Air floating strip assembly, air floating strip mechanism and conveying device

Abstract

The utility model provides an air floatation strip assembly, an air floatation strip mechanism and a conveying device.The air floatation strip assembly comprises an air floatation strip box body structure, a first air floatation strip, a second air floatation strip, a third air floatation strip and a fourth air floatation strip, the gas uniform distribution structure comprises a uniform distribution partition plate and a uniform distribution flat plate, the uniform distribution partition plate is vertically arranged in the air floatation strip box body structure, the uniform distribution flat plate is flatly arranged on the side, away from the bottom wall of the air floatation strip box body structure, of the uniform distribution partition plate, and the uniform distribution flat plate is provided with a plurality of uniform distribution air outlet holes; the air floating strip structure is arranged at the opening of the air floating strip box body structure in a sealing manner, and the air floating strip structure is provided with a plurality of air film holes. According to the technical scheme, the problem that the stability of an object on the air floating strip is not high due to non-uniform air distribution of the air floating strip in the prior art is effectively solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of air floating conveying equipment, and in particular to an air floating strip assembly, an air floating strip mechanism and a conveying device. BACKGROUND

[0002] In modern industry and technological development, there are increasingly high requirements for high-precision movement and low-friction support of objects. Traditional mechanical support and movement methods often have problems such as large friction loss and easy-to-affect precision. For example, in the conveying of glass substrates and semiconductor industries, phenomena such as deformation and improper conveying of panel glass can easily cause wear and tear of equipment and damage to products; in a logistics conveying system, high friction can increase energy consumption and equipment wear.

[0003] Some existing technologies also use air floating technology for conveying, such as the invention with the application number 202311734149.8 and the title of a precision substrate air floating conveying system and method. The air floating strip assembly described above still has the following deficiencies: on the one hand, the air distribution of the air floating strip is uneven, which leads to poor stability of the object during floating movement, and easy shaking and deviation, affecting operation precision and product quality. CONTENT OF THE UTILITY MODEL

[0004] One of the technical problems to be solved by the present application is that the air distribution of the air floating strip is uneven, which leads to low stability of the object on the air floating strip.

[0005] To solve the above technical problems, the present application provides an air floating strip assembly, which comprises: an air floating strip box body structure, the air floating strip box body structure having a box body air inlet and an opening; an air distribution structure, the air distribution structure comprising a distribution partition and a distribution flat plate, the distribution partition being vertically arranged in the air floating strip box body structure, the distribution flat plate being horizontally arranged on one side of the bottom wall of the distribution partition away from the air floating strip box body structure, the distribution flat plate having a plurality of distribution air outlets; and an air floating strip structure, the air floating strip structure being sealingly arranged at the opening of the air floating strip box body structure, the air floating strip structure having a plurality of air film holes.

[0006] In some embodiments, the surface of one side of the distribution flat plate facing the air floating strip structure has a plurality of buffer grooves, and the plurality of distribution air outlets are located in the plurality of buffer grooves.

[0007] In some embodiments, each buffer groove extends along the length direction of the distribution flat plate, and each buffer groove has a boss extending along the length direction of the distribution flat plate on both sides, and the surface of one side of the boss close to the air floating strip structure has a plurality of distribution grooves.

[0008] In some embodiments, the plurality of distribution grooves form an X shape.

[0009] In some embodiments, the cross section of each distribution groove is V-shaped.

[0010] In some embodiments, the lower surface of the air float strip structure is in contact with the upper surface of the boss.

[0011] In some embodiments, the uniform distribution partition plate comprises a first vertical plate, a second vertical plate, a third vertical plate and a fourth vertical plate arranged in sequence and parallel on one side of the air float strip box structure, the distance between the first vertical plate and the second vertical plate is the same as the distance between the third vertical plate and the fourth vertical plate, the first vertical plate and the second vertical plate have an air inlet therebetween, the third vertical plate and the fourth vertical plate have an air inlet therebetween, the distance between the first vertical plate and the second vertical plate is greater than the distance between the second vertical plate and the third vertical plate, and the second vertical plate and the third vertical plate are both provided with a communication hole.

[0012] According to another aspect of the present application, there is also provided an air float strip mechanism, which comprises a communication pipeline assembly and an air float strip assembly, the communication pipeline assembly is in communication with the air float strip assembly, and the air float strip assembly is the air float strip assembly described above.

[0013] In some embodiments, the communication pipeline assembly comprises a communication pipeline, an adjusting valve and a filter, the adjusting valve and the filter are both arranged on the communication pipeline, and the adjusting valve is arranged between the filter and the air float strip assembly.

[0014] According to another aspect of the present application, there is also provided a conveying device, which comprises an air float strip mechanism, and the air float strip mechanism is the air float strip mechanism described above.

[0015] By applying the technical solution of the present application, the gas enters the air float strip box structure through the air inlet of the box body, is uniformly distributed and buffered for the first time by the uniform distribution partition plate, is uniformly distributed and buffered for the second time through the plurality of uniform distribution air outlets, and then forms the air film through the plurality of air film holes of the air float strip structure, so as to suspend the object. The above structure makes the gas distribution more uniform. The technical solution of the present application effectively solves the problem of non-uniform gas distribution of the air float strip in the prior art, which leads to low stability of the object on the air float strip. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0017] Figure 1 A perspective structural schematic diagram of the air float strip assembly of the embodiment of the present application is shown;

[0018] Figure 2 A perspective structural schematic diagram of the air float strip assembly of the embodiment of the present application is shown; Figure 1 A top view schematic diagram of the air float strip assembly of the embodiment of the present application is shown;

[0019] Figure 3 a side view schematic diagram of the air floating strip assembly of Figure 1

[0020] Figure 4 a bottom view schematic diagram of the air floating strip assembly of Figure 1

[0021] Figure 5 a perspective view schematic diagram of the air floating strip mechanism of the embodiment of the present application;

[0022] Figure 6 a front view schematic diagram of the air floating strip mechanism of Figure 5

[0023] BRIEF DESCRIPTION OF DRAWINGS

[0024] 10, air floating strip box structure; 20, air distribution structure; 21, distribution partition; 22, distribution flat plate; 221, distribution air outlet hole; 222, buffer groove; 223, boss; 224, distribution groove; 30, air floating strip structure; 40, communication pipeline assembly; 41, communication pipeline; 42, regulating valve; 43, filter; 50, position sensor. DETAILED DESCRIPTION

[0025] The embodiments of the present application will be further described in conjunction with the drawings and examples. The detailed description and drawings of the following examples are used to exemplarily illustrate the principles of the present application, but cannot be used to limit the scope of the present application, and the present application can be implemented in many different forms, and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0026] The present application provides these embodiments in order to make the present application thorough and complete, and fully express the scope of the present application to those skilled in the art. It should be noted that: unless otherwise specified, the relative arrangement of components and steps, the composition of materials, numerical expressions and values set forth in these embodiments should be interpreted as merely exemplary, and not as a limitation.

[0027] It should be noted that, in the description of the present application, unless otherwise specified, the meaning of "a plurality of" is greater than or equal to two; the orientation or position relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer" and the like is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0028] ​​​In addition, the "first", "second", and similar words used in the present application do not represent any order, number or importance, but are only used to distinguish different parts. "Vertical" is not strictly vertical, but within the allowable range of error. "Parallel" is not strictly parallel, but within the allowable range of error. "Include" or "contain" and similar words mean that the elements before the word cover the elements listed after the word, and do not exclude the possibility of also covering other elements.

[0029] It should also be noted that in the description of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. When it is described that a specific device is located between the first device and the second device, there can be or can not be an intermediate device between the specific device and the first device or the second device.

[0030] All terms used in the present application have the same meaning as understood by those skilled in the art to which the present application belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted to have meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an idealized or excessively formalized sense, unless otherwise defined explicitly herein.

[0031] Techniques, methods and devices known to those skilled in the relevant art can not be discussed in detail, but in appropriate cases, the techniques, methods and devices should be considered as part of the specification.

[0032] As shown in Figures 1 to 3 The embodiment shows a gas floating strip assembly, which comprises a gas floating strip box body structure 10, a gas uniform distribution structure 20 and a gas floating strip structure 30. The gas floating strip box body structure 10 has a box body air inlet and an opening. The gas uniform distribution structure 20 comprises a uniform distribution partition plate 21 and a uniform distribution flat plate 22, the uniform distribution partition plate 21 is vertically arranged in the gas floating strip box body structure 10, and the uniform distribution flat plate 22 is horizontally arranged on the side of the uniform distribution partition plate 21 away from the bottom wall of the gas floating strip box body structure 10, and the uniform distribution flat plate 22 has a plurality of uniform distribution air outlet holes 221. The gas floating strip structure 30 is sealingly arranged at the opening of the gas floating strip box body structure 10, and the gas floating strip structure 30 has a plurality of gas film holes.

[0033] According to the technical scheme of the embodiment, the gas enters the air float strip box body structure 10 through the box body air inlet, is uniformly distributed and buffered by the uniform distribution partition plate 21 for the first time, is uniformly distributed and buffered again through the plurality of uniform distribution air outlets 221, and then forms the air film through the plurality of air film holes of the air float strip structure 30, so as to suspend the object. The above structure makes the gas distribution more uniform. The technical scheme of the embodiment effectively solves the problem that the gas distribution of the air float strip is not uniform in the prior art, and the stability of the object on the air float strip is not high.

[0034] It should be noted that the air float strip structure 30 of the embodiment is a porous structure made of graphite nano material, the porous structure forms the air film hole, the pore size of the air film hole is between 0.03 microns and 0.08 microns, and the air float strip structure 30 is a plate-shaped structure. Such a structure makes the air film distribution more uniform.

[0035] As shown in Figure 1 and Figure 2 , in the technical scheme of the embodiment, the surface of the side of the uniform distribution flat plate 22 facing the air float strip structure 30 has a plurality of buffer grooves 222, and the plurality of uniform distribution air outlets 221 are located in the plurality of buffer grooves 222. The buffer grooves 222 are arranged on one side of the air float strip structure 30. The buffer grooves 222 play a role in buffering the gas entering the upper side of the uniform distribution flat plate 22, and also play a role in further uniform distribution of the gas. A plurality of uniform distribution air holes are arranged in each buffer groove 222, and the distance between adjacent uniform distribution air holes is the same. The distance between adjacent uniform distribution air holes can also be different according to needs, for example, the distance between adjacent uniform distribution air holes near the box body air inlet is greater than the distance between adjacent uniform distribution air holes away from the box body air inlet.

[0036] As shown in Figure 1 and Figure 2 , in the technical scheme of the embodiment, each buffer groove 222 extends along the length direction of the uniform distribution flat plate 22, and the two sides of each buffer groove 222 have a boss 223 extending along the length direction of the uniform distribution flat plate 22, and the surface of the side of the boss 223 close to the air float strip structure 30 has a plurality of uniform distribution grooves 224. The arrangement of the uniform distribution grooves 224 further ensures the uniformity of the gas passing through the air float strip structure 30. It should be noted that the uniform distribution grooves 224 and the buffer grooves 222 are connected.

[0037] As shown in Figure 1 and Figure 2As shown, in this embodiment, multiple evenly distributed grooves 224 form an X-shape. The evenly distributed grooves 224 in the above structure have better connectivity, which is more conducive to the even distribution of gas. The angle between each evenly distributed groove 224 and the extending direction of the boss 223 (the length direction of the evenly distributed plate 22) is 45°, which makes the path of each evenly distributed groove 224 not very long and relatively uniform, thereby ensuring that the gas is relatively evenly distributed before the gas enters the air flotation bar structure 30.

[0038] like Figure 1 As shown, in the technical solution of this embodiment, the cross-section of each uniformly distributed groove 224 is V-shaped. This structure makes the gas diffusion space of the uniformly distributed groove 224 gradually increase from bottom to top, thereby ensuring that the area of ​​gas passing through the air-floating strip structure 30 is large, and the gradual change of gas also ensures that abrupt changes are not likely to occur.

[0039] like Figures 1 to 3 As shown, in this embodiment, the lower surface of the air-float structure 30 is in contact with the upper surface of the boss 223. Gas enters the air-float structure 30 through the buffer groove 222 and the evenly distributed groove 224, further ensuring the controllability of the gas flow.

[0040] like Figure 3 As shown, in this embodiment, the uniformly distributed partition 21 includes a first vertical plate, a second vertical plate, a third vertical plate, and a fourth vertical plate arranged in parallel on one side of the air-floating bar box structure 10. The distance between the first and second vertical plates is the same as the distance between the third and fourth vertical plates. An air inlet is located between the first and second vertical plates, and between the third and fourth vertical plates. The distance between the first and second vertical plates is greater than the distance between the second and third vertical plates. Both the second and third vertical plates have connecting holes. This structure further ensures the uniform distribution of gas under the action of the uniformly distributed partition 21. The spaces between the first and second vertical plates, the spaces between the second and third vertical plates, and the spaces between the third and fourth vertical plates all have a certain buffering and uniform distribution effect on the gas.

[0041] It should be noted that, in this embodiment, the air flotation strip structure 30 and the gas distribution structure 20 are sealed together by adhesive bonding. The air flotation strip box structure 10 and the gas distribution structure 20 can be an integral structure.

[0042] like Figure 5 and Figure 6 As shown, according to another aspect of the embodiments of this application, an air flotation bar mechanism is also provided. The air flotation bar mechanism includes a connecting pipe assembly 40 and an air flotation bar assembly, wherein the connecting pipe assembly 40 is connected to the air flotation bar assembly, and the air flotation bar assembly is the aforementioned air flotation bar assembly. The aforementioned air flotation bar mechanism has the beneficial effect of stable and uniform distribution of air film.

[0043] It should be noted that in the technical solution of the present embodiment, there are also four position sensors 50, which are respectively arranged at the four corners of the air float strip assembly. The position sensor 50 can be a pressure sensor, which can sense the distance between the object and the air float strip structure 30 by pressure method, as well as the local changes of the air film pressure and flow. The position sensor 50 can also be a distance measuring sensor, which can measure the distance between the object and the air float strip structure 30.

[0044] As shown in Figure 5 and Figure 6 , the communication pipeline assembly 40 includes a communication pipeline 41, an adjusting valve 42 and a filter 43, the adjusting valve 42 and the filter 43 are arranged on the communication pipeline 41, and the adjusting valve 42 is arranged between the filter 43 and the air float strip assembly. The adjusting valve 42 can adjust the flow, pressure and other parameters of the gas. The filter can filter out impurities in the gas to prevent impurities in the gas from blocking the gas path and polluting the objects floated by the gas.

[0045] I. Air float strip main structure

[0046] The air float strip base (air float strip box body structure 10 and air distribution structure 20) is made of high-strength and high-toughness aluminum alloy material, which has good mechanical properties and processing performance. The base is provided with a complex network of gas channels, which are optimized in design to ensure that the gas can be uniformly distributed in the length direction of the entire air float strip (air float strip assembly).

[0047] The air float micro-holes are distributed on the upper surface of the air float strip, and the material is nano-porous material. The nano-pore diameter and spacing are accurately calculated and experimentally verified, and are arranged in a uniform hexagonal array, so that the gas sprayed from the micro-holes forms a stable and uniform air film.

[0048] II. Gas supply and adjusting system

[0049] The gas supply source is connected to the gas inlet (box body gas inlet, which is multiple) of the air float strip through a pressure-resistant and wear-resistant rubber hose (communication pipeline 41). On the gas supply pipeline, a high-precision pressure regulating valve is installed. The pressure regulating valve can automatically adjust the gas pressure according to the preset pressure value, to ensure that the gas pressure entering the air float strip is stable within [0.6Mpa]. A flow sensor is arranged on the communication pipeline 41, which monitors the gas flow in real time and feeds back the data to the control system.

[0050] In addition, a gas filtering device (filter 43) is also provided to remove impurities and moisture in the gas, prevent the air float nano micro-holes from being blocked, and ensure the long-term stability of the air float effect.

[0051] III. Self-adaptive adjusting mechanism

[0052] The air float strip assembly has an array of pressure sensors distributed at key locations of the air float strip. When the load changes or the local pressure of the air float strip surface is abnormal, the pressure sensor can quickly detect the pressure change and transmit the signal to the control system.

[0053] The control system adjusts the gas supply pressure by adjusting the opening degree of the pressure regulating valve according to the received pressure signal, fine-tunes the gas flow of different areas, ensures the uniformity and stability of the air film on the surface of the air float strip, and enables the air float strip assembly to adapt to different working conditions.

[0054] Four, sealing and protection structure

[0055] Special sealing structures are designed at the edges and bottom of the air float strip. The edges use special clean sealant and flexible rubber sealing pads, which are tightly combined with the air float strip base through the blocking plate and screw fixing method, effectively preventing gas leakage from the side, and enhancing the pressure resistance and wear resistance of the air float strip (air float strip assembly).

[0056] Another aspect of the present application also provides a conveying device, which comprises an air float strip mechanism, and the air float strip mechanism is the air float strip mechanism described above. The conveying device of the present application has a stable air film.

[0057] So far, the embodiments of the present application have been described in detail. In order to avoid obscuring the concept of the present application, some details known in the art are not described. Those skilled in the art can fully understand how to implement the technical solutions disclosed herein according to the above description.

[0058] Although some specific embodiments of the present application have been described in detail through examples, those skilled in the art should understand that the above examples are only for illustration, not for limiting the scope of the present application. Those skilled in the art should understand that the above embodiments can be modified or some technical features can be replaced equivalently without departing from the scope and spirit of the present application. In particular, as long as there is no structural conflict, the technical features mentioned in each embodiment can be combined in any way.

Claims

1. An air float strip assembly, characterized by, The application relates to a gas-float strip box structure (10) having a box body air inlet and an opening, a gas-distribution structure (20) including a distribution partition (21) and a distribution flat plate (22), the distribution partition (21) being vertically arranged in the gas-float strip box structure (10), the distribution flat plate (22) being horizontally arranged on a side of the distribution partition (21) away from a bottom wall of the gas-float strip box structure (10), the distribution flat plate (22) having a plurality of distribution air outlets (221), and a gas-float strip structure (30) being sealingly arranged at the opening of the gas-float strip box structure (10), the gas-float strip structure (30) having a plurality of gas film holes. The surface of a side of the distribution flat plate (22) facing the gas-float strip structure (30) has a plurality of buffer grooves (222), and the plurality of distribution air outlets (221) are located in the plurality of buffer grooves (222). Each buffer groove (222) extends along the length direction of the distribution flat plate (22), and both sides of each buffer groove (222) have a boss (223) extending along the length direction of the distribution flat plate (22), and the surface of a side of the boss (223) close to the gas-float strip structure (30) has a plurality of distribution grooves (224). The plurality of distribution grooves (224) form an X shape.

2. The air float bar assembly of claim 1, wherein, The cross section of each distribution groove (224) is V-shaped.

3. The air float bar assembly of claim 2, wherein, The lower surface of the gas-float strip structure (30) is in contact with the upper surface of the boss (223).

4. The air float bar assembly of claim 3, wherein, The distribution partition (21) includes a first vertical plate, a second vertical plate, a third vertical plate and a fourth vertical plate sequentially and horizontally arranged on one side of the gas-float strip box structure (10), the interval between the first vertical plate and the second vertical plate is the same as the interval between the third vertical plate and the fourth vertical plate, the first vertical plate and the second vertical plate have an air inlet therebetween, the third vertical plate and the fourth vertical plate have an air inlet therebetween, the interval between the first vertical plate and the second vertical plate is greater than the interval between the second vertical plate and the third vertical plate, and the second vertical plate and the third vertical plate are both provided with a communication hole.

5. The air float bar assembly of claim 3, wherein, The gas-float strip mechanism includes a communication pipeline assembly (40) and a gas-float strip assembly, the communication pipeline assembly (40) is in communication with the gas-float strip assembly, and the gas-float strip assembly is the gas-float strip assembly according to any one of claims 1 to 7.

6. The air float bar assembly of claim 3, wherein, The communication pipeline assembly (40) includes a communication pipeline (41), an adjusting valve (42) and a filter (43), the adjusting valve (42) and the filter (43) are both arranged on the communication pipeline (41), and the adjusting valve (42) is arranged between the filter (43) and the gas-float strip assembly.

7. The air floatation strip assembly of any one of claims 1 to 6, wherein, The conveying device includes a gas-float strip mechanism, and the gas-float strip mechanism is the gas-float strip mechanism according to claim 8 or 9.

8. An air float bar mechanism characterized by, ​ 9. The gas float bar mechanism of claim 8, wherein, ​ 10. A delivery device characterized by, ​

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