Efficient and stable photoresist pump system

Abstract

The utility model relates to the technical field of photoresist pump systems, in particular to an efficient and stable photoresist pump system which comprises a base and a containing groove, the containing groove is machined in the inner wall of the base, the upper end of the base is fixedly connected with an electric telescopic rod, and the outer wall of the electric telescopic rod is fixedly connected with a fixing ring. The outer wall of the fixing ring is fixedly connected with a connecting rod, a through groove is machined in the end of the connecting rod, and the output end of the electric telescopic rod is connected with a mounting mechanism. The output end of an electric telescopic rod shrinks to drive a mounting plate to move up and down, the mounting plate drives a disc on an exhaust steel pipe to move up and down on a rubber pad, after the storage space of the disc in the liquid tank is changed, the atmospheric pressure in the liquid tank is changed, and photoresist in a photoresist bottle is extracted by a photoresist inlet pipe and flows into the liquid tank; and the photoresist can be completely used after being externally injected into the photoresist tank, so that the waste of resources is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field technical field of photoresist glue pump system, concretely to a kind of efficient, stable photoresist glue pump system. BACKGROUND

[0002] In integrated circuit or discrete device chip manufacturing, the glue uniformization step is a crucial link. The glue pump is the core component of the glue device, which directly determines the stability of the glue uniformization process. Most of the glue uniformization abnormalities are directly or indirectly related to the glue pump. Currently, the glue pump used is mainly a diaphragm pump or a pressure tank type glue pump, which is generally old and has poor stability, and the frequency of related glue uniformization abnormalities is high.

[0003] For example, a simple, efficient, and stable photoresist glue pump system with the authorization announcement number "CN 219745374 U", although it solves the problem of the existing simple, efficient, and stable photoresist glue pump system, this type of pump has complex structure and is difficult to maintain, and the price of purchasing a new glue pump is high. The above-mentioned glue output time is controlled by a timer to ensure stable glue output. At the same time, the liquid tank pressure signal and liquid level signal are fed back to the PLC system, and the PLC system controls each electromagnetic valve to realize glue supplementing or glue outputting. The application has low cost, simple structure, and easy maintenance. The digital display pressure regulating valve controls the pressure stably, the digital display pressure gauge is installed on the pressure regulating valve to realize real-time monitoring of the pressure, an alarm signal is output when the fluctuation is large, the stability of the glue output state is ensured, the glue uniformization abnormality is effectively reduced, and the depth of the glue output pipe and the glue tank in the existing simple, efficient, and stable photoresist glue pump system is limited. The amount of injection into the pouring tank cannot be well controlled by the external glue bottle, the use of photoresist in the glue tank cannot be guaranteed, and resources are wasted. SUMMARY

[0004] The utility model aims at solving the problem of the existing simple, efficient, and stable photoresist glue pump system, the amount of injection into the pouring tank cannot be well controlled by the external glue bottle, the use of photoresist in the glue tank cannot be guaranteed, and resources are wasted, and proposes a kind of efficient, stable photoresist glue pump system.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: an efficient, stable photoresist glue pump system, comprising a base and a placing groove, the inner wall of the base is processed with a placing groove, the upper end of the base is fixedly connected with an electric telescopic rod, the outer wall of the electric telescopic rod is fixedly connected with a fixed ring, the outer wall of the fixed ring is fixedly connected with a connecting rod, the end of the connecting rod is processed with a through groove, and the output end of the electric telescopic rod is connected with a mounting mechanism.

[0006] Preferably, the mounting mechanism comprises a mounting plate, the lower end of the mounting plate is fixedly connected with the output end of the electric telescopic rod, the end of the mounting plate is fixedly connected with the exhaust steel pipe, the outer wall of the exhaust steel pipe is connected with the tee, and the outer wall of the tee is provided with a nitrogen pipe and a vacuum pipe.

[0007] Preferably, the outer wall of the vacuum pipe is provided with a vacuum valve, and the end of the exhaust steel pipe is connected with an adjusting structure.

[0008] Preferably, the adjusting structure comprises a disc, the inner wall of the disc is fixedly connected with the exhaust steel pipe, the inner wall of the disc is fixedly connected with a rubber pad, and the outer wall of the rubber pad is slidably connected with a liquid tank.

[0009] Preferably, the lower end of the liquid tank is movably connected with a placing groove, the left inner wall of the disc is fixedly connected with a glue inlet pipe, and the left inner wall of the disc is fixedly connected with a glue outlet pipe.

[0010] Preferably, the outer wall of the glue inlet pipe is movably connected with a connecting rod, the outer wall of the glue inlet pipe is provided with a glue empty detection sensor, and the outer wall of the glue outlet pipe is provided with a check valve.

[0011] Preferably, the outer wall of the nitrogen pipe is provided with a numerical control valve, and the outer wall of the glue inlet pipe is provided with a glue inlet valve.

[0012] Preferably, the inner wall of the through groove is movably connected with the glue inlet pipe.

[0013] The high-efficiency and stable photoresist glue pump system has the beneficial effects that the mounting plate is driven to move up and down by the contraction of the output end of the electric telescopic rod, the disc on the exhaust steel pipe is driven to move up and down by the rubber pad, the volume space of the disc in the liquid tank is changed, the atmospheric pressure in the liquid tank is changed, the photoresist in the glue bottle is drawn into the liquid tank by the glue inlet pipe, and the photoresist injected into the glue tank from outside can be fully used, so that the waste of resources is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a structural schematic view of the utility model;

[0015] Figure 2 It is Figure 1 It is a front view and a sectional view structure schematic diagram;

[0016] Figure 3 It is Figure 1 It is a top view and a sectional view structure schematic diagram;

[0017] Figure 4 It is Figure 2 It is an enlarged structure schematic diagram of A in the utility model;

[0018] Figure 5 It isFigure 2 Amplification structure schematic view in the middle B;

[0019] Figure 6 For Figure 1 Amplification structure schematic view in the middle connecting rod.

[0020] In the figure: 1, base, 2, placing groove, 3, electric telescopic rod, 4, fixed ring, 5, connecting rod, 6, through slot, 7, mounting mechanism, 701, mounting plate, 702, exhaust steel pipe, 703, tee piece, 704, nitrogen pipe, 705, vacuum pipe, 8, vacuum valve, 9, adjusting structure, 901, disc, 902, rubber pad, 903, liquid tank, 10, numerical control valve, 11, glue inlet pipe, 12, glue outlet pipe, 13, glue empty detection sensor, 14, check valve, 15, glue inlet valve. DETAILED DESCRIPTION

[0021] The utility model will be further described below in combination with the drawings:

[0022] Example 1:

[0023] Please refer to Figures 1-6 : in this embodiment, a kind of efficient, stable photoresist glue pump system, including base 1 and placing groove 2, the inner wall of base 1 is processed with placing groove 2, the upper end of base 1 is fixedly connected with electric telescopic rod 3, the outer wall of electric telescopic rod 3 is fixedly connected with fixed ring 4, the outer wall of fixed ring 4 is fixedly connected with connecting rod 5, the end of connecting rod 5 is processed with through slot 6, the output end of electric telescopic rod 3 is connected with mounting mechanism 7, the model of electric telescopic rod 3 is according to actual demand, just meet work.

[0024] Mounting mechanism 7 includes mounting plate 701, through the contact between the lower end of mounting plate 701 and exhaust steel pipe 702, nitrogen pipe 704 and vacuum pipe 705, the position of exhaust steel pipe 702, nitrogen pipe 704 and vacuum pipe 705 installed is more stable, the lower end of mounting plate 701 is fixedly connected with the output end of electric telescopic rod 3, the end of mounting plate 701 is fixedly connected with exhaust steel pipe 702, the outer wall of exhaust steel pipe 702 is connected with tee piece 703, the outer wall of tee piece 703 is provided with nitrogen pipe 704 and vacuum pipe 705.

[0025] The outer wall of vacuum pipe 705 is provided with vacuum valve 8, vacuum valve 8 is ZCA vacuum electromagnetic valve, the end of exhaust steel pipe 702 is connected with adjusting structure 9, adjusting structure 9 includes disc 901, by the change of height between disc 901 and liquid tank 903, the size of space between liquid tank 903 is adjusted, the inner wall of disc 901 is fixedly connected with exhaust steel pipe 702, the inner wall of disc 901 is fixedly connected with rubber pad 902, the outer wall of rubber pad 902 is slidably connected with liquid tank 903.

[0026] The output end of the electric telescopic rod 3 is retracted to drive the mounting plate 701 to move up and down, the mounting plate 701 drives the disc 901 on the exhaust steel pipe 702 to move up and down on the rubber pad 902, so that the storage space of the disc 901 in the liquid tank 903 is changed, the atmospheric pressure in the liquid tank 903 is changed, the glue pipe 11 draws the photoresist in the glue bottle into the liquid tank 903, and ensures that the photoresist injected into the glue tank 903 can be used completely, avoiding waste of resources.

[0027] The lower end of the liquid tank 903 is movably connected with the placing groove 2, the left inner wall of the disc 901 is fixedly connected with the glue inlet pipe 11, the left inner wall of the disc 901 is fixedly connected with the glue outlet pipe 12, the outer wall of the glue inlet pipe 11 is movably connected with the connecting rod 5, the outer wall of the glue inlet pipe 11 is provided with the glue empty detection sensor 13, the glue empty detection sensor 13 is a YF-S201 flow detection sensor, the outer wall of the glue outlet pipe 12 is provided with the check valve 14, the outer wall of the nitrogen pipe 704 is provided with the numerical control valve 10, the outer wall of the glue inlet pipe 11 is provided with the glue inlet valve 15, the glue inlet valve 15 is a stainless steel electromagnetic valve direct-acting type 304, and the inner wall of the through groove 6 is movably connected with the glue inlet pipe 11.

[0028] Working principle:

[0029] Preparation stage

[0030] The numerical pressure regulating valve 10 is arranged on the nitrogen pipe 704, the glue inlet valve 15 and the vacuum valve 8 are respectively connected with the PLC system signal, are used for monitoring the upper liquid level and the lower liquid level of the glue in the liquid tank and feeding back to the PLC system, and then the PLC system controls the glue inlet valve 15 to be opened or closed, the exhaust valve at the end of the exhaust steel pipe 702 to be opened or closed, and the vacuum valve 8 to be opened or closed. The vacuum valve 8 controls the vacuum pipe 705 to be switched on or off, so that the vacuum pipe 705 draws the air in the liquid tank 903 from the exhaust steel pipe 702, the atmospheric pressure in the liquid tank 903 is changed, the glue inlet pipe 11 draws the photoresist in the glue bottle into the liquid tank 903, and the glue empty detection sensor 13 detects the flow rate of the glue inlet pipe 11, so that the glue bottle at the end of the glue inlet pipe 11 can be replaced.

[0031] Working stage

[0032] After the pressure relief through the exhaust steel pipe 702 is completed and the external exhaust valve is closed, the vacuum valve 8 is opened to apply negative pressure to the liquid tank 903, and after a delay, the glue valve on the external glue bottle is opened. Since the liquid tank 903 is under negative pressure, the photoresist in the glue bottle is drawn into the liquid tank 903. At this time, according to the change in the depth of the photoresist in the liquid tank 903, the external power supply of the control switch electric telescopic rod 3 is controlled, and the electric telescopic rod 3 starts to work. The output end of the electric telescopic rod 3 is retracted to drive the mounting plate 701 to move up and down, and the mounting plate 701 drives the disc 901 on the exhaust steel pipe 702 to move up and down on the rubber pad 902, so that the storage space of the disc 901 inside the liquid tank 903 is changed, and the glue outlet pipe 12 on the disc 901 can also be controlled in real time to contact the photoresist inside the liquid tank 903. The glue inlet valve 15 on the glue outlet pipe 12 is closed, and the valve between the nitrogen pipe 704 and the outside is opened. When the liquid tank 903 is pressurized to the set pressure of the digital pressure gauge on the digital precise pressure regulating valve 10, the glue pump home signal of the glue pump system is turned on, and the glue pump system is in a ready state, waiting for the glue dispensing instruction from the glue dispensing equipment.

[0033] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A high-efficiency and stable photoresist pump system, comprising a base (1) and a placement groove (2), wherein the inner wall of the base (1) is machined with the placement groove (2), characterized in that: The upper end of the base (1) is fixedly connected to the electric telescopic rod (3), the outer wall of the electric telescopic rod (3) is fixedly connected to the fixing ring (4), the outer wall of the fixing ring (4) is fixedly connected to the connecting rod (5), the end of the connecting rod (5) is machined with a through groove (6), and the output end of the electric telescopic rod (3) is connected to the installation mechanism (7).

2. The high-efficiency and stable photoresist pump system according to claim 1, characterized in that: The installation mechanism (7) includes an installation plate (701), the lower end of which is fixedly connected to the output end of the electric telescopic rod (3), the end of which is fixedly connected to the exhaust steel pipe (702), the outer wall of which is connected to the tee fitting (703), and the outer wall of which is equipped with a nitrogen pipe (704) and a vacuum pipe (705).

3. The high-efficiency and stable photoresist pump system according to claim 2, characterized in that: A vacuum valve (8) is installed on the outer wall of the vacuum tube (705), and an adjustment structure (9) is connected to the end of the exhaust steel pipe (702).

4. The high-efficiency and stable photoresist pump system according to claim 3, characterized in that: The adjustment structure (9) includes a disc (901), the inner wall of which is fixedly connected to the exhaust steel pipe (702), the inner wall of which is fixedly connected to the rubber pad (902), and the outer wall of which is slidably connected to the liquid tank (903).

5. The high-efficiency and stable photoresist pump system according to claim 4, characterized in that: The lower end of the liquid tank (903) is movably connected to the placement groove (2), the left inner wall of the disc (901) is fixedly connected to the glue inlet pipe (11), and the left inner wall of the disc (901) is fixedly connected to the glue outlet pipe (12).

6. The high-efficiency and stable photoresist pump system according to claim 5, characterized in that: The outer wall of the glue inlet pipe (11) is movably connected to the connecting rod (5). A glue void detection sensor (13) is installed on the outer wall of the glue inlet pipe (11), and a check valve (14) is installed on the outer wall of the glue outlet pipe (12).

7. The high-efficiency and stable photoresist pump system according to claim 6, characterized in that: A numerical control valve (10) is installed on the outer wall of the nitrogen pipe (704), and a glue inlet valve (15) is installed on the outer wall of the glue inlet pipe (11).

8. The high-efficiency and stable photoresist pump system according to claim 1, characterized in that: The inner wall of the through groove (6) is movably connected to the glue inlet pipe (11).

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