Cathode gun sputtering device

Abstract

A cathode gun sputtering device belongs to the technical field of material surface treatment equipment and comprises a movable base, a liquid storage tank is fixedly mounted on the upper surface of the movable base, a clear water tank and an electrolyte tank are arranged in the liquid storage tank, mounting space is reserved between the liquid storage tank and the upper surface of the movable base, and a mounting groove is formed in the upper surface of the movable base in a penetrating manner. A carrier plate with the position capable of being adjusted in a sliding mode is installed in the installation groove, a circulating pump is fixedly installed on the upper surface of the carrier plate, the liquid inlet end of the circulating pump is connected with a liquid inlet pipe, the liquid discharging end of the circulating pump is connected with a liquid discharging pipe, and the liquid discharging end of the liquid discharging pipe is fixedly connected with a cathode gun body; according to the cathode gun moving device, the overall moving convenience of the device can be remarkably improved, the complexity of cooperative moving of all the components is effectively reduced, the adaptability and flexibility of the device to different application environments are further enhanced, and the cathode gun moving device can better meet diversified working condition requirements.

Description

TECHNICAL FIELD

[0001] The utility model belongs to material surface treatment equipment technical field, concretely relates to a cathode gun sputtering device. BACKGROUND

[0002] In the industrial category of material surface treatment and film preparation, the cathode gun sputtering technology has a key role, and its traditional sputtering device basic framework covers gun body, liquid guide pipe, circulating pump and liquid tank. However, in view of the continuous rise of the requirements of modern industrial production to equipment mobility, efficiency and convenience, the traditional structure exposes a series of significant problems, which seriously hinders its popularization and development in diversified scenes.

[0003] The combination form of the traditional cathode gun sputtering device is relatively solidified, and lacks an integrated efficient mobile design scheme. When the device needs to be adjusted in position according to different production process layout, or in the operation scene of equipment maintenance, site migration, etc., its mobile operation is extremely difficult. The gun body, due to its mass and volume characteristics, and the complex connection structure of the liquid guide pipe, circulating pump and liquid tank, needs to synchronize the spatial position and running state of multiple components in the moving process, which undoubtedly increases the operation difficulty and labor load of the operator, causing the equipment to be repositioned and layout adjusted for a long time and low efficiency, which is difficult to quickly adapt to the changing operation environment requirements in modern industrial production, and thus seriously limits its application flexibility and adaptability in industrial practice. Therefore, another cathode gun sputtering device is provided to solve the above technical problems. UTILITY MODEL CONTENTS

[0004] In view of the cathode gun sputtering device in the prior art, the mobile operation is difficult when the working condition changes, the connection of each component is complex, which leads to difficulty in coordinated movement, and there is a problem that it is difficult to adapt to the change of production environment. The utility model provides a cathode gun sputtering device, which sets the liquid storage tank with fresh water tank and electrolyte tank on the mobile base, sets the circulating pump in the mounting groove of the mobile base through the carrier plate, and hangs the cathode gun in the hook of the liquid storage tank. In actual application, the overall mobile convenience of the device can be significantly improved, the complexity of the coordinated movement of each component is effectively reduced, and the adaptability and flexibility of the device to different application environments are enhanced, so that it can better meet the diversified working condition requirements, effectively solve the problem that the cathode gun sputtering device in the prior art is difficult to move when the working condition changes, the connection of each component is complex, which leads to difficulty in coordinated movement, and there is a problem that it is difficult to adapt to the change of production environment. The specific technical scheme is as follows:

[0005] The utility model provides a kind of cathode gun sputtering device, including mobile base, the upper surface of mobile base is fixedly installed with liquid storage tank, water tank and electrolyte tank are arranged in the liquid storage tank, the upper surface of mobile base is reserved with mounting space to liquid storage tank, the upper surface of mobile base is provided with installation groove, the load plate of adjustable position slidably is installed in the installation groove, the upper surface of load plate is fixedly installed with circulating pump, the liquid inlet of circulating pump is connected with liquid inlet pipe, the liquid outlet of circulating pump is connected with liquid outlet pipe, the liquid outlet of liquid outlet pipe is fixedly connected with cathode gun main body, the right surface of liquid storage tank is fixedly installed with hook, and cathode gun main body is hung in hook.

[0006] In the above technical solution, the load plate is in the shape of an I-beam, and the front surface of the load plate is provided with positioning holes A and B, and the front surface of the mobile base is provided with positioning bolts.

[0007] In the above technical solution, the front surface of the liquid storage tank is fixedly provided with a three-way pipe, two liquid inlets of the three-way pipe are arranged in the water tank and the electrolyte tank respectively, control valves A and B are arranged at the two liquid inlets of the three-way pipe respectively, and the liquid outlet of the three-way pipe is fixedly connected with the liquid inlet of the liquid inlet pipe.

[0008] In the above technical solution, the bottom end of the liquid storage tank is fixedly provided with a stop block, and the left end of the load plate is fixedly provided with a positioning block, when the positioning block moves to the right and contacts the stop block, the positioning hole B is located behind the positioning bolt.

[0009] In the above technical solution, the left surface of the liquid storage tank is fixedly provided with a handle.

[0010] In the above technical solution, the lower surface of the load plate is fixedly provided with four auxiliary moving wheels.

[0011] Compared with the prior art, the cathode gun sputtering device has the following advantages:

[0012] Firstly, the liquid storage tank with a water tank and an electrolyte tank is arranged on the mobile base, the circulating pump is arranged in the installation groove of the mobile base through the load plate, and the cathode gun is hung in the hook of the liquid storage tank.

[0013] II. This invention mounts the circulating pump on a carrier plate and slides the carrier plate into the mounting groove of the movable base. In practical applications, the operating space of the cathode gun body can be expanded by sliding the circulating pump to the right, thereby improving the flexibility and functionality of the equipment in actual use, meeting the needs of diverse work scenarios, and optimizing the overall working efficiency and use of the equipment.

[0014] Thirdly, the innovation of this utility model lies in constructing a clear water tank and an electrolyte tank inside the storage tank, and equipping them with a three-way pipe connected to them. Control valves A and B are respectively installed at the two inlet ends of the three-way pipe, and then the three-way pipe is connected to the inlet pipe of the circulating pump. In this way, during actual operation, the operator can precisely select the liquid source of the circulating pump by adjusting control valves A and B, thereby achieving effective control of the liquid extraction process, meeting the liquid medium requirements of different working conditions, greatly improving the convenience and efficiency of switching the cathode gun body between cleaning and normal use states, enhancing the practicality and adaptability of the equipment, and optimizing the overall operation process and experience. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the main structure of this utility model.

[0016] Figure 2 This is a schematic diagram of the right-side structure of this utility model.

[0017] Figure 3 This is a schematic diagram of the movable base structure of this utility model.

[0018] Figure 4 This is a schematic diagram of the carrier plate structure of this utility model.

[0019] Figure 5 This is a top view of the structure of this utility model.

[0020] Figures 1-5 The components include: 1. Movable base; 11. Mounting slot; 12. Positioning bolt; 2. Liquid storage tank; 21. Clean water tank; 22. Electrolyte tank; 23. Stop block; 24. Handle; 3. Carrier plate; 31. Positioning hole A; 32. Positioning hole B; 33. Positioning block; 4. Circulation pump; 41. Inlet pipe; 42. Drain pipe; 5. Cathode gun body; 6. T-connector; 61. Control valve A; 62. Control valve B. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] In this embodiment, front, back, left, right, top, and bottom are... Figure 1 Describe the reference plane. See [link / reference] Figures 1-5 This utility model provides a technical solution:

[0023] A cathode gun sputtering device includes a movable base 1, a liquid storage tank 2 fixedly installed on the upper surface of the movable base 1, a clean water tank 21 and an electrolyte tank 22 provided in the liquid storage tank 2, an installation space reserved between the liquid storage tank 2 and the upper surface of the movable base 1, an installation groove 11 through the upper surface of the movable base 1, a slidable and adjustable carrier plate 3 installed in the installation groove 11, a circulation pump 4 fixedly installed on the upper surface of the carrier plate 3, an inlet pipe 41 connected to the inlet end of the circulation pump 4, a drain pipe 42 connected to the outlet end of the circulation pump 4, a cathode gun body 5 fixedly connected to the outlet end of the drain pipe 42, a hook fixedly installed on the right surface of the liquid storage tank 2, the cathode gun body 5 being hung in the hook, and a handle 24 fixedly installed on the left surface of the liquid storage tank 2.

[0024] In actual use, the mobile base 1 can be moved at any time according to the actual needs of the site, so as to move the whole device to the place of use. Compared with the existing technology, it improves the flexibility and functionality of the equipment in actual use, meets the needs of diverse work scenarios, and optimizes the overall working efficiency and use of the equipment.

[0025] It is worth noting that a three-way pipe 6 is fixedly installed on the front surface of the liquid storage tank 2. The two liquid inlet ends of the three-way pipe 6 are respectively located in the clear water tank 21 and the electrolyte tank 22. Control valve A61 and control valve B62 are respectively installed at the two liquid inlet ends of the three-way pipe 6. The liquid outlet end of the three-way pipe 6 is fixedly connected to the liquid inlet end of the liquid inlet pipe 41.

[0026] In the process of sputtering a metal film onto a material surface, according to Figure 1 and Figure 5As shown in the steps, first, control valve A61 is placed in a closed state, while control valve B62 is opened, and then circulating pump 4 is started, and through the cooperation of liquid inlet pipe 41 and three-way pipe 6, the electrolyte in electrolyte tank 22 is extracted and transported to cathode gun body 5 to implement sputtering spraying operation to achieve the goal of metal film. When the operation is completed, control valve B62 is closed, control valve A61 is opened, and circulating pump 4 is started again to pump the water in water tank 21 into cathode gun body 5 to perform flushing operation. The flushing step aims to prevent target material atoms and their compounds from remaining in cathode gun body 5 to avoid adverse effects on subsequent use, ensure stable performance and work efficiency of cathode gun body 5 each time, and maintain good running state of the equipment and precision and reliability of the sputtering process.

[0027] In addition, the carrier plate 3 is in the shape of an I-beam, and the front surface of the carrier plate 3 is provided with a positioning hole A31 and a positioning hole B32, and the front surface of the moving base 1 is penetrated and installed with a positioning bolt 12 through screwing, when the carrier plate 3 is received in the mounting groove 11, the rear end of the positioning bolt 12 is inserted into the positioning hole A31 to fix the received carrier plate 3, when the carrier plate 3 moves to the right side to move the circulating pump 4 out to increase the use range of the cathode gun body 5, the rear end of the positioning bolt 12 can be inserted into the positioning hole B32 to fix the position of the carrier plate 3.

[0028] In addition, in order to facilitate the positioning between the positioning bolt 12 and the positioning hole B32, and to quickly lock the position of the carrier plate 3, a stop block 23 is fixedly installed on the inner surface of the bottom end of the liquid storage tank 2, and a positioning block 33 is fixedly installed on the left end of the carrier plate 3, when the positioning block 33 moves to the right side to contact the stop block 23, the positioning hole B32 is located behind the positioning bolt 12, at this time, after the positioning bolt 12 is tightened, the rear end thereof can be inserted into the positioning hole B32 to quickly fix the position of the carrier plate 3.

[0029] Finally, in order to optimize the moving performance of the carrier plate 3 and enhance the smoothness during the moving process, four auxiliary moving wheels are fixedly installed on the lower surface of the carrier plate 3, which can effectively support the carrier plate 3 during actual operation, share the weight of the circulating pump 4 carried by the carrier plate 3, reduce the friction between the carrier plate 3 and the moving base 1, thereby ensuring that the carrier plate 3 moves more stably and smoothly during the moving process, reducing the obstacles caused by load and friction factors during the moving process, improving the overall running stability and operation convenience of the equipment, and providing strong guarantee for efficient implementation of related processes.

Claims

1. A cathode gun sputtering apparatus, comprising a movable base (1), characterized in that, A liquid storage tank (2) is fixedly installed on the upper surface of the mobile base (1). A clear water tank (21) and an electrolyte tank (22) are provided in the liquid storage tank (2). An installation space is reserved between the liquid storage tank (2) and the upper surface of the mobile base (1). An installation groove (11) is opened through the upper surface of the mobile base (1). A slidable and adjustable carrier plate (3) is installed in the installation groove (11). A circulation pump (4) is fixedly installed on the upper surface of the carrier plate (3). An inlet pipe (41) is connected to the inlet end of the circulation pump (4). A drain pipe (42) is connected to the drain end of the circulation pump (4). A cathode gun body (5) is fixedly connected to the drain end of the drain pipe (42). A hook is fixedly installed on the right surface of the liquid storage tank (2). The cathode gun body (5) is hung in the hook.

2. The cathode gun sputtering apparatus according to claim 1, characterized in that, The carrier plate (3) is I-shaped, and the front surface of the carrier plate (3) is provided with positioning holes A (31) and B (32). The front surface of the movable base (1) is threaded with positioning bolts (12).

3. The cathode gun sputtering apparatus according to claim 1, characterized in that, A three-way pipe (6) is fixedly installed on the front surface of the liquid storage tank (2). The two inlet ends of the three-way pipe (6) are respectively located in the clear water tank (21) and the electrolyte tank (22). Control valve A (61) and control valve B (62) are respectively installed at the two inlet ends of the three-way pipe (6). The drain end of the three-way pipe (6) is fixedly connected to the inlet end of the inlet pipe (41).

4. The cathode gun sputtering apparatus according to claim 2, characterized in that, A stop block (23) is fixedly installed on the inner surface of the bottom end of the liquid storage tank (2), and a positioning block (33) is fixedly installed on the left end of the carrier plate (3). When the positioning block (33) moves to the right and contacts the stop block (23), the positioning hole B (32) is located behind the positioning bolt (12).

5. The cathode gun sputtering apparatus according to claim 1, characterized in that, A handle (24) is fixedly installed on the left surface of the liquid storage tank (2).

6. The cathode gun sputtering apparatus according to claim 1, characterized in that, Four auxiliary moving wheels are fixedly installed on the lower surface of the carrier plate (3).

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