Nine-path output transimpedance amplification photoelectric detector based on 3*3 PIN matrix photodiode
By using a nine-channel output transimpedance amplified photodetector based on a 3x3 PIN matrix photodiode, the problems of narrow spectral range and high noise of existing photodetectors are solved, enabling multi-wavelength detection and high-resolution imaging, and improving signal quality and accuracy.
Patent Information
- Application Number
- CN202520300152.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-24
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2035-02-24
AI Technical Summary
Existing photodetectors can only detect light signals of a single or limited number of wavelengths, have a narrow spectral range, and suffer from high interference noise and limited acquisition capabilities, resulting in poor detector performance.
A nine-channel output transimpedance amplification photodetector based on a 3x3 PIN matrix photodiode is adopted, including a photocurrent signal acquisition module, a power input and filtering circuit module, an operational amplifier voltage supply module, a reverse adjustable bias module, a transimpedance amplification module, and a voltage amplification module. By integrating them on the same substrate, the connection between devices and parasitic parameters are reduced, noise interference is reduced, and signal transmission quality and stability are improved.
It enables the detection of multiple optical signals of different wavelengths, obtains more comprehensive spectral information, improves the resolution and sensitivity of the detector, reduces the influence of external interference and internal noise, and enhances signal quality and accuracy.
Smart Images
Figure CN223596995U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to nine way output cross resistance amplification photoelectric detector based on 3x3 PIN matrix photodiode. BACKGROUND
[0002] The working principle of the photoelectric detector is that the irradiated material conductivity is changed by radiation, the optical signal is converted into the electrical signal, the related photoelectric signal detection is carried out according to the changed conductivity value, and the photoelectric detector can be widely applied in various different application scenarios.
[0003] The existing photoelectric detector often adopts single-end detection or double-end detection working form, can only detect single wavelength or limited several wavelengths of optical signal, and the received optical spectrum range is relatively narrow, the interference noise is relatively high, the acquisition capacity is limited, and the overall performance of the detector is poor. UTILITY MODEL CONTENT
[0004] The utility model embodiment provides nine way output cross resistance amplification photoelectric detector based on 3x3 PIN matrix photodiode, and the structure design is reasonable, is based on the 3x3 PIN matrix photodiode, makes every photodiode can convert optical signal into electrical signal and amplify, and also has multi-channel detection imaging capacity, can detect multiple different wavelengths of optical signal simultaneously, can obtain more comprehensive spectral information to change optical image into electrical signal image, and simultaneously can integrate semiconductor device and electronic device on the same substrate, reduces the connection and parasitic parameter between devices, reduces noise interference, improves the quality and stability of signal transmission, further makes the detector obtain higher resolution and sensitivity, can detect more weak optical signal, effectively reduces the influence of external interference and internal noise on signal, improves signal quality and signal precision, makes the detector have more superior overall performance, solves the problems in the prior art.
[0005] The utility model adopts the technical scheme that the above technical problems are solved:
[0006] Nine way output cross resistance amplification photoelectric detector based on 3x3 PIN matrix photodiode, the photoelectric detector includes:
[0007] Photoelectric current signal acquisition module, the photoelectric current signal acquisition module is used to receive the laser of specific wave band after modulating by intensity modulator, including 3x3 PIN matrix photodiode;
[0008] Power input and filter circuit module, the power input and filter circuit module are used to provide stable power supply voltage for photoelectric detector;
[0009] An operational amplifier voltage supply module is used to ensure the stability of the output voltage, including an operational amplifier positive voltage supply module and an operational amplifier negative voltage supply module;
[0010] A reverse adjustable bias module is used to provide a matrix photodiode with an adjustable negative power supply voltage;
[0011] A transimpedance amplification module is used to effectively reduce the noise and errors introduced by the input current, ensuring the rapid rise and fall of the output signal;
[0012] A voltage amplification module is used to reduce noise interference and improve signal quality and accuracy;
[0013] A signal output module is used to output an electrical signal.
[0014] In the 3x3 PIN matrix photodiode, 9 photodiodes are arranged, and the cathodes of the 9 photodiodes are connected together using metal wires to form a common cathode structure. Electrodes are made on the anodes and common cathodes of the photodiodes to facilitate the connection of external circuits.
[0015] The 3x3 PIN matrix photodiode can simultaneously measure multiple wavelengths of moving light beams, has low electrical crosstalk and ultra-high uniformity between adjacent elements. The size of the 3x3 PIN matrix photodiode is 3.8mm x 3.8mm, the size of each pixel is 1mm x 1mm, the pixel spacing is 0.2mm, the spectral range is 250nm-1600nm, and the detection of ultraviolet, visible and infrared light can be realized. The dark current is less than 0.5nA, the sensitivity is less than 0.5A / W, and it can be used to detect weak light signals. The typical value of the rise time is 200ns, which can quickly convert the light signal into an electrical signal. The typical value of the reverse breakdown voltage is 25V. The probe numbers of the 9 photodiodes are A, B, C, D, E, F, G, H and I, and the corresponding signal output channels are 1, 2, 3, 4, 5, 6, 7, 8 and 9, respectively.
[0016] The power input and filter circuit module includes a GH1-25-3PIN line pair board socket J1 connected to a 12V positive and negative power supply, a SK-22D02-4 slide switch J2 connected to the GH1-25-3PIN line pair board socket J1, a 3-pin foot of the slide switch J2 connected to a feed-through capacitor C13 for filtering and then connected to avalanche diode D3, C14, C15, and C16 three parallel capacitors for filtering and then outputting +VIN; a 4-pin foot of the slide switch J2 connected to a voltage dividing resistor R1 and then connected to a light emitting diode D1 as a power switch indicator, and the 4-pin foot connected to a feed-through capacitor C1 for filtering and then connected to avalanche diode D2, C2, C3, and C4 three parallel capacitors for filtering and then outputting -VIN.
[0017] The model of the operational amplifier positive voltage supply module is 78L05, which can fixedly output a positive 5V voltage, and the maximum output current is 100mA, the three-pin foot of the operational amplifier positive voltage supply module is electrically connected to +VIN, the two-pin foot of the operational amplifier positive voltage supply module is grounded, and the one-pin foot of the operational amplifier positive voltage supply module is connected to C5 and C6 two parallel capacitors for filtering and then outputting a positive 5V voltage.
[0018] The model of the operational amplifier negative voltage supply module is 79L05, which can fixedly output a negative 5V voltage, and the maximum output current is 150mA, the two-pin foot of the operational amplifier negative voltage supply module is electrically connected to -VIN, the one-pin foot of the operational amplifier negative voltage supply module is grounded, and the three-pin foot of the operational amplifier negative voltage supply module is connected to C7 and C8 two parallel capacitors for filtering and then outputting a negative 5V voltage.
[0019] The model of the reverse adjustable bias module is LT1964ES5, which adopts a 5-pin TSOT-23 package; the one-pin foot of the reverse adjustable bias module is grounded, providing a reference potential for the reverse adjustable bias module; the two-pin foot of the reverse adjustable bias module is an input pin, used for connecting an external negative power input; the three-pin foot of the reverse adjustable bias module is a bypass pin, connected to a ceramic capacitor ground, used for reducing output noise and improving power stability; the four-pin foot of the reverse adjustable bias module is an adjustment pin, used for accurately adjusting the output voltage; and the five-pin foot of the reverse adjustable bias module is an output pin, used for outputting a stable negative voltage.
[0020] The first pin of the reverse adjustable bias module is grounded, the second pin of the reverse adjustable bias module is connected with VIN, and the third pin of the reverse adjustable bias module is grounded through the capacitor C9; the potentiometer R2 is connected between the fourth pin and the fifth pin of the reverse adjustable bias module, and the three parallel filter capacitors C10, C11 and C12 are arranged on the potentiometer R2; and the output adjustable negative voltage -VPD is used to supply power to the matrix photodiode; and the fourth pin of the reverse adjustable bias module is grounded through the resistor R3.
[0021] The transimpedance amplification module is of the type OPA657NB / 250 and adopts the SOT23-5 package form; the first pin of the transimpedance amplification module is an amplifier output end, the second pin of the transimpedance amplification module is a negative voltage input end, the third pin of the transimpedance amplification module is a same-phase input end, the fourth pin of the transimpedance amplification module is an inverse-phase input end, and the fifth pin of the transimpedance amplification module is a positive power supply input end.
[0022] The fourth pin of the transimpedance amplification module is electrically connected with the anode of the matrix photodiode, the third pin of the transimpedance amplification module is grounded, the fifth pin of the transimpedance amplification module is connected with +5V voltage through the capacitors C17 and C19 connected in parallel, the second pin of the transimpedance amplification module is connected with -5V voltage through the capacitors C25 and C26 connected in parallel; the first pin of the transimpedance amplification module is connected with the fourth pin of the transimpedance amplification module through the feedback resistor R4; and the compensation capacitor C20 is arranged between the first pin and the fourth pin of the transimpedance amplification module, so as to improve the stability of the transimpedance amplification module.
[0023] The first pin of the transimpedance amplification module is connected with the voltage amplification module through the resistors R5 and R6, one end of the filter capacitor C22 is connected to the middle of R5 and R6, and the other end is grounded.
[0024] The model of the voltage amplification module is THS4031IDGN, the No. 3 pin of the voltage amplification module is a same-phase input end, one end of a filter capacitor C23 is connected between R6 and the No. 3 pin, and the other end is grounded; the No. 2 pin of the voltage amplification module is an opposite-phase input end, is connected to the No. 6 pin output end of the voltage amplification module through a resistor R9, and is grounded through a resistor R11, so that same-phase amplification is realized; a potentiometer R10 is arranged between the No. 1 pin and the No. 8 pin of the voltage amplification module, so that the power supply-VIN flows into the voltage amplification module through the potentiometer R10, and a zero adjustment function is realized; the No. 7 pin of the voltage amplification module is connected with a positive voltage +VIN, one end of a filter capacitor C27 is connected between the No. 7 pin of the voltage amplification module and +VIN, and the other end is grounded; the No. 4 pin of the voltage amplification module is connected with a negative voltage-VIN, one end of a filter capacitor C18 is connected between the No. 4 pin and-VIN, and the other end is grounded; the No. 9 pin of the voltage amplification module is grounded; the No. 6 pin of the voltage amplification module is an output end, is connected to the No. 3 pin of the voltage amplification module through a compensation capacitor C21, and outputs an amplified voltage through resistors R7 and R8, one end of a filter capacitor C24 is connected between R7 and R8, and the other end is grounded.
[0025] The No. 6 pin of the voltage amplification module is connected with a signal output module through a resistor R8, and the signal output module is an SMA interface.
[0026] The utility model discloses adopt above -mentioned structure, through photoelectric current signal acquisition module receives the laser of specific wave band that modulates through intensity modulator, through power input and filter circuit module provides stable supply voltage for photoelectric detector, through the voltage of guaranteeing output voltage's stability of operational amplifier voltage supply module, through the negative power voltage of adjustable of matrix photodiode for being provided to adjustable bias module, through transimpedance amplification module effectively reduces the noise and error of input current introduction, guarantees the rapid rise and drop of output signal, through voltage amplification module reduces noise interference, promotes the quality and precision of signal, through signal output module output electric signal, has accurate practical, stable and efficient advantage. BRIEF DESCRIPTION OF DRAWINGS
[0027] Figure 1 It is the structural schematic diagram of the utility model.
[0028] Figure 2 It is the electrical schematic diagram of power input and filter circuit module of the utility model.
[0029] Figure 3 It is the electrical schematic diagram of operational amplifier positive voltage supply module of the utility model.
[0030] Figure 4The utility model discloses an electrical schematic diagram of the operational amplifier negative voltage power supply module.
[0031] Figure 5 The utility model discloses an electrical schematic diagram of the reverse adjustable bias module.
[0032] Figure 6 The utility model discloses an electrical schematic diagram of the transimpedance amplifier module. DETAILED DESCRIPTION
[0033] To clearly show the technical features of the present application, the utility model will be described in detail below through specific embodiments and in conjunction with the accompanying drawings.
[0034] As shown in Figures 1-6 The nine-way output transimpedance amplification photoelectric detector based on the 3x3 PIN matrix photodiode includes:
[0035] The photocurrent signal acquisition module is used for receiving laser of specific waveband modulated by the intensity modulator and includes the 3x3 PIN matrix photodiode.
[0036] The power input and filter circuit module is used for providing stable power supply voltage for the photoelectric detector.
[0037] The operational amplifier voltage power supply module is used for ensuring the stability of the output voltage and includes the operational amplifier positive voltage power supply module and the operational amplifier negative voltage power supply module.
[0038] The reverse adjustable bias module is used for providing adjustable negative power supply voltage for the matrix photodiode.
[0039] The transimpedance amplification module is used for effectively reducing the noise and error introduced by the input current and ensuring the rapid rise and fall of the output signal.
[0040] The voltage amplification module is used for reducing noise interference and improving the quality and precision of the signal.
[0041] The signal output module is used for outputting electric signal.
[0042] There are 9 photodiodes in the 3x3 PIN matrix photodiode, the cathodes of the 9 photodiodes are connected together by metal wires to form a common cathode structure, and electrodes are made on the anodes and the common cathode of the photodiodes to facilitate the connection of external circuits.
[0043] The 3x3 PIN matrix photodiode can simultaneously measure moving light beams of multiple wavelengths, has low electrical crosstalk and ultra-high uniformity between adjacent elements; the size of the 3x3 PIN matrix photodiode is 3.8mmx3.8mm, the size of each pixel is 1mmx1mm, the pixel spacing is 0.2mm, the spectral range is 250nm-1600nm, the detection of ultraviolet, visible and infrared light can be realized, the dark current is less than 0.5nA, the sensitivity is less than 0.5A / W, it can be used to detect weak light signals, the typical value of the rise time is 200ns, the light signal can be quickly converted into an electrical signal, and the typical value of the reverse breakdown voltage is 25V; the detection numbers of the nine photodiodes are A, B, C, D, E, F, G, H and I, and the corresponding signal output channels are 1, 2, 3, 4, 5, 6, 7, 8 and 9, and there are 9 signal output channels.
[0044] The power input and filter circuit module includes a GH1-25-3PIN line pair board socket J1 connected with 12V positive and negative power supply, a SK-22D02-4 slide switch J2 connected on the GH1-25-3PIN line pair board socket J1, a No. 3 pin of the slide switch J2 connected with a feed-through capacitor C13 for filtering, then connected with an avalanche diode D3, then connected with C14, C15 and C16 three parallel capacitors for filtering and outputting +VIN; a No. 4 pin of the slide switch J2 connected with a voltage dividing resistor R1, then connected with a light emitting diode D1 as a power switch indicator, and the No. 4 pin connected with a feed-through capacitor C1 for filtering, then connected with an avalanche diode D2, then connected with C2, C3 and C4 three parallel capacitors for filtering and outputting -VIN.
[0045] The operational amplifier positive voltage supply module has a model of 78L05, can fixedly output a positive 5V voltage, and the maximum output current is 100mA, a No. 3 pin of the operational amplifier positive voltage supply module is electrically connected with +VIN, a No. 2 pin of the operational amplifier positive voltage supply module is grounded, and a No. 1 pin of the operational amplifier positive voltage supply module is connected with C5 and C6 two parallel capacitors for filtering and outputting a positive 5V voltage.
[0046] The operational amplifier negative voltage supply module has a model of 79L05, can fixedly output a negative 5V voltage, and the maximum output current is 150mA, a No. 2 pin of the operational amplifier negative voltage supply module is electrically connected with -VIN, a No. 1 pin of the operational amplifier negative voltage supply module is grounded, and a No. 3 pin of the operational amplifier negative voltage supply module is connected with C7 and C8 two parallel capacitors for filtering and outputting a negative 5V voltage.
[0047] The model of the reverse adjustable bias module is LT1964ES5, adopts a 5-pin TSOT-23 package; the No. 1 pin of the reverse adjustable bias module is grounded, providing a reference potential for the reverse adjustable bias module; the No. 2 pin of the reverse adjustable bias module is an input pin, used for connecting an external negative power input; the No. 3 pin of the reverse adjustable bias module is a bypass pin, connected with a ceramic capacitor to ground, used for reducing output noise and improving the stability of the power supply; the No. 4 pin of the reverse adjustable bias module is an adjustment pin, used for accurately adjusting the output voltage; and the No. 5 pin of the reverse adjustable bias module is an output pin, used for outputting a stable negative voltage.
[0048] The No. 1 pin of the reverse adjustable bias module is grounded, the No. 2 pin of the reverse adjustable bias module is connected with -VIN, and the No. 3 pin of the reverse adjustable bias module is grounded through the capacitor C9; a potentiometer R2 is connected between the No. 4 pin and the No. 5 pin of the reverse adjustable bias module, and three parallel filter capacitors C10, C11 and C12 are arranged on the potentiometer R2, and the output adjustable negative voltage -VPD is used to supply power to the matrix photodiode; and the No. 4 pin of the reverse adjustable bias module is grounded through the resistor R3.
[0049] The model of the transimpedance amplification module is OPA657NB / 250, adopting an SOT23-5 package form, the No. 1 pin of the transimpedance amplification module is an amplifier output end, the No. 2 pin of the transimpedance amplification module is a negative voltage input end, the No. 3 pin of the transimpedance amplification module is a non-inverting input end, the No. 4 pin of the transimpedance amplification module is an inverting input end, and the No. 5 pin of the transimpedance amplification module is a positive power input end.
[0050] The No. 4 pin of the transimpedance amplification module is electrically connected with the anode of the matrix photodiode, the No. 3 pin of the transimpedance amplification module is grounded, the No. 5 pin of the transimpedance amplification module is connected with +5V voltage through the capacitors C17 and C19 in parallel, and the No. 2 pin of the transimpedance amplification module is connected with -5V voltage through the capacitors C25 and C26 in parallel; the No. 1 pin of the transimpedance amplification module is connected with the No. 4 pin of the transimpedance amplification module through the feedback resistor R4; and the compensation capacitor C20 is arranged between the No. 1 pin and the No. 4 pin of the transimpedance amplification module, so as to improve the stability of the transimpedance amplification module;
[0051] The No. 1 pin of the transimpedance amplification module is connected with the voltage amplification module through the resistors R5 and R6, one end of the filter capacitor C22 is connected to the middle of R5 and R6, and the other end is grounded.
[0052] The model of the voltage amplification module is THS4031IDGN, the No. 3 pin of the voltage amplification module is a same-phase input end, one end of a filter capacitor C23 is connected between R6 and the No. 3 pin, and the other end is grounded; the No. 2 pin of the voltage amplification module is an opposite-phase input end, is connected to the No. 6 pin output end of the voltage amplification module through a resistor R9, and is grounded through a resistor R11, so that same-phase amplification is realized; a potentiometer R10 is arranged between the No. 1 pin and the No. 8 pin of the voltage amplification module, so that the power supply-VIN flows into the voltage amplification module through the potentiometer R10, and a zero adjustment function is realized; the No. 7 pin of the voltage amplification module is connected with a positive voltage +VIN, one end of a filter capacitor C27 is connected between the No. 7 pin of the voltage amplification module and +VIN, and the other end is grounded; the No. 4 pin of the voltage amplification module is connected with a negative voltage-VIN, one end of a filter capacitor C18 is connected between the No. 4 pin and-VIN, and the other end is grounded; the No. 9 pin of the voltage amplification module is grounded; the No. 6 pin of the voltage amplification module is an output end, is connected to the No. 3 pin of the voltage amplification module through a compensation capacitor C21, and outputs the amplified voltage through resistors R7 and R8, one end of a filter capacitor C24 is connected between R7 and R8, and the other end is grounded.
[0053] The No. 6 pin of the voltage amplification module is connected with a signal output module through a resistor R8, and the signal output module is an SMA interface.
[0054] The working principle of the nine-way output transimpedance amplification photoelectric detector based on the 3x3 PIN matrix photodiode in the embodiment of the utility model is as follows: based on the 3x3 PIN matrix photodiode, each photodiode can convert optical signals into electrical signals for amplification, and also has multi-channel detection imaging capability, can detect multiple optical signals of different wavelengths at the same time, can obtain more comprehensive spectral information to convert optical images into electrical signal images, can integrate semiconductor devices and electronic devices on the same substrate, reduces the connection and parasitic parameters between devices, reduces noise interference, improves the quality and stability of signal transmission, and further makes the detector obtain higher resolution and sensitivity, can detect weaker optical signals, effectively reduces the influence of external interference and internal noise on signals, improves signal quality and signal accuracy, and makes the detector have more superior overall performance.
[0055] In the overall scheme, the photoelectric detector comprises: a photocurrent signal acquisition module for receiving laser of a specific waveband modulated by an intensity modulator, including a 3x3 PIN matrix photodiode; a power input and filter circuit module for providing stable power supply voltage for the photoelectric detector; an operational amplifier voltage supply module for ensuring the stability of the output voltage, including an operational amplifier positive voltage supply module and an operational amplifier negative voltage supply module; a reverse adjustable bias voltage module for providing adjustable negative power supply voltage for the matrix photodiode; a transimpedance amplification module for effectively reducing noise and errors introduced by input current, ensuring rapid rise and fall of the output signal; a voltage amplification module for reducing noise interference and improving signal quality and accuracy; and a signal output module for outputting electrical signals.
[0056] Further, each photodiode can convert the optical signal into an electrical signal, and then amplify it through the transimpedance amplification module and the voltage amplification module, thereby improving the overall performance of the detector and also enabling the product to have imaging capability, i.e., converting optical images into electrical signal images.
[0057] For the photocurrent signal acquisition module, a 3X3 PIN matrix photodiode is used, and 9 photodiodes are made on a silicon substrate through processes such as photolithography and diffusion. Each photodiode has an anode and a cathode. The cathodes of the 9 photodiodes are connected together to form a common cathode structure, and metal wires are used for connection. Electrodes are made on the anodes and the common cathode of the photodiodes for external circuit connection. This array can simultaneously measure multiple wavelengths of moving light beams, has low electrical crosstalk, and has ultra-high uniformity between adjacent elements. The size of the matrix photodiode is 3.8mm x 3.8mm, the size of each pixel is 1mm x 1mm, the pixel spacing is 0.2mm, the spectral range is 250nm-1600nm, and the detection of ultraviolet, visible, and infrared light can be realized. The dark current is less than 0.5nA, the sensitivity is less than 0.5A / W, it can be used to detect weak light signals, the typical value of the rise time is 200 nanoseconds, it can quickly convert optical signals into electrical signals, and the typical value of the reverse breakdown voltage is 25V. The detector numbers of the 9 photodiodes are A, B, C, D, E, F, G, H, and I, and the corresponding signal output channels are 1, 2, 3, 4, 5, 6, 7, 8, and 9, respectively.
[0058] For the power input and filter circuit module, including the connection 12V positive and negative power supply GH1-25-3PIN line pair board socket J1, on GH1-25-3PIN line pair board socket J1 connection SK-22D02-4 slide switch J2, the 3 pin of the slide switch J2 is connected to the feed-through capacitor C13 filter and then connected to avalanche diode D3, then connected to C14, C15, C16 three parallel capacitors for filtering output +VIN; the 4 pin of the slide switch J2 is connected to a voltage dividing resistor R1 and then to a light emitting diode D1 for power switch indicator light, 4 pin is connected to a feed-through capacitor C1 filter and then connected to avalanche diode D2, then connected to C2, C3, C4 three parallel capacitors for filtering output -VIN; the output voltage is about 11.3V.
[0059] For the op-amp positive voltage supply module, the model is 78L05, which can output a fixed positive 5V voltage, and the maximum output current is 100mA, the three pins of the op-amp positive voltage supply module are electrically connected to +VIN, the two pins of the op-amp positive voltage supply module are grounded, and the one pin of the op-amp positive voltage supply module is connected to C5, C6 two parallel capacitors for filtering and outputting a positive 5V voltage.
[0060] For the op-amp negative voltage supply module, the model is 79L05, which can output a fixed negative 5V voltage, and the maximum output current is 150mA, the two pins of the op-amp negative voltage supply module are electrically connected to -VIN, the one pin of the op-amp negative voltage supply module is grounded, and the three pins of the op-amp negative voltage supply module are connected to C7, C8 two parallel capacitors for filtering and outputting a negative 5V voltage.
[0061] For the reverse adjustable bias module, the model is LT1964ES5, which adopts a 5-pin TSOT-23 package; the one pin of the reverse adjustable bias module is grounded, providing a reference potential for the reverse adjustable bias module; the two pin of the reverse adjustable bias module is an input pin, used to connect the external negative power input; the three pin of the reverse adjustable bias module is a bypass pin, connected to a ceramic capacitor ground, used to reduce output noise and improve power stability; the four pin of the reverse adjustable bias module is an adjustment pin, used to accurately adjust the output voltage; the five pin of the reverse adjustable bias module is an output pin, used to output stable negative voltage; the one pin of the reverse adjustable bias module is grounded, the two pin of the reverse adjustable bias module is connected to -VIN, and the three pin of the reverse adjustable bias module is grounded through capacitor C9; a potentiometer R2 is connected between the four pin and the five pin of the reverse adjustable bias module, and C10, C11, C12 three parallel filter capacitors are provided on the potentiometer R2, outputting adjustable negative voltage -VPD for the matrix photodiode; the four pin of the reverse adjustable bias module is grounded through resistor R3.
[0062] The reverse adjustable bias module can provide an output current of 200mA, and the voltage difference is 490mV, that is, the absolute value of the difference between the input voltage and the output voltage must be greater than 490mV, so that the chip can work normally and ensure the stability of the output voltage; at 120Hz, the power supply rejection ratio is typically 54dB, which indicates that the chip has good suppression ability to the ripple and noise in the input power supply, and can output a relatively stable and pure negative DC voltage, reducing the influence of power supply fluctuation on the load.
[0063] For the transimpedance amplification module, the model is OPA657NB / 250, and the SOT23-5 package form is adopted. The first pin of the transimpedance amplification module is the amplifier output end, the second pin of the transimpedance amplification module is the negative voltage input end, the third pin of the transimpedance amplification module is the in-phase input end, the fourth pin of the transimpedance amplification module is the anti-phase input end, and the fifth pin of the transimpedance amplification module is the positive power supply input end. The fourth pin of the transimpedance amplification module is electrically connected with the anode of the matrix photodiode, the third pin of the transimpedance amplification module is grounded, the fifth pin of the transimpedance amplification module is connected with +5V voltage through the parallel connection of capacitors C17 and C19, and the second pin of the transimpedance amplification module is connected with -5V voltage through the parallel connection of capacitors C25 and C26. The first pin of the transimpedance amplification module is connected with the fourth pin of the transimpedance amplification module through a feedback resistor R4. A compensation capacitor C20 is arranged between the first pin and the fourth pin of the transimpedance amplification module to improve the stability of the transimpedance amplification module. The first pin of the transimpedance amplification module is connected with the voltage amplification module through resistors R5 and R6, one end of a filter capacitor C22 is connected to the middle of R5 and R6, and the other end is grounded.
[0064] The trans-impedance amplification module can support two power supply modes of single power supply and double power supply, the single power supply voltage range is 8V-12V, the double power supply voltage range is ±4V-±6V, and ±5V power supply is adopted. The input bias current of the chip is extremely low, only 2PA, this characteristic makes the chip have higher precision and stability when processing weak signals, and can effectively reduce the noise and error introduced by the input current. The chip has a high slew rate of 700V / us, which enables it to quickly respond to changes in the input signal, thereby ensuring the fast rising and falling edges of the output signal, and is suitable for high-speed signal processing circuits with high requirements for signal change speed. Its common-mode rejection ratio (CMRR) and power supply rejection ratio (PSRR) are 79dB and 72dB respectively, which reflect the chip's ability to suppress common-mode signals and power supply noise. Higher CMR and PSRR mean that the chip can effectively suppress the influence of common-mode interference and power supply fluctuations on the output signal, thereby improving the quality and stability of the signal; wider bandwidth and high gain-bandwidth product enable the chip to amplify signals in a wide frequency range, and still maintain good amplification performance at high frequencies, suitable for practical applications that process high-frequency signals.
[0065] For the voltage amplification module, the model is THS4031IDGN, the No. 3 pin of the voltage amplification module is the in-phase input end, one end of the filter capacitor C23 is connected between R6 and the No. 3 pin, and the other end is grounded; the No. 2 pin of the voltage amplification module is the anti-phase input end, which is connected to the output end of the No. 6 pin of the voltage amplification module through the resistance R9 and is grounded through the resistance R11, realizing in-phase amplification; a potentiometer R10 is arranged between the No. 1 pin and the No. 8 pin of the voltage amplification module, so that the power supply-VIN flows into the voltage amplification module through the potentiometer R10, realizing zero adjustment function; the No. 7 pin of the voltage amplification module is connected with the positive voltage +VIN, one end of the filter capacitor C27 is connected between the No. 7 pin of the voltage amplification module and +VIN, and the other end is grounded; the No. 4 pin of the voltage amplification module is connected with the negative voltage-VIN, one end of the filter capacitor C18 is connected between the No. 4 pin and-VIN, and the other end is grounded; the No. 9 pin of the voltage amplification module is grounded; the No. 6 pin of the voltage amplification module is the output end, which is connected back to the No. 3 pin of the voltage amplification module through a compensation capacitor C21, and the No. 6 pin of the voltage amplification module outputs the amplified voltage through the resistances R7 and R8, one end of the filter capacitor C24 is connected between R7 and R8, and the other end is grounded.
[0066] The voltage amplification module can effectively amplify signals in a wide frequency range, can meet the demand of processing signals in a medium frequency range, can quickly respond to changes in the input signal, and the output signal has a fast rising edge and a falling edge, which is suitable for circuits with certain requirements for signal change speed.
[0067] 3x3 PIN matrix photodiode has 9 output signals, each of which is connected to a transimpedance amplifier module and a voltage amplifier module for signal processing and amplification, and then connected to 9 different signal output ports; the power input and filter circuit module provides +VIN (about +11.3V) and -VIN (about -11.3V) power supply voltage for the circuit board, and provides positive and negative input voltage for each THS4031IDGN operational amplifier, the operational amplifier positive voltage supply module provides +5V input voltage for each OPA657NB / 250 operational amplifier, and the operational amplifier negative voltage supply module provides -5V input voltage for each OPA657NB / 250 operational amplifier; the reverse adjustable bias module provides a 3x3 PIN matrix photodiode with an adjustable reverse bias voltage of -1.7V to -11.2V.
[0068] The present application has multi-channel detection and imaging capability, and the 3X3 matrix photodiode can provide 9 pixels, which can simultaneously detect multiple light signals of different wavelengths and obtain more comprehensive spectral information. In spectral analysis, a single measurement can obtain data in a large spectral range, greatly improving the detection efficiency and helping to more accurately analyze the spectral characteristics and composition of the substance; the array structure of the matrix photodiode has imaging capability, which can convert optical images into electrical signal images, and each photodiode corresponds to a pixel point in the image. Through the combination of multiple pixel points, high-resolution imaging can be achieved.
[0069] The present application can obtain higher resolution and sensitivity, each diode can correspond to receive a narrow spectral bandwidth of monochromatic light on the spectrum, which can greatly improve the spectral resolution and can more finely distinguish spectral details and characteristics; multiple photodiodes work in parallel, making the effective receiving area of the light signal larger, and the ability to capture weak light signals stronger, which can detect weaker light signals and improve the sensitivity of the entire system.
[0070] In terms of stability, the present application adopts integrated design and advanced manufacturing process, and the internal circuit layout is optimized, which has lower noise level compared with traditional photodiodes. It can effectively reduce the influence of external interference and internal noise on the signal, improve the signal quality and signal accuracy.
[0071] In conclusion, the nine-way output transimpedance amplification photoelectric detector based on the 3x3 PIN matrix photodiode in the embodiment of the present application can convert optical signals into electrical signals for amplification based on the construction of 3x3 PIN matrix photodiode, and has multi-channel detection imaging capability, can detect multiple optical signals of different wavelengths at the same time, can obtain more comprehensive spectral information to convert optical images into electrical signal images, can integrate semiconductor devices and electronic devices on the same substrate, reduce the connection and parasitic parameters between devices, reduce noise interference, improve the quality and stability of signal transmission, and thus make the detector obtain higher resolution and sensitivity, can detect weaker optical signals, effectively reduce the influence of external interference and internal noise on the signal, improve the signal quality and signal accuracy, and make the detector have more superior overall performance.
[0072] The above specific embodiments cannot be regarded as a limitation on the protection scope of the present application, and any alternative improvement or transformation made by the person skilled in the art to the embodiments of the present application falls within the protection scope of the present application.
[0073] The details not described in the present application are known to the person skilled in the art.
Claims
1. A nine-channel transimpedance amplified photodetector based on 3x3 PIN matrix photodiodes, characterized in that, The photoelectric detector comprises: A photocurrent signal acquisition module is configured to receive laser of specific waveband modulated by an intensity modulator, and comprises a 3x3 PIN matrix photodiode; A power input and filter circuit module is configured to provide stable power supply voltage for the photoelectric detector; An operational amplifier voltage supply module is configured to ensure stability of output voltage, and comprises an operational amplifier positive voltage supply module and an operational amplifier negative voltage supply module; A reverse adjustable bias voltage module is configured to provide adjustable negative power supply voltage for the matrix photodiode; A transimpedance amplification module is configured to effectively reduce noise and error introduced by input current, and ensure rapid rise and fall of output signal; A voltage amplification module is configured to reduce noise interference and improve signal quality and precision; A signal output module is configured to output electrical signal.
2. The 3x3 PIN matrix photodiode based nine-way output transimpedance amplified photodetector according to claim 1, wherein: Nine photodiodes are arranged in the 3x3 PIN matrix photodiode, cathodes of the nine photodiodes are connected together by metal wires to form a common cathode structure, and electrodes are made on anodes and the common cathode of the photodiodes to facilitate connection of external circuits; The 3x3 PIN matrix photodiode can simultaneously measure mobile light beams of multiple wavelengths, has low electrical crosstalk and ultrahigh uniformity between adjacent elements; the size of the 3x3 PIN matrix photodiode is 3.8mmx3.8mm, the size of each pixel is 1mmx1mm, the pixel spacing is 0.2mm, the spectral range is 250nm-1600nm, the detection of ultraviolet, visible and infrared light can be realized, the dark current is less than 0.5nA, the sensitivity is less than 0.5A / W, it can be used for detecting weak light signals, the typical value of rise time is 200ns, the light signal can be quickly converted into an electrical signal, the typical value of reverse breakdown voltage is 25V; the detection numbers of the nine photodiodes are A, B, C, D, E, F, G, H and I, and the corresponding signal output channels are 1, 2, 3, 4, 5, 6, 7, 8 and 9, respectively.
3. The 3x3 PIN matrix photodiode based nine-channel output transimpedance amplified photodetector according to claim 1, wherein: The power input and filter circuit module comprises a GH1-25-3PIN line pair board socket J1 connected with 12V positive and negative power supply, a SK-22D02-4 sliding switch J2 connected on the GH1-25-3PIN line pair board socket J1, a No.3 pin of the sliding switch J2 connected with a feed-through capacitor C13 for filtering, then connected with an avalanche diode D3, then connected with C14, C15 and C16 three parallel capacitors for filtering and outputting +VIN; a No.4 pin of the sliding switch J2 connected with a voltage dividing resistor R1, then connected with a light emitting diode D1 as a power switch indicator, then connected with a feed-through capacitor C1 for filtering, then connected with an avalanche diode D2, then connected with C2, C3 and C4 three parallel capacitors for filtering and outputting -VIN.
4. The 3x3 PIN matrix photodiode based nine-way output transimpedance amplified photodetector of claim 3, wherein: The model of the operational amplifier positive voltage power supply module is 78L05, which can output fixed positive 5V voltage, and the maximum output current is 100mA, the No. 3 pin of the operational amplifier positive voltage power supply module is electrically connected with +VIN, the No. 2 pin of the operational amplifier positive voltage power supply module is grounded, and the No. 1 pin of the operational amplifier positive voltage power supply module is connected with C5 and C6 two parallel capacitors for filtering and then outputting positive 5V voltage.
5. The 3x3 PIN matrix photodiode based nine-channel output transimpedance amplified photodetector of claim 3, wherein: The model of the operational amplifier negative voltage power supply module is 79L05, which can output fixed negative 5V voltage, and the maximum output current is 150mA, the No. 2 pin of the operational amplifier negative voltage power supply module is electrically connected with -VIN, the No. 1 pin of the operational amplifier negative voltage power supply module is grounded, and the No. 3 pin of the operational amplifier negative voltage power supply module is connected with C7 and C8 two parallel capacitors for filtering and then outputting negative 5V voltage.
6. The 3x3 PIN matrix photodiode based nine-channel output transimpedance amplified photodetector of claim 3, wherein: The model of the reverse adjustable bias module is LT1964ES5, which adopts 5-pin TSOT-23 packaging; the No. 1 pin of the reverse adjustable bias module is grounded, and provides a reference potential for the reverse adjustable bias module; the No. 2 pin of the reverse adjustable bias module is an input pin, which is used for connecting an external negative power input; the No. 3 pin of the reverse adjustable bias module is a bypass pin, which is connected with a ceramic capacitor ground, and is used for reducing output noise and improving the stability of the power supply; the No. 4 pin of the reverse adjustable bias module is an adjustment pin, which is used for accurately adjusting the output voltage; and the No. 5 pin of the reverse adjustable bias module is an output pin, which is used for outputting stable negative voltage. The No. 1 pin of the reverse adjustable bias module is grounded, the No. 2 pin of the reverse adjustable bias module is connected with -VIN, and the No. 3 pin of the reverse adjustable bias module is grounded through the capacitor C9; a potentiometer R2 is connected between the No. 4 pin and the No. 5 pin of the reverse adjustable bias module, and C10, C11 and C12 three parallel filter capacitors are arranged on the potentiometer R2, and the output adjustable negative voltage -VPD is used for supplying power to the matrix photodiode; the No. 4 pin of the reverse adjustable bias module is grounded through the resistor R3.
7. The 3x3 PIN matrix photodiode based nine-way output transimpedance amplified photodetector according to claim 6, wherein: The model of the transimpedance amplification module is OPA657NB / 250, which adopts SOT23-5 packaging form, the No. 1 pin of the transimpedance amplification module is an amplifier output end, the No. 2 pin of the transimpedance amplification module is a negative voltage input end, the No. 3 pin of the transimpedance amplification module is a same-phase input end, the No. 4 pin of the transimpedance amplification module is an inverse-phase input end, and the No. 5 pin of the transimpedance amplification module is a positive power input end; The fourth pin of the transimpedance amplification module is electrically connected with the anode of the matrix photodiode, the third pin of the transimpedance amplification module is grounded, the fifth pin of the transimpedance amplification module is connected with +5V voltage through the parallel connection of capacitors C17 and C19, and the second pin of the transimpedance amplification module is connected with -5V voltage through the parallel connection of capacitors C25 and C26; the first pin of the transimpedance amplification module is connected with the fourth pin of the transimpedance amplification module through a feedback resistor R4; a compensation capacitor C20 is arranged between the first pin and the fourth pin of the transimpedance amplification module to improve the stability of the transimpedance amplification module; The first pin of the transimpedance amplification module is connected with the voltage amplification module through resistors R5 and R6, and one end of a filter capacitor C22 is connected to the middle of R5 and R6, and the other end is grounded.
8. The 3x3 PIN matrix photodiode based nine-way output transimpedance amplified photodetector of claim 7, wherein: The voltage amplification module is of THS4031 IDGN type, the third pin of the voltage amplification module is a non-inverting input terminal, one end of a filter capacitor C23 is connected to the middle of R6 and the third pin, and the other end is grounded; the second pin of the voltage amplification module is an inverting input terminal, is connected with the sixth pin output terminal of the voltage amplification module through a resistor R9, and is grounded through a resistor R11 to realize non-inverting amplification; a potentiometer R10 is arranged between the first pin and the eighth pin of the voltage amplification module, so that the power supply-VIN flows into the voltage amplification module through the potentiometer R10 to realize zero adjustment function; the seventh pin of the voltage amplification module is connected with positive voltage +VIN, one end of a filter capacitor C27 is connected to the middle of the seventh pin and +VIN of the voltage amplification module, and the other end is grounded; the fourth pin of the voltage amplification module is connected with negative voltage-VIN, one end of a filter capacitor C18 is connected to the middle of the fourth pin and-VIN, and the other end is grounded; the ninth pin of the voltage amplification module is grounded; the sixth pin of the voltage amplification module is an output terminal, is connected with the third pin of the voltage amplification module through a compensation capacitor C21, and outputs the amplified voltage through resistors R7 and R8, one end of a filter capacitor C24 is connected to the middle of R7 and R8, and the other end is grounded.
9. The 3x3 PIN matrix photodiode based nine-output transimpedance amplified photodetector according to claim 8, wherein: The sixth pin of the voltage amplification module is connected with the signal output module through a resistor R8, and the signal output module is an SMA interface.