Polishing pad renovating device

Abstract

The utility model discloses a polishing pad renovating device. The polishing pad renovating device comprises a rotating shaft, a second spherical bearing, a mounting base, a machining disc, a transmission part and at least three connecting assemblies. Each connecting assembly comprises a second spherical bearing, a third spherical bearing and a guide column connected to the second spherical bearing and the third spherical bearing. When the rotating shaft rotates, the transmission part can drive the mounting base to rotate through the multiple connecting assemblies, and the grinding face of the machining disc can machine the surface of the part to be ground. When the rotating shaft rotates and the surface of the to-be-ground piece is provided with a fluctuating structure, the machining disc can enable the guide column of the at least one connecting assembly to move relative to the third spherical bearing according to the fluctuating structure through the mounting base, and then the machining disc swings. Therefore, the machining disc can rotate along with the fluctuating structure on the surface of the to-be-ground part, so that the surface of the to-be-ground part is uniformly ground, and the service life of the to-be-ground part is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to a finishing device, especially a polishing pad finishing device. BACKGROUND

[0002] In semiconductor processes, a polishing pad in a CMP (Chemical Mechanical Polishing) machine is often used to polish wafers so that the surfaces of the wafers are flat and smooth. However, the polishing pad will be worn out during the polishing process, thereby reducing the service life of the polishing pad.

[0003] Furthermore, the surface of the polishing pad will become uneven after polishing wafers, and the existing finishing device cannot properly finish the polishing pad according to the uneven surface. Therefore, the applicant believes that the above defects can be improved, and after careful research and application of scientific principles, the utility model is finally proposed, which is reasonable in design and effectively improves the above defects.

[0004] UTILITY MODEL CONTENTS

[0005] The utility model embodiment is to provide a polishing pad finishing device which can effectively improve the defects that may be caused by the existing polishing pad finishing device.

[0006] One embodiment of the utility model discloses a polishing pad finishing device, which comprises a rotating shaft, a first spherical bearing, a mounting seat, a processing disc, a transmission member, and at least three connecting assemblies. The rotating shaft is defined by a central axis and can rotate about the central axis to perform a rotating operation. The first spherical bearing is installed at the bottom end of the rotating shaft. The mounting seat is connected to the first spherical bearing and can swing relative to the rotating shaft. The processing disc is fixed to the bottom of the mounting seat and can be used to process the surface of a to-be-ground part. The transmission member is fixed to the rotating shaft. Each connecting assembly comprises a second spherical bearing, a third spherical bearing, and a guide column. The second spherical bearing is rotatably connected to the mounting seat. The third spherical bearing is rotatably connected to the transmission member. One end of the guide column is connected to the second spherical bearing, and the other end of the guide column is connected to the third spherical bearing. When the rotating shaft performs the rotating operation, the transmission member can drive the mounting seat to rotate through the connecting assemblies, and the grinding surface of the processing disc can process the surface of the to-be-ground part. When the rotating shaft performs the rotating operation and the surface of the to-be-ground part has a relief structure, the processing disc can make the guide column of at least one connecting assembly move relative to the third spherical bearing according to the relief structure through the mounting seat, thereby making the processing disc swing.

[0007] Optionally, the mounting seat further comprises a flange and a bushing fixed to the flange. The flange is fixed to the first spherical bearing, and the first spherical bearing is fixed to the bushing.

[0008] Optionally, there is an annular gap between the bushing and the rotating shaft, and the annular gap allows the mounting base to swing relative to the rotating shaft with the first spherical bearing as a pivot point.

[0009] Optionally, each second spherical bearing further comprises a machine buckle, and the guide post is fixed in the second spherical bearing through the machine buckle.

[0010] Optionally, each third spherical bearing further comprises a buckle ring, and the buckle ring is capable of limiting the guide post when the rotating shaft performs a rotating operation, so that the guide post drives the mounting base to rotate.

[0011] Optionally, each connecting assembly is further provided with a spring outside the guide post, one end of the spring abuts against the transmission member, and the other end of the spring selectively abuts against one of the mounting base and the second spherical bearing in each connecting assembly.

[0012] Optionally, the periphery of each guide post is further provided with a thread, and there is a spacing between the second spherical bearing and the third spherical bearing of each connecting assembly; in each connecting assembly, the thread of the guide post is capable of being locked into the corresponding second spherical bearing.

[0013] Optionally, at least three connecting assemblies are arranged around the central shaft; wherein, any two adjacent connecting assemblies have a configuration angle relative to the central shaft, and any two configuration angles are not more than 5 degrees different.

[0014] Optionally, each connecting assembly further comprises a force adjusting block, the force adjusting block is arranged on the guide post, and the other end of the spring abuts against the force adjusting block.

[0015] Optionally, each guide post and the force adjusting block are combined together in a threaded manner.

[0016] In summary, the polishing pad repairing device disclosed in the embodiment of the present application can make the polishing pad repairing device rotate the processing disc along with the undulating structure of the surface of the to-be-ground part when the to-be-ground part is ground, so that the surface of the to-be-ground part is uniformly ground, and the service life of the to-be-ground part is improved.

[0017] For further understanding of the features and technical contents of the present application, please refer to the following detailed description and drawings of the present application, but these descriptions and drawings are only used to illustrate the present application, and do not limit the protection scope of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is a three-dimensional schematic view of the polishing pad repairing device of the embodiment one of the present application.

[0019] Figure 2 Figure 2 is a perspective view of the polishing pad dressing device of Figure 1 from another angle.

[0020] Figure 3 Figure 3 is a cross-sectional view taken along section line III-III in Figure 2. Figure 2

[0021] Figure 4 Figure 4 is a cross-sectional view of the polishing pad dressing device of Figure 1 in an initial position.

[0022] Figure 5 Figure 5 is a cross-sectional view of the polishing pad dressing device of Figure 1 passing over a relief structure on the surface of the material to be ground.

[0023] Figure 6 Figure 6 is a cross-sectional view taken along section line VI-VI in Figure 5. Figure 2

[0024] Figure 7 Figure 7 is a perspective view of the connecting assembly of the polishing pad dressing device of Figure 1.

[0025] Figure 8 Figure 8 is a cross-sectional view of the polishing pad dressing device of Figure 1.

[0026] Figure 9 Figure 9 is a cross-sectional view of the polishing pad dressing device of Figure 1. Figure 8 Figure 10 is a cross-sectional view of the polishing pad dressing device of Figure 1 after adjustment of the connecting assembly.

[0027] Figure 10 Figure 11 is a cross-sectional view of the polishing pad dressing device of Figure 1. DETAILED DESCRIPTION

[0028] The following is a description of the embodiments of the polishing pad dressing device disclosed in the present application by means of specific, concrete embodiments. Those skilled in the art can understand the advantages and effects of the present application from the disclosure herein. The present application can be implemented or applied by other different concrete embodiments, and each detail in the present application can be modified and changed in various ways based on different viewpoints and applications without departing from the concept of the present application. In addition, it should be noted that the drawings of the present application are only simple schematic illustrations and are not drawn to scale. The following embodiments will further describe the technical content of the present application in detail, but the disclosure is not intended to limit the scope of protection of the present application.

[0029] ​​It should be understood that while terms such as “first,” “second,” and “third” may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term “or” as used herein may, as appropriate, include any combination of one or more of the associated listed items.

[0030] [Example 1]

[0031] Please see Figures 1 to 7 As shown, Figures 1 to 7 This is one embodiment of the present invention. This embodiment discloses a polishing pad repair device 100. The polishing pad repair device 100 can be applied to a polishing machine (not shown in the figure); for example, the polishing pad repair device 100 can be installed in a CMP (Chemical Mechanical Polishing) machine to process (e.g., grind or repair) a polishing pad to extend the service life of the polishing pad.

[0032] Please see Figures 1 to 3 As shown, the polishing pad dressing device 100 includes a rotating shaft 1, a first spherical bearing 2 mounted on the bottom end of the rotating shaft 1, a mounting base 3 connected to the first spherical bearing 2, a processing disc 4 fixed to the bottom of the mounting base 3, a transmission component 5 fixed on the rotating shaft 1, and at least three connecting components 6 connecting the mounting base 3 and the transmission component 5. The polishing pad dressing device 100 is capable of grinding a surface S of a workpiece P to be ground, and the polishing pad dressing device 100 can oscillate according to the undulating structure U of the surface S (e.g., ...). Figure 5 (As shown). In this embodiment, the workpiece P to be polished can be the polishing pad, but this utility model is not limited thereto.

[0033] It should be noted that the number of connecting components 6 in this embodiment is described as three; however, in other embodiments not shown in this utility model, the number of connecting components 6 may also be four or five, and this utility model is not limited thereto.

[0034] Please see Figure 3 As shown, the rotating shaft 1 is defined by a central axis Z, and the rotating shaft 1 can rotate about the central axis Z to perform a rotation operation. That is, when the rotating shaft 1 performs the rotation operation, the rotating shaft 1 will rotate about the central axis Z, and the rotating shaft 1 can rotate counterclockwise or clockwise.

[0035] The first spherical bearing 2 is installed at the bottom end of the rotating shaft 1, and the mounting seat 3 is connected to the first spherical bearing 2. That is, the mounting seat 3 is arranged at the bottom end of the rotating shaft 1 through the first spherical bearing 2, and the mounting seat 3 can swing at different angles relative to the rotating shaft 1 through the first spherical bearing 2.

[0036] Further, the first spherical bearing 2 includes a first inner ring 21 and a first outer ring 22. The first inner ring 21 is combined with the rotating shaft 1, and the first outer ring 22 is combined with the mounting seat 3, so that the mounting seat 3 can swing with the uneven structure U of the surface S of the workpiece P on the central axis Z with the first spherical bearing 2 as a pivot point, but without moving. That is, the mounting seat 3 has only a rotational degree of freedom relative to the rotating shaft 1, without a displacement degree of freedom.

[0037] It is worth mentioning that the mounting seat 3 includes a flange 31 and a bushing 32 fixed to the flange 31. The flange 31 is fixed to the first spherical bearing 2, and the bushing 32 is fixed to the side of the flange 31 where the first spherical bearing 2 is fixed, and the flange 31 and the bushing 32 together surround a containing space A, and the first spherical bearing 2 is located in the containing space A. That is, the mounting seat 3 is fixed to the first spherical bearing 2 through the flange 31, and the first spherical bearing 2 is located inside the mounting seat 3.

[0038] In addition, an annular gap G is left between the bushing 32 and the rotating shaft 1, which can provide enough space for the mounting seat 3 to swing. That is, the annular gap G can allow the mounting seat 3 to swing relative to the rotating shaft 1 with the first spherical bearing 2 as the pivot point.

[0039] In another aspect, the first spherical bearing 2 provides enough space for the mounting seat 3 to move when arranged on the rotating shaft 1 through the annular gap G, so that the mounting seat 3 can swing at multiple different angles, while avoiding interference between the rotating shaft 1 and the mounting seat 3.

[0040] Further, as shown in Figure 4 and Figure 5 The machining disc 4 is connected to the side of the flange 31 away from the bushing 32. When the rotating operation is performed, the grinding surface 41 of the machining disc 4 can process (e.g., grind or finish) the surface S of the workpiece P.

[0041] As mentioned above, when the processing disc 4 passes the uneven structure U of the surface S of the workpiece P, one side of the uneven structure U will push the mounting seat 3 on the same side, and the mounting seat 3 will rotate around the first spherical bearing 2, and the bushing 32 will be close to the rotating shaft 1, so that the annular gap G between the two will be smaller, that is, the annular gap G shown on the right side of the central axis Z in Figure 5 is smaller than Figure 4 .

[0042] Please continue to refer to Figure 4 and Figure 5 , on the contrary, when the processing disc 4 does not pass one side of the uneven structure U, that is, on the left side of the central axis Z in Figure 5 , the bushing 32 will swing away from the annular gap G, and the annular gap G between the bushing 32 and the rotating shaft 1 will become larger.

[0043] Then, as shown in Figure 1 and Figure 6 , the bushing 32 is provided with a plurality of first holes 321 on the side away from the flange 31, and each first hole 321 can accommodate a part of one of the connecting assemblies 6. In this embodiment, a plurality of first holes 321 are taken as an example of three, but the present application is not limited thereto.

[0044] The transmission member 5 is annular and fixed to the upper position of the rotating shaft 1, that is, the transmission member 5 is fixed to the side of the rotating shaft 1 which is not installed with the mounting seat 3, and there is no space between the transmission member 5 and the rotating shaft 1 for the transmission member 5 to move or rotate. Among them, the transmission member 5 is provided with a plurality of second holes 51 on the side facing the mounting seat 3, and each second hole 51 can accommodate a part of one of the connecting assemblies 6. In this embodiment, a plurality of second holes 51 are taken as an example of three, but the present application is not limited thereto.

[0045] As shown in Figure 3 and Figure 7 , three connecting assemblies 6 are parallel to the central axis Z and arranged around the rotating shaft 1. It should be noted that the three connecting assemblies 6 adopt the same structure in this embodiment, so as to facilitate the description, the structure of one connecting assembly 6 will be introduced first below, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the structures of the three connecting assemblies 6 can also be slightly different.

[0046] Please refer to Figure 7As shown, the connecting assembly 6 comprises a guide column 61, a second spherical bearing 62 connected to one end of the guide column 61, a third spherical bearing 63 connected to the other end of the guide column 61, and a spring 64 disposed on the periphery of the guide column 61. The second spherical bearing 62 is rotatably connected to the mounting base 3, the third spherical bearing 63 is rotatably connected to the transmission member 5, and the guide column 61 is movable relative to the third spherical bearing 63 in a direction parallel to the central axis Z. Thus, when the rotating shaft 1 performs the rotating operation and the surface S of the workpiece P has the uneven structure U, the flange 31 and the bushing 32 can drive the guide column 61 to move relative to the third spherical bearing 63 through the second spherical bearing 62 of at least one connecting assembly 6.

[0047] Specifically, the second spherical bearing 62 is disposed in the mounting base 3, i.e., a second outer ring portion 622 of the second spherical bearing 62 is combined with the mounting base 3; the third spherical bearing 63 is disposed in the transmission member 5, i.e., a third outer ring portion 632 of the third spherical bearing 63 is combined with the transmission member 5. Then, one end of the guide column 61 is combined with a second inner ring portion 623 of the second spherical bearing 62, and the other end of the guide column 61 is disposed in a third inner ring portion 633 of the third spherical bearing 63. Thus, when the rotating shaft 1 performs the rotating operation, the transmission member 5 will rotate with the rotating shaft 1, and can drive the mounting base 3 to rotate through the guide column 61.

[0048] Further, the second spherical bearing 62 further comprises a machine buckle 621, and one end of the guide column 61 is fixed in the second spherical bearing 62 through the machine buckle 621. When the connecting assembly 6 moves relative to the transmission member 5 according to the uneven structure U through the mounting base 3, the guide column 61 remains fixed with the second spherical bearing 62.

[0049] In other words, the machine buckle 621 will fix the guide column 61 to the second inner ring portion 623; thus, the guide column 61 is fixed to the second spherical bearing 62, and the second spherical bearing 62 is fixed to the first hole 321 of the bushing 32, so that when the rotating shaft 1 performs the rotating operation, the connecting assembly 6 will not move away from the first hole 321 with the swinging of the mounting base 3, and can better ensure power transmission.

[0050] The third spherical bearing 63 further comprises a clasp 631, the other end of the guide post 61 can pass through the clasp 631 to limit the movement of the guide post 61 relative to the third spherical bearing 63. Therefore, when the rotating shaft 1 performs the rotating operation, the clasp 631 can limit the other end of the guide post 61 to rotate the mounting base 3 driven by the guide post 61, and the clasp 631 can also prevent the mounting base 3 from swinging too much. In addition, when the connecting assembly 6 moves relative to the transmission member 5 according to the undulating structure U, since the third outer ring part 632 of the third spherical bearing 63 is combined with the transmission member 5, the third spherical bearing 63 will not move with the undulating structure U.

[0051] That is, the other end of the guide post 61 is movably arranged in the third inner ring part 633 of the third spherical bearing 63; thus, when the mounting base 3 swings relative to the first spherical bearing 2, the guide post 61 will displace relative to the third spherical bearing 63; so that Figure 5 For example, the guide post 61 on the right side of the central axis Z moves upward relative to the corresponding third spherical bearing 63, that is, the guide post 61 moves relative to the third spherical bearing 63 in a direction away from the workpiece P. Of course, the guide post 61 on the left side of the central axis Z moves downward relative to the corresponding third spherical bearing 63.

[0052] In this embodiment, the connecting assembly 6 is provided with the spring 64 outside the guide post 61. One end of the spring 64 abuts against the transmission member 5, and the other end of the spring 64 selectively abuts against one of the mounting base 3 and the second spherical bearing 62, and the spring 64 can provide a pre-tightening force to the transmission member 5, the mounting base 3, and the second spherical bearing 62. Therefore, when the rotating operation is performed, the processing disc 4 can be processed by the pre-tightening force provided by the spring 64 of at least one connecting assembly 6 to the workpiece P. Of course, the pressure applied by the polishing pad conditioning device 100 to the workpiece P can also come from the rotating shaft 1, that is, the polishing pad conditioning device 100 can drive the rotating shaft 1 to approach the workpiece P, thereby increasing the contact force applied by the processing disc 4 to the workpiece P. In this way, the operator can flexibly change the processing force applied to the workpiece P, and can be adjusted in different processes to improve processing efficiency.

[0053] In detail, when the processing disc 4 passes the undulating structure U, the processing disc 4 pushes the mounting base 3 to swing relative to the first spherical bearing 2, at this time, the spring 64 applies the pre-tightening force to the mounting base 3 with the second spherical bearing 62 as a pivot point, and the mounting base 3 can push the processing disc 4 back to an initial position. In addition, in another embodiment, the initial position is not limited to the position where the processing disc 4 set by the mounting base 3 does not contact the workpiece P, but also can be a position with a pre-adjusted angle relative to the rotation shaft 1.

[0054] However, in the present embodiment, the spring 64 is only used as an auxiliary tool to assist the connecting assembly 6 to return the mounting base 3 to the initial position, and in other embodiments not shown in the utility model, the spring 64 can also be omitted. In the embodiment without the spring 64, the initial position of the mounting base 3 relative to the rotation shaft 1 is the state presented by the natural gravity of the mounting base 3 and the processing disc 4.

[0055] The above description focuses on a single connecting assembly 6, and the following describes the connection relationship and actual application between three connecting assemblies 6 and other components (such as the mounting base 3 and the transmission member 5).

[0056] Please refer to Figure 3 and Figure 6 When the three connecting assemblies 6 are arranged in the mounting base 3 and the transmission member 5, any two adjacent connecting assemblies 6 have a configuration angle θ relative to the center axis Z, and any two configuration angles θ can be selected to differ by no more than 5 degrees; that is, the three connecting assemblies 6 are generally arranged at equal angles.

[0057] In addition, the two ends of each connecting assembly 6 are arranged in the mounting base 3 and the transmission member 5, respectively, so that the three connecting assemblies 6 can surround the rotation shaft 1. Therefore, the three connecting assemblies 6 are drivingly connected to the rotation shaft 1 through the transmission member 5, and the rotation shaft 1 can transmit a rotary power to the mounting base 3 through the transmission member 5 and the connecting assemblies 6.

[0058] As described above, when the rotation shaft 1 performs the rotation operation, the transmission member 5 can drive the mounting base 3 and the processing disc 4 to rotate through at least three connecting assemblies 6, so that the grinding surface 41 of the processing disc 4 can grind the surface S of the workpiece P.

[0059] When the rotating shaft 1 is performing the rotating operation and the surface S of the workpiece P has the uneven structure U, the mounting base 3 is swung relative to the rotating shaft 1, the annular gap G of the side of the machining disc 4 contacting the uneven structure U will be reduced, at the same time, the machining disc 4 will push the mounting base 3 and the connecting assembly 6 to swing relative to the rotating shaft 1, and the flange 31 and the bushing 32 can drive at least one of the connecting assembly 6 to move. The connecting assembly 6 arranged in the transmission member 5 can move relative to the third inner ring part 633 of the third spherical bearing 63, so that when the connecting assembly 6 is pushed by the mounting base 3 and the machining disc 4, the guide column 61 can move relative to the third inner ring part 633 according to the uneven structure U (that is, the guide column 61 moves in the direction away from the mounting base 3).

[0060] In other words, when the surface S of the workpiece P has the uneven structure U, one end of one of the guide columns 61 located at the third spherical bearing 63 will move in the direction away from the mounting base 3 (that is, along the central axis Z and away from the workpiece P). On the contrary, as shown in Figure 5 the other end of the other one of the guide columns 61 located at the third spherical bearing 63 will move in the direction close to the mounting base 3 (that is, along the central axis Z and close to the workpiece P). However, the moving direction of the other guide columns 61 not mentioned will change according to the position or size of the uneven structure U according to the mounting base 3.

[0061] When the rotating shaft 1 is performing the rotating operation and the workpiece P is away from the uneven structure U of the surface S, the spring 64 of the connecting assembly 6 will provide the pre-tightening force to the second spherical bearing 62 and the third spherical bearing 63, so that the connecting assembly 6 can push the mounting base 3 and the machining disc 4 back to the initial position through the pre-tightening force.

[0062] [Embodiment Two]

[0063] Please refer to Figure 8 and Figure 9 which are embodiment two of the present application. Since the embodiment is similar to the above-mentioned embodiment one, the same parts of the two embodiments will not be described again, and the differences between the embodiment and the above-mentioned embodiment one are generally described as follows:

[0064] In the embodiment, the guide post 61 is further provided with a thread 611, and the second spherical bearing 62 and the third spherical bearing 63 of the connecting assembly 6 have a first spacing B1. That is, in the connecting assembly 6, the thread 611 of the guide post 61 can be locked into at least one of the second spherical bearing 62 and the third spherical bearing 63, respectively, to adjust the first spacing B1 (as shown in Figure 8 to a second spacing B2 (as shown in Figure 9 ) by the first spacing B1 being shortened, and any one of the springs 64 can adjust the pre-tightening force by changing the first spacing B1.

[0065] Specifically, at least one of the second spherical bearing 62 and the third spherical bearing 63 is locked along the thread 611 of the guide post 61, so that the first spacing B1 (as shown in Figure 8 ) of the second spherical bearing 62 and the third spherical bearing 63 is shortened to the second spacing B2 (as shown in Figure 9 ), at this time, the spring 64 will be extruded by the second spherical bearing 62 and the third spherical bearing 63 to provide greater pre-tightening force to the second spherical bearing 62 and the third spherical bearing 63. In the embodiment, the thread 611 is optionally arranged at one end of the second spherical bearing 62, and the thread 611 of the guide post 61 can be locked into the corresponding second spherical bearing 62 to change the first spacing B1 between the second spherical bearing 62 and the third spherical bearing 63. Of course, after the first spacing B1 is adjusted to the second spacing B2, the position of the second spherical bearing 62 relative to the bushing 32 is fixed, and the fixing method can be locking, bolt connection, or insertion (such as buckling, insertion) and the like.

[0066] [Embodiment Three]

[0067] Please refer to Figure 10 , which is embodiment three of the utility model. Since the embodiment is similar to the above-mentioned embodiment two, the same parts of the two embodiments will not be described again, and the differences of the embodiment compared with the above-mentioned embodiment two are generally described as follows:

[0068] In the embodiment, the connecting assembly 6 further comprises a force adjusting block 65, the force adjusting block 65 is arranged on the guide post 61, and one end of the spring 64 abuts against the transmission member 5, and the other end of the spring 64 abuts against the force adjusting block 65.

[0069] Specifically, the force adjusting block 65 can be in the form of a U-shaped block (not shown in the figure) so that the force adjusting block 65 of different thickness sizes can be quickly threaded on the guide post 61, and the pre-tightening force of the spring 64 is adjusted by the thickness of the force adjusting block 65.

[0070] In addition, in the present embodiment, the guide post 61 and the force adjusting block 65 can also be combined with each other through the thread 611; that is, the force adjusting block 65 can change the position of the force adjusting block 65 relative to the guide post 61 in a screwing manner to change the pre-tightening force of the spring 64.

[0071] [Technical effects of the utility model embodiment]

[0072] In summary, the polishing pad finishing device disclosed in the utility model embodiment can make the polishing pad finishing device rotate the processing disc along with the undulating structure of the surface on the to-be-ground part when the to-be-ground part is ground, so that the surface of the to-be-ground part is uniformly ground, and the service life of the to-be-ground part is improved.

[0073] The above disclosed content is only optional and feasible embodiments of the utility model, and does not limit the patent range of the utility model, so that equivalent technical changes made by applying the utility model specification and the attached drawings are included in the patent range of the utility model.

Claims

1. A polishing pad repair device, characterized in that, The polishing pad conditioning device includes: A rotation axis is defined by a central axis; wherein the rotation axis is rotatable about the central axis to perform a rotation operation; A first spherical bearing is installed at the bottom end of the rotating shaft; A mounting base is connected to the first spherical bearing and is able to swing relative to the rotating shaft; A processing disc is fixed to the bottom of the mounting base; wherein the processing disc can be used to process a surface of a workpiece to be ground; A transmission component, fixed to the rotating shaft; and At least three connecting components connect the mounting base to the transmission member, and each connecting component includes: A second spherical bearing is rotatably connected to the mounting base; A third spherical bearing is rotatably connected to the transmission component; and A guide post, one end of which is connected to the second spherical bearing, and the other end of which is connected to the third spherical bearing; When the rotating shaft performs the rotation operation, the transmission component can drive the mounting base to rotate through multiple connecting components, and a grinding surface of the processing disc can process the surface of the workpiece to be ground. When the rotating shaft performs the rotation operation and the surface of the workpiece to be ground has an undulating structure, the processing disc can cause the guide post of at least one of the connecting components to move relative to the third spherical bearing according to the undulating structure via the mounting base, thereby causing the processing disc to oscillate.

2. The polishing pad repair device according to claim 1, characterized in that, The mounting base also includes a flange and a bushing fixed to the flange, the flange being fixed to the first spherical bearing, and the first spherical bearing being fixed to the bushing.

3. The polishing pad repair device according to claim 2, characterized in that, There is an annular gap between the bushing and the rotating shaft, and the annular gap allows the mounting base to oscillate relative to the rotating shaft with the first spherical bearing as a pivot point.

4. The polishing pad repair device according to claim 1, characterized in that, Each of the second spherical bearings further includes a fastener, through which the guide post is fixed to the second spherical bearing.

5. The polishing pad repair device according to claim 1, characterized in that, Each of the third spherical bearings further includes a retaining ring; when the rotating shaft performs the rotation operation, the retaining ring can limit the guide post, thereby causing the guide post to drive the mounting base to rotate.

6. The polishing pad repair device according to claim 1, characterized in that, Each of the connecting components is further provided with a spring around the guide post; in each of the connecting components, one end of the spring abuts against the transmission member, while the other end of the spring selectively abuts against either the mounting base or the second spherical bearing.

7. The polishing pad conditioning device according to claim 6, characterized in that, Each of the guide posts is further provided with a thread on its periphery, and there is a gap between the second spherical bearing and the third spherical bearing of each of the connecting assemblies; in each of the connecting assemblies, the thread of the guide post can be locked into the corresponding second spherical bearing.

8. The polishing pad repair device according to claim 1, characterized in that, At least three of the connecting components are arranged around the central axis; wherein any two adjacent connecting components have an arrangement angle relative to the central axis, and the difference between any two arrangement angles is no greater than 5 degrees.

9. The polishing pad conditioning device according to claim 6, characterized in that, Each of the connecting components also includes an adjusting block, which passes through the guide post, and the other end of the spring abuts against the adjusting block.

10. The polishing pad conditioning device according to claim 9, characterized in that, Each of the guide posts and the force adjusting blocks are threaded together.

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