Vacuum coating equipment

Abstract

The utility model discloses vacuum coating equipment which comprises a main chamber and a sample introduction chamber connected with the main chamber, a main chamber sample table and a sample introduction bracket are respectively arranged in the main chamber and the sample introduction chamber, and a manipulator with the end part capable of extending into the main chamber is arranged on the sample introduction chamber; the sample introduction bracket comprises a liftable bracket mounting plate positioned in the sample introduction chamber, a plurality of groups of bottom plates are mounted on the bracket mounting plate, and second elastic sheets for pushing substrates are mounted on the plurality of groups of bottom plates. The system is simple in structure, and can store and process sample substrates on a large scale at the same time by arranging the main cavity sample table, the sample introduction bracket and the rotary lifting mechanism, so that the frequency of opening a cavity to increase or replace sample wafers is greatly reduced. By means of the improvement, a large amount of time is saved, the overall working efficiency is improved, and more samples can be processed in unit time. And secondly, the main chamber can provide a consistent process environment for a plurality of sample substrates at the same time, so that the uniformity and quality stability of batch products are ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technology field, concretely is a kind of vacuum coating equipment. BACKGROUND

[0002] In the field of vacuum coating, especially in various processes involving physical vapor deposition (PVD) and chemical vapor deposition (CVD), such as vacuum ion evaporation, magnetron sputtering, molecular beam epitaxy (MBE), laser sputtering deposition (PLD), etc., the efficiency and flexibility of the equipment are key factors in improving production capacity and reducing costs. These processes require to be carried out in a highly controlled vacuum environment to ensure the quality and uniformity of the deposited layer. Therefore, the design of the vacuum chamber, as the core component of the vacuum coating equipment, is crucial to the performance of the entire system.

[0003] Traditional vacuum coating equipment can usually only handle a single sample at a time, which not only limits the processing capacity per unit time, but also increases the time cost required for chamber opening and closing and repeated vacuum pumping, reducing overall work efficiency. In addition, for small samples, conventional mechanical hands often cannot directly clamp, leading to complex processing process, and some relatively expensive materials are unnecessarily wasted due to sample size problems. Therefore, a vacuum coating equipment is proposed. SUMMARY

[0004] The purpose of the utility model is to provide a kind of vacuum coating equipment to solve the problems raised in the above background technology.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: a kind of vacuum coating equipment, including main chamber and the sample introduction chamber connected with main chamber, main chamber and sample introduction chamber are respectively installed with main cavity sample stage and sample introduction support, the mechanical hand with end portion can be extended into main chamber is installed on the sample introduction chamber;The sample introduction support includes the bracket mounting plate that can be lifted in the sample introduction chamber, a plurality of bottom plates are installed on the bracket mounting plate, a plurality of second elastic sheets for pushing the substrate into the substrate are installed on the plurality of bottom plates to provide restraint force for the substrate.

[0006] As a further scheme of the utility model: the main cavity sample stage includes the installation base plate that can be lifted in the main chamber, the limit plate is arranged on the installation base plate, the installation base plate and the limit plate are provided with a plurality of grooves, the groove on the installation base plate and the groove on the limit plate are combined to form the groove body for pushing the substrate into the substrate, and the first elastic sheet is installed on the side edge of the groove on the limit plate.

[0007] As a further scheme of the utility model: the installation base plate and the bracket mounting plate are both installed with rotary lifting mechanism below, and the two rotary lifting mechanisms are connected with main chamber and sample introduction chamber respectively.

[0008] As a further scheme of the present utility model: the rotary lifting mechanism includes a support shaft arranged below the support mounting plate and a sealing adapter flange fixedly connected below the sample inlet chamber, the sealing adapter flange and the support shaft are connected through a bushing, the end of the support shaft away from the support mounting plate is connected with the motor mounting seat through a sealing magnetic fluid, a servo motor is mounted on the motor mounting seat, a lifting module is mounted on the sealing adapter flange, and the end of the lifting module away from the sealing adapter flange is connected with the sealing magnetic fluid.

[0009] As a further scheme of the present utility model: the lifting module includes a fixing part connected with the sealing adapter flange and a lifting part connected with the sealing magnetic fluid, a driving motor for driving the lifting part to move on the fixing part is mounted on the fixing part, and a compression bellows sleeved outside the support shaft is arranged between the fixing part and the lifting part.

[0010] As a further scheme of the present utility model: the second elastic sheet is in a U shape, and a sliding groove is arranged at the opening thereof.

[0011] Compared with the prior art, the present utility model has the beneficial effects that:

[0012] 1. The main cavity sample table, the sample inlet support and the rotary lifting mechanism are arranged, so that the system can store and process a large number of sample substrates at the same time, and the frequency of opening the cavity to increase or replace the sample is greatly reduced. This improvement not only saves a lot of time, but also improves the overall work efficiency, so that more samples can be processed in unit time; secondly, the main cavity can provide consistent process environment for multiple sample substrates at the same time, ensuring the uniformity and quality stability of batch products, which not only improves the product quality, but also enhances customer satisfaction and market competitiveness. Since the main cavity can process multiple sample substrates at the same time, the sample transmission time and waiting time in the traditional single sample processing mode are greatly shortened, and the overall speed and efficiency of the production process are further improved.

[0013] 2. The arrangement of the substrate can provide a special installation scheme for small sample pieces that are difficult to be clamped by conventional mechanical hands, avoid operation difficulties and material waste caused by sample size problems, and broaden the application range of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the vacuum coating equipment of the present utility model;

[0015] Figure 2 It is a sectional view schematic diagram of the vacuum coating equipment of the present utility model;

[0016] Figure 3 It is a schematic diagram of the combination of the sample inlet support and the rotary lifting mechanism of the present utility model;

[0017] Figure 4 The main cavity sample table and the rotating lifting mechanism combined schematic view of the utility model;

[0018] Figure 5 The lifting module schematic view of the utility model;

[0019] Figure 6 The A place enlarged schematic view of the utility model;

[0020] Figure 7 The B place enlarged schematic view of the utility model;

[0021] Figure 8 The substrate schematic view of the utility model;

[0022] Figure 9 The second elastic sheet schematic view of the utility model;

[0023] In the figure: 1, main chamber; 2, sample chamber; 3, main cavity sample table; 31, installation base plate; 32, limit plate; 33, first elastic sheet; 4, sample support; 41, support installation plate; 42, bottom plate; 43, second elastic sheet; 5, mechanical hand; 6, substrate; 7, rotating lifting mechanism; 71, support shaft; 72, sealing adapter flange; 73, bushing; 74, sealing magnetic fluid; 75, motor mounting seat; 76, servo motor; 77, lifting module; 771, fixed part; 772, lifting part; 773, drive motor; 774, compression bellows. DETAILED DESCRIPTION

[0024] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor fall within the scope of protection of the utility model.

[0025] Please refer to Figures 1-9The utility model discloses a vacuum coating equipment, including main chamber 1 and with the sample introduction chamber 2 of main chamber 1 connection, the inside mutual communication of main chamber 1 and sample introduction chamber 2, and the opening and closing of both are controlled through the gate valve, the inside of main chamber 1 is kept in high vacuum state all the time, when the gate valve is closed, staff assembles sample piece to sample introduction chamber 2, after assembling completes vacuumizing, open the gate valve again, make the inside of main chamber 1 and sample introduction chamber 2 intercommunication, provide better working environment for the processing of sample, main chamber 1 and sample introduction chamber 2 are installed with main chamber sample table 3 and sample introduction support 4 respectively, the mechanical hand 5 of end portion can be extended into main chamber 1 is installed on sample introduction chamber 2, and the sealed connection between sample introduction chamber 2 and mechanical hand 5, sample introduction support 4 includes the support mounting plate 41 of liftable in sample introduction chamber 2, a plurality of bottom plates 42 are installed on support mounting plate 41, a plurality of bottom plates 42 are all installed with the second spring 43 of the substrate 6 push in, for providing the restraint of substrate 6, wherein, support mounting plate 41 provides the stable support platform for a plurality of bottom plates 42, ensures the stability of bottom plate 42 in the operation process, thereby supports the efficient, accurate process execution, second spring 43 is U-shaped, is equipped with the sliding slot at its opening, for the substrate 6 push in, the sliding slot design ensures that substrate 6 can smoothly enter and position, in initial state, the opening size of second spring 43 is less than the size of substrate 6, this design ensures that when substrate 6 is pushed in, can effectively open the opening of second spring 43, when substrate 6 enters the sliding slot, will open the opening of second spring 43, at this moment, second spring 43 restores deformation by the elastic property of its own material, exerts certain restraint on substrate 6, this restraint effectively limits the position of substrate 6, makes it stably keep in second spring 43, provides reliable guarantee for the subsequent clamping of mechanical hand 5, when needing to take out substrate 6, mechanical hand 5 can accurately grab substrate 6 in second spring 43 and take it out, second spring 43 realizes the effective fixing and release of substrate 6 through its unique U-shaped design and elastic property.This design ensures the stability and accuracy of substrate 6 in the process of entering and removing, simultaneously simplifies the operation process of mechanical hand 5, improves the performance and efficiency of overall system.

[0026] Please refer to Figure 7In one embodiment, the preferred main cavity sample stage 3 in this embodiment includes a mounting base plate 31 that is liftable within the main cavity 1, and a limiting plate 32 is arranged on the mounting base plate 31. Both the mounting base plate 31 and the limiting plate 32 have multiple sets of grooves. The grooves on the mounting base plate 31 and the limiting plate 32 combine to form a groove body for the substrate 6 to be pushed into. There are multiple groove bodies. The side edges of the grooves on the limiting plate 32 are provided with first elastic sheets 33 for providing elastic constraint. In the initial state, the thickness of the groove body is smaller than the thickness of the substrate 6. This design ensures that when the substrate 6 is pushed into the groove body, the first elastic sheets 33 can be effectively squeezed and bent upwards. When the substrate 6 is pushed into the groove body, it will squeeze the first elastic sheets 33, causing them to bend upwards. Once the substrate 6 is completely in the groove body, the first elastic sheets 33 exert a downward constraint force on the substrate 6 under the action of their own elastic properties. This constraint force effectively limits the position of the substrate 6, allowing it to be stably maintained in the groove body and providing reliable protection for subsequent operations.

[0027] Please refer to Figures 3-5 In one embodiment, the preferred mounting base plate 31 and the bracket mounting plate 41 are both provided with rotary lifting mechanisms 7 below for providing rotary and lifting functions. Two rotary lifting mechanisms 7 are respectively connected to the main cavity 1 and the sample inlet chamber 2. The working principles of the two rotary lifting mechanisms 7 are the same, i.e., they can both perform rotary and lifting actions to support the precise operation and positioning of the components on their respective platforms.

[0028] Please refer to Figures 3-5In one embodiment, preferably, the rotary lifting mechanism 7 comprises a support shaft 71 arranged below the bracket mounting plate 41 and a sealing adapter flange 72 fixedly connected below the sample chamber 2. The sealing adapter flange 72 is connected to the support shaft 71 through a bushing 73, which is fixed to the sealing adapter flange 72 and movably connected to the support shaft 71. Thus, the support shaft 71 is not affected by the sealing adapter flange 72 when rotating or lifting. In addition, the bushing 73 ensures the sealing of the connection between the support shaft 71 and the sealing adapter flange 72, thereby ensuring the vacuum degree in the sample chamber 2. The end of the support shaft 71 away from the bracket mounting plate 41 is connected to a motor mounting seat 75 through a sealing magnetic fluid 74. A servo motor 76 is mounted on the motor mounting seat 75 and connected to the sealing magnetic fluid 74. The servo motor 76 drives the support shaft 71 to rotate through the sealing magnetic fluid 74, thereby driving the bracket mounting plate 41 to rotate and adjusting the substrate 6 at a position that can be gripped by the robot 5. The lifting module 77 is mounted on the sealing adapter flange 72 and connected to the sealing magnetic fluid 74 at the end away from the sealing adapter flange 72. The sealing magnetic fluid 74 is driven by the lifting module 77 to move up and down, thereby driving the support shaft 71 to move up and down. When loading the substrate 6, the lifting module 77 drives the support shaft 71 and the bracket mounting plate 41 to move up, so that they are completely separated from the inside of the sample chamber 2. At this time, the worker can push the substrate 6 into the second elastic sheet 43 to complete the loading of the substrate 6. After the loading is completed, the lifting module 77 adjusts the height of the bracket mounting plate 41 to be at the same level as the robot 5. In this state, the robot 5 can accurately grip the substrate 6 on the bracket mounting plate 41, ensuring smooth operation. When the robot 5 enters the main chamber 1, the lifting module 77 lowers the bracket mounting plate 41 to a position lower than the robot 5. Thus, the end of the robot 5 will not be affected by the bracket mounting plate 41 when entering the main chamber 1, ensuring the freedom and safety of the robot 5.

[0029] Please refer to Figure 5 In one embodiment, preferably, the lifting module 77 comprises a fixed part 771 connected to the sealing adapter flange 72 and a lifting part 772 connected to the sealing magnetic fluid 74. A drive motor 773 is mounted on the fixed part 771 to drive the lifting part 772 to move on the fixed part 771. A compression bellows 774 is arranged outside the support shaft 71 between the fixed part 771 and the lifting part 772.

[0030] The working principle and use process of the utility model: the main chamber 1 is kept in high vacuum state all the time, the main chamber 1 is connected with the sample chamber 2 by the gate valve, the substrate 6 with sample piece is pushed into the second elastic sheet 43 with sliding slot, when the substrate 6 is all assembled, the sample chamber 2 starts to vacuumize, when the pressure difference between the main chamber 1 and the sample chamber 2 is less than a certain value, the gate valve is opened, and transmission is carried out; at this time, the main chamber 1 and the sample chamber 2 have working environment, the mechanical hand 5 extends and holds the substrate 6 on the second elastic sheet 43, the mechanical hand 5 takes out the substrate 6 and rotates 90 degrees, so that it is parallel to the main cavity sample stage 3, at this time, the lifting module 77 drives the support shaft 71 and the sample support 4 to descend, so as to avoid the conveying path of the mechanical hand 5, and ensure that the mechanical hand 5 can smoothly send the substrate 6 into the groove body of the main cavity sample stage 3, after the mechanical hand 5 places the substrate 6 to the groove body of the main cavity sample stage 3, the substrate 6 is fixed in the groove body in combination with the action of the first elastic sheet 33, at this time, the mechanical hand 5 retracts after completing the task, the servo motor 76 drives the bracket mounting plate 41 to rotate through the sealed magnetic fluid 74, so that the next substrate 6 to be taken away is aligned with the position of the mechanical hand 5; the lifting module 77 acts again, drives the support shaft 71 and the sample support 4 to rise, ensures that the bracket mounting plate 41 and the mechanical hand 5 are at the same horizontal height, and prepares for the clamping of the next substrate 6, the above steps are repeatedly executed until all the substrates 6 are assembled into the corresponding groove body of the main cavity sample stage 3 according to the requirements; the lifting and rotation of the main cavity sample stage 3 are controlled by the rotary lifting mechanism 7 connected with it, and the working principle of the mechanism is same as that of the rotary lifting mechanism 7 of the sample support 4, which is used for cooperating with the action of the mechanical hand 5 and the final positioning of the substrate 6.

[0031] Although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be combined appropriately to form other embodiments that those skilled in the art can understand.

[0032] Therefore, the above only describes the preferred embodiments of the present application, and is not intended to limit the scope of the present application; that is, various equivalent transformations made within the scope of the claims of the present application are within the protection scope of the claims of the present application.

Claims

1. A vacuum coating apparatus, characterized by, The application relates to a sample loading device, which comprises a main chamber (1) and a sample loading chamber (2) connected with the main chamber (1), wherein a main chamber sample stage (3) and a sample loading support (4) are respectively arranged in the main chamber (1) and the sample loading chamber (2), a mechanical arm (5) capable of extending into the main chamber (1) is arranged on the sample loading chamber (2), the sample loading support (4) comprises a support mounting plate (41) capable of ascending and descending in the sample loading chamber (2), a plurality of groups of bottom plates (42) are arranged on the support mounting plate (41), a second elastic sheet (43) for pushing a substrate (6) is arranged on each group of the bottom plates (42), and the second elastic sheet (43) is used for providing a constraint force for the substrate (6).

2. The vacuum coating apparatus according to claim 1, wherein The main chamber sample stage (3) comprises a mounting base plate (31) capable of ascending and descending in the main chamber (1), a limiting plate (32) is arranged on the mounting base plate (31), the mounting base plate (31) and the limiting plate (32) are provided with a plurality of groups of grooves, the grooves on the mounting base plate (31) and the grooves on the limiting plate (32) are combined to form a groove body for pushing the substrate (6), and a first elastic sheet (33) is arranged on the side edge of the groove on the limiting plate (32).

3. The vacuum coating apparatus according to claim 2, wherein Rotary lifting mechanisms (7) are arranged below the mounting base plate (31) and the support mounting plate (41), and the two rotary lifting mechanisms (7) are respectively connected with the main chamber (1) and the sample loading chamber (2).

4. The vacuum coating apparatus according to claim 3, wherein The rotary lifting mechanism (7) comprises a support shaft (71) arranged below the support mounting plate (41) and a sealing adapter flange (72) fixedly connected with the sample loading chamber (2), the sealing adapter flange (72) is connected with the support shaft (71) through a bushing (73), the end of the support shaft (71) away from the support mounting plate (41) is connected with a motor mounting base (75) through a sealing magnetic fluid (74), a servo motor (76) is arranged on the motor mounting base (75), a lifting module (77) is arranged on the sealing adapter flange (72), and the end of the lifting module (77) away from the sealing adapter flange (72) is connected with the sealing magnetic fluid (74).

5. The vacuum coating apparatus according to claim 4, wherein The lifting module (77) comprises a fixing member (771) connected with the sealing adapter flange (72) and a lifting member (772) connected with the sealing magnetic fluid (74), a driving motor (773) for driving the lifting member (772) to move on the fixing member (771) is arranged on the fixing member (771), and a compression bellows (774) sleeved outside the support shaft (71) is arranged between the fixing member (771) and the lifting member (772).

6. The vacuum coating apparatus according to claim 1, wherein The second elastic sheet (43) is in a U shape, and a sliding groove is arranged at the opening of the second elastic sheet (43).

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