Seed crystal shaft connecting structure and crystal growth furnace

Abstract

The utility model relates to the technical field of liquid phase method silicon carbide, and particularly discloses a seed crystal shaft connecting structure and a crystal growth furnace applying the same, a connecting device is arranged at one end of a connecting rod, and a plectrum ring and a clamping plectrum in transmission connection with the plectrum ring are arranged in the connecting device; when the seed crystal shaft needs to be detached, the shifting piece ring can be rotated to drive the clamping shifting piece to clamp the end of the seed crystal shaft, so that the seed crystal shaft is prevented from being separated from the connecting device, the seed crystal shaft and the connecting rod are connected and fixed, and when the seed crystal shaft needs to be detached, the shifting piece ring only needs to be reversely rotated to drive the clamping shifting piece to loosen the clamping of the seed crystal shaft. By adopting the connecting device, the mounting and dismounting work between the seed crystal shaft and the connecting rod is greatly facilitated, so that the working efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to liquid phase method silicon carbide technical field especially relates to a seed crystal axle connecting structure and apply the long crystal furnace of this connecting structure. BACKGROUND

[0002] In the liquid phase method silicon carbide long crystal furnace, in the long crystal process, need to utilize the connecting rod to drive the seed crystal axle with the seed crystal attached to the head to extend into the crucible to rotate and pull long crystal, to obtain silicon carbide round bar, in the use process, operating personnel need to open the operating window of machine upper cover and connect or disconnect the connecting rod and seed crystal axle, but the step of connecting or dismounting the connecting rod and seed crystal axle is complicated at present, and the connection stability is also not high.

[0003] The technical problem to be solved by the present application is to design a connecting structure for connecting or dismounting the seed crystal axle and the connecting rod and a long crystal furnace applying the connecting structure. UTILITY MODEL CONTENTS

[0004] In order to overcome the deficiencies of the prior art, the utility model aims at providing a connecting structure for connecting or dismounting the seed crystal axle and the connecting rod and a long crystal furnace applying the connecting structure.

[0005] The technical scheme adopted by the utility model is: a seed crystal axle connecting structure, including connecting rod and the seed crystal axle connected with the connecting rod, one end of the connecting rod is equipped with connecting device, the connecting device includes the tab ring, the detent tab is connected with the transmission of the tab ring, the seed crystal axle is equipped with the convex ring, and the detent tab and the convex ring are matched when the connecting rod is connected with the seed crystal axle.

[0006] In some embodiments, the connecting device further includes a connecting body connected to the connecting rod, the connecting body includes a connecting head and a connecting base, the tab ring is sleeved on the connecting head, and the detent tab and the connecting base are slidingly matched.

[0007] In some embodiments, the connecting base is provided with two sliding grooves arranged in mirror image, and the detent tab is located in the sliding grooves arranged in mirror image.

[0008] In some embodiments, the connecting base is provided with two sliding grooves arranged in mirror image, and the detent tab is located in the sliding grooves arranged in mirror image.

[0009] In some embodiments, the detent tab is provided with a strip-shaped groove, the strip-shaped groove is arranged obliquely between the length direction of the detent tab, and the detent tab and the strip-shaped groove are limitingly and slidingly matched.

[0010] In some embodiments, the opposite sides of the two clamping pieces are semicircular rings, and a limiting hole is formed in the middle after the two clamping pieces are combined towards each other, and the diameter of the limiting hole is smaller than the diameter of the convex ring.

[0011] In some embodiments, a limiting groove is arranged on the connecting base, and the clamping piece ring is provided with a positioning screw, and the positioning screw and the limiting groove are limitedly matched.

[0012] In some embodiments, the seed crystal shaft is provided with a taper joint at the end provided with the convex ring, one end of the connecting rod is provided with a taper hole, the taper joint is located in the taper hole after the seed crystal shaft and the connecting rod are connected, and an exhaust hole communicating with the outside is arranged in the taper hole.

[0013] A crystal growing furnace is provided with the seed crystal shaft connecting structure in any of the above embodiments, and comprises a vacuum cavity, the upper end of the vacuum cavity is provided with a cover body, the seed crystal shaft connecting structure is located in the cover body, the cover body is provided with an operation window, and the inside of the vacuum cavity is further provided with a crucible.

[0014] The connecting device is arranged at one end of the connecting rod, the clamping piece ring and the clamping piece drivenly connected with the clamping piece ring are arranged in the connecting device, when it is needed to connect and fix the seed crystal shaft and the connecting rod, the clamping piece ring is rotated to drive the clamping piece to clamp the end of the seed crystal shaft, so that the seed crystal shaft and the connecting device are separated, and the connection and fixation between the seed crystal shaft and the connecting rod are realized, when it is needed to disassemble, the clamping piece ring is reversely rotated to drive the clamping piece to release the clamping of the seed crystal shaft, and the disassembly and separation of the seed crystal shaft and the connecting rod are realized, the above connecting device is adopted, the installation and disassembly work between the seed crystal shaft and the connecting rod are greatly facilitated, and the working efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a structural schematic view of the utility model;

[0016] Figure 2 It is a structural schematic view of the utility model;

[0017] Figure 3 It is a structural schematic view of the utility model;

[0018] Figure 4 It is a structural schematic view of the utility model.

[0019] The labels and names in the figure correspond as follows: 1, connecting rod; 2, seed crystal shaft; 3, connecting device; 30, push piece ring; 31, clamping push piece; 20, convex ring; 32, connecting main body; 320, connecting head; 321, connecting base; 322, sliding groove; 323, limiting through hole; 300, push rod; 310, strip-shaped groove; 324, limiting groove; 301, positioning screw; 21, taper joint; 10, taper hole; 4, vacuum cavity; 40, cover body; 41, operation window. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0021] Embodiment 1: please refer to Figures 1-3 The utility model provides a technical scheme: a kind of seed crystal shaft connection work, including connecting rod 1 and the seed crystal shaft 2 connected with connecting rod 1, the one end of connecting rod 1 is equipped with connecting device 3, and connecting device 3 includes push piece ring 30, clamping push piece 31 with the transmission connection of push piece ring 30, convex ring 20 is equipped on seed crystal shaft 2, and clamping push piece 31 is clamped with the cooperation between convex ring 20 when connecting rod 1 is connected with seed crystal shaft 2, clamping push piece 31 is equipped with two mutually mirror images, and the opposite side of two clamping push pieces 31 is semicircular ring, when two clamping push pieces 31 between towards merging, limit hole will be formed in the middle, wherein the diameter of limit hole is less than the diameter of convex ring 20, so when needing to connect between seed crystal shaft 2 and connecting rod 1, first, the one end of seed crystal shaft 2 with convex ring 20 is inserted into connecting device 3, then rotating push piece ring 30, and push piece ring 30 will drive two clamping push pieces 31 towards merging, to form limit hole in the middle, since the diameter of limit hole is less than the diameter of convex ring 20, so at this time, seed crystal shaft 2 is locked between clamping push piece 31 due to being equipped with convex ring 20, to realize the connection and fixation of seed crystal shaft 2 and connecting device 3, since the installation between connecting device 3 and connecting rod 1, it is equivalent to realize the connection and fixation between seed crystal shaft 2 and connecting rod 1, and when needing to disassemble between seed crystal shaft 2 and connecting rod 1, at this time, only need to rotate push piece ring 30 reversely, i.e. can drive two clamping push pieces 31 between opposite sides to slide, to release the clamping of seed crystal shaft 2, to realize the disassembly and separation between seed crystal shaft 2 and connecting rod 1.

[0022] The connecting device 3 further comprises a connecting body 32 connected with the connecting rod 1, wherein the connecting body 32 comprises a connecting head 320 and a connecting base 321, the connecting head 320 is connected with the connecting rod 1, the connecting rod 1 penetrates into the connecting head 320, the tab ring 30 is sleeved on the connecting head 320, the clamping tab 31 is slidingly fitted with the connecting base 321, two mutually mirror-image sliding grooves 322 are arranged on the connecting base 321, wherein the clamping tab 31 is arranged in the mutually mirror-image sliding grooves 322 respectively, by arranging the clamping tab 31 in the sliding grooves 322, the tab ring 30 can drive the clamping tab 31 to slide to clamp the seed crystal shaft 2.

[0023] A limiting through hole 323 is arranged on the connecting base 321 corresponding to the sliding groove 322, two mutually mirror-image push rods 300 are arranged on the tab ring 30, the push rod 300 penetrates through the limiting through hole 323 to push the clamping tab 31 to slide, the clamping tab 31 is provided with a strip-shaped groove 310, the strip-shaped groove 310 is arranged obliquely with the length direction of the clamping tab 31, the push rod 300 is limitingly and slidingly fitted with the strip-shaped groove 310, wherein the limiting through hole 323 is arc-shaped, by rotating the tab ring 30, the push rod 300 can slide in the limiting through hole 323, and the lower end of the push rod 300 is limitingly and slidingly fitted with the strip-shaped groove 310, so when the tab ring 30 rotates, the push rod 300 can slide in the limiting through hole 323 and the strip-shaped groove 310, and since the length direction of the strip-shaped groove 310 is arranged obliquely with the length direction of the clamping tab 31, when the push rod 300 slides in the strip-shaped groove 310, the two clamping tabs 31 are pushed to move towards each other, thereby clamping the seed crystal shaft 2.

[0024] In order to avoid that the two clamping tabs 31 clamp the seed crystal shaft 2 and the tab ring 30 loosens in the working process, thereby affecting the connection of the seed crystal shaft 2, a limiting groove 324 is further arranged on the connecting base 321, a positioning screw 301 is arranged on the tab ring 30, wherein the positioning screw 301 is limitingly fitted with the limiting groove 324, by embedding one end of the positioning screw 301 into the limiting groove 324, the tab ring 30 can be positioned to avoid loosening.

[0025] In order to better connect the seed crystal axis 2 and the connecting rod 1, the end of the seed crystal axis 2 provided with the convex ring 20 is also provided with a tapered joint 21, wherein one end of the connecting rod 1 is provided with a tapered hole 10, and after the connection between the seed crystal axis 2 and the connecting rod 1, the tapered joint 21 is embedded in the tapered hole 10, wherein in order to avoid the air remaining in the tapered hole 10 after the fitting between the tapered joint 21 and the tapered hole 10, thereby affecting the fitting degree of the tapered joint 21 and the tapered hole 10, the tapered hole 10 is also provided with an exhaust hole in communication with the outside, thereby facilitating the exhaust of the remaining gas in the tapered hole 10, and more facilitating the installation and fitting between the tapered joint 21 and the tapered hole 10, and when the tapered joint 21 and the tapered hole 10 are fitted, the tapered surface between the tapered joint 21 and the tapered hole 10 can be adjusted by rotating the connecting body 32, and then the end of the positioning screw 301 is embedded in the limiting groove 324, so that the push piece ring 30 can be positioned to avoid loosening, thereby ensuring better connection and fixation between the seed crystal axis 2 and the connecting rod 1.

[0026] Embodiment 2: please refer to Figure 4 The utility model provides another technical scheme: a crystal growing furnace, the crystal growing furnace is equipped with any seed crystal axis 2 connecting structure in above -mentioned embodiment 1, including vacuum cavity 4, the upper end of vacuum cavity 4 is equipped with cover 40, wherein seed crystal axis 2 connecting structure is located in cover 40, cover 40 is equipped with operating window 41 to facilitate staff to rotate push piece ring 30, thereby realize the connection or disassembly of seed crystal axis 2, still be equipped with crucible in the inside of vacuum cavity 4.

[0027] The working principle of the utility model: by being equipped with connecting device 3 in one end of connecting rod 1, being equipped with push piece ring 30 and the clamping piece 31 of transmission connection of push piece ring 30 in connecting device 3, when needing to connect and fix between connecting rod 1 and seed crystal axis 2, can by rotating push piece ring 30 to drive clamping piece 31 to carry out the clamping of this end of seed crystal axis 2, thereby avoiding the separation of seed crystal axis 2 and connecting device 3, thereby realizing the connection and fixation between seed crystal axis 2 and connecting rod 1, and when needing to disassemble, just reverse rotation push piece ring 30, thereby can drive clamping piece 31 to loosen the clamping of seed crystal axis 2, thereby realizing the disassembly and separation of seed crystal axis 2 and connecting rod 1, by adopting above -mentioned connecting device 3, greatly facilitate the installation and disassembly work between seed crystal axis 2 and connecting rod 1, thereby improving work efficiency.

[0028] Finally, it should be noted that the above only for the preferred examples of the utility model and does not limit the utility model, although the utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, still can modify the technical scheme recorded in the foregoing embodiments, or equivalent replacement to part of technical features. Any modification, equivalent replacement, improvement etc. within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A seed axis connection structure comprising a link and a seed axis connected to the link, characterized by, One end of the connecting rod is provided with a connecting device, the connecting device comprises a dial ring, a clamping dial connected with the dial ring, the seed crystal shaft is provided with a convex ring, the clamping dial and the convex ring are clamped when the connecting rod is connected with the seed crystal shaft.

2. The seed axis connection structure of claim 1, wherein The connecting device further comprises a connecting body connected with the connecting rod, the connecting body comprises a connecting head and a connecting base, the dial ring is sleeved on the connecting head, and the clamping dial and the connecting base are slidingly matched.

3. The seed axis connection structure of claim 2, wherein The connecting base is provided with two mutually mirror-image sliding grooves, and the clamping dial is located in the mutually mirror-image sliding grooves.

4. The seed axis connection structure of claim 3, wherein The connecting base is provided with two mutually mirror-image sliding grooves, and the clamping dial is located in the mutually mirror-image sliding grooves.

5. The seed axis connection structure of claim 4, wherein The connecting base is provided with two mutually mirror-image sliding grooves, and the clamping dial is located in the mutually mirror-image sliding grooves.

6. The seed axis connection structure of claim 1, wherein The clamping dial is provided with a strip-shaped groove, the strip-shaped groove is obliquely arranged between the length direction of the clamping dial, and the dial rod and the strip-shaped groove are limitingly and slidingly matched.

7. The seed axis connection structure of claim 2, wherein The opposite sides of the two clamping dials are semicircular rings, and a limiting hole is formed in the middle of the two clamping dials after they are combined towards each other, the diameter of the limiting hole is smaller than that of the convex ring.

8. The seed axis connection structure of claim 1, wherein The connecting base is provided with a limiting groove, the dial ring is provided with a positioning screw, and the positioning screw and the limiting groove are limitingly matched.

9. A crystal growing furnace provided with the seed crystal shaft connection structure according to any one of claims 1 to 8, characterized by The seed crystal shaft is provided with a tapered joint at the end provided with the convex ring, one end of the connecting rod is provided with a tapered hole, the tapered joint is located in the tapered hole after the seed crystal shaft and the connecting rod are connected, and an exhaust hole communicating with the outside is arranged in the tapered hole. The vacuum cavity is provided with a cover at the upper end, the seed crystal shaft connecting structure is located in the cover, the cover is provided with an operation window, and the vacuum cavity is further provided with a crucible.

Images