Conveying device, material carrying system and in-place detection assembly
By using a positioning detection component consisting of a self-balancing swing arm and rollers, combined with a conveyor belt with adjustable gaps, the problem of inaccurate wafer cell placement in existing technologies has been solved, achieving both safety and accuracy in conveying.
Patent Information
- Application Number
- CN202423280221.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-12-30
AI Technical Summary
In existing technologies, when using through-beam sensors or specular reflection sensors to detect whether a wafer cassette has fallen onto the conveying device, it is impossible to determine accurately, which increases the risk of conveying.
The positioning detection component consists of a self-balancing rocker and rollers. The rollers rotate under pressure to trigger the detection sensor. The signal is only triggered when the wafer cassette falls completely onto the conveyor assembly. This is combined with two conveyor belts with gaps for dual-sided detection.
The wafer cassette is only transported when both sides are stably positioned on the conveyor belt, which improves the safety and accuracy of the transport. The self-balancing swing arm can automatically reset, and the structure is simple and easy to install and debug.
Smart Images

Figure CN223591619U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of carrying equipment, especially conveying device, material handling system and in place detection assembly. BACKGROUND
[0002] In the wafer box conveying process, the wafer box is placed on the conveying device from the top by the crown block, and then the wafer box is conveyed by the conveying device.
[0003] Generally, a pair of sensors or a mirror surface reflection sensor is arranged on the side of the conveying device to detect whether there is a wafer box on the conveying device, as shown in the patent document with the authorization announcement number CN215285441U.
[0004] This detection method cannot accurately determine whether the wafer box falls into the conveying device as required, which increases the conveying risk. INVENTION CONTENTS
[0005] The utility model aims at solving the above problems in the prior art and provides a conveying device, a material handling system and an in place detection assembly.
[0006] The utility model achieves the purpose by the following technical scheme:
[0007] The conveying device comprises a rack and a conveying assembly arranged on the rack, and an in place detection assembly is further arranged on the rack, the in place detection assembly comprises a self-balancing swing rod which can rotate around a horizontal shaft perpendicular to the conveying direction of the conveying assembly and a roller arranged on the self-balancing swing rod and having an axis parallel to the horizontal shaft, the self-balancing swing rod makes the roller locally protrude from the conveying surface of the conveying assembly when in the balanced position, when the roller is subjected to pressure, the self-balancing swing rod rotates around the horizontal shaft to make the top of the roller not higher than the conveying surface, and the in place detection assembly further comprises a detection sensor for detecting the position change of the self-balancing swing rod.
[0008] Preferably, the conveying assembly comprises at least two conveying belts arranged at intervals, and the in place detection assembly comprises two and is arranged close to a conveying belt.
[0009] Preferably, the self-balancing swing rod comprises a main rod, and when in the balanced position, the main rod is arranged at an acute angle with the horizontal input direction of the conveying assembly.
[0010] Preferably, the middle part of the self-balancing swing rod is connected to the horizontal shaft, the horizontal shaft is connected to the mounting seat in a self-rotating manner, the upper end of the self-balancing swing rod is connected to the roller, and the part of the self-balancing swing rod below the horizontal shaft is provided with a counterweight for keeping the self-balancing swing rod in a normal state.
[0011] Preferably, the mounting base comprises a first part and a second part, the second part being arranged on the first part and being adjustable in axial direction of the horizontal axis relative to the first part.
[0012] Preferably, the first part is arranged on a rack and is adjustable in height.
[0013] Preferably, the mounting base is provided with a limiting member for limiting the self-balancing swing lever in the balanced position.
[0014] Preferably, the limiting member and the self-balancing swing lever are in contact at positions of mutually matching arc surfaces.
[0015] Preferably, the detection sensor can detect the self-balancing swing lever when the top of the roller is not higher than the conveying surface.
[0016] The material conveying system comprises the conveying device as any one of the above.
[0017] The in-place detection assembly comprises a self-balancing swing lever rotatable about a horizontal axis perpendicular to the conveying direction of the conveying assembly and a roller arranged on the self-balancing swing lever and having an axis parallel to the horizontal axis, the self-balancing swing lever locally protrudes the conveying surface of the conveying assembly when in the balanced position, the self-balancing swing lever is rotatable about the horizontal axis to make the top of the roller not higher than the conveying surface when the roller is subjected to pressure, and the in-place detection assembly further comprises a detection sensor for detecting the position change of the self-balancing swing lever.
[0018] The technical scheme of the utility model has the following advantages:
[0019] The in-place detection assembly of the utility model is triggered only when the wafer box completely falls on the conveying assembly, which can effectively ensure the accuracy of the conveying trigger signal and improve the safety of conveying.
[0020] The conveying assembly of the utility model adopts two conveying belts arranged with gaps to convey and is provided with two in-place detection assemblies respectively close to the conveying belts, which can effectively ensure that the wafer box is stably conveyed on the conveying belts on both sides and is conducive to further improving the safety of conveying.
[0021] The in-place detection assembly of the utility model adopts a self-balancing swing lever, which can be automatically reset after being triggered, has a simple structure, is convenient to install and debug, and has strong usability.
[0022] The main lever of the in-place detection assembly of the utility model keeps an inclined state in normal state, thereby effectively avoiding interference with conveying when the wafer box is horizontally conveyed on the conveying assembly. BRIEF DESCRIPTION OF DRAWINGS
[0023] Figure 1 is a top view of the conveying device of the utility model
[0024] Figure 2 is a sectional view of the conveying device of the utility model
[0025] Figure 3 is an enlarged view of the in-place detection assembly area of the utility model. DETAILED DESCRIPTION
[0026] The purpose, advantages and characteristics of the utility model will be illustrated and explained by the non-restrictive description of the preferred embodiments. These embodiments are only typical examples of applying the technical scheme of the utility model, and any technical scheme formed by equivalent replacement or equivalent transformation falls within the scope of the utility model.
[0027] In the description of the scheme, it should be noted that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.
[0028] Embodiment 1
[0029] The conveying device disclosed by the utility model will be described below in combination with the drawings, such as the drawings Figure 1 , the drawings Figure 2 , which comprises a rack 100 and a conveying assembly 200 arranged on the rack 100, the conveying assembly 200 can be a roller conveying assembly 200, that is, it comprises a group of parallel and gap arranged rollers, one of the rollers is connected to drive motor to drive its rotation, at the same time, the end of the adjacent roller is connected through the transmission structure composed of chain wheel and chain or the transmission structure composed of pulley and synchronous belt, so that a plurality of the rollers can rotate simultaneously for conveying. At this time, the roller 330 is located at the gap between the two adjacent rollers.
[0030] As shown in the drawings Figure 1 , the drawings Figure 2As shown, the conveying assembly 200 comprises at least two gap-arranged conveying belts 220, the two conveying belts 220 are sleeved on a pair of driving rollers 230 and driven rollers 240 respectively, the two driving rollers 230 are arranged on the same rotating shaft 250, the rotating shaft 250 is connected with a driving motor 260 which drives the rotation of the rotating shaft 250, or the two driving rollers 230 are electric rollers respectively, the in-place detection assembly 300 is two and is arranged close to one conveying belt 220 respectively. Meanwhile, the frame is further provided with a plurality of supporting rollers 270 which support the upper layer of the conveying belt 220 and a plurality of tensioning rollers 280 which tension and adjust the conveying belt.
[0031] As shown in the accompanying drawings, the frame 100 is provided with a conveying assembly 200 and an in-place detection assembly 300. Figure 1 -As shown in the accompanying drawings, the frame 100 is provided with a conveying assembly 200 and an in-place detection assembly 300. Figure 3 As shown, the frame 100 is further provided with the in-place detection assembly 300, the in-place detection assembly is arranged at the middle position of the length direction of the conveying assembly, the in-place detection assembly 300 comprises a self-balancing swing rod 320 which can rotate around a horizontal shaft 310 which is perpendicular to the conveying direction of the conveying assembly 200 and a roller 330 which is arranged on the self-balancing swing rod 320 and whose axis is parallel to the horizontal shaft 310, when the self-balancing swing rod 320 is in the balanced position, the roller 330 partially protrudes from the conveying surface 210 of the conveying assembly 200, when the roller 330 is pressed, the self-balancing swing rod 320 rotates around the horizontal shaft 310 so that the top of the roller 330 is not higher than the conveying surface 210, the in-place detection assembly 300 further comprises a detection sensor 340 which detects the position change of the self-balancing swing rod 320.
[0032] As shown in the accompanying drawings, the frame 100 is provided with a conveying assembly 200 and an in-place detection assembly 300. Figure 3As shown, the in-place detection assembly 300 comprises a mounting seat 350, which comprises a first part 351 and a second part 352, the first part 351 is adjustably mounted on the rack 100 in height; the second part 352 is adjustably arranged on the first part 351 along the axial direction of the horizontal shaft 310 relative to the first part 351. Specifically, the side plate 110 of the rack 100 of the conveying device is provided with a waist-shaped hole extending in the height direction, the first part 351 is provided with a screw hole towards the side surface of the side plate 110, and the first part 351 is fixed with the side plate 110 by a bolt threaded in the waist-shaped hole and connected to the screw hole of the first part 351. Moreover, a support bolt can be arranged below the first part and supported at the bottom thereof, and the support bolt is threaded on a fixed plate on the side plate. At the same time, the top surface of the first part 351 is provided with a guide groove, the second part 352 is movably arranged in the guide groove, and the guide groove is provided with a strip-shaped hole extending along the axial direction of the horizontal shaft 310, the bottom surface of the second part 352 is provided with a screw hole, and the second part 352 is fixed with the first part 351 by a bolt threaded in the strip-shaped hole from the bottom and screwed into the screw hole of the second part 352.
[0033] As shown in the accompanying drawings, Figure 3 As shown, the second part 352 of the mounting seat 350 is rotatably connected with the horizontal shaft 310 through a bearing, the horizontal shaft 310 is fixedly connected with the self-balancing swing rod 320, and the horizontal shaft 310 is connected at the middle position of the self-balancing swing rod 320, and the self-balancing swing rod is connected at the outer end of the horizontal shaft, and the two are screwed and fixed.
[0034] The shape of the self-balancing swing rod 320 can be designed as needed, and preferably, as shown in the accompanying drawings, Figure 3 As shown, the self-balancing swing rod 320 is approximately L-shaped as a whole, which comprises a main rod 321, when the self-balancing swing rod 320 is in the balanced position, the main rod 321 is obliquely arranged, and the lower end of the main rod 321 is closer to the input and output end of the conveying assembly 200 relative to the higher end, the input and output end is the end of the wafer box 400 entering and exiting the conveying assembly 200, and the extension direction of the main rod forms an acute angle with the horizontal input direction of the conveying assembly, which can effectively reduce the impact vibration when the wafer box is horizontally conveyed to the conveying assembly, and avoid the problem that the wafer box is stuck by the in-place detection assembly.
[0035] The upper end of the main rod 321 is rotatably connected with the roller 330, and the part of the self-balancing swing rod 320 below the horizontal shaft 310 is provided with a counterweight 360 for keeping the self-balancing swing rod 320 in normal state, and the counterweight 360 is particularly connected at the shorter auxiliary rod 322 of the self-balancing swing rod 320, and the counterweight 360 can be fixed at the auxiliary rod 322 by screwing.
[0036] As shown in the accompanying drawings, the mounting seat 350 is provided with a limiting piece 370 for limiting the self-balancing swing rod 320 in the balanced position, and the limiting piece 370 can be a bolt connected at the second part 352, and the side surface of the main rod 321 and the auxiliary rod 323 facing the limiting piece 370 is arc-shaped, so that the position where the limiting piece 370 and the self-balancing rod contact is arc-shaped and matched with each other. Figure 3 The detection sensor 340 can be a known proximity switch, an opposite sensor, etc., and preferably is a known groove sensor. When the self-balancing swing rod 320 is in the balanced position, the detection sensor 340 can detect the self-balancing swing rod 320, and when the self-balancing swing rod 320 rotates to the position where the roller 330 moves below the conveying surface 210, the detection sensor 340 cannot detect the self-balancing swing rod 320. Preferably, in order to ensure the reliability of triggering, the detection sensor 340 cannot detect the self-balancing swing rod 320 when the self-balancing swing rod 320 is in the balanced position, and the detection sensor 340 can detect the self-balancing swing rod when the roller 330 moves below the conveying surface 210.
[0037] When the wafer box 400 is vertically placed downward on the conveying device, the bottom surface of the wafer box 400 will press the top of the two rollers 330, so that the self-balancing swing rod 320 rotates to make the top of the roller 330 just flush with the conveying surface 210 of the conveying belt 220, and at this time the self-balancing swing rod 320 triggers the detection sensor 340, indicating that the wafer box 400 is placed in position. Since the two sides of the bottom surface of the wafer box 400 are detected, only when the two sides of the wafer box 400 are placed in position can the conveying triggering signal be generated, effectively ensuring the safety of the conveying control. After the wafer box 400 is placed in position, the conveying device starts to horizontally transmit the wafer box 400, and since the rollers 330 contact the bottom of the wafer box 400, the horizontal transmission of the wafer box 400 will not interfere with the horizontal transmission of the wafer box 400. When the wafer box 400 is transmitted back to the conveying device in the reverse direction, since the angle between the swing rod mechanism and the bottom of the wafer box 400 is acute, the wafer box 400 transmitted back in the reverse direction will not produce obvious impact vibration with the in-position detection assembly 300.
[0038]
[0039] Although in the above embodiments, the in-place detection assembly 300 is used in the conveying device for detecting the components of the goods, in other embodiments, the in-place detection assembly 300 can also be used in other scenarios where it is necessary to detect whether an article is in place, for example, for determining whether an article is placed on a loading platform.
[0040] Embodiment 2
[0041] The present embodiment discloses a material conveying system comprising a conveying device as described in any of the above.
[0042] The present utility model still has various implementation manners, all technical schemes formed by using equivalent transformation or equivalent transformation fall within the protection scope of the present utility model.
Claims
1. A conveying device, comprising a frame and conveying components mounted on the frame, characterized in that: The frame is also equipped with a positioning detection component, which includes a self-balancing rocker arm that can rotate about a horizontal axis perpendicular to the conveying direction of the conveying component and a roller mounted on the self-balancing rocker arm with its axis parallel to the horizontal axis. When the self-balancing rocker arm is in the balanced position, the roller partially protrudes from the conveying surface of the conveying component. When the roller is subjected to pressure, the self-balancing rocker arm rotates about the horizontal axis so that the top of the roller is not higher than the conveying surface. The positioning detection component also includes a detection sensor for detecting changes in the position of the self-balancing rocker arm.
2. The conveying device according to claim 1, characterized in that: The conveying assembly includes at least two conveyor belts spaced apart, and the positioning detection assembly consists of two components, each located close to one of the conveyor belts.
3. The conveying device according to claim 1, characterized in that: The self-balancing pendulum includes a main rod. When the self-balancing pendulum is in the balanced position, the main rod is tilted and forms an acute angle with the horizontal input direction of the conveying assembly.
4. The conveying device according to claim 1, characterized in that: The middle part of the self-balancing pendulum is connected to the horizontal axis, and the horizontal axis is rotatably connected to the mounting base. The upper end of the self-balancing pendulum is connected to the roller, and the portion of the self-balancing pendulum located below the horizontal axis is provided with a counterweight to keep the self-balancing pendulum in a normal state.
5. The conveying device according to claim 4, characterized in that: The mounting base includes a first part and a second part, wherein the first part is mounted on the frame with an adjustable mounting height and / or the second part is mounted on the first part with an axially adjustable position relative to the first part along the horizontal axis.
6. The conveying device according to claim 4, characterized in that: The mounting base is provided with a limiting member that restricts the self-balancing pendulum to a balanced position.
7. The conveying device according to claim 6, characterized in that: The contact positions of the limiting component and the self-balancing swing rod are mutually matched arc surfaces.
8. The conveying device according to any one of claims 1-7, characterized in that: The detection sensor can detect the self-balancing rocker arm when the top of the roller is not higher than the conveying surface.
9. A material handling system, characterized in that: Includes the conveying device as described in any one of claims 1-8.
10. A positioning detection component, characterized in that: The device includes a self-balancing rocker arm that can rotate about a horizontal axis perpendicular to the conveying direction of the conveying assembly, and a roller disposed on the self-balancing rocker arm with its axis parallel to the horizontal axis. When the self-balancing rocker arm is in the balanced position, the roller partially protrudes from the conveying surface of the conveying assembly. When the roller is subjected to pressure, the self-balancing rocker arm can rotate about the horizontal axis so that the top of the roller is not higher than the conveying surface. The positioning detection assembly also includes a detection sensor for detecting changes in the position of the self-balancing rocker arm.
Citation Information
Patent Citations
Belt line aligning device and thermal shrinkage film packaging equipment
CN215285441U