Supporting mechanism for splitting machine and splitting machine

Abstract

The utility model provides a supporting mechanism for a splitting machine and the splitting machine, and relates to the technical field of semiconductor processing, the supporting mechanism comprises a driving assembly, two supporting parts and two rows of guide rails arranged in parallel, the two supporting parts are slidably connected to the two rows of guide rails, the driving assembly is connected with the two supporting parts, and the driving assembly is connected with the two supporting parts. The driving assembly is used for driving the two supporting parts to slide along the guide rails, and the two guide rails are located on the two opposite sides of the driving assembly respectively. As the two rows of guide rails in sliding connection with the supporting part are located on the two opposite sides of the driving assembly respectively, the torque of driving force borne by the supporting part relative to the two rows of guide rails is roughly the same and is short, and the supporting part slides smoothly and is not prone to deflection. Therefore, the width of the gap between the two supporting parts after sliding can be kept in a relatively uniform state, and the product yield of splitting processing can be improved. In addition, the size of the whole supporting mechanism is small.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and in particular to a support mechanism for a splitting machine and a splitting machine. Background Technology

[0002] With the rapid development of the semiconductor industry, a variety of semiconductor processing equipment has emerged, such as cleavers used for cleaving semiconductor wafers. During cleaving, two support platforms support the semiconductor wafer, and a drive unit drives the two support platforms to slide, adjusting the gap width between the two support platforms and aligning the gap between the two support platforms with the pre-cut cutting line on the semiconductor wafer. Then, the cleaver is aligned with the pre-cut cutting line on the semiconductor wafer and pressed down to cleave the semiconductor wafer.

[0003] Currently, the drive component does not slide the support platform smoothly enough, resulting in uneven gaps between the two support platforms after sliding. That is, the gaps are wide in some places and narrow in others, which causes uneven stress on the semiconductor wafer when the splitter presses down, affecting the product yield of the splitting process.

[0004] Therefore, how to ensure that the support platform can slide smoothly and that the gap between the two support platforms is uniform after sliding, thereby improving the product yield of splitting processing, is a technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0005] To solve the above-mentioned technical problems, this application provides a support mechanism for a splitting machine. The support mechanism includes a drive assembly, two support parts, and two parallel guide rails. The two support parts are slidably connected to the two guide rails. The drive assembly is connected to the two support parts to drive the two support parts to slide along the guide rails. The two guide rails are located on opposite sides of the drive assembly.

[0006] One embodiment of the support mechanism for a splitting machine includes two support parts, each comprising a mounting base plate, a slider, and a support platform. The slider is fixed to the bottom side of the mounting base plate, the mounting base plate is slidably connected to two rows of guide rails via the slider, and the support platform is fixed to the top side of the mounting base plate.

[0007] One embodiment of the support mechanism for a splitting machine includes a drive assembly comprising two power components and two transmission modules. One power component is connected to one of the mounting base plates via one of the transmission modules, and the other power component is connected to another of the mounting base plates via another transmission module, so that the two power components can drive the two support portions respectively.

[0008] In one embodiment of the support mechanism for a splitting machine, both power components are motors, and both transmission modules are lead screw transmission modules.

[0009] One embodiment of the support mechanism for a splitting machine includes a lead screw drive module comprising a lead screw, a nut connecting block threadedly connected to the lead screw, a first bearing, a second bearing, a first bearing seat, and a second bearing seat. The first bearing and the second bearing are respectively disposed at the end of the lead screw near the motor and the end away from the motor. Along the length direction of the lead screw, the nut connecting block is located between the first bearing seat and the second bearing seat, and the nut connecting block is fixedly connected to the mounting base plate.

[0010] In one embodiment of a support mechanism for a splitting machine, the nut connecting block is fixedly connected to the bottom and / or side of the mounting base plate, and the first bearing seat is located on the bottom side of the mounting base plate.

[0011] In one embodiment of the support mechanism for a splitting machine, the lead screws of the two said lead screw drive modules are arranged coaxially.

[0012] One embodiment of a support mechanism for a splitting machine includes a drive assembly biased toward a row of guide rails.

[0013] One embodiment of a support mechanism for a rock splitter includes two first limiting parts and two second limiting parts. The two first limiting parts are located on the side where the two support parts are far apart from each other. When the two support parts are far apart to their limit, the two support parts abut against the two first limiting parts respectively. The two second limiting parts are fixedly connected to the two support parts. When the two support parts are close together to their limit, the two second limiting parts abut against each other.

[0014] This application also provides a splitting machine, which includes the support mechanism described in any of the above claims, and a machine platform, wherein two rows of guide rails of the support mechanism are fixedly connected to the table surface of the machine platform.

[0015] The support mechanism provided in this application has a drive component that can drive two support parts to slide along a guide rail, thereby aligning the gap between the two support parts with the pre-cut cutting line on the semiconductor wafer and adjusting the gap width between the two support parts so that the gap width between the two support parts matches the die size of the semiconductor wafer.

[0016] The support mechanism provided in this application, because the two rows of guide rails slidably connected to the support are located on opposite sides of the drive assembly, means that the driving force borne by the support is approximately the same and the torque of the two rows of guide rails is relatively short. Therefore, the support slides smoothly and is less prone to deflection or skew, resulting in a relatively uniform gap width between the two support sections after sliding. This improves the yield of splitting products. Furthermore, the location of the two rows of guide rails on opposite sides of the drive assembly also reduces the overall size of the support mechanism. Attached Figure Description

[0017] Figure 1 This is a perspective view of one embodiment of the support mechanism for a rock splitter according to this application;

[0018] Figure 2 for Figure 1 Bottom-side view.

[0019] The annotations in the attached figures are explained as follows:

[0020] 1 Support part, 11 Mounting base plate, 11a First groove, 11b Second groove, 12 Slider, 13 Support platform, 13a Connecting base plate, 13b Platform body, 2 Guide rail, 31 Motor, 32 Lead screw, 33 Nut connecting block, 34 First bearing seat, 35 Second bearing seat, 36 Coupling, 4 First limiting part, 5 Second limiting part. Detailed Implementation

[0021] This application provides a support mechanism (hereinafter referred to as the support mechanism) for a splitting machine and a splitting machine. The support mechanism is used to support the material during the splitting process.

[0022] To enable those skilled in the art to better understand the technical solution of this application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0023] like Figure 1 and Figure 2 As shown, the support mechanism provided in this application includes a drive assembly, two support parts 1, and two parallel rows of guide rails 2. Both support parts 1 are slidably connected to the two rows of guide rails 2. The drive assembly is connected to the two support parts 1 and can drive the two support parts 1 to slide along the two rows of guide rails 2. The two rows of guide rails 2 are located on opposite sides of the drive assembly; that is, the drive assembly is located between the planes containing the opposite sides of the two rows of guide rails 2, and at least a portion of the drive assembly is located between the two rows of guide rails 2.

[0024] During the splitting process, the two support parts 1 of the aforementioned support mechanism support the semiconductor wafer. The drive assembly drives the two support parts 1 to slide along the guide rail, so that the gap between the two support parts 1 is aligned with the pre-cut cutting line on the semiconductor wafer. The gap width between the two support parts 1 is adjusted so that the gap width between the two support parts 1 matches the grain size of the semiconductor wafer.

[0025] In the aforementioned support mechanism, since the two rows of guide rails 2, which are slidably connected to the support part 1, are located on opposite sides of the drive assembly, the driving force borne by the support part 1 is approximately the same as the torque of the two rows of guide rails 2, and the torque is relatively short. Therefore, the support part 1 slides smoothly and is not easily deflected or skewed. As a result, the gap width between the two support parts 1 can remain relatively uniform after sliding, thus improving the product yield of the splitting process. In addition, the fact that the two rows of guide rails 2 are located on opposite sides of the drive assembly also reduces the overall size of the support mechanism.

[0026] Specifically, each of the two support parts 1 includes a mounting base plate 11, a slider 12, and a support platform 13. The slider 12 is fixed to the bottom side of the mounting base plate 11, and the mounting base plate 11 is slidably connected to two rows of guide rails 2 via the slider 12. The support platform 13 is fixed to the top side of the mounting base plate 11. In the illustrated embodiment, the slider 12 is fixed to the mounting base plate 11 by threaded fasteners. In actual implementation, the slider 12 can also be fixed to the mounting base plate 11 in other ways, such as snap-fit ​​fixing or integral molding fixing. In the illustrated embodiment, each support part 1 has four sliders 12 connected to the bottom side of the mounting base plate 11. Two of the sliders 12 are slidably connected to one row of guide rails 2, and the other two sliders 12 are slidably connected to another row of guide rails 2. In actual implementation, the number of sliders 12 can be flexibly adjusted according to actual needs and is not limited to four. In the illustrated embodiment, the bottom end of the support platform 13 body 13b is provided with a connecting base plate 13a. The connecting base plate 13a is fixed to the mounting base plate 11 by threaded fasteners. In actual implementation, the support platform 13 can also be fixed to the mounting base plate 11 in other ways, such as snap-fit ​​fixing.

[0027] Specifically, the drive assembly may include two power components and two transmission modules. One power component is connected to a support part 1 via a transmission module, and the other power component is connected to another support part 1 via another transmission module. The two power components drive the two support parts 1 respectively. This is the configuration shown in the illustrated embodiment. In actual implementation, the drive assembly may also consist of only one power component, which is connected to both support parts 1 simultaneously, so that one power component can drive both support parts 1 at the same time.

[0028] Specifically, the power component can be a motor 31, and the transmission module can be a lead screw drive module, which has a simple structure and high transmission efficiency. The power component can also be a pneumatic cylinder or a hydraulic cylinder. The transmission module can also be a gear drive module or a worm gear drive module.

[0029] Specifically, the lead screw drive module includes a lead screw 32, a nut connecting block 33, a first bearing, a second bearing, a first bearing housing 34, and a second bearing housing 35. The lead screw 32 is connected to the output shaft of the motor 31, and exemplaryly, it can be connected to the output shaft of the motor 31 via a coupling 36. The first bearing is sleeved on the outer periphery of the end of the lead screw 32 away from the motor 31, and the second bearing is sleeved on the outer periphery of the end of the lead screw 32 near the motor 31. The first bearing is installed in the seat hole of the first bearing housing 34, and the second bearing is installed in the seat hole of the second bearing housing 35. The nut connecting block 33 is threadedly connected to the lead screw 32, and in the length direction of the lead screw 32, the nut connecting block 33 is located between the first bearing housing 34 and the second bearing housing 35. The nut connecting block 33 is fixedly connected to the mounting base plate 11, and exemplaryly, it can be fixedly connected by threaded fasteners. When the motor 31 is working, the lead screw 32 rotates and drives the nut connecting block 33 along the length direction of the lead screw 32 (which is also the guiding direction of the guide rail 2), thereby driving the mounting base plate 11 to slide along the guide rail 2. Correspondingly, the entire support part 1 slides together.

[0030] Specifically, the nut connecting block 33 can be connected to the bottom and / or side of the mounting base plate 11, and the first bearing seat 34 is located on the bottom side of the mounting base plate 11. The illustrated embodiment is such a solution. This fully utilizes the space between the two rows of guide rails 2 to accommodate the nut connecting block 33 and the first bearing seat 34, making the entire support mechanism more compact and smaller in size. In the illustrated embodiment, the side and bottom sides of the mounting base plate 11 are also provided with a first groove 11a and a second groove 11b, respectively. The nut connecting block 33 is installed in the first groove 11a, and the first bearing seat 34 is installed in the second groove 11b. This further helps to reduce the volume of the support mechanism and avoids the problem of the first bearing seat 34 protruding from the bottom surface of the guide rail 2, causing the guide rail 2 to be suspended.

[0031] Specifically, the lead screws 32 of the two lead screw drive modules can be coaxially arranged. This allows the two motors 31 connected to the two lead screws 32 and the two nut connecting blocks 33 to be roughly located on the same straight line parallel to the guide rail 2. This is the solution in the illustrated embodiment. In this way, when the two support parts 1 approach each other to the limit state (at this time, the two support parts 1 can be regarded as a whole), the driving forces on the two support parts 1 cancel each other out along the straight line. Therefore, even if the two support parts 1 approach each other to the limit state but the motor 31 has not yet been turned off, it will not cause the two support parts 1 to deflect as a whole. Thus, the problem of the two support parts 1 deflecting as a whole and jamming with the guide rail 2 due to the motor 31 not being turned off in time is avoided.

[0032] Specifically, the drive assembly can be biased toward one row of guide rails 2, thus creating a larger space between the drive assembly and the other row of guide rails 2. This space can be used to arrange other structures of the splitter, excluding the support mechanism.

[0033] Specifically, the support mechanism may also include two first limiting parts 4, which are located on opposite sides of the two mounting base plates 11. When the two support parts 1 are far apart from each other, they abut against the two first limiting parts 4 to prevent the two support parts 1 from slipping off the guide rail 2 or damaging the surrounding structure.

[0034] Specifically, the support mechanism may also include two second limiting parts 5, which are fixedly connected to two mounting base plates 11 respectively. When the two support parts 1 approach each other to their limit, the two second limiting parts 5 abut against each other to prevent the two support parts 1 from colliding and damaging the support surface.

[0035] The splitting machine provided in this application includes a machine base, the aforementioned support mechanism, and a splitting mechanism. The two rows of slide rails of the support mechanism are fixed on the table surface of the machine base, and the splitting mechanism includes a splitting blade and a drive component for driving the splitting blade to move.

[0036] The above examples illustrate the principles and implementation methods of this application. The descriptions of the embodiments are merely for the purpose of helping to understand the methods and core ideas of this application. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from its principles, and these improvements and modifications also fall within the protection scope of this application.

Claims

1. A support mechanism for a splitting machine, characterized in that, The support mechanism comprises a driving assembly, two support parts (1) and two parallel guide rails (2), the two support parts (1) are slidably connected to the two guide rails (2), the driving assembly is connected with the two support parts (1) to drive the two support parts (1) to slide along the guide rails (2), and the two guide rails (2) are located at opposite sides of the driving assembly respectively.

2. The support mechanism for a cleaving machine of claim 1, wherein, The two support parts (1) each comprise a mounting bottom plate (11), a sliding block (12) and a support table (13), the sliding block (12) is fixed to the bottom side of the mounting bottom plate (11), the mounting bottom plate (11) is slidably connected with the two guide rails (2) through the sliding block (12), and the support table (13) is fixed to the top side of the mounting bottom plate (11).

3. The support mechanism for a cleaving machine of claim 2, wherein, The driving assembly comprises two power members and two transmission modules, one power member is connected with one mounting bottom plate (11) through one transmission module, and the other power member is connected with the other mounting bottom plate (11) through the other transmission module, so that the two power members drive the two support parts (1) respectively.

4. The support mechanism for a cleaving machine of claim 3, wherein, The two power members are motors (31), and the two transmission modules are screw transmission modules.

5. The support mechanism for a cleaving machine of claim 4, wherein, The screw transmission module comprises a screw (32), a nut connecting block (33) threadedly connected with the screw (32), a first bearing, a second bearing, a first bearing seat (34) and a second bearing seat (35), the first bearing and the second bearing are arranged at the end of the screw (32) close to the motor (31) and the end of the screw (32) away from the motor (31) respectively, the nut connecting block (33) is located between the first bearing seat (34) and the second bearing seat (35) in the length direction of the screw (32), and the nut connecting block (33) is fixedly connected with the mounting bottom plate (11).

6. The support mechanism for a cleaving machine of claim 5, wherein, The nut connecting block (33) is fixedly connected to the bottom side and / or the side side of the mounting bottom plate (11), and the first bearing seat (34) is located at the bottom side of the mounting bottom plate (11).

7. The support mechanism for a cleaving machine of claim 4, wherein, The screws (32) of the two screw transmission modules are coaxially arranged.

8. Support mechanism for splitting machines according to any one of claims 1-7, characterized in that, The driving assembly is arranged to be inclined to one of the guide rails (2).

9. The support mechanism for a cleaving machine of claim 8, wherein, The support mechanism comprises two first limiting parts (4) and two second limiting parts (5), the two first limiting parts (4) are located on the sides away from each other of the two support parts (1), when the two support parts (1) are moved to the limit state of moving away from each other, the two support parts (1) respectively abut against the two first limiting parts (4), the two second limiting parts (5) are fixedly connected with the two support parts (1), and when the two support parts (1) are moved to the limit state of moving close to each other, the two second limiting parts (5) abut against each other.

10. A splitting machine characterized by, The splitting machine comprises the support mechanism in any one of claims 1-9 and a machine table, and the two guide rails (2) of the support mechanism are fixedly connected to the table top of the machine table.

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