Measuring tool

Abstract

The utility model discloses a measuring tool. The measuring tool comprises a profiling assembly and a measuring assembly, the profiling assembly comprises a base plate and a profiling rod which are movably connected, and under the condition that the base plate is placed on a workbench, the profiling rod is used for moving relative to the base plate so as to be aligned with a machining head; the measuring assembly is provided with a dial used for indicating the angle of the profiling rod relative to the substrate.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of measuring tools, and in particular to a measuring tool. BACKGROUND

[0002] In a photoresist spin coating process of a wafer, the excess photoresist is pushed to the edge of the wafer by centrifugal force, and an EBR nozzle sprays organic solvent at an angle on the edge of the wafer to remove the excess photoresist on the edge of the wafer. The EBR nozzle is complicated to install and maintain, and has low adjustment accuracy and long use time. CONTENT OF THE UTILITY MODEL

[0003] To solve the above technical problems, the present application provides a measuring tool. The present application is implemented through the following technical solutions:

[0004] The present application provides a measuring tool for a semiconductor processing device to measure the angle of a processing head relative to a workbench. The measuring tool comprises a profiling assembly and a measuring assembly. The profiling assembly comprises a base plate and a profiling rod movably connected. When the base plate is placed on the workbench, the profiling rod is used to move relative to the base plate to align with the processing head. The measuring assembly is provided with a scale disc to indicate the angle of the profiling rod relative to the base plate.

[0005] The measuring tool provided by the present application is used to obtain the relative position of the processing head and the workbench, and then the relative angle of the processing head and the workbench is obtained by combining the measuring assembly. Specifically, the base plate of the profiling assembly is placed on the bearing surface of the workbench to simulate the position of the semiconductor component relative to the workbench. The profiling rod moves relative to the base plate and aligns with the processing head to simulate the positional relationship of the processing head relative to the semiconductor component. The angle of the profiling rod relative to the base plate is measured by the scale disc of the measuring assembly, and the angle of the processing head relative to the workbench is obtained. By the cooperation of the profiling assembly and the measuring assembly, the measuring tool of the present application uses the profiling assembly as an intermediate bridge, and the measuring assembly can conveniently obtain the relative angle of the processing head and the workbench. Compared with the scheme in which the processing head and the workbench have a complex structure and it is difficult to place a measuring tool due to the layout relationship, resulting in difficult assembly and debugging of the processing head, the measuring tool of the present application can conveniently obtain the relative angle of the processing head and the workbench, so as to efficiently and accurately adjust the position of the processing head.

[0006] In a possible implementation manner of the present application, an axle body is arranged between the profiling rod and the base plate, and the profiling rod rotates relative to the base plate around the axle body. The base plate comprises a structural surface relative to the workbench, and the axis of the axle body is parallel or perpendicular to the structural surface.

[0007] Here, the profiling rod rotates relative to the base plate through the shaft body. In the case that the shaft body is parallel to the structure surface, the rotation of the profiling rod along the first shaft body can be close to or away from the workbench in the vertical direction to simulate the horizontal angle of the machining head relative to the workbench, so as to obtain the horizontal angle of the machining head relative to the workbench in combination with the measuring assembly, and the profiling rod can be folded relative to the base plate through the first shaft body to facilitate storage. In the case that the shaft body is perpendicular to the structure surface, the rotation of the profiling rod along the second shaft body can be close to or away from the center of the workbench in the horizontal direction to simulate the tangent angle of the machining head relative to the workbench, so as to obtain the tangent angle of the machining head relative to the workbench in combination with the measuring assembly.

[0008] In a possible implementation of the present application, the measuring assembly further comprises a connecting piece connected to the scale disc, and the connecting piece is detachably connected to the base plate, so that the measuring tool has at least a first state and a second state; in the first state, the extension surface of the base plate is parallel to the extension surface of the scale disc; in the second state, the extension surface of the base plate is perpendicular to the extension surface of the scale disc.

[0009] Here, the measuring assembly and the profiling assembly are connected by the connecting piece, so that the measuring assembly and the profiling assembly can be positioned relative to each other to have high measurement accuracy. The detachable connection of the connecting piece allows the profiling assembly to be separated from the measuring assembly during profiling to facilitate profiling of the profiling assembly. The first state and the second state of the measuring tool facilitate the acquisition of different types of angles, such as the horizontal angle and the tangent angle of the machining head relative to the machining table.

[0010] In a possible implementation of the present application, the scale disc is formed with a receiving space, and the connecting piece extends into the receiving space; the base plate is provided with a connecting hole extending from the edge to the middle, and the connecting piece cooperates with the connecting hole to detachably connect the base plate and the scale disc.

[0011] Here, the connecting piece extends into the receiving space of the scale disc. When the base plate is connected to the scale disc, the base plate is on the inner side of the scale disc, which facilitates reading of the scale and reduces space occupation. The connecting piece is connected to the connecting hole on the base plate, which facilitates adjustment of the relative position of the base plate and the scale disc.

[0012] In a possible implementation of the present application, the scale disc extends along an arc line, and the inner concave side of the scale disc forms a receiving space; or, the scale disc is ring-shaped, and the hollow part of the scale disc forms a receiving space. Here, the scale disc extends along an arc line to form a receiving space with a semi-enclosed structure, which is compact in structure. The scale disc is ring-shaped, which is symmetrical in structure and facilitates reading by the user.

[0013] In a possible implementation of the present application, the profiling rod comprises at least two rod bodies, and the at least two rod bodies are connected in relative sliding along the axial direction to enable the profiling rod to be elongated or shortened.

[0014] Here, the profiling rod is arranged in an extension and retraction mode by at least two rod bodies, in the extension state, the profiling rod can be quickly and accurately aligned with the machining head to facilitate profiling, and can be quickly aligned with the scale on the scale disc to facilitate quick and accurate reading. In the shortened state, the space occupation is reduced, and the profiling rod is convenient to store and carry.

[0015] In a possible implementation of the present application, the measuring tool further comprises a locking structure arranged between the profiling rod and the base plate, for locking or unlocking the movement of the profiling rod relative to the base plate.

[0016] Here, by arranging the locking structure, the movement of the profiling rod relative to the base plate can be unlocked, so that the profiling rod moves relative to the base plate to obtain the relative angle of the machining head relative to the workbench. When the locking structure locks the profiling rod relative to the base plate, the profiling rod and the base plate are relatively fixed to facilitate the measurement of the measurement assembly and obtain accurate measurement results.

[0017] In a possible implementation of the present application, the profiling assembly further comprises a base, and the profiling rod is rotatably connected to the base; the base comprises two limit portions arranged oppositely, and a sliding groove is formed between the two limit portions and is in sliding fit with the edge of the base plate.

[0018] Here, the profiling rod slides relative to the base plate through the base, and can move to different edges of the base plate to adjust the position relative to the workbench and adapt to machining heads at different positions. The sliding groove formed by the limit portions is matched with the base plate, and the structure is simple and has good stability.

[0019] In a possible implementation of the present application, the measuring tool further comprises an anti-skid structure arranged between the limit portion and the base plate, for limiting the relative movement of the base and the base plate.

[0020] Here, by arranging the anti-skid structure, the relative movement of the base and the base plate can be limited to position the base relative to the base plate, thereby improving the positioning accuracy of the profiling rod relative to the base plate.

[0021] In a possible implementation of the present application, the measuring tool further comprises a rolling body arranged between the base and the base plate and rolling relative to the base and the base plate.

[0022] Here, by arranging the rolling body, the surface contact between the base plate and the base is changed into line contact between the base plate, the base and the rolling body, and the sliding friction is changed into rolling friction, which helps to reduce friction, facilitate the movement of the base relative to the base plate, reduce wear and improve service life. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 The schematic diagram of the horizontal included angle in the embodiment of the present application;

[0024] Figure 2 A schematic diagram of the tangent angle in the embodiment of the present application is shown in FIG. 1;

[0025] Figure 3 A schematic diagram of the measuring tool in the first state is shown in FIG. 2;

[0026] Figure 4 A schematic diagram of the measuring tool in the second state is shown in FIG. 3;

[0027] Figure 5 A schematic diagram of the profiling assembly in the measuring tool is shown in FIG. 4;

[0028] Figure 6 A schematic diagram of the profiling assembly in the measuring tool is shown in FIG. 5.

[0029] Reference signs:

[0030] 010 - workbench; 011 - bearing surface; 020 - machining head; 100 - profiling assembly; 110 - base plate; 111 - connecting hole; 120 - profiling rod; 121 - rod body; 130 - first shaft body; 140 - second shaft body; 150 - connecting block; 160 - base; 161 - limiting portion; 162 - sliding groove; 200 - measuring assembly; 210 - scale disc; 220 - connecting piece; 300 - locking structure; 400 - anti-slip structure; 500 - rolling body; a - horizontal angle; b - tangent angle. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the specific technical solutions of the present application will be further described in detail below with reference to the drawings in the embodiments of the present application. The following embodiments are used to explain the present application, but not to limit the scope of the present application.

[0032] In the embodiments of the present application, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0033] In addition, in the embodiments of the present application, the orientation terms such as "up", "down", "left" and "right" are defined with respect to the orientation of the components shown in the drawings, and it should be understood that these directional terms are relative concepts, which are used for relative description and clarification, and they can be changed accordingly according to the change of the orientation of the components placed in the drawings.

[0034] In the embodiments of the present application, unless specifically defined and limited otherwise, the term "connection" should be interpreted broadly, for example, "connection" can be fixed connection, can also be detachable connection, or integral; can be directly connected, or indirectly connected through intermediate medium.

[0035] In the embodiments of the present application, the term "comprising", "containing" or any other variant thereof is intended to cover a non-exclusive inclusion, so that a process, method, article or apparatus that comprises a list of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent in such process, method, article or apparatus. Without more limitations, the element defined by the phrase "comprising a" does not exclude the presence of additional identical elements in the process, method, article or apparatus comprising the element.

[0036] In the embodiments of the present application, the words "exemplary" or "for example" are used to mean serving as an example, instance, or illustration. Any embodiment or design described herein as "exemplary" or "for example" should not be construed as being preferred or advantageous over other embodiments or designs. Rather, the exemplary or for example embodiments are intended to convey concepts in a concrete manner.

[0037] The embodiments of the present application provide a measurement tool. The measurement tool can be used in a semiconductor processing device, which generally includes a worktable for carrying a semiconductor component (such as a wafer) and a processing head for processing the semiconductor component, and the processing head can be a photolithography processing head, a vapor deposition processing head, a mechanical processing head, or a cleaning processing head, such as an Edge Bead Removal (EBR) nozzle.

[0038] For example, in the process of spin coating photoresist on a wafer, the excess photoresist will be pushed to the edge of the wafer by centrifugal force, and a small amount of photoresist will even flow along the edge to the non-processing surface of the wafer. The EBR nozzle is used to remove the excess photoresist on the edge of the wafer, specifically, the worktable drives the wafer to rotate at a predetermined speed, and the EBR nozzle sprays organic solvent at an angle on the edge of the wafer, so as to clean and remove the excess photoresist on the edge of the wafer.

[0039] Reference Figure 1 and Figure 2, the machining head 020 (such as an EBR nozzle or the like) needs to be kept within a preset angle range relative to the worktable 010, the worktable 010 generally comprises a circular bearing surface 011, and an outer edge of the bearing surface 011 forms a contour circle, and an included angle of the machining head 020 relative to the worktable 010 comprises a horizontal included angle a and a tangent included angle β. The horizontal included angle a refers to an included angle between an extension axis of the machining head 020 and the worktable 010 in a plane perpendicular to the bearing surface 011. The tangent included angle β is specifically as follows: a projection of the machining head 020 on the bearing surface 011 forms a tangent of the contour circle along a secant of the contour circle passing through any intersection point of the contour circle, and an included angle between the tangent and the secant is the tangent included angle β.

[0040] During installation and maintenance of the EBR nozzle, the horizontal included angle a and the tangent included angle β of the EBR nozzle need to be adjusted to ensure cleaning effect, and the prior art lacks a corresponding measuring tool, resulting in a complicated adjustment process, low adjustment precision and long time consumption.

[0041] Therefore, the measuring tool provided by the embodiments of the present application can be used in a semiconductor processing device to measure the angle of the machining head 020 relative to the worktable 010. Referring to Figure 3 and Figure 4 , the measuring tool comprises a profiling assembly 100 and a measuring assembly 200, the profiling assembly 100 comprises a base plate 110 and a profiling rod 120 connected movably, the profiling rod 120 is used to move relative to the base plate 110 to align with the machining head 020 when the base plate 110 is placed on the worktable 010, and the measuring assembly 200 is provided with a scale disc 210 used to indicate an angle of the profiling rod 120 relative to the base plate 110.

[0042] The technical scheme provided by the embodiments of the present application is that the profiling assembly 100 is used to obtain a relative position of the machining head 020 and the worktable 010, and the measuring assembly 200 is used to obtain a relative included angle of the machining head 020 and the worktable 010. Specifically, the base plate 110 of the profiling assembly 100 is placed on the bearing surface 011 of the worktable 010, and can simulate a position of a semiconductor component relative to the worktable 010, the profiling rod 120 moves relative to the base plate 110 and aligns with the machining head 020 to simulate a positional relationship of the machining head 020 relative to the semiconductor component, and the angle of the profiling rod 120 relative to the base plate 110 is measured by the scale disc 210 of the measuring assembly 200, so that the angle of the machining head 020 relative to the worktable 010 can be obtained.

[0043] The measuring tool in the embodiment of the present application is used to conveniently obtain the relative angle between the machining head 020 and the workbench 010 by cooperation of the profiling assembly 100 and the measuring assembly 200, taking the profiling assembly 100 as an intermediate bridge. Compared with the scheme in which the machining head 020 and the workbench 010 are complex in structure and difficult to place a measuring tool due to the layout relationship, resulting in difficult assembly and debugging of the machining head 020, the measuring tool in the embodiment of the present application can conveniently obtain the relative angle between the machining head 020 and the workbench 010, so as to efficiently and accurately adjust the position of the machining head 020.

[0044] In the embodiment of the present application, the substrate 110 can be placed on the workbench 010 to simulate a semiconductor component. The substrate 110 can be circular, square, triangular, diamond, trapezoidal, etc. The shape and size of the substrate 110 are set with reference to the semiconductor component. The substrate 110 can be made of metal material, plastic material, inorganic material, synthetic material, etc.

[0045] In an example, the substrate 110 is a circular plate structure with a size of 300 millimeters (mm) consistent with a wafer, made of acrylic material, having good weather resistance, insulation, easy processing, and high transparency, which is also conducive to observation and measurement.

[0046] In the embodiment of the present application, the substrate 110 and the profiling rod 120 are movably connected, and the two can be slidingly connected, rotatably connected, or connected by a flexible member, so that the profiling rod 120 can move relative to the substrate 110. For example, the profiling rod 120 can rotate relative to the substrate 110 to change the relative angle between the profiling rod 120 and the substrate 110.

[0047] In the embodiment of the present application, the measuring assembly 200 is provided with a scale disc 210, and the scale disc 210 is provided with scales. The profiling assembly 100 can be combined with the measuring assembly 200, so that the substrate 110, the profiling rod 120, and the scales on the scale disc 210 are aligned, so that the operator can read the corresponding scales to obtain the relative angle between the machining head 020 and the workbench 010.

[0048] Referring to Figure 5 and Figure 6 , an axle (for example, a first axle 130 and a second axle 140) is arranged between the profiling rod 120 and the substrate 110, and the profiling rod 120 rotates relative to the substrate 110 around the axle, wherein the substrate 110 includes a structural surface relative to the workbench 010, and the axis of the axle is parallel or perpendicular to the structural surface.

[0049] In the embodiment of the present application, the substrate 110 can include a circumferential surface and an adjacent circumferential surface plane, which is a structural surface of the substrate 110. When the substrate 110 is arranged on the workbench 010, the structural surface is opposite to the bearing surface 011.

[0050] With reference to Figure 5 In some possible embodiments of the present application, a first shaft body 130 is arranged between the profiling rod 120 and the base plate 110, so that the profiling rod 120 rotates relative to the base plate 110 around the first shaft body 130, and the first shaft body 130 is parallel to the structural surface.

[0051] According to the technical scheme provided in the embodiments of the present application, the profiling rod 120 rotates relative to the base plate 110 through the first shaft body 130, and since the first shaft body 130 is parallel to the structural surface, the rotation of the profiling rod 120 along the first shaft body 130 can be close to or away from the workbench 010 in the vertical direction, so as to simulate the horizontal included angle a of the machining head 020 relative to the workbench 010, thereby combining the measurement assembly 200 to obtain the horizontal included angle a of the machining head 020 relative to the workbench 010, and the profiling rod 120 can be folded relative to the base plate 110 through the first shaft body 130, so as to facilitate storage.

[0052] In the embodiments of the present application, one of the profiling rod 120 and the base plate 110 is fixedly connected with the first shaft body 130, and the other is rotatably connected with the first shaft body 130, so that the profiling rod 120 and the base plate 110 can rotate relative to each other through the first shaft body 130. It should be noted that the connection between the profiling rod 120, the base plate 110 and the first shaft body 130 can be direct connection or indirect connection through a connecting block 150 and the like.

[0053] With reference to Figure 5 In some possible embodiments of the present application, a second shaft body 140 is arranged between the profiling rod 120 and the base plate 110, so that the profiling rod 120 rotates relative to the base plate 110 around the second shaft body 140, and the second shaft body 140 is perpendicular to the structural surface.

[0054] According to the technical scheme provided in the embodiments of the present application, the profiling rod 120 rotates relative to the base plate 110 through the second shaft body 140, and since the second shaft body 140 is perpendicular to the structural surface, the rotation of the profiling rod 120 along the second shaft body 140 can be close to or away from the center of the workbench 010 in the horizontal direction, so as to simulate the tangent included angle β of the machining head 020 relative to the workbench 010, thereby combining the measurement assembly 200 to obtain the tangent included angle β of the machining head 020 relative to the workbench 010.

[0055] In the embodiments of the present application, one of the profiling rod 120 and the base plate 110 is fixedly connected with the second shaft body 140, and the other is rotatably connected with the second shaft body 140, so that the profiling rod 120 and the base plate 110 can rotate relative to each other through the second shaft body 140. It should be noted that the connection between the profiling rod 120, the base plate 110 and the second shaft body 140 can be direct connection or indirect connection through a connecting block 150 and the like.

[0056] In the embodiment of the present application, the first shaft body 130 and the second shaft body 140 can be connected by a spherical hinge instead of being connected between the profiling rod 120 and the base plate 110. Alternatively, the profiling rod 120 is connected to the connecting block 150 through the first shaft body 130, the connecting block 150 is connected to the base plate 110 through the second shaft body 140, the profiling rod 120 can move along the first shaft body 130 relative to the connecting block 150, and then move relative to the base plate 110. Alternatively, the profiling rod 120 and the connecting block 150 move together along the second shaft body 140 relative to the base plate 110.

[0057] With reference to Figure 3 and Figure 4 In some possible embodiments of the present application, the measuring assembly 200 further comprises a connecting piece 220 connected to the scale disc 210, and the connecting piece 220 is detachably connected to the base plate 110, so that the measuring tool has at least a first state and a second state. In the first state, the extension plane of the base plate 110 is parallel to the extension plane of the scale disc 210. In the second state, the extension plane of the base plate 110 is perpendicular to the extension plane of the scale disc 210.

[0058] The technical scheme provided by the embodiment of the present application connects the measuring assembly 200 and the profiling assembly 100 through the connecting piece 220, so that the measuring assembly 200 and the profiling assembly 100 can be positioned relative to each other to have high measurement accuracy. The detachable connection of the connecting piece 220 allows the profiling assembly 100 to be separated from the measuring assembly 200 during profiling, so as to facilitate the profiling of the profiling assembly 100. The first state and the second state of the measuring tool facilitate the acquisition of different types of included angles, such as the horizontal included angle α and the tangent included angle β of the machining head 020 relative to the machining table.

[0059] In the embodiment of the present application, the extension plane refers to the plane with the largest area of a component. For example, the base plate 110 has a flat plate structure, which includes two structure planes arranged in a plane, and the extension plane can be the structure plane. Similarly, the scale disc 210 also has a flat plate structure, and the extension plane is the plane on both sides of the scale disc 210.

[0060] In the embodiment of the present application, the detachable connection between the connecting piece 220 and the base plate 110 can be clamping, threaded connection, adsorption connection, fastener connection, etc. In an example, the connecting piece 220 is clamped to the base plate 110.

[0061] In the embodiment of the present application, the measurement tool in the first state is arranged in parallel with the extension surface of the scale disc 210 and the extension surface of the substrate 110, which can be used to measure the tangent angle β of the profiling rod 120 relative to the substrate 110, so as to obtain the tangent angle β of the machining head 020 and the worktable 010. The substrate 110 and the scale disc 210 can be arranged in the same plane or different planes. For example, the scale disc 210 is hollow, and the substrate 110 is arranged on the inner side of the scale disc 210, and the two are arranged in the same plane.

[0062] In the embodiment of the present application, the measurement tool in the second state is arranged perpendicular to the extension surface of the scale disc 210 and the extension surface of the substrate 110, which can be used to measure the horizontal angle α of the profiling rod 120 relative to the substrate 110, so as to obtain the horizontal angle α of the machining head 020 and the worktable 010. The substrate 110 can be arranged on the outer side or the inner side of the scale disc 210. For example, the scale disc 210 is hollow, and the substrate 110 is arranged on the inner side of the scale disc 210.

[0063] Referring to Figure 3 , Figure 4 and Figure 5 In some possible embodiments of the present application, the scale disc 210 forms a containing space, and the connecting member 220 extends into the containing space; the substrate 110 is provided with a connecting hole 111 extending from the edge to the middle of the substrate 110, and the connecting member 220 is matched with the connecting hole 111 to detachably connect the substrate 110 and the scale disc 210.

[0064] In the embodiment of the present application, the connecting member 220 is arranged on the inner side of the scale disc 210, and when the substrate 110 is connected to the scale disc 210, the substrate 110 is arranged on the inner side of the scale disc 210, which can facilitate reading of the scale and can also reduce the space occupation. The connecting member 220 is connected with the connecting hole 111 on the substrate 110, which facilitates adjustment of the relative position of the substrate 110 and the scale disc 210.

[0065] In some possible embodiments of the present application, the scale disc 210 extends along an arc, and the inner concave side of the scale disc 210 forms a containing space; or, the scale disc 210 is annular, and the hollow part of the scale disc 210 forms a containing space.

[0066] In the embodiment of the present application, the scale disc 210 extends along an arc to form a containing space of a semi-enclosed structure, and the structure is relatively compact. When the scale disc 210 is annular, the structure is symmetrical, which facilitates reading of the scale by the user.

[0067] In some embodiments of the present application, the scale disc 210 can extend along a circular arc to form a semi-enclosed structure, and the two ends of the scale disc 210 extend to be in contact to form a structure circle. The extension size of the scale disc 210 can be half, 1 / 3, 2 / 3, 1 / 4, 3 / 4, etc. of the circumference of the corresponding structure circle.

[0068] Referring to Figure 3 、 Figure 4 and Figure 5 In some embodiments of the present application, the dial 210 is annular, and the middle part of the dial 210 is empty, thereby forming a receiving space.

[0069] In some embodiments of the present application, the dial 210 can be a circular ring, a square ring, a triangular ring, etc., and the present application is not limited thereto. For example, the dial 210 is a circular ring structure, and the middle part of the dial 210 is empty and can accommodate the profiling assembly 100.

[0070] In some embodiments of the present application, the connecting member 220 can be a rod structure, so as to extend into the connecting hole 111, and the axial direction of the connecting rod is arranged along the radial direction of the dial 210. The connecting member 220 and the dial 210 can be integrally formed, or connected by clamping, threaded connection, fastener connection, etc.

[0071] In some embodiments of the present application, when the connecting member 220 and the dial 210 are connected in a non-detachable manner, a notch can be formed on the side opposite to the connecting member 220 of the dial 210, so that the base plate 110 enters the inside of the dial 210 and is connected with the connecting member 220, or the connecting member 220 and the dial 210 are rotationally connected, and the connecting member 220 is a flexible member, etc.

[0072] In some embodiments of the present application, the radial cross section of the connecting member 220 can be circular, elliptical, square, triangular, hexagonal, etc., and the size and shape of the connecting hole 111 are matched with the connecting member 220. In an example, the radial cross sections of the connecting member 220 and the connecting hole 111 are both circular, and when the connecting member 220 and the connecting hole 111 are matched, the base plate 110 can be rotated relative to the dial 210 to adjust the state of the measuring tool. In another example, the radial cross sections of the connecting member 220 and the connecting hole 111 are both square, and the relative rotation of the two can be limited, thereby having high positioning accuracy.

[0073] Referring to Figure 6 In some possible embodiments of the present application, the profiling rod 120 includes at least two rod bodies 121, and the at least two rod bodies 121 are connected in a sliding manner along the axial direction, so that the profiling rod 120 can be elongated or shortened.

[0074] The technical scheme provided by some embodiments of the present application is that the profiling rod 120 is arranged in an elongated or shortened manner by the at least two rod bodies 121, so that the profiling rod 120 can be quickly and accurately aligned with the machining head 020 in an elongated state, thereby facilitating profiling and quickly aligning with the scale on the dial 210 to quickly obtain accurate readings. In a shortened state, the space occupation can be reduced, thereby facilitating storage and carrying.

[0075] In the embodiment of the present application, the profiling rod 120 can include two or more rod bodies 121 connected in sequence along the axial direction, and adjacent profiling rods 120 can be connected in sliding mode. For example, the rod body 121 is a hollow columnar structure, and one of the two adjacent rod bodies 121 can extend into the other to form a nested structure.

[0076] In the embodiment of the present application, the radial cross section of the rod body 121 can be circular, elliptical, square, triangular, hexagonal, etc. The rod body 121 with a circular cross section can rotate relatively, and the rod body 121 with a non-circular cross section can limit relative rotation.

[0077] Referring to Figure 5 and Figure 6 In some possible embodiments of the present application, the measuring tool further includes a locking structure 300 arranged between the profiling rod 120 and the base plate 110, for locking or unlocking the movement of the profiling rod 120 relative to the base plate 110.

[0078] The technical scheme provided by the embodiment of the present application can unlock the movement of the profiling rod 120 relative to the base plate 110, so as to facilitate the movement of the profiling rod 120 relative to the base plate 110, obtain the relative angle of the machining head 020 relative to the workbench 010, and in the case that the locking structure 300 locks the profiling rod 120 relative to the base plate 110, the profiling rod 120 and the base plate 110 are relatively fixed, so as to facilitate the measurement of the measuring assembly 200 and obtain accurate measurement results.

[0079] In the embodiment of the present application, the locking structure 300 can be a damping structure, such as a damping sleeve, a damping shaft, a rubber pad, etc.; the locking structure 300 can also be a clamping structure, such as an elastic buckle, a mortise and tenon structure, etc.; the locking structure 300 can also be a fastener, such as a screw, a bolt, a nut, etc.; or the locking structure 300 can be an adsorption structure, such as a negative pressure suction cup, a magnetic adsorption structure, etc.

[0080] In the embodiment of the present application, the profiling rod 120 and the base plate 110 can have multiple movable connections, and different or the same locking structure 300 can be arranged correspondingly. The locking structure 300 can be arranged between the first shaft body 130 and the profiling rod 120, and between the second shaft body 140 and the base plate 110, and for example, the first shaft body 130 and the second shaft body 140 are damping shafts. In addition, the locking structure 300 can also be arranged between the multiple rod bodies 121 of the profiling rod 120.

[0081] Referring to Figure 4 , Figure 5 and Figure 6In some possible embodiments of the present application, the profiling assembly 100 further comprises a base 160, and the profiling rod 120 is rotationally connected to the base 160; the base 160 comprises two limiting portions 161 oppositely arranged, and a sliding groove 162 is formed between the two limiting portions 161, and the sliding groove 162 is in sliding fit with the edge of the base plate 110.

[0082] According to the technical scheme provided in the embodiments of the present application, the profiling rod 120 can slide relative to the base plate 110 through the base 160, and can move to different edges of the base plate 110, so as to adjust the position relative to the workbench 010 and adapt to the machining head 020 in different positions, and the sliding groove 162 formed by the limiting portions 161 is matched with the base plate 110, so that the structure is simple and the stability is good.

[0083] In the embodiments of the present application, the profiling rod 120 can be connected to the base 160 through the second shaft body 140, the base 160 forms the sliding groove 162 through the two limiting portions 161, and is in sliding connection with the base plate 110 through the sliding groove 162, so that the base 160 can slide along the edge of the base plate 110, and in turn drive the profiling rod 120 to move relative to the base plate 110.

[0084] In the embodiments of the present application, in the case of arranging the base 160, a locking structure 300 can also be arranged between the base 160 and the base plate 110. For example, the locking structure 300 comprises fasteners such as bolts, the fasteners pass through the two limiting portions 161, and the spacing between the two fasteners can be changed through threaded connection, in the case that the spacing between the two limiting portions 161 is large, the relative movement between the base 160 and the base plate 110 is unlocked, and in the case that the spacing between the two limiting portions 161 is small, the relative movement between the base 160 and the base plate 110 is locked.

[0085] Referring to Figure 5 In some possible embodiments of the present application, the measuring tool further comprises an anti-skid structure 400 arranged between the limiting portion 161 and the base plate 110, and used for limiting the relative movement between the base 160 and the base plate 110.

[0086] According to the technical scheme provided in the embodiments of the present application, by arranging the anti-skid structure 400, the relative movement between the base 160 and the base plate 110 can be limited, so as to position the base 160 relative to the base plate 110, and in turn improve the positioning accuracy of the profiling rod 120 relative to the base plate 110.

[0087] In the embodiments of the present application, the anti-skid structure 400 can be an anti-skid pad arranged between the limiting portion 161 and the base plate 110, such as a rubber pad, and the anti-skid pad can be connected to the limiting portion 161 or the base plate 110 through gluing or the like; or alternatively, the anti-skid structure 400 is an anti-skid line arranged on the limiting portion 161 or the base plate 110.

[0088] In the embodiments of the present application, the anti-skid structure 400 can be used as the locking structure 300, that is, the user needs to exert a force to overcome the damping of the anti-skid structure 400 to enable the base 160 and the base plate 110 to move relative to each other, or the anti-skid structure 400 is an auxiliary structure of the locking structure 300, and only in the case that the locking structure 300 locks the base 160 relative to the base plate 110, the locking effect is improved, and in the case that the locking structure 300 unlocks the base 160 relative to the base plate 110, no limiting is provided.

[0089] With reference to Figure 5 In some possible embodiments of the present application, the measuring tool further comprises a rolling body 500, which is arranged between the base 160 and the base plate 110 and rolls relative to the base 160 and the base plate 110.

[0090] The technical scheme provided by the embodiments of the present application changes the surface contact between the base plate 110 and the base 160 into line contact of the base plate 110, the base 160 and the rolling body 500, and changes the sliding friction into rolling friction, which helps to reduce the friction, facilitates the movement of the base 160 relative to the base plate 110, reduces the wear and tear, and prolongs the service life.

[0091] In the embodiments of the present application, the rolling body 500 can be a ball, a roller or the like, and the rolling body 500 can be arranged between the base plate 110 and the limiting portion 161, or arranged on the side of the base plate 110. It can be understood that, in the case that the rolling body 500 is arranged, a limiting groove is arranged on the base plate 110 or the limiting portion 161 in correspondence, and part of the rolling body 500 is arranged in the limiting groove, so as to reduce the possibility of the rolling body 500 coming out.

[0092] With reference to Figure 3 、 Figure 4 、 Figure 5 and Figure 6 In one possible embodiment of the present application, the profiling tool comprises a profiling assembly 100 and a measuring assembly 200. The profiling assembly 100 comprises a base plate 110 and a profiling rod 120, the profiling rod 120 comprises a plurality of slidingly connected rod bodies 121, so that the profiling rod 120 can be arranged in an extendable and retractable manner, the profiling rod 120 is rotatably connected to a connecting block 150 through a first shaft body 130, the connecting block 150 is rotatably connected to a base 160 through a second shaft body 140, and the base 160 is slidingly connected to the edge of the base plate 110. The first shaft body 130 and the second shaft body 140 are damping shafts, and the base 160 and the base plate 110 are provided with a locking screw. The measuring assembly 200 comprises a circular scale disc 210 provided with scales, the inside of the scale disc 210 can accommodate the base plate 110, and a cylindrical connecting piece 220 is arranged.

[0093] In use, the substrate 110 is placed on the worktable 010, the profiling rod 120 is moved to the position of the machining head 020 by moving the base 160, then the base 160 is locked relative to the substrate 110 by the locking screw, the profiling rod 120 is rotated along the first shaft body 130 and / or the second shaft body 140 so as to align the profiling rod 120 with the machining head 020, in this process, the profiling rod 120 can also be telescoped to facilitate operation.

[0094] When the profiling is completed, the profiling assembly 100 is removed from the worktable 010, the connecting rod is inserted into the connecting hole 111, so that the substrate 110 is located in the dial 210 and connected with the dial 210. When the substrate 110 is connected with the dial 210, the substrate 110 can be rotated along the connecting rod to change the angle of the substrate 110 and the dial 210. When the substrate 110 is perpendicular to the dial 210, the horizontal angle a of the machining head 020 relative to the worktable 010 can be obtained by reading the scale at the corresponding position of the profiling rod 120; when the substrate 110 is parallel to the dial 210, the tangent angle β of the machining head 020 relative to the worktable 010 can be obtained by reading the scale at the corresponding position of the profiling rod 120.

[0095] The above-mentioned serial numbers of the embodiments of the present application are only for description, and do not represent the advantages and disadvantages of the embodiments. The above is only the preferred embodiment of the present application, and does not limit the patent scope of the present application, and any equivalent structure or equivalent process transformation, or direct or indirect application in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A measurement tool for a semiconductor processing apparatus for measuring an angle of a processing head relative to a worktable, characterized by, The measuring tool comprises: a profiling assembly comprising a base plate and a profiling rod movably connected, the profiling rod being used to move relative to the base plate to align with the machining head when the base plate is placed on the workbench; a measuring assembly provided with a scale disc used to indicate the angle of the profiling rod relative to the base plate.

2. The measurement tool of claim 1, wherein, An axle body is arranged between the profiling rod and the base plate, the profiling rod rotates relative to the base plate around the axle body, wherein the base plate comprises a structural surface relative to the workbench, and the axle body is parallel or perpendicular to the structural surface.

3. The measurement tool of claim 1, wherein, The measuring assembly further comprises a connecting piece connected to the scale disc, and the connecting piece is detachably connected to the base plate, so that the measuring tool has at least a first state and a second state; In the first state, the extension surface of the base plate is parallel to the extension surface of the scale disc; In the second state, the extension surface of the base plate is perpendicular to the extension surface of the scale disc.

4. The measurement tool of claim 3, wherein, The scale disc is formed with a receiving space, and the connecting piece extends into the receiving space; The base plate is provided with a connecting hole extending from the edge to the middle part, and the connecting piece is matched with the connecting hole to detachably connect the base plate and the scale disc.

5. The measurement tool of claim 4, wherein, The scale disc extends along an arc, and the inner concave side of the scale disc forms the receiving space; or the scale disc is annular, and the hollow part of the scale disc forms the receiving space.

6. The measurement tool of any one of claims 1 to 5, wherein, The profiling rod comprises at least two rod bodies, and the at least two rod bodies are movably connected in the axial direction, so that the profiling rod can be elongated or shortened.

7. The measurement tool of any one of claims 1 to 5, wherein, Further comprising a locking structure arranged between the profiling rod and the base plate, used to lock or unlock the movement of the profiling rod relative to the base plate.

8. The measurement tool of any one of claims 1 to 5, wherein, The profiling assembly further comprises a base, and the profiling rod is rotatably connected to the base; The base comprises two oppositely arranged limiting parts, and a sliding groove is formed between the two limiting parts, and the sliding groove is slidably matched with the edge of the base plate.

9. The measurement tool of claim 8, wherein, Further comprising an anti-skid structure arranged between the limiting part and the base plate, used to limit the relative movement of the base and the base plate.

10. The measurement tool of claim 8, wherein, Further comprising a rolling body arranged between the base and the base plate, and the rolling body is arranged to roll relative to the base and the base plate.

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