Heating sucker

Abstract

The heating sucker comprises a ceramic base and a porous ceramic adsorption plate, the ceramic base comprises a first base body and a second base body, a groove is formed in the upper end face of the first base body, an air channel layer is arranged in the groove, and the air channel layer comprises a plurality of protruding strips arranged at intervals. The porous ceramic adsorption plate is arranged in the groove and is positioned above the air passage layer; a heating layer is arranged at the upper end of the second base body; an electrode inlet, an electrode outlet and a plurality of through air holes arranged at intervals are formed in the ceramic base, the through air holes penetrate through the second base body and extend upwards to the bottom of the groove, and the through air holes communicate with the air channel; the electrode inlet and the electrode outlet both penetrate through the second base body. According to the heating sucker, the air channel layer and the heating layer are arranged on the ceramic base at the same time, the heating sucker has heating and adsorption functions, the heating layer and the air channel layer are mutually independent and can be controlled and used separately, the heating layer is integrated below the vacuum air channel, and the occupied space is small; the heating sucker is compact in structure, convenient to operate and control and high in practicability.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of sucking disc, specifically relates to a heating sucking disc. BACKGROUND

[0002] The working structure of the vacuum sucking disc mainly includes the porous ceramic in the middle and the outer ring wall at the edge of the porous ceramic, and when working, the air between the workpiece such as a silicon wafer and the ceramic surface is extracted through the small holes on the porous ceramic, so that the workpiece and the ceramic surface realize low pressure, and the workpiece is adsorbed on the surface of the sucking disc due to air pressure, thereby fixing the workpiece. However, in the prior art, some workpieces need to maintain a certain temperature during processing, and the existing vacuum sucking disc does not have heating performance itself when in use, is not suitable for the processing of the above-mentioned workpieces, or needs to be additionally configured with a heating device, which is inconvenient to use, occupies a large space, and has the problem of uneven temperature distribution in the processing process. SUMMARY

[0003] In order to overcome the shortcomings and deficiencies existing in the prior art, the purpose of the utility model is to provide a heating sucking disc, which can meet the processing requirements of workpieces that need to control temperature in the processing process by simultaneously arranging an air channel layer and a heating layer on the ceramic base, thereby expanding its application range; the heating layer and the air channel layer are independent of each other and can be used and controlled respectively, the heating layer is integrated below the vacuum air channel, occupies a small space, and the heating sucking disc has compact structure, is convenient to operate and control, and has high practicability.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a heating sucking disc, comprising a ceramic base and a porous ceramic adsorption plate, the ceramic base comprises a first base body and a second base body arranged below the first base body, the upper end surface of the first base body is provided with a groove, an air channel layer is arranged in the groove, the air channel layer comprises a plurality of spaced convex strips, a plurality of air channel sections are formed between adjacent convex strips and between the convex strips and the inner wall of the groove, and the plurality of air channel sections are communicated to form an air channel, and the porous ceramic adsorption plate is arranged in the groove and above the air channel layer.

[0005] The upper end of the second base body is provided with a heating layer; the ceramic base is provided with an electrode inlet, an electrode outlet and a plurality of spaced through holes, the through holes penetrate through the second base body and extend upward to the bottom of the groove, and the through holes are communicated with the air channel; the electrode inlet and the electrode outlet both penetrate through the second base body, and the electrode inlet and the electrode outlet are used for penetrating the lead wire connected with the heating layer.

[0006] Further, the plurality of convex strips are divided into a plurality of convex strip groups arranged in a ring array, each of the convex strip groups comprises a first convex strip and a plurality of second convex strips arranged from inside to outside along the radial direction of the first base body, a main airway section is formed between adjacent convex strip groups, and a branch airway section is formed between the first convex strip and the innermost second convex strip of the same convex strip group and between adjacent second convex strips.

[0007] Further, the cross section of the groove is circular, the cross section of the first convex strip is fan-shaped, and the cross section of the second convex strip is fan ring-shaped.

[0008] Further, the airway layer comprises at least four convex strip groups, and the cross section of each of the convex strip groups is fan-shaped.

[0009] Further, the heating layer comprises a plurality of heating lines, a first electrode inlet is arranged at the head end of the heating line, a first electrode outlet is arranged at the tail end of the heating line, and the heating line is arranged in a reciprocating backfolding manner at the upper end of the second base body.

[0010] Further, the first electrode inlet is arranged at the middle part of the second base body, the first electrode outlet comprises a first connecting hole and a second connecting hole connected to the lower end of the first connecting hole, the first connecting hole is arranged at the edge of the upper end surface of the second base body and extends downward, the second connecting hole is arranged on the outer circumferential side wall of the second base body, and the first connecting hole and the second connecting hole are perpendicular.

[0011] Further, the heating layer comprises at least four heating lines, and the plurality of heating lines are arranged in a reciprocating backfolding manner in a fan shape to form a plurality of temperature zones, and the plurality of heating lines are uniformly distributed at the upper end of the second base body.

[0012] Further, the heating layer comprises four heating lines, the four heating lines are arranged in a reciprocating backfolding manner in a fan shape to form four temperature zones, and the four heating lines are uniformly distributed at the upper end of the second base body.

[0013] Further, the ceramic base and the porous ceramic adsorption plate are packaged by an epoxy packaging layer or are integrally formed.

[0014] Further, the edge of the ceramic base is provided with a plurality of positioning holes extending from top to bottom, and the outer circumferential side wall of the ceramic base is provided with a plurality of mounting holes.

[0015] Further, the cross section of the ceramic base is circular or polygonal.

[0016] The heating suction disc has the advantages that the heating suction disc is provided with the air channel layer and the heating layer on the ceramic base, has heating and adsorption functions, can meet the processing requirements of workpieces that need to control temperature in the processing process, and expands the use range; the heating layer and the air channel layer are independent of each other and can be controlled and used respectively, the heating layer is integrated below the vacuum air channel, and the heating suction disc has compact structure, is convenient to operate and control, and is high in practicability. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a perspective structural schematic view of the heating suction disc of the utility model.

[0018] Figure 2 is an exploded view of the heating suction disc of the utility model.

[0019] Figure 3 is a sectional view of the heating suction disc of the utility model.

[0020] Figure 4 is a top view of the heating suction disc of the utility model.

[0021] Figure 5 is a front view of the heating suction disc of the utility model.

[0022] Figure 6 is a bottom view of the heating suction disc of the utility model.

[0023] Figure 7 is a structural schematic view of the air channel layer of the utility model.

[0024] Figure 8 is a structural schematic view of the heating layer of the utility model.

[0025] The figure mark is: 1, ceramic base; 11, first base body; 111, air channel; 112, first convex strip; 113, second convex strip; 114, main air channel section; 115, branch air channel section; 116, recess; 117, outer ring wall; 12, second base body; 121, heating circuit; 122, electrode inlet; 123, electrode outlet; 1231, first connecting hole; 1232, second connecting hole; 13, through air hole; 14, positioning hole; 15, mounting hole; 2, porous ceramic adsorption plate. DETAILED DESCRIPTION

[0026] In order to facilitate the understanding of those skilled in the art, the utility model is further illustrated below in combination with examples and drawings, and the content mentioned in the implementation manner is not a limitation on the utility model.

[0027] For example, Figures 1-8As shown, a heating chuck comprises a ceramic base 1 and a porous ceramic adsorption plate 2, the ceramic base 1 comprises a first base body 11 and a second base body 12 arranged below the first base body 11, the upper end surface of the first base body 11 is provided with a groove 116, an air channel layer is arranged in the groove 116, the air channel layer comprises a plurality of spaced convex strips, a plurality of air channel sections are formed between adjacent convex strips and between the convex strips and the inner wall of the groove 116, and the plurality of air channel sections are communicated to form an air channel 111, and the porous ceramic adsorption plate 2 is arranged in the groove 116 and above the air channel layer; the first base body 11 comprises an outer ring wall 117 surrounding the groove 116, the outer ring wall 117 is arranged at the upper end of the first base body 11 and protrudes upward, and the groove 116 is formed by the outer ring wall 117;

[0028] The upper end of the second base body 12 is provided with a heating layer; the ceramic base 1 is provided with an electrode inlet 122, an electrode outlet 123 and a plurality of spaced through holes 13, the through holes 13 penetrate through the second base body 12 and extend upward to the bottom of the groove 116, and the through holes 13 are communicated with the air channel 111; the electrode inlet 122 and the electrode outlet 123 both penetrate through the second base body 12, and the electrode inlet 122 and the electrode outlet 123 are used for the lead wire connected with the heating layer to penetrate through. The porous ceramic adsorption plate 2 is embedded in the groove 116, and the upper end surface thereof can be in contact with a workpiece in use.

[0029] The heating chuck has the functions of heating and adsorption by simultaneously arranging the air channel layer and the heating layer in the ceramic base 1, can meet the processing requirements of the workpiece which needs to control the temperature in the processing process, and expands the use range; the heating layer and the air channel layer are independent of each other and can be controlled and used respectively, the heating layer is integrated below the vacuum air channel 111 and occupies small space; the heating chuck has compact structure, is convenient to operate and control, and has high practicability.

[0030] Further, the plurality of convex strips are divided into a plurality of convex strip groups arranged in a ring array, the convex strips are named first convex strips 112 or second convex strips 113, each of the convex strip groups comprises the first convex strips 112 and the plurality of second convex strips 113 arranged in sequence from inside to outside along the radial direction of the first base body 11, the main air passage sections 114 are formed between adjacent convex strip groups, the first convex strips 112 and the innermost second convex strips 113 of the same convex strip group and the adjacent second convex strips 113 form the branch air passage sections 115. Preferably, the cross section of the groove 116 is circular, the cross section of the first convex strip 112 is fan-shaped, and the cross section of the second convex strip 113 is fan ring-shaped. In the embodiment, the main air passage sections 114 are arranged in a straight line between adjacent convex strip groups, and the branch air passage sections 115 are arranged in an arc line type. The main air passage sections 114, the branch air passage sections 115 and the through air holes 13 are connected to each other to form a gas passage, a vacuum adsorption layer is formed inside the ceramic base 1, and the workpiece is fixed and processed. The first convex strip 112 and the second convex strip 113 are both adhesive strips.

[0031] Further, the air passage layer comprises at least four convex strip groups, and the cross section of each convex strip group is fan-shaped. In the embodiment, the air passage layer is preferably divided into four convex strip groups, and the cross section of each convex strip group and the combination of the convex strips between adjacent convex strip groups are all fan-shaped or approximately fan-shaped. The air passage layer is symmetric about the center line of the ceramic base 1, and the air passages 111 are uniformly distributed, so that the workpiece is fixed by the chuck, the stress is more uniform, and the product yield is improved.

[0032] Further, the heating layer comprises a plurality of heating lines 121, the first end of the heating line 121 is provided with an electrode inlet 122, the end of the heating line 121 is provided with an electrode outlet 123, and the heating line 121 is reciprocally folded on the upper end of the second base body 12. The heating line 121 is designed reasonably, and can meet the needs of workpieces that need temperature control processing.

[0033] Further, the electrode inlet 122 is arranged at the middle part of the second base body 12, the electrode outlet 123 comprises a first connecting hole 1231 and a second connecting hole 1232 connected to the lower end of the first connecting hole 1231, the first connecting hole 1231 is arranged at the edge of the upper end surface of the second base body 12 and extends downward, the second connecting hole 1232 is arranged on the outer circumferential side wall of the second base body 12, and the first connecting hole 1231 and the second connecting hole 1232 are perpendicular.

[0034] Further, the heating layer comprises at least four heating lines 121, and the plurality of heating lines 121 are arranged in a circular array on the upper end of the second substrate 12. The heating layer comprises at least four heating lines 121, and the plurality of heating lines 121 are arranged in a fan-shaped reciprocating backfolding manner to form a plurality of temperature zones, and the plurality of heating lines 121 are uniformly arranged on the upper end of the second substrate 12. In the embodiment, the heating layer preferably adopts four heating lines 121, and the reciprocating backfolding paths of the heating lines 121 are all fan-shaped or approximately fan-shaped. The heating lines 121 of the heating layer of the embodiment are integrally formed with the ceramic base 1 by high-temperature co-firing. The heating layer forms a plurality of temperature zones, each heating zone can be independently temperature-controlled, and is symmetrically distributed about the center line of the ceramic base 1, so that the temperature distribution of the ceramic base 1 is more uniform. The through air holes 13 avoid the heating lines 121. In other embodiments of the utility model, the heating lines 121 can be replaced by heating wires, heating sheets or heating plates.

[0035] Further, the ceramic base 1 and the porous ceramic adsorption plate 2 are packaged by an epoxy packaging layer or integrally formed. The ceramic base 1 and the porous ceramic adsorption plate 2 of the utility model can be packaged by an epoxy packaging layer, the porous ceramic adsorption plate 2 is located above the air duct layer and shields the air duct 111, thereby guaranteeing the sealing effect, and the inner wall of the groove 116 of the ceramic base 1 and the outer peripheral sidewall of the porous ceramic adsorption plate 2 are provided with an expansion joint, so that the ceramic base 1 and the porous ceramic adsorption plate 2 do not separate during the heating process. The ceramic base 1 and the porous ceramic adsorption plate 2 can also be integrally formed by high-temperature co-firing, so that the ceramic base 1 and the porous ceramic adsorption plate have good sealing performance and stable connection.

[0036] Further, the edge of the ceramic base 1 is provided with a plurality of positioning holes 14 extending from top to bottom, and the outer peripheral sidewall of the ceramic base 1 is provided with a plurality of mounting holes 15. Due to the arrangement of the positioning holes 14 and the mounting holes 15, the heating suction disc can be accurately aligned and connected with external equipment or workpieces.

[0037] Further, the cross section of the ceramic base 11 is circular or polygonal, such as square, regular hexagon, etc., which can meet the needs of different sizes of products. Preferably, the cross section of the ceramic base 1 is circular, which is convenient for processing and use.

[0038] The above embodiment is a preferred implementation scheme of the utility model, and in addition, the utility model can also be implemented in other ways, and any obvious replacement without departing from the concept of the utility model is within the protection scope of the utility model.

Claims

1. A heating suction cup, characterized in that: The device includes a ceramic base and a porous ceramic adsorption plate. The ceramic base includes a first substrate and a second substrate disposed below the first substrate. The upper surface of the first substrate is provided with a groove. An air passage layer is disposed in the groove. The air passage layer includes a plurality of spaced protrusions. A plurality of interconnected air passage segments are formed between adjacent protrusions and between the protrusions and the inner wall of the groove. The plurality of air passage segments are connected to form an air passage. The porous ceramic adsorption plate is disposed in the groove and located above the air passage layer. The upper end of the second substrate is provided with a heating layer; the ceramic base is provided with an electrode inlet, an electrode outlet and a plurality of spaced through-holes, the through-holes penetrate the second substrate and extend upward to the bottom of the groove, the through-holes are connected to the air passage; the electrode inlet and electrode outlet both pass through the second substrate, the electrode inlet and electrode outlet are used for the lead wires connected to the heating layer to pass through.

2. The heating suction cup according to claim 1, characterized in that: The multiple convex strips are divided into multiple groups of convex strips arranged in a ring array. Each group of convex strips includes a first convex strip arranged in sequence from the inside to the outside along the radial direction of the first base and multiple second convex strips. Adjacent groups of convex strips form a main airway segment, and the first convex strip and the innermost second convex strip in the same group, as well as adjacent second convex strips, form a branch airway segment.

3. The heating suction cup according to claim 2, characterized in that: The groove has a circular cross-section, the first protrusion has a fan-shaped cross-section, and the second protrusion has a fan-ring-shaped cross-section.

4. The heating suction cup according to claim 2, characterized in that: The airway layer includes at least four sets of convex strips, each set of convex strips having a fan-shaped cross-section.

5. The heating suction cup according to claim 1, characterized in that: The heating layer includes multiple heating lines, with an electrode inlet at the beginning of each heating line and an electrode outlet at the end of each heating line. The heating lines are arranged to fold back and forth on the upper end of the second substrate.

6. The heating suction cup according to claim 5, characterized in that: The electrode inlet is located in the middle of the second substrate, and the electrode outlet includes a first connecting hole and a second connecting hole connected to the lower end of the first connecting hole. The first connecting hole is located at the upper edge of the second substrate and extends downward. The second connecting hole is located on the outer peripheral sidewall of the second substrate. The first connecting hole and the second connecting hole are perpendicular.

7. The heating suction cup according to claim 5, characterized in that: The heating layer includes at least four heating lines, and the heating lines are distributed in a fan-shaped back-and-forth pattern to form multiple temperature zones. The heating lines are evenly distributed on the upper end of the second substrate.

8. The heating suction cup according to claim 5, characterized in that: The heating layer includes four heating lines, which are arranged in a fan-shaped back-and-forth pattern to form four temperature zones. The four heating lines are evenly distributed on the upper end of the second substrate.

9. The heating suction cup according to claim 1, characterized in that: The ceramic base and the porous ceramic adsorption plate are encapsulated with an epoxy encapsulation layer or integrally formed.

10. The heating suction cup according to claim 1, characterized in that: The ceramic base has multiple positioning holes extending from top to bottom along its edge, and multiple mounting holes are provided on the outer peripheral sidewall of the ceramic base.

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