Explosion-proof efficient exhaust mechanism for organic wet process equipment
By using a tank side cover, fan filter group and exhaust device in the organic wet process equipment, combined with multiple filters and wind speed monitoring, the problem of traditional exhaust mechanisms being unable to purify and efficiently discharge organic gases is solved, achieving safe and efficient exhaust effect.
Patent Information
- Application Number
- CN202422694967.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-05
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-11-05
AI Technical Summary
Traditional ventilation systems cannot effectively purify organic gases, which increases the risk of flammability and explosion when the concentration of organic gases reaches a critical value, and the ventilation efficiency is insufficient.
The system employs a trough-side cover, a fan filter assembly, and an exhaust device, combined with chemical filters, molecular sieve filters, and activated carbon filters for multiple filtration and purification processes. An anemometer monitors gas flow to prevent gas accumulation.
It achieves effective extraction and purification filtration of organic gases, avoids gas accumulation inside the equipment, reduces the risk of flammability and explosion, and improves ventilation efficiency and safety.
Smart Images
Figure CN223586862U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a kind of exhaust mechanism field, specifically for a kind of organic wet process equipment explosion-proof high-efficiency exhaust mechanism. BACKGROUND
[0002] The explosion-proof high-efficiency exhaust mechanism for organic wet process equipment is a device integrating ventilation, filtration and exhaust function, and its core purpose is to efficiently and safely treat organic gas (cyclohexanone) released during the operation of organic wet process equipment. Through specific structural design and technical means, the mechanism realizes effective extraction, purification filtration and explosion-proof treatment of organic gas, thereby ensuring the cleanliness and safety of the production environment.
[0003] In semiconductor equipment, wet process equipment is usually an open area for wet chemical reaction, which involves organic chemical solution heating in the process area of the equipment, resulting in organic chemical volatilization, leading to high concentration of organic chemical atmosphere in the internal process area. When the concentration of organic gas (cyclohexanone) reaches a certain critical value, the risk of flammability and explosion occurs immediately. Traditional exhaust mechanisms have obvious shortcomings in handling such organic gas (cyclohexanone). On the one hand, these mechanisms can only simply extract and discharge gas (cyclohexanone) to the external environment, and cannot effectively purify the gas. This not only causes environmental pollution, but also may keep the concentration of organic gas (cyclohexanone) in the surrounding environment at a high level, increasing the safety hazard. On the other hand, traditional exhaust mechanisms have deficiencies in exhaust efficiency, especially when handling large amounts of organic gas (cyclohexanone), they often cannot timely discharge the gas, causing gas accumulation around the equipment, further exacerbating the risk of flammability and explosion. SUMMARY
[0004] To overcome the deficiencies of the prior art, the utility model provides an explosion-proof high-efficiency exhaust mechanism for organic wet process equipment, which can effectively solve the technical problem that existing exhaust mechanisms cannot purify organic gas, which easily leads to flammable and explosive risk when the concentration of organic gas reaches a certain critical value.
[0005] The utility model discloses a technical scheme that solves its technical problem is: a kind of for organic wet process equipment explosion-proof high efficiency exhaust mechanism, including groove edge cover and fan filter unit, the one end of fan filter group is provided with air inlet pipe, the air inlet pipe extends to the top of groove edge cover, the one end of air inlet pipe is provided with air inlet, the other end of fan filter group is provided with air outlet pipe, the air outlet pipe extends to the bottom of groove edge cover, the one end of air outlet pipe is provided with air outlet, when exhaust, fan filter group carries out air draft, makes organic gas from air inlet into air inlet pipe, carries out purification filtering to organic gas by fan filter group, removes organic substance in organic gas, and is discharged to air outlet by air outlet pipe.
[0006] Further, the bottom of the groove edge cover is provided with an air draft device for preventing organic gas vapor from accumulating at the bottom of the groove edge cover.
[0007] Further, the one end of the air inlet pipe is provided with an anemometer for detecting the wind speed of the organic gas.
[0008] Further, the fan filter group includes a fan, a fixed frame, and a filter plate for filtering the organic gas drawn by the fan. The fixed frame is arranged on the side of the fan by screws. The filter plate is arranged inside the fixed frame. The bottom of the fixed frame is provided with a cover plate by screws. The cover plate is provided with a plurality of wind baffles inclined downward. The wind baffles are equally spaced.
[0009] Further, the filter plate includes a chemical filter screen, a molecular sieve filter screen, and an activated carbon filter screen arranged in sequence. The activated carbon filter screen is a honeycomb filter screen.
[0010] Compared with the prior art, the utility model has the advantages that the utility model discloses a kind of for organic wet process equipment explosion-proof high efficiency exhaust mechanism, can effectively absorb the organic gas emitted and discharge quickly by fan filter group, realizes the effective extraction and purification filtering of organic gas, effectively removes harmful substances in organic gas, can avoid that organic gas forms accumulation inside groove edge cover, prevent organic gas from gathering to critical value and inflammable and explosive condition occurs. BRIEF DESCRIPTION OF DRAWINGS
[0011] Figure 1 It is the internal structure schematic diagram of the whole machine of the utility model for organic wet process equipment explosion-proof high efficiency exhaust mechanism.
[0012] Figure 2 It is the explosion drawing of the utility model for organic wet process equipment explosion-proof high efficiency exhaust mechanism.
[0013] Figure 3 It is the perspective view of the utility model for organic wet process equipment explosion-proof high efficiency exhaust mechanism.
[0014] Figure 4 Fig. 1 is a perspective view of a fan filter group of an explosion-proof high-efficiency air exhaust mechanism for an organic wet process equipment according to the present application;
[0015] Figure 5 Fig. 2 is a structural schematic view of a filter plate of the explosion-proof high-efficiency air exhaust mechanism for the organic wet process equipment according to the present application.
[0016] Reference signs in the drawings:
[0017] 1 - air inlet; 2 - air inlet pipe; 3 - groove side cover; 4 - air exhaust device; 5 - air outlet pipe; 6 - air outlet; 7 - air speed meter; 8 - fan filter group; 9 - fan; 10 - fixed frame; 11 - cover plate; 12 - wind shield; 13 - chemical filter screen; 14 - molecular sieve filter screen; 15 - activated carbon filter screen. DETAILED DESCRIPTION
[0018] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.
[0019] As Figures 1-5As shown, an efficient and explosion-proof air exhaust mechanism for an organic wet process device includes a tank edge cover 3 and a fan filter unit 8. One end of the fan filter unit 8 is provided with an air inlet pipe 2, which extends outwardly to the top end of the tank edge cover 3. One end of the air inlet pipe 2 is provided with an air inlet 1. The other end of the fan filter unit 8 is provided with an air outlet pipe 5, which extends outwardly to the bottom of the tank edge cover 3. One end of the air outlet pipe 5 is provided with an air outlet 6. When air is exhausted, the fan filter unit 8 performs air extraction, causing organic gas to enter the air inlet pipe 2 from the air inlet 1. The organic gas is purified and filtered by the fan filter unit 8, removing organic substances in the organic gas. The organic gas is discharged through the air outlet pipe 5 to the air outlet 6. The bottom of the tank edge cover 3 is provided with an air extraction device 4 for preventing the accumulation of organic gas vapor at the bottom of the tank edge cover 3. By providing the air extraction device 4 at the bottom of the tank edge cover 3, the accumulation of organic gas vapor at the bottom of the tank edge cover 3 is effectively prevented, which helps to maintain good air circulation inside the tank edge cover 3, further improves the air exhaust efficiency, and reduces potential safety hazards. One end of the air inlet pipe 2 is provided with an air speed meter 7 for detecting the speed of the organic gas. By providing the air speed meter 7 at one end of the air inlet pipe 2, real-time monitoring of the speed of the organic gas is achieved, which helps to timely understand and master the flow of the organic gas. The fan filter unit 8 includes a fan 9, a fixed frame 10, and a filter plate for filtering the organic gas extracted by the fan. The fixed frame 10 is provided on the side of the fan 9 by screws. The filter plate is provided inside the fixed frame 10. The bottom of the fixed frame 10 is provided with a cover plate 11 by screws. The cover plate 11 is provided with a plurality of downwardly inclined wind baffles 12. The wind baffles 12 are equally spaced and arranged. The filter plate includes a chemical filter screen 13, a molecular sieve filter screen 14, and an activated carbon filter screen 15 arranged in sequence. The activated carbon filter screen 15 is a honeycomb filter screen. The filter plate is arranged inside the fixed frame 10 for filtering the organic gas extracted by the fan 9. The wind baffles 12 on the cover plate 11 help to optimize the airflow path and improve the filtering efficiency. By arranging the chemical filter screen 13, the molecular sieve filter screen 14, and the activated carbon filter screen 15 in sequence, multiple filtering and purification of the organic gas are achieved. The activated carbon filter screen 15 adopts a honeycomb design, which improves its specific surface area and adsorption capacity, thereby more effectively removing harmful substances in the organic gas. Not only does it improve the filtering efficiency, but also through the comprehensive effect of the multiple filtering mechanism, it achieves deep purification treatment of the organic gas.
[0020] Wherein the speed of the organic gas is about 0.5 m / s. The tank edge cover 3 is connected to the plant exhaust and equipped with a differential pressure table for detection, effectively exhausting the cyclohexanone process tank vapor. The tank bottom air extraction device 4 cooperates with the plant exhaust to prevent cyclohexanone vapor from accumulating at the bottom of the tank.
[0021] The organic wet process equipment explosion-proof high-efficiency exhaust mechanism can effectively absorb the emitted organic gas and discharge the organic gas through the fan filter group 8, realizes effective extraction and purification and filtration of the organic gas, effectively removes harmful substances in the organic gas, can avoid accumulation of the organic gas in the tank edge cover 3, and prevents the organic gas from gathering to the critical value to cause flammable and explosive conditions.
[0022] It is obvious for those skilled in the art that the utility model is not limited to the details of the above-mentioned exemplary embodiments, and the utility model can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the utility model is defined by the appended claims instead of the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims should be included in the utility model, and any figure mark in the claims should not be regarded as limiting the involved claims.
Claims
1. A high efficiency exhaust mechanism for explosion-proof organic wet equipment, comprising a tank edge cover and a fan filter group, characterized in that: One end of the fan filter group is provided with an air inlet pipe which extends outwardly to the top end of the tank cover, and one end of the air inlet pipe is provided with an air inlet; the other end of the fan filter group is provided with an air outlet pipe which extends outwardly to the bottom of the tank cover, and one end of the air outlet pipe is provided with an air outlet; when the exhaust air, the fan filter group performs air suction, so that the organic gas enters the air inlet pipe from the air inlet, and the organic gas is purified and filtered by the fan filter group to remove the organic substances in the organic gas, and then the organic gas is discharged to the air outlet through the air outlet pipe.
2. The explosion-proof high-efficiency exhaust mechanism for organic wet equipment according to claim 1, characterized in that: The bottom of the tank cover is provided with an air suction device for preventing the organic gas vapor from gathering at the bottom of the tank cover.
3. The explosion-proof high-efficiency exhaust mechanism for organic wet equipment according to claim 1, characterized in that: One end of the air inlet pipe is provided with an anemometer for detecting the wind speed of the organic gas.
4. The explosion-proof high-efficiency exhaust mechanism for organic wet equipment according to any one of claims 1-3, characterized in that: The fan filter group comprises a fan, a fixed frame and a filter plate for filtering the organic gas sucked by the fan, the fixed frame is arranged on the side of the fan by screws, the filter plate is arranged in the fixed frame, the bottom of the fixed frame is provided with a cover plate by screws, the cover plate is provided with a plurality of wind baffles which are inclined downward, and the wind baffles are arranged at equal intervals.
5. The explosion-proof high-efficiency exhaust mechanism for organic wet equipment according to claim 4, characterized in that: The filter plate comprises a chemical filter screen, a molecular sieve filter screen and an activated carbon filter screen which are arranged in sequence, and the activated carbon filter screen is a honeycomb filter screen.