Adjusting module, laser detection device and laser processing equipment

Abstract

The utility model discloses an adjusting module, a laser detection device and laser processing equipment. The adjusting module comprises a supporting piece, a driving assembly and a first connecting piece. The driving assembly and the first connecting piece are both connected to the supporting piece. The first connecting piece is used for mounting the detector; the driving assembly is connected with the first connecting piece and used for driving the first connecting piece to move in the first direction so as to adjust the position of the detector. The position between the detector and the laser in the first direction can be adjusted through the adjusting module, so that when the laser beam emitted by the laser is projected to the detection surface of the detector, the size of the light spot is adjustable, and the size of the light spot can be better matched with the size of the detection surface; therefore, the laser beam projected to the detector can be projected to the detection surface of the detector as much as possible, so that the detection precision is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to laser processing technical field especially, relate to a kind of adjustment module, laser detection device and laser processing equipment. BACKGROUND

[0002] Laser processing equipment utilizes high-power laser beam to cut, weld, mark and other processing operations to material. In order to ensure the reliability and stability of laser processing equipment, corresponding detector (such as, photoelectric detector) needs to be used to detect the parameters of laser pulse. When working, laser beam emitted by laser needs to be transmitted to the detection surface of detector, so that detector detects laser beam.

[0003] However, in the prior art, when laser beam emitted by laser is transmitted to the detection surface of detector, there is a problem that the size of light spot does not match the size of detection surface, thereby leading to reduced detection accuracy. SUMMARY

[0004] The utility model embodiment provides a kind of adjustment module, laser detection device and laser processing equipment, to solve in prior art, when laser beam emitted by laser is transmitted to the detection surface of detector, the size of light spot does not match the size of detection surface Problem.

[0005] The utility model embodiment provides a kind of adjustment module, for adjusting the position of detector relative to laser;The adjustment module includes support piece, drive module and first connecting piece;The drive module and the first connecting piece are connected to the support piece;The first connecting piece is used to install the detector;The drive module is connected with the first connecting piece, for driving the first connecting piece movement along first direction, to adjust the light path distance between the detector and the laser.

[0006] Optionally, the drive module includes linear motor;The stator of the linear motor is connected on the support piece, and extends along the first direction;The rotor of the linear motor is connected to the first connecting piece;The stator is used to drive the rotor movement along the first direction.

[0007] Optionally, the adjustment device further includes displacement detection module, and the displacement detection module is used to detect the displacement amount of the first connecting piece along the first direction.

[0008] Optionally, the displacement detection module includes grating ruler and reading head;One of the grating ruler and the reading head is connected to the support piece, and the other is connected to the first connecting piece;The grating ruler extends along the first direction, and the reading head cooperates with the grating ruler to measure the distance of the first connecting piece movement along the first direction.

[0009] Optionally, the adjusting device further comprises a first adjusting member, the first connecting member is connected to the driving module through the first adjusting member; the first adjusting member is used for adjusting the position of the first connecting member in at least one of a second direction and a third direction; wherein the first direction, the second direction and the third direction are perpendicular to each other.

[0010] Optionally, the adjusting device further comprises a second connecting member and a condenser; the condenser is connected to the second connecting member and is used for focusing the laser beam emitted by the laser; the condenser is located on the side of the first connecting member close to the laser, so that the laser beam emitted by the laser is focused by the condenser and then projected to the detector; the condenser is an aspherical lens.

[0011] Optionally, the adjusting device further comprises a second adjusting member, the condenser is connected to the second connecting member through the second adjusting member; the second adjusting member is used for adjusting at least one of the position of the condenser relative to the second connecting member in the first direction, the position of the condenser relative to the second connecting member in the second direction, the position of the condenser relative to the second connecting member in the third direction and the inclination angle of the condenser relative to the second connecting member; wherein the inclination angle is the included angle between the optical axis of the condenser and the first direction, the first direction, the second direction and the third direction are perpendicular to each other; and / or the adjusting device further comprises a light splitting mirror, the light splitting mirror is connected to the second connecting member and is located on the side of the condenser away from the first connecting member; the light splitting mirror is used for splitting the laser beam emitted by the laser, so that part of the laser beam emitted by the laser is transmitted to the condenser; the light splitting mirror is a semi-transparent half mirror.

[0012] The utility model embodiment provides a kind of laser detection device, including detector and the adjusting module described in any one of the above;The detector is connected to the first connecting member, and is used to detect the intensity of laser emitted by laser.

[0013] The utility model embodiment provides a kind of laser processing equipment, including rack, laser, detector and the adjusting module described in any one of the above;The laser and the adjusting module are connected on the rack;The detector is connected on the first connecting member of the adjusting module.

[0014] Optionally, the detector is a photoelectric detector; and / or the detector is detachably connected to the first connecting member.

[0015] In the adjusting module, the laser detection device and the laser processing equipment provided in the embodiment of the utility model, the position between the detector and the laser in the first direction can be adjusted through the adjusting module, so as to adjust the light path distance between the detector and the laser, and then when the laser beam emitted by the laser is projected to the detection surface of the detector, the size of the light spot can be adjusted, so that the size of the light spot and the size of the detection surface can be more matched, so that the laser beam projected to the detector (namely the laser beam used for detection) can be projected to the detection surface of the detector as much as possible, thereby improving the detection precision.

[0016] In addition, by driving the first connecting piece to move in the first direction through the driving assembly, the detector mounted on the first connecting piece can be driven to move in the first direction, and then the interval between the detector and the laser in the first direction is adjusted, so that the position of the detector in the first direction relative to the laser can be conveniently adjusted. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the drawings needed to be used in the description of the embodiment of the utility model will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained according to these drawings without creative labor for those skilled in the art.

[0018] Figure 1 is the schematic view of the adjusting module cooperating with the detector and the laser provided in an embodiment of the utility model;

[0019] Figure 2 is the defocus point column diagram provided in an embodiment of the utility model;

[0020] Figure 3 is the pulse waveform corresponding to different light spots provided in an embodiment of the utility model.

[0021] INDICATION OF DRAWINGS IN THE DESCRIPTION:

[0022] 1, adjusting module;

[0023] 11, supporting piece;

[0024] 12, driving assembly; 121, linear motor;

[0025] 13, first connecting piece;

[0026] 14, displacement detection assembly; 141, grating ruler; 142, reading head;

[0027] 15, first adjusting piece;

[0028] 16, second connecting piece;

[0029] 17. Condenser lens;

[0030] 18. Second adjusting component;

[0031] 19. Beam splitter;

[0032] 2. Detector;

[0033] 3. Laser. Detailed Implementation

[0034] To make the technical problems solved, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0035] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0036] like Figure 1 As shown, this application embodiment provides an adjustment module 1, which is used to adjust the position of the detector 2 of the laser processing equipment relative to the laser 3 of the laser processing equipment in a first direction. The laser 3 is used to emit a laser beam, and the detector 2 is used to detect the light intensity of the laser beam emitted by the laser 3. By adjusting the relative position between the detector 2 and the detector 3, the optical path distance between the detector 2 and the laser 3 can be adjusted, thereby changing the size of the light spot formed by the laser beam emitted by the laser 3 on the detection surface of the detector 2. The detection surface of the detector 2 refers to its photosensitive surface; when light shines on this surface, its light intensity can be detected by the detector 2.

[0037] For example, in Figure 1 In the example shown, by adjusting the relative positions of detector 2 and detector 3 in the first direction, the optical path distance between detector 2 and laser 3 can be changed. Additionally, in Figure 1 Of the directions shown, the first direction is parallel to the X-axis, and the first direction can be the left or right direction.

[0038] The optical path distance between the detector 2 and the laser 3 refers to that the laser beam emitted by the laser 3 can be transmitted to the detector 2, wherein the distance from the laser 3 to the detector 2 along the propagation path of the laser beam emitted by the laser 3 is the optical path distance between the detector 2 and the laser 3. The propagation path of the laser beam emitted by the laser 3 can be a straight path or a bent path.

[0039] In the embodiment, the position of the detector 2 and the laser 3 in the first direction can be adjusted according to the actual scene, so that the size of the light spot when the laser beam emitted by the laser 3 is projected to the detection surface of the detector 2 is adjustable. In this way, the size of the light spot and the size of the detection surface can be more matched, so that the laser beam projected to the detector 2 (i.e. the laser beam for detection) can be projected to the detection surface of the detector 2 as much as possible, thereby improving the detection accuracy and improving the quality of laser processing. The detector 2 can be a photoelectric detector.

[0040] In actual application, the size of the light spot of the laser projected to the detection surface can be smaller than the size of the detection surface, so that the light spot is completely located in the detection surface. Please refer to Figure 1 The adjusting module 1 comprises a support 11, a driving assembly 12 and a first connecting piece 13. The driving assembly 12 and the first connecting piece 13 are connected to the support 11. The first connecting piece 13 is used for mounting the detector 2. The driving assembly 11 and the first connecting piece 13 are used for driving the first connecting piece 13 to move in the first direction, so as to adjust the position of the detector 2 mounted on the first connecting piece 13, and further adjust the optical path distance between the detector 2 and the laser 3.

[0041] In work, the driving assembly 12 can drive the first connecting piece 13 to move in the first direction, so as to drive the detector 2 mounted on the first connecting piece 13 to move in the first direction, and further adjust the distance between the detector 2 and the laser 3 in the first direction. In this way, the size of the light spot when the laser beam emitted by the laser 3 is projected to the detection surface of the detector 2 is adjustable. Therefore, the position of the detector 2 in the first direction can be adjusted according to the actual scene, so that the size of the light spot and the size of the detection surface can be more matched, so that the laser beam projected to the detector 2 (i.e. the laser beam for detection) can be projected to the detection surface of the detector 2 as much as possible, thereby improving the detection accuracy.

[0042] In an embodiment, the driving assembly 12 is an electric driving assembly, which is beneficial to realize the automatic control of the driving assembly 12. In actual application, the driving assembly 12 can be in communication connection with a corresponding controller, so as to control the working of the driving assembly 12 through the controller.

[0043] Alternatively, the controller can also be connected to the laser 3 via communication to control the operation of the laser 3. Similarly, the controller can also be connected to the detector 2 via communication, so that the detection signal from the detector 2 can be transmitted to the controller, which can process the signal to obtain the desired detection result.

[0044] It should be understood that the communication connection between the controller and related components (such as drive assembly 12, detector 2, and laser 3) can be: a wired communication connection, in which case the two are electrically connected through conductive lines; or a wireless communication connection, in which case both are electrically connected to corresponding wireless communication modules.

[0045] like Figure 1 As shown, in one embodiment, the drive assembly 12 includes a linear motor 121, the stator of which is connected to the support member 11 and extends along a first direction; the mover of the linear motor 121 is connected to a first connector 13. When the stator is energized, it can drive the mover to move along the first direction. By adjusting the energizing direction, the stator can reciprocate in the first direction.

[0046] like Figure 1 As shown, in one embodiment, the adjustment module 1 further includes a displacement detection component 14. When the drive component 12 drives the first connector 13 to move along the first direction, the displacement detection component 14 is used to detect the displacement of the first connector 13 along the first direction.

[0047] The displacement detection component 14 includes a grating ruler 141 and a reading head 142; one of the grating ruler 141 and the reading head 142 is connected to the support member 11, and the other is connected to the first connector 13; the grating ruler 141 extends along a first direction, and the reading head 142 cooperates with the grating ruler 141 to measure the distance the first connector 13 moves along the first direction, thereby realizing the measurement of the movement distance of the detector 2 in the first direction.

[0048] Specifically, the one of the grating ruler 141 and the reading head 142 that connects to the first connector 13 can be mounted on the mover, thereby achieving connection with the first connector 13.

[0049] By using the reading head 142 in conjunction with the grating ruler 141, the distance the mover travels along the first direction can be measured, thereby enabling the measurement of the movement distance of the detector 2 in the first direction.

[0050] The coordinated use of the linear motor 121, the grating ruler 141, and the reading head 142 can improve the position adjustment accuracy of the detector 2 in the first direction, so that the size of the light spot projected onto the detection surface can better match the size of the detection surface.

[0051] In addition, it should be understood that when the mover moves in the first direction, it can drive the first connecting part 13 and the reading head 142 (or the grating ruler 141) connected to it to move in the first direction.

[0052] In one embodiment, the adjustment module 1 may further include a first guide mechanism for guiding the movement of the mover along a first direction.

[0053] like Figure 1 As shown, in one embodiment, the adjustment module 1 further includes a first adjustment member 15, and a first connector 13 is connected to the drive assembly 12 through the first adjustment member 15; the first adjustment member 15 is used to adjust the position of the first connector 13 in at least one of the second direction and the third direction; wherein the first direction, the second direction and the third direction are perpendicular to each other.

[0054] exist Figure 1 In the directions shown, the second direction is parallel to the Y-axis, and the third direction is parallel to the Z-axis. The second direction can be a front-back direction, and the third direction can be a top-bottom direction.

[0055] By setting the first adjusting member 15, the position of the detector 2 relative to the laser 3 can be adjusted along the first direction and the second direction, thereby increasing the position adjustment range between the detector 2 and the laser 3, so as to avoid the laser beam used for detection being projected into an area outside the detection surface, so that the laser beam used for detection can be projected onto the detection surface as much as possible, thereby improving the detection accuracy.

[0056] In one embodiment, the first adjusting member 15 can be a two-dimensional adjusting frame, which is a manual adjusting mechanism. In this case, the first adjusting member 15 can adjust the position of the first connecting member 13 in the second direction and the third direction. Alternatively, the two-dimensional adjusting frame can adopt an existing design, and this embodiment will not impose further limitations on it.

[0057] like Figure 1 As shown, in one embodiment, the adjustment module 1 further includes a second connector 16 and a condenser lens 17; the condenser lens 17 is connected to the second connector 16 and is used to focus the laser beam emitted by the laser 3; the condenser lens 17 is located on the side of the first connector 13 closer to the laser 3, so that the laser beam emitted by the laser 3 is focused by the condenser lens 17 and projected onto the detector 2 mounted on the first connector 13. Wherein, the condenser lens 17 being located on the side of the first connector 13 closer to the laser 3 means that in the path of the laser beam emitted by the laser 3 to the detection surface of the detector 2, the condenser lens 17 is located between the first connector 13 and the laser 3.

[0058] The laser beam used for detection can be more concentrated after being focused by the condenser lens 17, which can focus the incident laser over a wider range of angles onto the detection surface, so that the laser beam used for detection can be projected onto the detection surface of the detector 2 as much as possible.

[0059] During operation, the detection surface can be moved to or near the focal point of the condenser lens 17. The following diagram illustrates the spot detection process.

[0060] like Figure 2 As shown in the figure, the vertical axis represents the diameter of the laser spot, and the horizontal axis represents the defocus distance (i.e., the distance between the detection surface and the focal point). The dots and rings in the figure represent the laser spot formed by the laser beam on the detection surface. It can be seen from the figure that when the detection surface moves to the focal point of the condenser lens 17 (i.e., the focal point is on the detection surface, and the distance between them is 0), the size of the laser spot formed on the detection surface is the smallest; when the detection surface deviates from the focal point (i.e., the distance between them is greater than 0), the size of the laser spot formed on the detection surface gradually increases.

[0061] In addition, such as Figure 3 As shown in the figure, this diagram illustrates the pulse waveforms corresponding to different light spots (the light spots formed by the laser beam on the detection surface). The vertical axis represents laser intensity, and the horizontal axis represents defocus distance. The defocus distance at the peak is 0, at which point detector 2 detects the maximum laser intensity. Furthermore, as the defocus distance increases, the laser intensity detected by detector 2 gradually decreases. Based on the information reflected in the defocus and pulse waveforms, a basis for adjusting the distance between the detector and the laser can be established.

[0062] In one embodiment, the second connector 16 and the first connector 13 may be spaced apart in the first direction. Furthermore, the second connector 16 and the support member 11 may also be spaced apart in the first direction. After assembly, the condenser lens 17 and the detector 2 are spaced apart in the first direction.

[0063] In one embodiment, the condenser lens 17 can be either a spherical lens or an aspherical lens. Preferably, the condenser lens 17 is an aspherical lens, which can more effectively eliminate deviations in the laser beam propagation path and improve the stability of the signal acquired by the detector 2.

[0064] like Figure 1As shown, in one embodiment, the adjustment module 1 further includes a second adjustment member 18, and the condenser lens 17 is connected to the second connector 16 through the second adjustment member 18; the second adjustment member 18 is used to adjust at least one of the following: the position of the condenser lens 17 relative to the second connector 16 in a first direction, the position of the condenser lens 17 relative to the second connector 16 in a second direction, the position of the condenser lens 17 relative to the second connector 16 in a third direction, and the tilt angle of the condenser lens 17 relative to the second connector 16; wherein, the tilt angle is the angle between the optical axis of the condenser lens 17 and the first direction.

[0065] By setting the second adjustment member 18, the position of the condenser lens 17 can be adjusted along the first direction, the second direction, and the third direction, thereby improving the alignment between the condenser lens 17 and the detector 2, so as to avoid the laser beam used for detection being projected into an area outside the detection surface, so that the laser beam used for detection can be projected onto the detection surface as much as possible, thereby improving the detection accuracy.

[0066] In one embodiment, the second adjusting member 18 can be a four-dimensional adjusting frame, which is a manual adjustment mechanism. In this case, the second adjusting member 18 can adjust the position of the condenser lens 17 relative to the second connecting member 16 in the first direction, the second direction, the third direction, and the tilt angle. Furthermore, the four-dimensional adjusting frame can adopt an existing design, and this embodiment will not impose further limitations on it.

[0067] In one embodiment, the detector 2 can be rotated about a first axis by the second adjusting member 18 to adjust the tilt angle of the detector 2 relative to the second connecting member 16. The first axis may point parallel to a second direction.

[0068] like Figure 1 As shown, in one embodiment, the adjustment module 1 further includes a beam splitter 19, which is mounted on the second connector 16 and located between the laser 3 and the adjustment module 1. The beam splitter 19 is used to split the laser beam emitted by the laser 3 so that a portion of the laser beam emitted by the laser 3 is transmitted to the condenser lens 17. For example, during laser processing, the beam splitter 19 splits the laser beam emitted by the laser 3 into two beams, one of which enters the laser processing equipment for laser processing; the other beam enters the detector 2 for laser detection.

[0069] In one embodiment, the beam splitter 19 can be a semi-transparent, semi-reflective mirror. This saves optical path space and makes the structure of the adjustment module 1 more compact. During operation, the portion of the laser beam that passes through the beam splitter 19 can be projected onto the detection surface of the detector 2; or, the portion of the laser beam that is reflected by the beam splitter 19 can be projected onto the detection surface of the detector 2.

[0070] The embodiment of the utility model provides a kind of laser detection device, which includes detector 2 and the adjusting module described in any one of the above embodiments;Detector 2 is connected to first connecting piece 13, and is used to detect the intensity of laser emitted by laser 3.

[0071] As Figure 1 The embodiment of the utility model also provides a kind of laser processing equipment, which includes rack, laser 3, detector 2 and the adjusting module 1 described in any one of the above embodiments;Laser 3 and adjusting module 1 are both connected to rack;Detector 2 is connected to first connecting piece 13 of adjusting module 1.

[0072] Among them, the laser beam emitted by laser 3 can be used for cutting, welding or marking and other processing operations.

[0073] In addition, detector 2 can be a photoelectric detector 2.At the same time, detector 2 can be detachably connected to first connecting piece 13, so that detector 2 in laser processing equipment can be replaced according to demand.

[0074] In an embodiment, the processing equipment further includes a controller, which is communicatively connected to laser 3, detector 2 and adjusting module 1.

[0075] It should be understood that the above-mentioned related design can also be replaced by other ways, such as:

[0076] In other embodiments, the linear motor included in driving assembly 12 can also be replaced by rotary motor and screw transmission mechanism, etc., at this time, the cooperation of rotary motor and screw transmission mechanism is used to realize the reciprocating motion of first connecting piece 13 along the first direction.In addition, screw transmission mechanism can also be replaced by gear and rack mechanism or synchronous belt transmission mechanism, etc.

[0077] In other embodiments, the driving assembly 12 can also be a manual assembly to adjust the position of the first connecting member 13 in the first direction by a manual adjustment mode. For example, the driving assembly 12 can include a support plate, a support block, a connecting plate, an adjusting bolt, and a second guide mechanism, wherein the support block, the connecting plate, and the second guide mechanism are connected to the support plate; the support block is provided with a connecting hole completely penetrating the support block along the first direction; the connecting plate is provided with a threaded hole; the adjusting bolt penetrates the support block from the connecting hole and can rotate around its own axis in the connecting hole, and the axis of the adjusting bolt can be parallel to the first direction; meanwhile, the adjusting bolt is provided with two stop blocks, which are respectively located on both sides of the support block in the first direction and can abut against the support block to avoid the movement of the adjusting bolt relative to the support block along the first direction; the adjusting bolt is threadedly connected to the threaded hole of the connecting plate, and when the adjusting bolt is manually driven to rotate around its own axis, the connecting plate can be driven to move relative to the support plate along the first direction; the second guide mechanism connects the support plate and the connecting plate to guide the movement of the connecting plate relative to the support plate along the first direction. In addition, the first connecting member 13 can be connected to the connecting plate. It should be understood that the above-mentioned settings for achieving the linear movement of the driving body in each direction in the two-dimensional adjustment frame and the four-dimensional adjustment frame can be the same as the above-mentioned manual assembly.

[0078] In other embodiments, the first adjusting member 15 can also be an electric adjusting member, and when it is used to adjust the position of the first connecting member 13 in one of the second direction and the third direction, the first adjusting member 15 can be provided with the same structure as the above-mentioned driving assembly 12.

[0079] When the first adjusting member 15 is used to adjust the position of the first connecting member 13 in both the second direction and the third direction, the first adjusting member 15 can include a first driving mechanism and a second driving mechanism, the first driving mechanism is connected to the driving assembly 12, the second driving mechanism is connected to the first driving mechanism, and the first connecting member 13 is connected to the second driving mechanism; one of the first driving mechanism and the second driving mechanism is used to drive the first connecting member 13 to move linearly and reciprocally in the second direction to adjust the position of the first connecting member 13 in the second direction; the other of the first driving mechanism and the second driving mechanism is used to drive the first connecting member 13 to move linearly and reciprocally in the third direction to adjust the position of the first connecting member 13 in the third direction.

[0080] In addition, any one of the first driving mechanism and the second driving mechanism can be provided with the same structure as the above-mentioned driving assembly 12.

[0081] In other embodiments, the detection of the displacement amount of the first connecting member 13 in the first direction can also be performed by other existing methods, such as laser ranging.

[0082] In other embodiments, the second adjusting member 18 can also be an electric adjusting member, which can be configured in the same manner as the driving assembly 12 when it is used to adjust the position of the condenser 17 in only one of the first direction, the second direction and the third direction.

[0083] When the second adjusting member 18 is used to adjust the position of the condenser 17 in multiple directions, the second adjusting member 18 comprises multiple linear driving units, each of which is used to drive the linear reciprocating movement of the condenser 17 in one direction. The multiple linear driving units and their connection manner can be configured in the existing design, which will not be limited in this embodiment. For example, the linear driving units can be configured in the same manner as the driving assembly 12. The term “multiple” means more than or equal to two, and the meaning of the term “multiple” is the same in each embodiment.

[0084] When the second adjusting member 18 is used to adjust the inclination angle of the condenser 17, the second adjusting member 18 comprises a rotary driving unit, which is used to drive the rotation of the condenser 17 to adjust its inclination angle. The rotary driving unit can be a rotary motor or any device capable of driving the rotation of an object. In addition, the rotary driving unit can be configured in the existing design, which will not be limited in this embodiment.

[0085] When the second adjusting member 18 can drive the linear movement of the condenser 17 (i.e. movement in at least one of the first direction, the second direction and the third direction) and can drive the inclination of the condenser 17, the second adjusting member 18 comprises a linear driving unit capable of driving the linear movement of the condenser 17 and a rotary driving unit capable of driving the inclination of the condenser 17.

[0086] For example, the second adjusting member 18 comprises three linear driving units and one rotary driving unit. The three linear driving units are respectively a first unit, a second unit and a third unit, wherein the first unit is connected to the second connecting member 16, the second unit is connected to the first unit, the third unit is connected to the second unit, the rotary driving unit is connected to the third unit, and the condenser 17 is connected to the rotary driving unit.

[0087] The first unit is used to drive the linear reciprocating movement of the second unit, the third unit, the rotary driving unit and the condenser 17 in the first direction. The second unit is used to drive the linear reciprocating movement of the third unit, the rotary driving unit and the condenser 17 in the second direction. The third unit is used to drive the linear reciprocating movement of the rotary driving unit and the condenser 17 in the third direction. The rotary driving unit is used to drive the rotation of the condenser 17 around the first axis, wherein the first axis is perpendicular to the first direction, and the first axis is perpendicular to the optical axis of the condenser 17.

[0088] Any combination of the technical features in the above-described embodiments can be made, and for the sake of brevity, not all possible combinations are described, however, as long as the combination of the technical features does not exist in contradiction, it shall be considered as within the scope of the present disclosure.

[0089] The above-described embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application.

Claims

1. An adjustment module, characterized in that, Used to adjust the position of the detector relative to the laser; The adjustment module includes a support component, a drive component, and a first connector. The drive component and the first connector are both connected to the support component; The first connector is used to mount the detector; The driving component is connected to the first connector and is used to drive the first connector to move along a first direction in order to adjust the optical path distance between the detector and the laser.

2. The adjustment module according to claim 1, characterized in that, The drive component includes a linear motor; The stator of the linear motor is connected to the support and extends along the first direction; The mover of the linear motor is connected to the first connector; The stator is used to drive the mover to move along the first direction.

3. The adjustment module according to claim 1, characterized in that, The adjustment module further includes a displacement detection component, which is used to detect the displacement of the first connector along the first direction.

4. The adjustment module according to claim 3, characterized in that, The displacement detection component includes a grating ruler and a reading head; One of the grating ruler and the reading head is connected to the support member, and the other is connected to the first connector; The grating ruler extends along the first direction, and the reading head cooperates with the grating ruler to measure the distance the first connector moves along the first direction.

5. The adjustment module according to claim 1, characterized in that, The adjustment module further includes a first adjustment member, and the first connecting member is connected to the drive component through the first adjustment member; The first adjusting member is used to adjust the position of the first connecting member in at least one of the second and third directions; The first direction, the second direction, and the third direction are perpendicular to each other.

6. The adjustment module according to claim 1, characterized in that, The adjustment module also includes a second connector and a condenser lens; The condenser lens is connected to the second connector and is used to focus the laser beam emitted by the laser. The condenser lens is located on the side of the first connector closer to the laser, so that the laser beam emitted by the laser is focused by the condenser lens and projected onto the detector; The condenser lens is an aspherical lens.

7. The adjustment module according to claim 6, characterized in that, The adjustment module further includes a second adjustment component, through which the condenser lens is connected to the second connector; the second adjustment component is used to adjust at least one of the following: the position of the condenser lens relative to the second connector in the first direction, the position of the condenser lens relative to the second connector in the second direction, the position of the condenser lens relative to the second connector in a third direction, and the tilt angle of the condenser lens relative to the second connector; wherein, the tilt angle is the angle between the optical axis of the condenser lens and the first direction, and the first direction, the second direction, and the third direction are perpendicular to each other; And / or, The adjustment module further includes a beam splitter, which is connected to the second connector and located on the side of the condenser lens away from the first connector. The beam splitter is used to split the laser beam emitted by the laser so that a portion of the laser beam emitted by the laser is transmitted to the condenser lens. The beam splitter is a semi-transparent and semi-reflective mirror.

8. A laser detection device, characterized in that, Includes a detector and the adjustment module as described in any one of claims 1 to 7; The detector is connected to the first connector and is used to detect the intensity of the laser emitted by the laser.

9. A laser processing device, characterized in that, Includes a frame, a laser, a detector, and the adjustment module as described in any one of claims 1 to 7; Both the laser and the adjustment module are connected to the frame; The detector is connected to the first connector of the adjustment module.

10. The laser processing equipment according to claim 9, characterized in that, The detector is a photodetector; and / or, the detector is detachably connected to the first connector.

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