Tube target sintering device

Abstract

The utility model provides a tube target sintering device which comprises a load bearing plate, a movable plate and a plurality of sliding assemblies, and each sliding assembly is connected between the movable plate and the load bearing plate. And the movable plate is arranged on the load bearing plate in a manner of being capable of moving from the outer edge of the load bearing plate to the center direction of the load bearing plate. According to the tube target sintering device, due to the arrangement of the moving plate and the sliding assembly, the situation that a target green body is excessively deformed due to shrinkage or gravity factors during sintering, and consequently cracking is caused is avoided.

Description

Technical Field

[0001] This utility model relates to the field of target material processing technology, and in particular to a tube target sintering device. Background Technology

[0002] Target materials are a crucial type of vacuum coating material. Currently, during the sintering of tubular target blanks, they are mostly placed directly on a firing plate, or a layer of pre-coated material is spread on the firing plate before placing the target blank to reduce shrinkage resistance during sintering. However, the sintering shrinkage rate of the target blank varies significantly in the vertical direction. Because the lower part of the blank bears more weight than the upper part, and due to the frictional force between the bottom of the blank and the contact surface of the firing plate during sintering shrinkage, the shrinkage resistance of the entire blank is different, exhibiting a gradient decrease in shrinkage rate from top to bottom. Even with pre-coated material, microspheres or spherical powders only serve to isolate the firing plate and reduce the contact area between the blank and the firing plate, which can reduce shrinkage resistance to some extent, but still cannot achieve synchronous shrinkage during the sintering process, causing the target material to deform or crack. Utility Model Content

[0003] In view of the problem that excessive deformation and cracking of target green billets during sintering due to shrinkage or gravity in the prior art, this utility model provides a tube target sintering device.

[0004] On the one hand, the present invention provides a tube target sintering device, including a sintering plate, a moving plate and a plurality of sliding components, each of the sliding components being connected between the moving plate and the sintering plate, so that the moving plate is displaceably disposed on the sintering plate from the outer edge of the sintering plate toward the center of the sintering plate.

[0005] Optionally, the movable plate includes a plurality of sector-shaped components, which are slidably connected to the firing plate via the sliding assembly.

[0006] Optionally, the sliding component includes a ball, a first groove disposed on the firing plate, and a second groove disposed on the fan-shaped member, wherein the first groove and the second groove are disposed opposite to each other, and the first groove and the second groove extend from the outer edge of the firing plate toward the center of the firing plate;

[0007] The ball bearing is displaceably disposed between the first groove and the second groove, and contacts the outer walls of the first groove and the second groove respectively.

[0008] Optionally, the cross-sections of the first groove and the second groove are arc-shaped.

[0009] Optionally, the firing plate is provided with a plurality of first grooves, the plurality of first grooves are spaced apart, and the extending direction of the first grooves is parallel to the radial direction of the firing plate;

[0010] The fan-shaped component is provided with a plurality of second grooves, which are spaced apart, and the extending direction of the second grooves is parallel to the radial direction of the fan-shaped component.

[0011] Optionally, there is one second groove, and the first groove and the second groove extend along the radial direction of the firing plate.

[0012] Optionally, the firing plate is annular, and the first groove extends from the outer edge of the firing plate to the inner edge of the firing plate.

[0013] Optionally, when two adjacent sector members abut each other, multiple sector members are joined together to form a ring.

[0014] Optionally, the tube target sintering apparatus further includes a first limiting ring, which is disposed on the firing plate and located on the side of the moving plate away from the outer edge of the firing plate.

[0015] Optionally, the tube target sintering apparatus further includes a second limiting ring, which is disposed on the firing plate and located on the side of the moving plate facing the outer edge of the firing plate.

[0016] In this invention, by setting a sliding component, the moving plate is displaceably disposed on the firing plate along the outer edge of the firing plate towards its center, which effectively reduces the shrinkage resistance of the target material. During the sintering of the target material, the moving plate moves towards the center of the firing plate as the target material shrinks, thereby preventing the target material from deforming or cracking during the shrinkage process and improving the sintering quality of the target material. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of a tube target sintering device provided in one embodiment of the present invention;

[0018] Figure 2 This is a schematic diagram of the structure of the sintering plate of a tube target sintering device according to an embodiment of the present invention;

[0019] Figure 3 This is a schematic diagram of the structure of the moving plate of a tube target sintering device provided in one embodiment of the present invention.

[0020] The reference numerals in the accompanying drawings are as follows:

[0021] 1. Sintering plate; 2. Sliding assembly; 21. First groove; 22. Second groove; 3. Target material; 4. Fan-shaped component; 5. First limiting ring; 6. Second limiting ring. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0023] To illustrate the technical solution of this utility model, specific embodiments are described below.

[0024] like Figures 1-3 As shown, an embodiment of the present invention provides a tube target sintering apparatus, which includes a sintering plate 1, a moving plate, and a plurality of sliding components 2. Each of the sliding components 2 is connected between the moving plate and the sintering plate 1, so that the moving plate is displaceably disposed on the sintering plate 1 from the outer edge of the sintering plate 1 toward the center of the sintering plate 1.

[0025] In this embodiment of the present invention, by setting a sliding component 2, the moving plate is displaceably disposed on the firing plate 1 along the outer edge of the firing plate 1 towards its center, which effectively reduces the shrinkage resistance of the target material 3, so that when the target material 3 is sintered, the moving plate moves towards the center of the firing plate 1 as the target material 3 shrinks, so as to prevent the target material 3 from deforming or cracking during the shrinkage process and improve the sintering quality of the target material 3.

[0026] like Figure 1 and Figure 3 As shown, in some embodiments of this utility model, the movable plate includes multiple fan-shaped components 4, which are slidably connected to the firing plate 1 via the sliding assembly 2. Specifically, three or more fan-shaped components 4 can be provided, so that the target material 3 can be uniformly contracted in all directions while moving with the fan-shaped components 4.

[0027] like Figures 1-3 As shown, in some embodiments of this utility model, the sliding component 2 includes a ball, a first groove 21 disposed on the firing plate 1 and a second groove 22 disposed on the fan-shaped component 4. The first groove 21 and the second groove 22 are disposed opposite to each other, and the first groove 21 and the second groove 22 extend from the outer edge of the firing plate 1 toward the center of the firing plate 1.

[0028] The ball is displaceably disposed between the first groove 21 and the second groove 22, and contacts the outer walls of the first groove 21 and the second groove 22 respectively.

[0029] By setting the ball bearings to move within the first groove 21 and the second groove 22, the sector-shaped component 4 can be directionally moved relative to the firing plate 1. Specifically, the outer walls of the first groove 21 and the second groove 22 are smooth or have a certain degree of roughness, the two ends of the first groove 21 and the second groove 22 are at the same height, the ball bearings are made of alumina and zirconia balls, and the diameter of the ball bearings is adapted to the size of the first groove 21 and the second groove 22.

[0030] like Figures 1-3 As shown, in some embodiments of this utility model, the cross-sections of the first groove 21 and the second groove 22 are arc-shaped. By setting the first groove 21 and the second groove 22 to be arc-shaped, they can be adapted to the ball bearings, facilitating the smooth and directional movement of the fan-shaped component 4 on the bearing plate 1.

[0031] like Figures 1-3 As shown, in some embodiments of this utility model, the firing plate 1 is provided with a plurality of first grooves 21, the plurality of first grooves 21 are spaced apart, and the extending direction of the first grooves 21 is parallel to the radial direction of the firing plate 1.

[0032] The fan-shaped component 4 is provided with a plurality of second grooves 22, which are spaced apart, and the extending direction of the second grooves 22 is parallel to the radial direction of the fan-shaped component 4. By providing a plurality of first grooves 21 and a plurality of second grooves 22, on the one hand, the fan-shaped component 4 can move smoothly on the firing plate 1, and on the other hand, by providing a plurality of first grooves 21, fan-shaped components 4 of different sizes can move along the outer edge of the firing plate 1 towards the center of the firing plate 1.

[0033] In another embodiment of this utility model, the number of second grooves 22 is one, and the first grooves 21 and the second grooves 22 extend along the radial direction of the firing plate 1. By providing multiple first grooves 21 extending radially on the firing plate 1 and providing a second groove 22 on the fan-shaped member 4, the target material 3 shrinks uniformly in all directions.

[0034] like Figure 2 As shown, in some embodiments of this utility model, the firing plate 1 is annular, and the first groove 21 extends from the outer edge of the firing plate 1 to the inner edge of the firing plate 1, so as to facilitate heat dissipation to the outside of the firing plate 1 through the first groove 21 during the sintering of the target material 3. Furthermore, the firing plate 1 has a circular ring structure, and the through hole in the middle facilitates gas flow during the sintering process, preventing gas flow from accumulating inside the target material 3.

[0035] In some embodiments of this utility model, when two adjacent fan-shaped parts 4 abut against each other, multiple fan-shaped parts 4 are joined together to form a ring to prevent deformation of the bottom of the target material 3. At the same time, the fan-shaped parts 4 have a certain width to ensure the stability of the target material 3.

[0036] like Figure 1 and Figure 2 As shown, in some embodiments of this utility model, the tube target sintering apparatus further includes a first limiting ring 5, which is disposed on the firing plate 1 and located on the side of the moving plate away from the outer edge of the firing plate 1. The outer diameter of the first limiting ring 5 matches the tube target after sintering and is used to limit the moving distance of the fan-shaped part 4 and the inner diameter of the target material 3 after sintering.

[0037] like Figure 1 and Figure 2 As shown, in some embodiments of this utility model, the tube target sintering device further includes a second limiting ring 6, which is disposed on the firing plate 1 and located on the side of the moving plate facing the outer edge of the firing plate 1. The inner diameter of the second limiting ring 6 matches the size of the target material 3 before sintering, and is used to limit the placement of the target material 3.

[0038] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model, and should all be included within the protection scope of this utility model.

Claims

1. A tube target sintering apparatus characterized by comprising: The device comprises a supporting plate, a moving plate and a plurality of sliding assemblies, each of which is connected between the moving plate and the supporting plate to allow the moving plate to be movably arranged on the supporting plate from the outer edge of the supporting plate to the center of the supporting plate.

2. The apparatus according to claim 1, wherein The moving plate comprises a plurality of fan-shaped pieces, each of which is slidably connected with the supporting plate through the sliding assembly.

3. The apparatus according to claim 2, wherein The sliding assembly comprises a ball, a first groove arranged on the supporting plate and a second groove arranged on the fan-shaped piece, the first groove and the second groove are oppositely arranged, and the first groove and the second groove extend from the outer edge of the supporting plate to the center of the supporting plate. The ball is movably arranged between the first groove and the second groove, and is in contact with the outer wall of the first groove and the second groove, respectively.

4. The pipe target sintering apparatus according to claim 3, wherein The cross section of the first groove and the second groove is in the shape of a circular arc.

5. The pipe target sintering apparatus according to claim 3, wherein The supporting plate is provided with a plurality of first grooves, the first grooves are arranged at intervals, and the extension direction of the first grooves is parallel to the radial direction of the supporting plate. The fan-shaped piece is provided with a plurality of second grooves, the second grooves are arranged at intervals, and the extension direction of the second grooves is parallel to the radial direction of the fan-shaped piece.

6. The pipe target sintering apparatus according to claim 3, wherein The number of the second grooves is one, and the first groove and the second groove extend along the radial direction of the supporting plate.

7. The apparatus according to any one of claims 3 to 6, wherein The supporting plate is in the shape of a ring, and the first groove extends from the outer edge of the supporting plate to the inner edge of the supporting plate.

8. The pipe target sintering apparatus according to claim 2, wherein When each adjacent two fan-shaped pieces are in contact with each other, a plurality of fan-shaped pieces are combined to form a ring.

9. The tube target sintering apparatus according to claim 1, wherein The tube target sintering device further comprises a first limiting ring, which is arranged on the supporting plate, and the first limiting ring is located on the side of the moving plate away from the outer edge of the supporting plate.

10. The tube target sintering apparatus according to claim 1, wherein The tube target sintering device further comprises a second limiting ring, which is arranged on the supporting plate, and the second limiting ring is located on the side of the moving plate towards the outer edge of the supporting plate.

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