Wafer vertical warehouse
By setting up multiple support bases and lifting platforms in the wafer rack, combined with the lifting platform of the actuator, the problems of insufficient storage capacity and low handling efficiency of traditional wafer racks are solved, and efficient wafer box storage and handling are realized.
Patent Information
- Application Number
- CN202423045678.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-10
- Publication Date
- 2025-11-21
- Estimated Expiration
- 2034-12-10
AI Technical Summary
Traditional wafer rack warehouses have low space utilization, insufficient storage capacity, and low handling efficiency.
Multiple support seats are installed on the lifting platform and side wall. The lifting platform drives the support seats to rise and fall, and combined with the actuator, the wafer box can be transported efficiently. The storage capacity can be increased by arranging the support seats in a reasonable manner.
This improved the storage capacity and handling efficiency of the wafer storage facility, reduced space waste and workflow complexity during handling, and enhanced handling efficiency.
Smart Images
Figure CN223582964U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present disclosure relates to the field of semiconductor manufacturing, and more particularly, to a wafer warehouse. BACKGROUND
[0002] In the semiconductor industry, a wafer warehouse is an automated storage device that realizes the flow of wafers between different processes through cooperation with an automated material handling system. The internal space of the wafer warehouse is provided with a plurality of support seats and a moving device. The plurality of support seats are used to carry wafer boxes, and the moving device can carry the wafer boxes between the plurality of support seats. In the past wafer warehouse, more space is not utilized, which leads to a lower storage capacity of the wafer warehouse; the arrangement of the plurality of support seats is not reasonable, which leads to a lower carrying efficiency. SUMMARY
[0003] Therefore, the present disclosure provides a wafer warehouse to improve the problem of low space utilization and carrying efficiency of the past wafer warehouse.
[0004] The wafer warehouse includes a warehouse shell, a moving device, and a plurality of support seats. The warehouse shell is internally provided with an internal space. The moving device is arranged in the internal space and includes a lifting platform and an actuator. The lifting platform lifts together with the actuator, and the actuator is used to move the wafer box. The warehouse shell includes a front wall, a rear wall, and two side walls. The front wall and the rear wall are spaced apart in the front-rear direction, and the two side walls are spaced apart in the width direction. The front wall is provided with a front window, and the rear wall is provided with a rear window. The plurality of support seats are used to support the wafer box, and the plurality of support seats include at least one first support seat, at least one second support seat, a third support seat, and a fourth support seat. The at least one first support seat is fixed on the front wall and exposed to the front window, and the at least one second support seat is located above the at least one first support seat. The third support seat is mounted on the lifting platform, and the fourth support seat is fixed on one side wall. The third support seat and the fourth support seat are respectively located on opposite sides of the actuator in the width direction.
[0005] As a possible implementation manner, the third support seat and the fourth support seat are closer to the rear wall than the actuator in the front-rear direction.
[0006] As a possible implementation manner, the wafer warehouse further includes a wafer processing device. The wafer processing device is located on the side of the actuator away from the third support seat, and the wafer processing device is located below the fourth support seat.
[0007] As a possible implementation manner, the wafer processing device is mounted on the lifting platform to lift together with the lifting platform.
[0008] As a possible implementation, the wafer box placed on the fourth support seat is lower than the upper edge of the rear window and higher than the lower edge of the rear window.
[0009] As a possible implementation, when the lifting platform is in the upper limit position, the third support seat is lower than the upper edge of the rear window and higher than the lower edge of the rear window.
[0010] As a possible implementation, the wafer vertical warehouse further comprises a wafer processing device installed on the lifting platform. When the lifting platform is in the upper limit position, the wafer placed on the wafer processing device is lower than the upper edge of the rear window and higher than the lower edge of the rear window.
[0011] As a possible implementation, the wafer processing device is located on the side of the actuator away from the third support seat, and the wafer processing device is below the fourth support seat. When the lifting platform is in the upper limit position, the wafer processing device is arranged at a distance D from the fourth support seat, and D≥50mm.
[0012] As a possible implementation, the lifting platform can be moved to an alignment position. When the wafer processing device is in the alignment position, at least one of the first support seat and the third support seat are aligned in the height direction.
[0013] As a possible implementation, the moving device further comprises a driving mechanism fixed to the rear wall portion and located below the rear window.
[0014] The present disclosure improves the storage capacity of the wafer vertical warehouse by providing multiple support seats on the lifting platform and the side wall portion. At the same time, the support seats on the lifting platform can be lifted together with the actuator, improving the handling efficiency of the wafer box. BRIEF DESCRIPTION OF DRAWINGS
[0015] It should be understood that the following drawings only show certain embodiments of the present disclosure and should not be considered as limiting the scope.
[0016] It should be understood that the same or similar reference signs are used to represent the same or similar elements in the drawings.
[0017] It should be understood that the drawings are only schematic and the sizes and proportions of the elements in the drawings are not necessarily precise.
[0018] Figure 1 Structure schematic diagram of a wafer vertical warehouse of an embodiment of the present disclosure.
[0019] Figure 2 Structure schematic diagram of the wafer vertical warehouse in Figure 1 from a top view.
[0020] Figure 3 Structure schematic diagram of the wafer vertical warehouse in Figure 1Structure diagram of front window of wafer vertical warehouse in
[0021] Figure 4 For Figure 1 Structure diagram of moving device and wafer processing device of wafer vertical warehouse in
[0022] Figure 5 For Figure 1 Structure diagram of actuator of wafer vertical warehouse in
[0023] Figure 6 For Figure 1 Structure diagram of first support seat, second support seat, third support seat and fourth support seat of wafer vertical warehouse in
[0024] Figure 7 For Figure 1 Position diagram of wafer processing device of wafer vertical warehouse in
[0025] Figure 8 For Figure 1 Structure diagram of lifting platform of wafer vertical warehouse in upper limit position
[0026] Figure 9 For Figure 1 Structure diagram of lifting platform of wafer vertical warehouse in alignment position
[0027] Figures 1 to 9 Explanation of reference numerals of the drawings:
[0028] 10 - warehouse shell, 11 - front wall part, 111 - front window, 12 - rear wall part, 121 - rear window, 13 - side wall part, 20 - moving device, 21 - lifting platform, 22 - actuator, 221 - main body, 222 - mechanical arm, 223 - actuator, 23 - driving mechanism, 231 - guide rail, 232 - sliding block, 233 - motor, 30 - wafer box, 40 - first support seat, 41 - second support seat, 42 - third support seat, 43 - fourth support seat, 50 - wafer processing device. DETAILED DESCRIPTION
[0029] Many specific details are set forth below to provide an understanding of the structure, function, and use of the embodiments shown in the description and the drawings. It will be appreciated that the embodiments described and shown herein are non-limiting examples, and that the particular structural and functional details described herein are representative and exemplary. Embodiments can be modified and changed without departing from the scope of the claims.
[0030] In the semiconductor industry, a wafer warehouse is an automated storage device that realizes the flow of wafers between different processes through cooperation with an automated material handling system. The internal space of the wafer warehouse is provided with a plurality of support seats and a moving device. The plurality of support seats are used to carry wafer boxes, and the moving device can carry wafer boxes between the plurality of support seats.
[0031] The inventor found that in the traditional wafer warehouse, more space is not utilized. For example, a large amount of space occupied by the moving device during movement, the space around the side wall is not utilized. This results in a low storage capacity of the wafer warehouse. In the traditional wafer warehouse, the arrangement of the plurality of support seats is not reasonable. For example, the plurality of support seats are fixed on the wall of the warehouse, and when the moving device carries the wafer box between support seats at different heights, it can only complete the three actions of grabbing, lifting and placing step by step. This results in a low carrying efficiency.
[0032] To solve the above problems, the present disclosure provides a plurality of support seats on the lifting platform and the side wall, which improves the storage capacity of the wafer warehouse. At the same time, the support seats on the lifting platform can be lifted together with the actuator. The actuator can be lifted while placing or grabbing the wafer box on the support seat on the lifting platform, which improves the carrying efficiency of the wafer box.
[0033] The wafer warehouse provided by the present disclosure is described in more detail below.
[0034] As shown in Figure 1 and Figure 2 , the wafer warehouse includes a warehouse shell 10, a moving device 20, and a plurality of support seats. The warehouse shell 10 is a rectangular cuboid. The warehouse shell 10 is provided with an internal space. The warehouse shell 10 includes a front wall portion 11, a rear wall portion 12, and two side wall portions 13. The front wall portion 11 and the rear wall portion 12 are spaced apart in the front-rear direction, and the two side wall portions 13 are spaced apart in the width direction. The direction indicated by x+ is the front direction, and the direction indicated by x- is the rear direction. The front-rear direction is collectively referred to as the x+ and x-, and the direction perpendicular to the front-rear direction is the width direction. As shown in Figure 1 , Figure 3 , the front wall portion 11 is provided with a front window 111, and the rear wall portion 12 is provided with a rear window 121. The front window 111 can be used to send the wafer box 30 into and out of the wafer warehouse, and the rear window 121 can be used to send the wafer into and out of the wafer warehouse.
[0035] As shown in Figure 2 , Figure 4As shown, the mobile device 20 is disposed in the internal space and includes a lifting platform 21 and an execution mechanism 22. The execution mechanism 22 is disposed above the lifting platform 21. The execution mechanism 22 can be used to move the wafer box 30. In some embodiments, the execution mechanism 22 can also be used to move the wafer. In other embodiments, two mobile devices 20 can be disposed in the wafer vertical library, one of which is used to move the wafer box 30, and the other is used to move the wafer. In other embodiments, an external mobile device can be used to send or take out the wafer through the rear window 121 into the wafer vertical library. The lifting platform 21 lifts together with the execution mechanism 22. The execution mechanism 22 can move the wafer box 30 to different heights under the cooperation of the lifting platform 21 to transport the wafer box 30 between support seats at different heights. Specifically, as shown, Figure 5 The execution mechanism 22 includes a main body 221, a mechanical arm 222, and an executor 223. The mechanical arm 222 is supported on the main body 221, and the executor 223 is disposed at the end of the mechanical arm 222. The executor 223 can be used to grab and place the wafer box 30, and can also be used to grab and place the wafer.
[0036] As shown, Figure 6 A plurality of support seats are used to support the wafer box 30, and the plurality of support seats include at least one first support seat 40, at least one second support seat 41, a third support seat 42, and a fourth support seat 43. The at least one first support seat 40 is fixed on the front wall portion 11 and exposed to the front window 111. The wafer box 30 sent into the wafer vertical library from the front window 111 can be placed on the first support seat 40 first, and then the wafer box 30 on the first support seat 40 is transported to other support seats by the mobile device 20. Similarly, the wafer box 30 sent out from the front window 111 can be placed on the first support seat 40 by the mobile device 20 first, and then taken out from the front window 111 by the technician. The at least one second support seat 41 is located above the at least one first support seat 40. There is more accommodation space above the first support seat 40. The second support seat 41 can be disposed on the front wall portion 11 in a stacked manner in the height direction. The third support seat 42 is installed on the lifting platform 21 and lifts together with the lifting platform 21. The execution mechanism 22 can grab and place the wafer box 30 or the wafer on the third support seat 42 during lifting, improving the transportation efficiency. The fourth support seat 43 is fixed on one side wall portion 13, and the accommodation space around the side wall portion 13 is used to improve the storage capacity of the wafer vertical library. Moreover, the third support seat 42 and the fourth support seat 43 are respectively located on the opposite sides of the execution mechanism 22 in the width direction, avoiding collision and interference between the third support seat 42 and the fourth support seat 43 during lifting, and utilizing the space on both sides of the execution mechanism 22 in the width direction.
[0037] In the above embodiments, the third support seat 42 and the fourth support seat 43 utilize the space on the side wall part 13 and the lifting platform 21, and improve the storage capacity of the wafer vertical warehouse. The first support seat 40 is fixed on the front wall part 11 and exposed to the front window 111, which facilitates the sending and taking of the wafer box 30 into and out of the wafer vertical warehouse. The third support seat 42 is installed on the lifting platform 21 and lifts together with the lifting platform 21. The actuator 22 is realized to lift while placing or grabbing the wafer box 30, and the carrying efficiency is improved.
[0038] In some embodiments, as shown in Figure 2 The third support seat 42 and the fourth support seat 43 are closer to the rear wall part 12 than the actuator 22 in the front-rear direction. That is, the distance from the third support seat 42 and the fourth support seat 43 to the rear wall part 12 is less than the distance from the actuator 22 to the rear wall part 12. The distance from the third support seat 42, the fourth support seat 43, and the actuator 22 to the rear wall part 12 is the vertical distance from the centroid of the orthographic projection of the third support seat 42, the fourth support seat 43, and the actuator 22 on the horizontal plane to the rear wall part 12. When the third support seat 42 and the fourth support seat 43 are close to the rear wall part 12, there is more space than when the distance from the third support seat 42, the fourth support seat 43, and the actuator 22 to the rear wall part 12 is equal. Larger wafer boxes 30 can be placed. The third support seat 42 and the fourth support seat 43 can interact with the rear window 121 through the actuator 22 to send and take the wafers or wafer boxes 30 out of and into the wafer vertical warehouse. A mechanical arm or the like device provided outside the wafer vertical warehouse can also be extended from the rear window 121 to grab and place the wafers or wafer boxes 30 on the third support seat 42 and the fourth support seat 43. When the third support seat 42 and the fourth support seat 43 are close to the rear wall part 12, the actuator 22 or the external mechanical arm needs to travel a shorter distance, and the carrying efficiency can be improved.
[0039] In some embodiments, as shown in Figure 7 The wafer vertical warehouse further includes a wafer processing device 50, which is located on the side of the actuator 22 away from the third support seat 42 and utilizes the space on the other side of the actuator 22. The wafer processing device 50 is located below the fourth support seat 43. The wafer processing device 50 can be located directly below the fourth support seat 43, or below the side 222 of the fourth support seat 43. The wafer processing device 50 can be fixed on the side wall part 13. The wafer processor can be a calibrator that sends the calibrated wafers out of the rear window 121.
[0040] In some embodiments, as shown in Figure 4As shown, the wafer processing unit 50 can be mounted on the lifting platform 21 for simultaneous lifting and lowering. In this embodiment, the wafer processing unit 50, the actuator 22, and the third support base 42 move together on the lifting platform 21. The wafer processing unit 50 and the third support base 42 interact via the actuator 22. The actuator 22 can remove wafers from the wafer cassette 30 on the third support base 42 and place them on the wafer processing unit 50. After processing by the wafer processing unit 50, the wafers can be placed on other support bases by the actuator 22 or sent out of the wafer storage unit through the rear window 121. During this process, the wafer processing unit 50, the actuator 22, and the third support base 42 can move together. Thus, the wafer processing and lifting actions can be completed simultaneously, allowing for rapid wafer transport between support bases of different heights or rapid wafer delivery, improving transport efficiency.
[0041] In some embodiments, such as Figure 1 As shown, the wafer cassette 30, placed on the fourth support 43, is lower than the upper edge of the rear window 121 and higher than its lower edge. The wafer cassette 30 on the fourth support 43, or the wafers within it, can be fed into or removed from the wafer storage unit through the rear window 121 via the actuator 22 or an external robotic arm. When the wafer cassette 30 is lower than the upper edge of the rear window 121 and higher than its lower edge, the actuator 22 or the external robotic arm only needs to translate the wafer cassette 30 or the wafer to place it on or remove it from the fourth support 43. This eliminates the need to move the wafer cassette 30 or the wafers in the vertical direction, reducing the movement path of the wafer cassette 30 or the wafers, decreasing the complexity of the actuator 22's movement trajectory, and improving handling efficiency.
[0042] In some embodiments, such as Figure 8 As shown, when the lifting platform 21 is at its upper limit position, the third support base 42 is lower than the upper edge of the rear window 121 and higher than the lower edge of the rear window 121. The upper limit position is the highest height that the lifting platform 21 can reach. The wafer cassette 30 on the third support base 42, or the wafers inside the wafer cassette 30, can be fed into or out of the wafer storage unit from the rear window 121 via the actuator 22 or an external robotic arm. When the third support base 42 is lower than the upper edge of the rear window 121 and higher than the lower edge of the rear window 121, the actuator 22 or the external robotic arm only needs to move the wafer cassette 30 or the wafers horizontally to place them on the third support base 42 or remove them from the third support base 42. There is no need to move the wafer cassette 30 or the wafers in the height direction, reducing the movement path of the wafer cassette 30 or the wafers, reducing the complexity of the movement trajectory of the actuator 22, and improving handling efficiency.
[0043] In some embodiments, such as Figure 8As shown, the wafer vertical warehouse further comprises a wafer processing device 50 installed on the lifting platform 21. When the lifting platform 21 is located at the upper limit position, the wafer placed on the wafer processing device 50 is lower than the upper edge of the rear window 121 and higher than the lower edge of the rear window 121. The actuator 22 or an external mechanical arm can send the wafer on the wafer processing device 50 out of the wafer vertical warehouse from the rear window 121. When the wafer placed on the wafer processing device 50 is lower than the upper edge of the rear window 121 and higher than the lower edge of the rear window 121, the actuator 22 or the external mechanical arm only needs to translate the wafer to take it out from the wafer processing device 50. Without moving the wafer in the height direction, the moving line of the wafer is reduced, the complexity of the moving track of the actuator 22 is reduced, and the handling efficiency is improved.
[0044] In some embodiments, as shown in Figure 2 , Figure 4 , Figure 8 As shown, the wafer processing device 50 is located on the side of the actuator 22 away from the third support seat 42, and the wafer processing device 50 is located below the fourth support seat 43. When the lifting platform 21 is located at the upper limit position, the wafer processing device 50 is arranged apart from the fourth support seat 43 and has a distance D to the fourth support seat 43, D≥50mm. Here, the apart arrangement can mean that the two are arranged apart in the height direction, and the distance D can mean the shortest distance between the two. Since the wafer processing device 50 and the fourth support seat 43 are arranged apart in the height direction, the orthographic projections of the two on the horizontal plane can partially coincide. The wafer processing device 50 will not collide with the fourth support seat 43 when it is lifted. In the above embodiment, when the lifting platform 21 is located at the upper limit position, the wafer processing device 50 and the fourth support seat 43 are both lower than the upper edge of the rear window 121 and higher than the lower edge of the rear window 121. The actuator 22 can move in the height direction relative to the lifting platform to take the wafer from the fourth support seat 43 and place it on the wafer processing device 50, and after processing is completed, it is sent out from the rear window 121.
[0045] In some embodiments, as shown in Figure 9 As shown, the lifting platform 21 can be moved to an alignment position. When the lifting platform 21 is located at the alignment position, at least one first support seat 40 is aligned with the third support seat 42 in the height direction. That is, when the lifting platform 21 is located at the alignment position, the first support seat 40 and the third support seat 42 are at the same height and located on the same horizontal plane. When the first support seat 40 and the third support seat 42 are aligned in the height direction, the actuator 22 can translate the wafer cassette 30 on the first support seat 40 to the third support seat 42 without moving the wafer cassette 30 in the height direction. The handling efficiency between the first support seat 40 and the third support seat 42 is improved.
[0046] In some embodiments, as shown in Figure 4、 Figure 8 As shown, the mobile device 20 further comprises a driving mechanism 23 fixed to the rear wall portion 12 and below the rear window. The driving mechanism 23 comprises a guide rail 231, a sliding block 232, and a motor 233. The guide rail 231 has a threaded rod inside, and the sliding block 232 is fixedly connected with the threaded rod and the lifting platform 21. The motor 233 drives the threaded rod to rotate, and the rotating threaded rod drives the sliding block 232 to lift, and in turn drives the lifting platform 21 to lift. The guide rail 231 is fixed to the rear wall portion 12 and has a height lower than the lower edge of the rear window 121. The guide rail 231 avoids blocking the rear window 121, and affects the sending out and sending in of the wafer box 30 or the wafer.
[0047] The present disclosure will be described in more detail with reference to specific examples. It should be noted that the examples are only intended to help those skilled in the art to understand the present disclosure, and are not intended to limit the present disclosure to the specific values or specific scenarios exemplified. Those skilled in the art can obviously make various equivalent modifications or changes according to the examples given below, and such modifications or changes also fall within the scope of the present disclosure.
[0048] In some embodiments, as Figures 1 to 9As shown, the wafer vertical warehouse includes a vertical warehouse shell 10, a moving device 20, a first support seat 40, a second support seat 41, a third support seat 42 and a fourth support seat 43. The vertical warehouse shell 10 is a rectangular cuboid, and the vertical warehouse shell 10 is internally provided with an internal space. The moving device 20, the first support seat 40, the second support seat 41, the third support seat 42 and the fourth support seat 43 are all arranged in the internal space. The vertical warehouse shell 10 includes a front wall part 11, a rear wall part 12 and two side wall parts 13. The front wall part 11 is provided with a front window 111, and the rear wall part 12 is provided with a rear window 121. The moving device 20 includes a driving device, a lifting platform 21 and an execution mechanism 22. The driving device includes a guide rail 231, a sliding block 232 and a motor 233. The guide rail 231 is fixed to the rear wall part 12 and has a height lower than that of the rear window 121. The sliding block 232 is fixed to a threaded rod in the guide rail 231. The sliding block 232 is fixedly connected to the lifting platform 21. The motor 233 drives the threaded rod to rotate, and the rotating threaded rod drives the sliding block 232 to lift, thereby driving the lifting platform 21 to lift. The execution mechanism 22 is arranged on the lifting platform 21 and is used to move a wafer box 30. The execution mechanism 22 includes a main body 221, a mechanical arm 222 and an actuator 223. The mechanical arm 222 is supported on the main body 221, and the actuator 223 is arranged at the end of the mechanical arm 222. The actuator 223 can be used to grab and place the wafer box 30, or can be used to grab and place a wafer. The first support seat 40 has three, is fixed on the front wall part 11 and is exposed to the front window 111. The second support seat 41 has nine, is located above the first support seat 40 and is arranged on the front wall part 11 in a stacked manner in the height direction. One third support seat 42 is installed on the lifting platform 21 and lifts together with the lifting platform 21. During the lifting of the execution mechanism 22, the wafer box 30 or the wafer on the third support seat 42 can be grabbed or placed. The fourth support seat 43 is fixed on one side wall part 13, and the wafer box 30 on the fourth support seat 43 is lower than the upper edge of the rear window 121 and higher than the lower edge of the rear window 121. The third support seat 42 and the fourth support seat 43 are both close to the rear wall part 12. A wafer processing device 50 is further arranged on the lifting platform 21 and lifts together with the lifting platform 21. The wafer processing device 50 is located on the side opposite to the third support seat 42 of the execution mechanism 22. When the lifting platform 21 is located at the upper limit position, the third support seat 42 and the wafer processing device 50 are both lower than the upper edge of the rear window 121 and higher than the lower edge of the rear window 121. And the wafer processing device 50 is arranged in a spaced manner with the fourth support seat 43, that is, the wafer processing device 50 and the fourth support seat 43 can be at the same height. The lifting platform 21 can be moved to an alignment position, so that the first support seat 40 and the third support seat 42 are aligned in the height direction. In the above embodiment, the third support seat 42 and the fourth support seat 43 utilize the space on the side wall part 13 and the lifting platform 21, thereby improving the storage capacity of the wafer vertical warehouse.The first support seat 40 is fixed on the front wall part 11 and exposed to the front window 111, facilitating the sending and taking of the wafer box 30 into and out of the wafer vertical warehouse. The third support seat 42 is installed on the lifting platform 21 and is lifted together with the lifting platform 21. The actuator 22 is realized to be lifted while placing or grabbing the wafer box 30, improving the carrying efficiency.
[0049] It should be noted that the various elements described in the above specific embodiments can be combined in any suitable manner, without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.
[0050] It should be understood that a plurality of components and / or parts can be provided by a single integrated component or part. Alternatively, a single integrated component or part can be divided into separate components and / or parts. The disclosure of "a" or "one" to describe a component or part does not exclude other components or parts.
[0051] It should be understood that although the terms "first" or "second" and the like can be used in the present disclosure to describe various elements (such as the first support seat and the second support seat), these elements are not set by these terms, and these terms are only used to distinguish one element from another.
[0052] The above describes the basic principles of the present disclosure in combination with specific embodiments, but it should be noted that the advantages, advantages, effects and the like mentioned in the present disclosure are only examples and are not limited, and these advantages, advantages, effects and the like cannot be considered as the various embodiments of the present disclosure must have. In addition, the above specific details are only for the purpose of example and for the purpose of understanding, and are not limited to the above specific details, and the above details do not limit the present disclosure to be implemented with the above specific details.
[0053] The above is only a specific embodiment of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and any person skilled in the art can easily think of changes or replacements within the technical scope disclosed by the present disclosure, which should be covered within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the protection scope of the claims.
Claims
1. A wafer storage rack, characterized in that, The wafer storage facility includes: The vertical storage enclosure has an internal space inside. The vertical storage enclosure includes a front wall, a rear wall, and two side walls. The front wall and the rear wall are spaced apart in the front-to-back direction, and the two side walls are spaced apart in the width direction. The front wall has a front window, and the rear wall has a rear window. A mobile device, disposed within the internal space and comprising a lifting platform and an actuator, wherein the lifting platform moves up and down along with the actuator, and the actuator is used to move the wafer cassette; and Multiple support bases are provided for supporting wafer cassettes. The multiple support bases include at least one first support base, at least one second support base, a third support base, and a fourth support base. The at least one first support base is fixed to the front wall portion and exposed to the front window. The at least one second support base is located above the at least one first support base. The third support base is mounted on the lifting platform. The fourth support base is fixed to a side wall portion, and the third support base and the fourth support base are respectively located on opposite sides of the actuator in the width direction.
2. The wafer storage facility according to claim 1, characterized in that, The third and fourth support seats are closer to the rear wall portion than the actuator along the front-rear direction.
3. The wafer storage facility according to claim 2, characterized in that, The wafer rack also includes a wafer processing device located on the side of the actuator facing away from the third support, and the wafer processing device is located below the fourth support.
4. The wafer storage facility according to claim 3, characterized in that, The wafer processing apparatus is mounted on the lifting platform so that it moves up and down together with the lifting platform.
5. The wafer storage facility according to claim 1, characterized in that, The wafer cassette placed on the fourth support is below the upper edge of the rear window and above the lower edge of the rear window.
6. The wafer storage rack according to claim 5, characterized in that, When the lifting platform is at its upper limit position, the third support is below the upper edge of the rear window and above the lower edge of the rear window.
7. The wafer storage rack according to claim 5, characterized in that, The wafer rack also includes a wafer processing device installed on the lifting platform; when the lifting platform is at its upper limit position, the wafers placed on the wafer processing device are below the upper edge of the rear window and above the lower edge of the rear window.
8. The wafer storage facility according to claim 7, characterized in that, The wafer processing device is located on the side of the actuator facing away from the third support, and the wafer processing device is located below the fourth support; when the lifting platform is at the upper limit position, the wafer processing device is arranged at a distance from the fourth support, and it has a distance D from the fourth support, D≥50 mm.
9. The wafer storage facility according to claim 1, characterized in that, The lifting platform can be moved to an aligned position; when the lifting platform is in the aligned position, the at least one first support seat and the third support seat are aligned in the height direction.
10. The wafer storage facility according to any one of claims 1 to 9, characterized in that, The mobile device also includes a drive mechanism, which is fixed to the rear wall and located below the rear window.