material at the exposure position by arranging the upper glass clamping piece and the lower glass clamping piece. In this way, the roll stock can be clamped, the flatness of the roll stock in the exposure area can be ensured, and the quality of the exposure can be ensured.

[0007] According to some embodiments of the utility model, the exposure device further includes a first driving component. The first driving component includes a first driving piece, a rotating shaft and a connecting block. The first driving piece is in transmission connection with the rotating shaft. The connecting block is arranged on the rotating shaft and connected with one end of the upper glass clamping piece. The first driving piece selectively drives the rotating shaft to rotate, so as to drive one end of the upper glass clamping piece to rotate through the connecting block.

[0008] According to some embodiments of the present application, the connecting blocks are multiple, and the multiple connecting blocks are arranged at intervals in the length direction of the rotating shaft and are connected to one end of the upper glass clamping piece.

[0009] According to some embodiments of the present application, the upper glass clamping piece comprises an upper frame piece, an upper glass piece and an upper fixing piece, the upper frame piece is arranged on the circumferential outer side of the upper glass piece, the upper glass piece is arranged on the upper frame piece and is tightly fixed by the upper fixing piece; the lower glass clamping piece comprises a lower frame piece, a lower glass piece and a lower fixing piece, the lower frame piece is arranged on the circumferential outer side of the lower glass piece, the lower glass piece is arranged on the lower frame piece and is tightly fixed by the lower fixing piece, and the upper glass piece and the lower glass piece are suitable for clamping the material therebetween.

[0010] According to some embodiments of the present application, a first sealing ring is arranged between the upper glass piece and the upper frame piece, and a second sealing ring is arranged between the lower glass piece and the lower frame piece; a third sealing ring is arranged between the upper fixing piece and the upper glass piece, and a fourth sealing ring is arranged between the lower fixing piece and the lower glass piece.

[0011] According to some embodiments of the present application, a fifth sealing ring is arranged between the upper frame piece and the lower frame piece.

[0012] According to some embodiments of the present application, the glass clamping assembly further comprises a vacuum suction piece, and the area between the upper glass clamping piece and the lower glass clamping piece is connected to the vacuum suction piece.

[0013] According to some embodiments of the present application, the exposure device further comprises a second driving assembly, the second driving assembly is in transmission connection with the tensioning assembly, the second driving assembly is two, and the two second driving assemblies are one-to-one corresponding to the two tensioning assemblies.

[0014] According to some embodiments of the present application, the tensioning assembly comprises a first roller shaft and a second roller shaft arranged at intervals, the first roller shaft is closer to the glass clamping assembly than the second roller shaft in a first direction, and the first roller shaft is located above the second roller shaft.

[0015] According to some embodiments of the present application, the exposure device further comprises a suction disc support piece, the suction disc support piece is arranged on the machine table, the suction disc support piece is located on at least one side of the glass clamping assembly in the first direction and between the tensioning assembly and the glass clamping assembly, and the upper surface of the suction disc support piece and the upper surface of the lower glass clamping piece are flush with each other.

[0016] Additional aspects and advantages of the present application will be given in part in the following description and will be apparent from the description, or will be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above and / or additional aspects and advantages of the present application will become apparent and be readily understood from the following description, taken in conjunction with the accompanying drawings, in which:

[0018] Figure 1 is a partial schematic view of an exposure device according to an embodiment of the present application;

[0019] Figure 2 is a schematic view of an exposure device according to an embodiment of the present application;

[0020] Figure 3 is a schematic view of an upper glass clamping member according to an embodiment of the present application;

[0021] Figure 4 is a schematic view of a lower glass clamping member according to an embodiment of the present application;

[0022] Figure 5 is a schematic view of a tensioning assembly and a second driving assembly according to an embodiment of the present application;

[0023] Figure 6 is a partial schematic view of an exposure device according to an embodiment of the present application.

[0024] REFERENCE NUMERALS:

[0025] 100, exposure device; 200, material;

[0026] 10, machine table;

[0027] 20, tensioning assembly; 21, first roller shaft; 22, second roller shaft; 23, roller shaft support;

[0028] 30, glass clamping assembly; 31, upper glass clamping member; 311, upper frame member; 312, upper glass member; 313, upper fixing member; 314, first sealing ring; 315, third sealing ring; 32, lower glass clamping member; 321, lower frame member; 322, lower glass member; 323, lower fixing member; 324, second sealing ring; 325, fourth sealing ring; 33, vacuum suction member;

[0029] 40, first driving assembly; 41, first driving member; 42, rotating shaft; 43, connecting block; 44, motor fixing base; 45, coupling; 46, bearing with seat; 47, speed reducer;

[0030] 50, fifth sealing ring; 60, second driving assembly; 70, suction disc support member. DETAILED DESCRIPTION

[0031] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0032] The embodiments of the present application are described in detail below with reference to the accompanying drawings. Figures 1-6 The exposure device 100 according to the embodiments of the present application is described below.

[0033] In combination with Figure 1 As shown in the figure, the exposure device 100 according to the embodiments of the present application can mainly include: a machine table 10, a tensioning assembly 20 and a glass clamping assembly 30, wherein the tensioning assembly 20 is two, and the two tensioning assemblies 20 are respectively arranged at the two ends of the machine table 10 in the first direction, so as to tension the material 200 sequentially threaded through the two tensioning assemblies 20, and the two tensioning assemblies 20 selectively ascend and descend at the same time.

[0034] Specifically, the machine table 10 is the basic structure of the exposure device 100, and can provide a stable and reliable setting position for the tensioning assembly 20 and the glass clamping assembly 30. The tensioning assembly 20 can be used to tension the material 200 on the front and rear two sets of take-up and pay-off devices, so as to ensure that the material 200 is unfolded and flattened in the exposure device 100. In the embodiments of the present application, the tensioning assembly 20 is two, and the two tensioning assemblies 20 are respectively arranged at the two ends of the machine table 10 in the first direction, so as to ensure that the material 200 is supported at the two ends of the exposure device 100 in the first direction, so that the material 200 can be unfolded and fixed on the exposure device 100.

[0035] Further, the glass clamping assembly 30 is arranged on the machine table 10 and located between the two tensioning assemblies 20, and the glass clamping assembly 30 includes an upper glass clamping piece 31 and a lower glass clamping piece 32. The upper glass clamping piece 31 and the lower glass clamping piece 32 are arranged opposite to each other, and when the material 200 is unfolded on the exposure device 100, the lower glass clamping piece 32 can support the material 200 in the up-down direction, and the upper glass clamping piece 31 can press the material 200 downward, so that the material 200 on the exposure device 100 can be clamped by the upper glass clamping piece 31 and the lower glass clamping piece 32 together, so as to ensure that the material 200 is arranged flat in the exposure area, so as to ensure the exposure quality.

[0036] In the embodiments of the present application, the exposure area of the exposure device 100 corresponds to the position of the glass clamping assembly 30.

[0037] Further, one end of the upper glass clamping piece 31 is rotatable upward relative to the lower glass clamping piece 32. In this way, on the one hand, the upper glass clamping piece 31 can be rotated upward to facilitate cleaning of the upper glass clamping piece 31, and on the other hand, when the exposure of the material 200 is completed, the upper glass clamping piece 31 can be rotated relative to the lower glass clamping piece 32, so that the upper glass clamping piece 31 cancels the limiting of the material 200, and the material 200 can move along the first direction on the exposure device 100, so that the two roll feeding and unwinding devices before and after the exposure device 100 complete the material feeding work to update the material 200 to be exposed.

[0038] In the embodiment of the utility model, after the upper glass clamping piece 31 is rotated upward relative to the lower glass clamping piece 32, the upper glass clamping piece 31 can be rotated downward relative to the lower glass clamping piece 32 to clamp the upper glass clamping piece 31 and the lower glass clamping piece 32 again. In this way, the glass clamping assembly 30 can be selectively opened and closed.

[0039] Therefore, the utility model discloses a glass clamping assembly 30, which comprises an upper glass clamping piece 31 and a lower glass clamping piece 32, and the upper glass clamping piece 31 and the lower glass clamping piece 32 are rotatable relative to each other.

[0040] As shown in Figs. 1 to 3, the exposure device 100 comprises a glass clamping assembly 30, a material feeding and unwinding device 20, a material feeding and unwinding device 30, and a material feeding and unwinding device 40. Figure 1 As shown in Figs. 1 to 3, the exposure device 100 comprises a glass clamping assembly 30, a material feeding and unwinding device 20, a material feeding and unwinding device 30, and a material feeding and unwinding device 40. Figure 6 As shown in Figs. 1 to 3, the exposure device 100 comprises a glass clamping assembly 30, a material feeding and unwinding device 20, a material feeding and unwinding device 30, and a material feeding and unwinding device 40.

[0041] Specifically, in the embodiment of the utility model, the first driving piece 41 comprises a driving motor and a speed reducer 47, and the driving motor and the speed reducer 47 are in transmission connection and are fixed on the machine table 10 through a motor fixing seat 44. The first driving piece 41 can convert electric power into torque and output under the condition of power supply. The shaft 42 is connected to the first driving piece 41 through a shaft coupling 45, and the end of the shaft 42 away from the first driving piece 41 is fixed on the machine table 10 through a belt seat bearing 46. The connecting block 43 is located in the region between the shaft coupling 45 and the belt seat bearing 46 in the first direction of the shaft 42, so that the torque of the first driving piece 41 can be transmitted to the shaft 42 to make the shaft 42 rotate, and the connecting block 43 can drive the upper glass clamping piece 31 to rotate relative to the lower glass clamping piece 32 to selectively open and close the glass clamping assembly 30.

[0042] Further, the connecting blocks 43 are arranged on the rotating shaft 42, and rotate synchronously with the rotating shaft 42 when the rotating shaft 42 rotates. One end of the upper glass clamping member 31 is connected with the connecting blocks 43, so that the upper glass clamping member 31 can be driven to rotate by the connecting blocks 43 when the rotating shaft 42 rotates, and the first driving member 41 can drive the upper glass clamping member 31 to rotate relative to the lower glass clamping member 32, so that the glass clamping assembly 30 can selectively clamp the material 200.

[0043] As shown in Figure 6 The connecting blocks 43 are arranged on the rotating shaft 42, and rotate synchronously with the rotating shaft 42 when the rotating shaft 42 rotates. One end of the upper glass clamping member 31 is connected with the connecting blocks 43, so that the upper glass clamping member 31 can be driven to rotate by the connecting blocks 43 when the rotating shaft 42 rotates, and the first driving member 41 can drive the upper glass clamping member 31 to rotate relative to the lower glass clamping member 32, so that the glass clamping assembly 30 can selectively clamp the material 200.

[0044] Specifically, the connecting blocks 43 are arranged on the rotating shaft 42, so that the connection position of the rotating shaft 42 and the upper glass clamping member 31 can be increased, and the connection reliability of the upper glass clamping member 31 and the rotating shaft 42 can be improved. The connecting blocks 43 are arranged along the length direction of the rotating shaft 42, so that the force of the connecting blocks 43 on the upper glass clamping member 31 can be evenly distributed along one end of the upper glass clamping member 31.

[0045] In this way, on the one hand, the connection reliability of one end of the upper glass clamping member 31 and the rotating shaft 42 can be ensured, so that the arrangement reliability of the upper glass clamping member 31 on the exposure device 100 can be ensured.

[0046] On the other hand, when the rotating shaft 42 rotates, the connecting blocks 43 can simultaneously apply force to the upper glass clamping member 31 along the length direction of the rotating shaft 42, so as to drive the upper glass clamping member 31 to rotate about the rotating shaft 42 as the rotation axis and stably rotate relative to the lower glass clamping member 32. In this way, when the upper glass clamping member 31 rotates relative to the lower glass clamping member 32, the upper glass clamping member 31 can timely and completely separate from the material 200 on the lower glass clamping member 32, so that the reliability of the position of the material 200 being movable can be ensured.

[0047] In the embodiment of the present application, the length direction of the rotating shaft 42 is Figure 1 the first direction in the figure.

[0048] As shown in Figure 2 and Figure 3 The upper glass clamping member 31 comprises an upper frame member 311, an upper glass member 312 and an upper fixing member 313. The upper frame member 311 is arranged on the circumferential outer side of the upper glass member 312, the upper glass member 312 is arranged on the upper frame member 311, and the upper glass member 312 is tightly fixed by the upper fixing member 313.

[0049] Specifically, in the embodiment of the utility model, the upper glass piece 312 in the upper glass clamping piece 31 is fixed in the upper frame piece 311 through the upper fixing piece 313, the upper frame piece 311 can play the role of support and protection for the upper glass piece 312. The upper fixing piece 313 is connected with the upper frame piece 311 through screw, can press the upper glass piece 312 in the upper frame piece 311, like this can guarantee the setting stability of the upper glass piece 312 in the upper frame piece 311.

[0050] Further, the lower glass clamping piece 32 includes lower frame piece 321, lower glass piece 322 and lower fixing piece 323, lower frame piece 321 is set to the circumferential outside of lower glass piece 322, lower glass piece 322 is set to lower frame piece 321 and is fixedly pressed through lower fixing piece 323, upper glass piece 312 and lower glass piece 322 are suitable for clamping material 200 between the two.

[0051] Specifically, in the embodiment of the utility model, the lower glass piece 322 in the lower glass clamping piece 32 is fixed in the lower frame piece 321 through the lower fixing piece 323, the lower frame piece 321 can play the role of support and protection for the lower glass piece 322. The lower fixing piece 323 is connected with the lower frame piece 321 through screw, can press the lower glass piece 322 in the lower frame piece 321, like this can guarantee the setting stability of the lower glass piece 322 in the lower frame piece 321.

[0052] Combination Figure 4 As shown in the figure, the first sealing ring 314 is arranged between the upper glass piece 312 and the upper frame piece 311, and the second sealing ring 324 is arranged between the lower glass piece 322 and the lower frame piece 321.

[0053] Specifically, the first sealing ring 314 is arranged between the upper glass piece 312 and the upper frame piece 311, which can prevent air leakage between the upper glass piece 312 and the upper frame piece 311 due to machining or assembly errors, thereby ensuring the sealing property between the upper glass piece 312 and the upper frame piece 311. The second sealing ring 324 is arranged between the lower glass piece 322 and the lower frame piece 321, which can prevent air leakage between the lower glass piece 322 and the lower frame piece 321 due to machining or assembly errors, thereby ensuring the sealing property between the lower glass piece 322 and the lower frame piece 321.

[0054] Further, the third sealing ring 315 is arranged between the upper fixing member 313 and the upper glass member 312, and the fourth sealing ring 325 is arranged between the lower fixing member 323 and the lower glass member 322. Specifically, the third sealing ring 315 is arranged between the upper fixing member 313 and the upper glass member 312, so that not only the sealing property between the upper fixing member 313 and the upper glass member 312 can be ensured, and air leakage between the upper fixing member 313 and the upper glass member 312 due to machining or assembly errors can be prevented, but also buffering between the upper glass member 312 and the upper fixing member 313 can be achieved, and the upper glass member 312 can be prevented from being broken due to the pressing force of the upper fixing member 313, so that the structural reliability of the upper glass clamping member 31 can be improved.

[0055] Further, the fourth sealing ring 325 is arranged between the lower fixing member 323 and the lower glass member 322, so that not only the sealing property between the lower fixing member 323 and the lower glass member 322 can be ensured, and air leakage between the lower fixing member 323 and the lower glass member 322 due to machining or assembly errors can be prevented, but also buffering between the lower glass member 322 and the lower fixing member 323 can be achieved, and the lower glass member 322 can be prevented from being broken due to the pressing force of the lower fixing member 323, so that the structural reliability of the upper glass clamping member 31 can be improved.

[0056] In combination Figure 4 The fifth sealing ring 50 is arranged between the upper frame member 311 and the lower frame member 321. Specifically, the fifth sealing ring 50 is arranged between the upper frame member 311 and the lower frame member 321, so that air leakage between the upper frame member 311 and the lower frame member 321 due to machining or assembly errors can be prevented, and the sealing property between the upper frame member 311 and the lower frame member 321 can be ensured.

[0057] In combination Figure 4 And Figure 6 As shown in the drawings, the glass clamping assembly 30 further comprises a vacuum suction member 33, and the region between the upper glass clamping member 31 and the lower glass clamping member 32 is in communication with the vacuum suction member 33. Specifically, the vacuum suction member 33 can suck vacuum in a certain range of space. In the embodiment of the present application, when the material 200 needs to be exposed, the region between the upper glass clamping member 31 and the lower glass clamping member 32 is defined by the upper glass member 312, the upper fixing member 313, the upper frame member 311, the lower glass member 322, the lower fixing member 323, the lower frame member 321, the first sealing ring 314, the second sealing ring 324, the third sealing ring 315, the fourth sealing ring 325 and the fifth sealing ring 50, and the vacuum suction member 33 is in communication with the region between the upper glass clamping member 31 and the lower glass clamping member 32.

[0058] When the material to be exposed moves to the area between the upper glass clamping part 31 and the lower glass clamping part 32, the area can be vacuumed by the vacuum suction part 33, so that the material can be kept flat in the glass clamping assembly 30, thereby ensuring the quality of exposure.

[0059] In combination Figure 5 As shown, the exposure device 100 further comprises a second driving assembly 60, the second driving assembly 60 is in transmission connection with the tensioning assembly 20, and the second driving assembly 60 is two, and the two second driving assemblies 60 correspond to the two tensioning assemblies 20 one by one. Specifically, in the embodiment of the utility model, the second driving assembly 60 includes but is not limited to an electric cylinder. The electric cylinder is in transmission connection with the tensioning assembly 20 and can drive the tensioning assembly 20 to move relative to the machine table 10.

[0060] In the embodiment of the utility model, two electric cylinders are arranged on the exposure device 100, and the two electric cylinders correspond to the two tensioning assemblies 20 one by one, so that the two electric cylinders can drive the corresponding tensioning assemblies 20 to move relative to the machine table 10.

[0061] In the embodiment of the utility model, the material 200 passes through the tensioning assembly 20 to move relative to the machine table 10 together with the tensioning assembly 20, and the tensioning assembly 20 moves relative to the machine table 10 in the up-down direction to control the lifting of the material 200 on the exposure device 100.

[0062] Further, after the upper glass clamping part 31 rotates upward relative to the lower glass clamping part 32 under the action of the first driving assembly 40, the second driving assembly 60 can drive the material 200 to rise from the upper surface of the lower glass assembly, which can facilitate the two roll laying devices before and after the exposure device 100 to complete the material pulling action, and can facilitate the cleaning of the upper surface of the lower glass assembly, and facilitate wiping, so as to ensure the exposure quality in the subsequent sequence.

[0063] In combination Figure 5 As shown, the tensioning assembly 20 comprises a first roller shaft 21 and a second roller shaft 22 arranged at intervals, and the first roller shaft 21 is closer to the glass clamping assembly 30 in the first direction than the second roller shaft 22, and the first roller shaft 21 is located above the second roller shaft 22. In this way, the material 200 can enter the tensioning assembly 20 from below the side of the second roller shaft 22 away from the first roller shaft 21 in the first direction, pass through between the second roller shaft 22 and the first roller shaft 21, and then extend from above the first roller shaft 21 to the glass clamping assembly 30. In this way, not only can the material 200 be laid on the exposure device 100, but also the material 200 can pass through the tensioning assembly 20 so that the material 200 can be lifted together with the tensioning assembly 20.

[0064] Under the action of the two front and back roll-off devices of the exposure device 100, the material 200 can be flattened and tensioned under the action of the first roller shaft 21 and the second roller shaft 22 to ensure the flatness of the material 200 in the exposure area.

[0065] Further, the top of the first roller shaft 21 is flush with the upper surface of the lower glass clamping piece 32, so that the material 200 extending from between the second roller shaft 22 and the first roller shaft 21 to the top of the first roller shaft 21 is flush with the material 200 arranged on the upper surface of the lower glass clamping piece 32, which is beneficial to improve the flatness of the material 200 in the exposure area and improve the exposure quality.

[0066] In the embodiment of the utility model, the tensioning assembly 20 further includes two roller shaft supports 23, the two roller shaft supports 23 are respectively corresponding to the two electric cylinders, and are connected through screws, the first roller shaft 21 and the second roller shaft 22 are both arranged between the two roller shaft supports 23, which can ensure the setting reliability of the first roller shaft 21 and the second roller shaft 22 in the tensioning assembly 20 and the relative position setting reliability of the first roller shaft 21 and the second roller shaft 22 in the exposure device 100.

[0067] In combination with Figs. Figure 1 and Figure 6 As shown, the utility model further includes a suction disc support 70, the suction disc support 70 is arranged on the machine table 10, the suction disc support 70 is located at least one side of the first direction of the glass clamping assembly 30 and between the tensioning assembly 20 and the glass clamping assembly 30.

[0068] Specifically, in the embodiment of the utility model, the suction disc support 70 is located between the glass clamping assembly 30 and the tensioning assembly 20 to support the material 200 not clamped by the glass clamping assembly 30, which is beneficial to ensure the flatness of the material 200 when clamped in the glass clamping assembly 30.

[0069] Further, the upper surface of the suction disc support 70 is flush with the upper surface of the lower glass clamping piece 32, so that the material 200 located on the upper surface of the suction disc support 70 is flush with the material 200 located on the lower glass clamping piece 32, which is beneficial to improve the flatness of the material 200 in the exposure area and improve the exposure quality.

[0070] In the embodiment of the utility model, when the material 200 needs to be exposed, the electric cylinder of the tensioning assembly 20 is in the retracted state. In the exposure area, the upper glass clamping piece 31 of the glass clamping assembly 30 is driven by the first driving assembly 40 to rotate downward relative to the lower glass clamping piece 32 to clamp the material 200 by the glass clamping assembly 30, and the suction vacuum piece 33 suctions vacuum in the area between the upper glass clamping piece 31 and the lower glass clamping piece 32 to ensure the flatness of the material 200.

[0071] In the non-exposure area, the suction disc support 70 performs a vacuum breaking process on the area between its upper surface and the material 200, so as to release the material 200, and then the tension assembly 20 is driven by the electric cylinder to lift the first roller shaft 21 and the second roller shaft 22, so as to lift the material 200, and then the material 200 is pulled by the unwinding and winding devices of the exposure device 100 and the exposure device 100 behind the exposure device 100, and waits for the exposure of the next frame of graphics.

[0072] Further, after the exposure of a frame of graphics is completed, in the exposure area, the suction vacuum 33 performs a vacuum breaking process on the area between the upper glass clamping member 31 and the lower glass clamping member 32, and at the same time, the upper glass member 312 rotates relative to the lower glass clamping member 32 under the driving of the first driving assembly 40, so as to open the glass clamping assembly 30 and release the material 200.

[0073] In the non-exposure area, the suction disc support 70 performs a vacuum breaking process on the area between its upper surface and the material 200, so as to release the material 200, and then the tension assembly 20 is driven by the electric cylinder to lift the first roller shaft 21 and the second roller shaft 22, so as to lift the material 200, and then the material 200 is pulled by the unwinding and winding devices of the exposure device 100 and the exposure device 100 behind the exposure device 100, and waits for the exposure of the next frame of graphics.

[0074] In the embodiments of the present application, the exposure device 100 can also facilitate the wiping and cleaning of the upper glass clamping member 31 and the lower glass clamping member 32, without the need to cut the material 200 or wait for the completion of the exposure of a roll of material 200, so that once dirt is found on the upper glass clamping member 31 or the lower glass clamping member 32 during the exposure process, the dirt can be found and cleaned in time, so as to ensure the exposure quality.

[0075] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the exemplary description of the above terms does not necessarily mean the same embodiment or example.

[0076] Although the embodiments of the present application have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and purposes of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. An exposure apparatus, characterized in that, include: Machine tool; The tensioning components are two in number, and the two tensioning components are respectively disposed at both ends of the machine in the first direction to tension the material that passes through the two tensioning components in sequence. The two tensioning components can selectively rise and fall simultaneously. A glass clamping assembly is disposed on a machine base and located between two tensioning assemblies. The glass clamping assembly includes an upper glass clamping member and a lower glass clamping member, which are disposed opposite to each other to clamp the material between them. One end of the upper glass clamping member is rotatable upward relative to the lower glass clamping member.

2. The exposure apparatus according to claim 1, characterized in that, It also includes a first drive assembly, which includes a first drive member, a rotating shaft, and a connecting block. The first drive member is connected to the rotating shaft in a transmission manner. The connecting block is disposed on the rotating shaft and connected to one end of the upper glass clamping member. The first drive member selectively drives the rotating shaft to rotate, so as to drive one end of the upper glass clamping member to rotate through the connecting block.

3. The exposure apparatus according to claim 2, characterized in that, There are multiple connecting blocks, which are spaced apart along the length of the rotating shaft and are all connected to one end of the upper glass clamping member.

4. The exposure apparatus according to claim 1, characterized in that, The upper glass clamping member includes an upper frame member, an upper glass member, and an upper fixing member. The upper frame member is disposed on the circumferential outer side of the upper glass member, and the upper glass member is disposed on the upper frame member and is pressed and fixed by the upper fixing member. The lower glass clamping member includes a lower frame member, a lower glass member, and a lower fixing member. The lower frame member is disposed on the outer circumferential side of the lower glass member, and the lower glass member is disposed on the lower frame member and pressed and fixed by the lower fixing member. The upper glass member and the lower glass member are adapted to clamp the material between them.

5. The exposure apparatus according to claim 4, characterized in that, A first sealing ring is provided between the upper glass component and the upper frame component, and a second sealing ring is provided between the lower glass component and the lower frame component; A third sealing ring is provided between the upper fixing member and the upper glass member, and a fourth sealing ring is provided between the lower fixing member and the lower glass member.

6. The exposure apparatus according to claim 4, characterized in that, A fifth sealing ring is provided between the upper frame member and the lower frame member.

7. The exposure apparatus according to claim 1, characterized in that, The glass clamping assembly also includes a vacuum suction component, and the area between the upper glass clamping component and the lower glass clamping component is connected to the vacuum suction component.

8. The exposure apparatus according to claim 1, characterized in that, It also includes a second drive assembly, which is connected to the tensioning assembly in a transmission manner. There are two second drive assemblies, and each of the two second drive assemblies corresponds to one of the two tensioning assemblies.

9. The exposure apparatus according to claim 8, characterized in that, The tensioning assembly includes a first roller and a second roller arranged at intervals. The first roller is closer to the glass clamping assembly in a first direction than the second roller, and the first roller is located above the second roller.

10. The exposure apparatus according to claim 1, characterized in that, It also includes a suction cup support, which is disposed on the machine base. The suction cup support is located on at least one side of the glass clamping assembly in the first direction and between the tensioning assembly and the glass clamping assembly. The upper surface of the suction cup support is flush with the upper surface of the lower glass clamping assembly.