Auxiliary cutting jig for photomask

Abstract

The utility model discloses an auxiliary cutting jig for a photomask, and belongs to the technical field of photoetching. Comprising a vacuumizing platform which is horizontally mounted on a workbench in a sliding manner; the supporting box is fixed to the workbench. A first sliding rail assembly and a second sliding rail assembly which are horizontally arranged are fixed to one side of the supporting box. The cutting knife assembly is installed on the first sliding rail assembly in a sliding mode. A cutting tool bit of the cutting tool assembly is vertically arranged downwards; the first CCD camera and the second CCD camera are respectively installed on the second sliding rail in a sliding mode, and a lens is vertically arranged downwards. According to the utility model, the first CCD camera and the second CCD camera are arranged, so that the alignment precision of cutting is improved; the cutting knife assembly stably slides through the sliding rail assembly, and the straightness and precision of cutting are improved; the cutting depth of the cutting tool bit is controlled by the electric cylinder, accurate adjustment can be conducted according to the thicknesses and material characteristics of different photomasks, the problem that the photomasks are damaged or cut incompletely due to the improper cutting depth is solved, and the cutting efficiency and quality of the photomasks are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of photoetching technology, specifically relates to a photomask auxiliary cutting fixture. BACKGROUND

[0002] In the photomask manufacturing industry, because the exposure machine model used by customers is various, the manufacturing plant often has difficulty in preparing all specifications of photomask. In order to meet the needs of customers, the manufacturing plant needs to cut part of the irregular size photomask. However, the traditional photomask cutting method mainly uses simple glass knife and ruler, and relies on manual operation to cut along the cutting line. This method has many drawbacks, such as low cutting precision, uneven control of cutting force, difficulty in achieving crack, and low cutting efficiency. These problems not only affect the cutting quality of photomask, but also limit the production capacity and market competitiveness of the manufacturing plant. SUMMARY

[0003] The utility model aims at providing a photomask auxiliary cutting fixture, which improves the photomask cutting method and improves the precision and efficiency of photomask cutting.

[0004] The utility model adopts the following technical scheme: a photomask auxiliary cutting fixture, comprising a workbench,

[0005] Further comprising:

[0006] A vacuum extraction platform is horizontally slidably installed on the workbench and used for placing the photomask to be cut;

[0007] A support box is fixed on the workbench, and a first slide rail assembly and a second slide rail assembly are fixed on one side of the support box close to the vacuum extraction platform and arranged horizontally, and the first slide rail assembly and the second slide rail assembly are parallel to each other;

[0008] A cutting knife assembly is slidably installed on the first slide rail assembly, and a cutting knife head of the cutting knife assembly is arranged vertically downward;

[0009] A first CCD camera and a second CCD camera are slidably installed on the second slide rail assembly, and lenses of the first CCD camera and the second CCD camera are arranged vertically downward.

[0010] Preferably, a pair of sliding grooves are formed in the workbench, the sliding grooves are perpendicular to the first slide rail assembly, and the vacuum extraction platform is slidably installed on the sliding grooves.

[0011] Preferably, the sliding grooves extend to the side of the support box close to the vacuum extraction platform.

[0012] Preferably, the first slide rail assembly comprises a sliding plate fixed on the side surface of the support box, and a guide groove is formed in the sliding plate and extends through the sliding plate in the vertical direction of the sliding plate.

[0013] The cutting knife assembly comprises a sliding block arranged on the sliding plate, the lower end of the sliding block being slidingly installed in the guide channel; and the cutting knife head is fixed to the lower end of the sliding block and penetrates downward through the guide channel.

[0014] Preferably, an electric cylinder is installed in the sliding block, and the cutting knife head is fixed to the output end of the electric cylinder, and the electric cylinder is used to drive the cutting knife head to move vertically.

[0015] Preferably, the second sliding rail assembly comprises a sliding rod parallel to the sliding plate, both ends of the sliding rod being fixed to the support box through a support; and the first CCD camera and the second CCD camera are slidingly installed on the sliding rod.

[0016] Preferably, the sliding rod is arranged directly above the guide channel, and the centers of the lenses of the first CCD camera and the second CCD camera are opposite to the guide channel vertically.

[0017] The utility model discloses the beneficial effects are:

[0018] The first CCD camera and the second CCD camera are arranged, the cutting line of the cutting mask to be cut is accurately positioned through machine vision technology, compared with the traditional manual use of ruler and naked eye alignment, the alignment precision of cutting is greatly improved; the cutting knife assembly realizes smooth sliding through the sliding rail assembly, reduces the shaking and error caused by manual operation, and further improves the straightness and precision of cutting; the cutting depth of the cutting knife head is controlled by the electric cylinder, the cutting depth can be accurately adjusted according to the thickness and material characteristics of different masks, and the problems of mask damage or incomplete cutting caused by improper cutting depth are avoided.

[0019] The utility model improves the cutting precision and efficiency of the mask, optimizes the cutting quality, can produce the mask product more in line with the requirement of customer, thereby enhancing the market competitiveness of product, and bringing greater economic benefits for enterprise. DRAWINGS

[0020] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without paying creative labor.

[0021] Figure 1 A perspective view of a mask auxiliary cutting jig is provided for the embodiments of the utility model.

[0022] Figure 2 A front view of a mask auxiliary cutting jig is provided for the embodiments of the utility model.

[0023] Figure 3 A plan view of the photomask auxiliary cutting jig provided by the utility model embodiment.

[0024] Figure 4 A right view of the photomask auxiliary cutting jig provided by the utility model embodiment.

[0025] Mark explanation:

[0026] 1, workbench; 11, sliding groove;

[0027] 2, vacuumizing platform;

[0028] 3, support box; 31, first slide rail assembly; 311, sliding plate; 312, guide through slot; 32, second slide rail assembly; 321, slide rod; 322, support;

[0029] 4, cutting knife assembly; 41, cutting knife head; 42, sliding block;

[0030] 5, first CCD camera;

[0031] 6, second CCD camera. Specific implementation

[0032] The technical scheme in the utility model embodiments will be described clearly and completely below with reference to the drawings in the utility model embodiments. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0033] Embodiment one:

[0034] As shown in Figures 1 to 4 The utility model provides a photomask auxiliary cutting jig, including workbench 1, a pair of sliding grooves 11 are set up on workbench 1. Support box 3 is fixed on workbench 1, and is arranged in one end of sliding groove 11. Vacuumizing platform 2 is slidably installed on sliding groove 11, and is used for placing the photomask to be cut, after the photomask to be cut is placed on vacuumizing platform 2, the adsorption positioning of the photomask to be cut is realized by vacuumizing, vacuumizing platform 2 can be close to or away from support box 3 along sliding groove 11, and the spacing adjustment of the photomask to be cut and support box 3 is realized.

[0035] The side close to vacuumizing platform 2 of support box 3 is fixed with horizontal first slide rail assembly 31 and second slide rail assembly 32, and second slide rail assembly 32 is located above first slide rail assembly 31.

[0036] The first slide rail assembly 31 comprises a horizontal slide plate 311 welded on the side of the support box 3. The slide plate 311 is provided with a guide groove 312 extending through the slide plate 311 in the vertical direction of the slide plate 311 and perpendicular to the slide groove 11;

[0037] The cutting knife assembly 4 comprises a sliding block 42 slidingly installed on the slide plate 311, and the lower end of the sliding block 42 is slidingly installed in the guide groove 312. The cutting knife head 41 is fixed to the lower end of the sliding block 42, and is vertically arranged downward and penetrates downward through the guide groove 312;

[0038] The first and second CCD cameras 5 and 6 are installed at the two ends of the first slide rail assembly 31, and the lenses of the first and second CCD cameras 5 and 6 are vertically arranged downward for positioning the cutting mask placed on the vacuumizing platform 2.

[0039] Embodiment II:

[0040] On the basis of the above-mentioned embodiment I, in combination with Figures 1 to 4 As shown in the figure, in this embodiment, an electric cylinder is installed in the sliding block 42 and vertically arranged, and the cutting knife head 41 is fixed to the output end of the electric cylinder. The electric cylinder can drive the cutting knife head 41 to move vertically, so as to adjust the cutting depth of the cutting knife head 41 to the cutting mask.

[0041] Embodiment III:

[0042] On the basis of the above-mentioned embodiment I or II, in combination with Figures 1 to 4 As shown in the figure, in this embodiment, the second slide rail assembly 32 comprises a slide rod 321 parallel to the slide plate 311, and the slide rod 321 is located directly above the guide groove 312. The slide rod 321 is fixed with a support 322 at the two ends, and the support 322 is welded on the side of the support box 3. The first and second CCD cameras 5 and 6 are slidingly installed on the slide rod 321, and the centers of the lenses of the first and second CCD cameras 5 and 6 are opposite to the guide groove 312.

[0043] Working process:

[0044] Clean the table of the vacuumizing platform 2 and place the cutting mask, and move the vacuumizing platform 2 to the appropriate position; use the first CCD camera 5 to confirm the first position cutting line of the cutting mask, and finely adjust the cutting line to the center position of the screen cross; use the second CCD camera 6 to confirm the second position cutting line of the cutting mask, and finely adjust the cutting line to the center position of the screen cross; turn on the vacuumizing platform 2, so that the cutting mask is tightly adsorbed on the vacuumizing platform 2; adjust the cutting knife head 41 to the appropriate position (cutting depth), and move the cutting knife assembly 4 along the cutting line to cut the corresponding length, until the cutting is completed.

[0045] The mask auxiliary cutting jig disclosed by the embodiment improves the cutting mode of the mask, changes from manual cutting to semi-automatic cutting, changes from manual naked eye distinguishing to machine vision grabbing in cutting alignment precision, and further improves the shape size precision and cutting qualification rate of the mask cutting, and increases product competitiveness.

[0046] Obviously, those skilled in the art can make various modifications and variations to the utility model without departing from the spirit and scope of the utility model. Thus, if these modifications and variations of the utility model belong to the scope of the utility model claims and their equivalent technologies, the utility model also intends to include these modifications and variations.

Claims

1. A mask auxiliary cutting jig, comprising a workbench (1), characterized in that Further comprising: a vacuumizing platform (2) horizontally slidingly installed on the workbench (1) for placing a mask to be cut; a support box (3) fixed on the workbench (1); the support box (3) is fixed with a first sliding rail assembly (31) and a second sliding rail assembly (32) arranged horizontally on one side close to the vacuumizing platform (2), and the first sliding rail assembly (31) and the second sliding rail assembly (32) are parallel to each other; a cutting knife assembly (4) slidingly installed on the first sliding rail assembly (31); a cutting knife head (41) of the cutting knife assembly (4) is arranged vertically downward; a first CCD camera (5) and a second CCD camera (6) slidingly installed on the second sliding rail assembly (32) respectively; lenses of the first CCD camera (5) and the second CCD camera (6) are arranged vertically downward.

2. The reticle assist cutting jig of claim 1, wherein: A pair of sliding grooves (11) are formed on the workbench (1), and the sliding grooves (11) are perpendicular to the first sliding rail assembly (31); the vacuumizing platform (2) is slidingly installed on the sliding grooves (11).

3. The reticle assist cutting fixture of claim 2, wherein: The sliding grooves (11) extend to one side of the support box (3) close to the vacuumizing platform (2).

4. The reticle assist cutting fixture of claim 1, wherein: The first sliding rail assembly (31) comprises a sliding plate (311) fixed on a side of the support box (3), and a guide through slot (312) extending through the sliding plate (311) in a vertical direction of the sliding plate (311) is formed on the sliding plate (311); The cutting knife assembly (4) comprises a sliding block (42) arranged on the sliding plate (311), and a lower end of the sliding block (42) is slidingly installed in the guide through slot (312); the cutting knife head (41) is fixed on the lower end of the sliding block (42) and passes downward through the guide through slot (312).

5. The reticle assist cutting fixture of claim 4, wherein: An electric cylinder is installed in the sliding block (42), and the cutting knife head (41) is fixed on an output end of the electric cylinder, and the electric cylinder is used to drive the cutting knife head (41) to move vertically.

6. The reticle assist cutting fixture of claim 4, wherein: The second sliding rail assembly (32) comprises a sliding rod (321) parallel to the sliding plate (311), and both ends of the sliding rod (321) are fixed on the support box (3) through supports (322); the first CCD camera (5) and the second CCD camera (6) are slidingly installed on the sliding rod (321).

7. The reticle assist cutting fixture of claim 6, wherein: The sliding rod (321) is arranged directly above the guide through slot (312), and centers of the lenses of the first CCD camera (5) and the second CCD camera (6) are opposite to the guide through slot (312) vertically.

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