Diversified sample placing carrier applied to plasma machine

Abstract

The utility model relates to the technical field of plasma machine tools, in particular to a diversified sample placing carrier applied to a plasma machine, which comprises a bottom plate, the top surface of the bottom plate is provided with an accommodating groove for placing samples, the top surface of the bottom plate is provided with a carrying handle, and the bottom plate is provided with a fixing piece for fixing the carrying handle. The device has the advantages that the sample can be conveniently taken and placed from the plasma machine table, and the plasma beating benefit of the sample is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of plasma machine carriers, and in particular to a diversity sample placement carrier applied to a plasma machine. BACKGROUND

[0002] The semiconductor plasma machine is also called a plasma etching machine. Plasma etching is the most common form of dry etching. Its principle is that the gas exposed to the electron region forms a plasma. The ionized gas and the released high-energy electrons form a gas, thereby forming a plasma or ion. When the ionized gas atoms are accelerated by an electric field, they will release enough power and surface driving force to tightly adhere to the material or etch the surface.

[0003] In the case of no carrier, the sample is difficult to put into the plasma machine due to the small opening, and it is also not easy to take out, which takes a long time. The sample placement position is too low, resulting in poor efficiency when applying plasma. CONTENT OF THE INVENTION

[0004] In order to facilitate the sample to be taken in and out of the plasma machine, and improve the efficiency of the sample applying plasma, the present application provides a diversity sample placement carrier applied to a plasma machine.

[0005] The present application provides a diversity sample placement carrier applied to a plasma machine, which adopts the following technical solution:

[0006] A diversity sample placement carrier applied to a plasma machine, comprising a bottom plate, a containing groove for placing a sample is formed on the top surface of the bottom plate, a handle is arranged on the top surface of the bottom plate, and a fixing member for fixing the handle is arranged on the bottom plate.

[0007] By adopting the above technical solution, when the sample needs to be put into the plasma machine for detection, the plasma machine is first broken vacuum, then the sample is put into the containing groove on the bottom plate, then the bottom plate is put into the plasma machine through the handle, then the vacuum equipment is started, and the plasma action is performed. By placing the sample on the bottom plate, the placement position of the sample is raised, the efficiency of applying plasma to the sample is improved, and the convenience of taking the sample is improved by taking and placing the sample through the handle.

[0008] Optionally, the fixing member is a bolt, the bolt is arranged on the bottom surface of the bottom plate, the fixed end of the bolt extends above the bottom plate, and the fixed end of the bolt is threadedly connected with the handle.

[0009] By adopting the above technical solution, the handle is fixed or disassembled through the bolt, which is convenient for disassembling the handle.

[0010] Optionally, the handle comprises a handle part and a fixing part, the handle part is slidingly arranged in the fixing part, the top end of the handle part extends above the fixing part, and the fixing part is provided with a positioning assembly for fixing the handle part.

[0011] By adopting the above technical scheme, the height of the handle is adjusted by the positioning assembly, which is beneficial to adapt the handle to different sizes of the plasma machine.

[0012] Optionally, the positioning assembly comprises a plug rod, the plug rod is arranged on the side wall of the fixing part, one end of the plug rod extends into the fixing part, the side wall of the handle part is provided with a plurality of positioning grooves, one end of the plug rod is respectively inserted into the plurality of positioning grooves, and the fixing part is provided with an elastic member for moving the plug rod.

[0013] By adopting the above technical scheme, when the height of the handle part needs to be adjusted, the plug rod is driven to be separated from the positioning groove by the elastic member, and then the height of the handle part is adjusted, and when the height of the handle part is determined, the plug rod is inserted into the corresponding positioning groove by the elastic member, and the handle part is fixed in the fixing part, thereby improving the stability of the height adjustment of the handle.

[0014] Optionally, the elastic member is a spring, the spring is sleeved on the plug rod, one end of the spring is fixedly connected with the side wall of the plug rod, and the other end of the spring is fixedly connected with the side wall of the fixing part.

[0015] By adopting the above technical scheme, when the plug rod is driven to move away from the fixing part, the plug rod stretches the spring, and when the plug rod is released, the spring releases the elastic force and drives the plug rod to be inserted into the positioning groove, thereby improving the stability of the adjustment and fixation of the handle part.

[0016] Optionally, the bottom surface of the bottom plate is provided with a supporting leg at each end corner.

[0017] By adopting the above technical scheme, under the action of the supporting leg, the height of the bottom plate is increased, and the stability of the placement of the bottom plate is improved.

[0018] Optionally, the end corners of the bottom plate are chamfered.

[0019] By adopting the above technical scheme, under the action of the chamfer, the end corners of the bottom plate are prevented from scratching the operator or colliding with the plasma machine.

[0020] Optionally, the bottom plate is made of aluminum metal material.

[0021] By adopting the above technical scheme, the aluminum metal material is light and convenient to carry, and the naturally formed oxide film of aluminum can effectively resist oxidation and is suitable for use in various environments.

[0022] In summary, the present application includes the following beneficial technical effects:

[0023] When the sample needs to be placed in the plasma machine for detection, first, the plasma machine is broken vacuum, then the sample is placed in the accommodation groove on the bottom plate, then the bottom plate is placed in the plasma machine through the handle, then the vacuum pumping equipment is started, and the plasma action is performed; by placing the sample on the bottom plate, it is beneficial to raise the placement position of the sample, improve the efficiency of the sample plasma, and take and place the sample through the handle, which is beneficial to improve the convenience of sample taking. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 is a top view of the bottom plate of the present application;

[0025] Figure 2 is a side view of the diverse sample placement carrier applied to the plasma machine of the present application;

[0026] Figure 3 is a front view of the diverse sample placement carrier applied to the plasma machine of the present application.

[0027] BRIEF DESCRIPTION OF DRAWINGS: 1, bottom plate; 2, accommodation groove; 3, handle; 4, fixing piece; 5, handle part; 6, fixed part; 7, insertion rod; 8, positioning groove; 9, spring; 10, supporting leg; 11, chamfer. DETAILED DESCRIPTION

[0028] The following will be described in detail in combination with the accompanying Figures 1-3 The present application will be further described in detail.

[0029] Embodiment:

[0030] Referring to Figures 1-3 A diverse sample placement carrier applied to a plasma machine, comprising a bottom plate 1, the projection of the bottom plate 1 is a square shape, and the size of the bottom plate 1 is 59mm*59mm, which satisfies the opening size of the plasma machine. The top surface of the bottom plate 1 is provided with an accommodation groove 2, which is used for placing a sample. In this embodiment, the size of the sample is 45mm*55mm. The projection of the accommodation groove 2 is a circular shape, and the diameter of the accommodation groove 2 is Φ63.5mm. The top surface of the bottom plate 1 is provided with a handle 3, and the bottom plate 1 is also provided with a fixing piece 4, which is used for fixing the handle 3.

[0031] When the sample needs to be placed in the plasma machine for detection, first, the plasma machine is broken vacuum, and then the sample is placed in the accommodating groove 2 on the bottom plate 1, and then the bottom plate 1 is placed in the plasma machine through the handle 3, and then the vacuum equipment is started, and the plasma action is performed, and at this time the plasma machine processes the surface of the sample. When the sample plasma processing is completed, the bottom plate 1 is taken out from the plasma machine through the handle 3, so that the sample is taken out.

[0032] Specifically, referring to Figure 2 , the fixing member 4 is a bolt, the bolt is installed on the bottom surface of the bottom plate 1, the fixed end of the bolt penetrates through the bottom plate 1 and extends above the bottom plate 1. The fixed end of the bolt is threadedly connected with the bottom end of the handle 3.

[0033] When the handle 3 needs to be disassembled, the bolt is tightened or loosened, so as to facilitate maintenance, replacement or assembly of the handle 3.

[0034] Referring to Figure 2 and Figure 3 , in order to improve the application range of the handle 3, the handle 3 comprises a handle part 5 and a fixing part 6. The fixing part 6 is in a cylindrical shape, and the bolt is threadedly connected with the bottom end of the fixing part 6. The top end of the handle part 5 is provided in a hook shape, and the bottom end of the handle part 5 is slidingly installed in the fixing part 6.

[0035] Referring to Figure 2 , in order to facilitate positioning and fixing the handle part 5 at a certain height position, the fixing part 6 is provided with a positioning assembly, and the positioning assembly comprises an insertion rod 7. The insertion rod 7 is horizontally arranged, and the insertion rod 7 is installed on the side wall of the fixing part 6. One end of the insertion rod 7 penetrates through the fixing part 6 and extends into the fixing part 6. The side wall of the handle part 5 is provided with a plurality of positioning grooves 8, and the plurality of positioning grooves 8 are arranged in a straight line along the vertical direction of the handle part 5. One end of the insertion rod 7 is respectively inserted into the plurality of positioning grooves 8.

[0036] Referring to Figure 2 , in order to cooperate with the movement of the insertion rod 7, the fixing part 6 is further provided with an elastic member, which is a spring 9. The spring 9 is installed outside the side wall of the fixing part 6, one end of the spring 9 is fixedly connected with the outer wall of the fixing part 6, and the other end of the spring 9 is fixedly connected with the side wall of the insertion rod 7.

[0037] When the height of the handle part 5 needs to be adjusted, the insertion rod 7 is moved away from the fixing part 6, the insertion rod 7 is separated from the positioning groove 8, and the spring 9 is stretched, so that the height of the handle part 5 can be adjusted. When the height of the handle part 5 is adjusted, the insertion rod 7 is loosened, and the spring 9 is reset, and the insertion rod 7 is inserted into the positioning groove 8, and the handle part 5 is fixed at the current height position. Thus, the use range of the handle 3 is improved, and the plasma machine with different opening sizes can be satisfied.

[0038] Referring toFigure 2 and Figure 3 In order to increase the height of the bottom plate 1 and improve the stability of the bottom plate 1 placed on the plasma machine table, the bottom surface of each of the four corners of the bottom plate 1 is fixedly connected with a supporting leg 10. Under the action of the supporting leg 10, the overall height of the bottom plate 1 is 6 mm.

[0039] Referring to Figure 1 In order to avoid scratching the operator or bumping the plasma machine with the corners of the bottom plate 1, each of the four corners of the bottom plate 1 is provided with a chamfer 11.

[0040] It is worth mentioning that the material of the bottom plate 1 is aluminum metal material. The aluminum metal material is light and convenient to carry and operate, and the naturally formed oxide film of aluminum can effectively resist oxidation and is suitable for use in various environments.

[0041] Working principle of a diversity sample placing carrier applied to a plasma machine:

[0042] Before using the carrier, the height of the handle 3 is adjusted according to the opening size of the plasma machine table, and the insertion rod 7 is first driven to move away from the fixed part 6, the insertion rod 7 is separated from the positioning groove 8, and the insertion rod 7 stretches the spring 9. At this time, the height of the handle part 5 can be adjusted. When the height adjustment of the handle part 5 is completed, the insertion rod 7 is loosened, at this time the spring 9 is reset, and the insertion rod 7 is inserted into the positioning groove 8, and the handle part 5 is fixed at the current height position.

[0043] Then the plasma machine table is broken vacuum, and then the sample is placed into the accommodating groove 2 on the bottom plate 1, and then the bottom plate 1 is placed into the plasma machine table by the handle 3, and then the vacuumizing equipment is started, and the plasma action is performed. At this time, the plasma machine processes the surface of the sample. When the plasma processing of the sample is completed, the bottom plate 1 is taken out from the plasma machine table by the handle 3, so as to realize the taking out of the sample.

[0044] In summary, by placing the sample on the bottom plate 1, it is beneficial to raise the placement position of the sample and improve the efficiency of the sample plasma application. By taking and placing the sample by the handle 3, it is beneficial to improve the convenience of sampling the sample.

[0045] The above are preferred embodiments of the present application, which do not limit the protection scope of the present application, therefore: any equivalent changes made on the structure, shape, principle of the present application should be covered within the protection scope of the present application.

Claims

1. A diversity sample placement carrier for use in a plasma machine comprising a base plate (1) characterised in that: The top surface of the bottom plate (1) is provided with a containing groove (2) for placing samples, and the top surface of the bottom plate (1) is provided with a handle (3), and the bottom plate (1) is provided with a fixing part (4) for fixing the handle (3); The handle (3) comprises a handle part (5) and a fixing part (6), the handle part (5) is slidingly arranged in the fixing part (6), the top end of the handle part (5) extends above the fixing part (6), and the fixing part (6) is provided with a positioning assembly for fixing the handle part (5); The positioning assembly comprises an insertion rod (7), the insertion rod (7) is arranged on the side wall of the fixing part (6), one end of the insertion rod (7) extends into the fixing part (6), the side wall of the handle part (5) is provided with a plurality of positioning grooves (8), one end of the insertion rod (7) is respectively inserted into a plurality of the positioning grooves (8), and the fixing part (6) is provided with an elastic member for cooperating to drive the insertion rod (7) to move; The elastic member is a spring (9), the spring (9) is sleeved on the insertion rod (7), one end of the spring (9) is fixedly connected with the side wall of the insertion rod (7), and the other end of the spring (9) is fixedly connected with the side wall of the fixing part (6).

2. A diversity sample placement carrier for use in a plasma machine as defined in claim 1, wherein: The fixing part (4) is a bolt, the bolt is arranged on the bottom surface of the bottom plate (1), the fixed end of the bolt extends above the bottom plate (1), and the fixed end of the bolt is threadedly connected with the handle (3).

3. A diversity sample placement carrier for use in a plasma machine as defined in claim 1, wherein: The bottom surface of the bottom plate (1) is provided with a supporting leg (10) at the end corner.

4. The multiplex sample placement carrier for use in a plasma machine of claim 1, wherein: The end corner of the bottom plate (1) is provided with a chamfer (11).

5. The multiplex sample placement carrier for use in a plasma machine of claim 1, wherein: The bottom plate (1) is made of aluminum metal material.

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