Non-conductor gdms assisted testing device

Abstract

The utility model discloses a kind of non-conductor GDMS auxiliary testing devices, including blocky sample to be measured;Auxiliary electrode is wrapped in the outside of the sample to be measured;Multiple openings, the surface of the auxiliary electrode is penetrated, and the opening is used for being contacted with the plasma of the wrapped sample to be measured and emission.This utility model is wrapped by auxiliary electrode whole piece non-conductive sample to be measured, and opening is set on auxiliary electrode, so that measured sample is exposed from opening, the plasma at high-purity argon ionization place is not only bombarded to the auxiliary electrode of conductive cavity when cathode surface is bombarded, and exposed non-conductive sample to be measured also can be bombarded with plasma of equal intensity, plasma containing measured sample information enters MS behind equipment, different elements are separated according to mass-to-charge ratio, and sample information can be obtained, compared with the prior art, it is often selected to be broken into smaller particles, and test result is more accurate and stable when being pressed on indium strip test.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of GDMS sample preparation, and particularly relates to a non-conductor GDMS auxiliary testing device. BACKGROUND

[0002] GDMS (Glow Discharge Mass Spectrometry) is a glow discharge mass spectrometry method, which uses a glow discharge source as an ion source to sputter and ionize a sample under the action of glow discharge, and the generated ions are separated and detected by a mass analyzer.

[0003] The GDMS cannot directly test samples that are not conductive or have poor conductivity. Currently, auxiliary electrodes are generally used for auxiliary discharge to test samples that are not conductive or have poor conductivity. However, in related technologies, when testing non-conductive quartz, the non-conductive quartz is generally crushed into small particles and pressed on an indium strip for testing. This method requires repeated sampling to obtain a stable signal when processing the sample due to the non-conductive nature of the quartz, which reduces the overall operation efficiency. UTILITY MODEL CONTENT

[0004] The utility model discloses a non-conductor GDMS auxiliary testing device to solve the above problems.

[0005] The utility model discloses a non-conductor GDMS auxiliary testing device to solve the above problems.

[0006] A non-conductor GDMS auxiliary testing device includes a block-shaped sample to be tested.

[0007] An auxiliary electrode is wrapped around the outside of the sample to be tested.

[0008] A plurality of openings penetrate the surface of the auxiliary electrode, and the openings are used to contact the wrapped sample to be tested with the emitted plasma.

[0009] As a further description of the above technical solution, the size of the sample to be tested is not less than 2cm*2cm*1cm.

[0010] As a further description of the above technical solution, the auxiliary electrode is an indium sheet.

[0011] As a further description of the above technical solution, the auxiliary electrode completely wraps the front and side surfaces of the sample to be tested, and the auxiliary electrode partially wraps the bottom of the sample to be tested.

[0012] As a further description of the above technical solution, the diameter of the opening is 0.8-1.2cm.

[0013] As a further description of the above technical solution, the four holes are regularly distributed.

[0014] As a further description of the above technical solution, the purity of the indium sheet is not less than 7N.

[0015] As a further description of the above technical solution, the test surface of the sample to be tested is a smooth plane.

[0016] The beneficial effects of the present application are as follows:

[0017] 1. The auxiliary electrode of the present application wraps the whole non-conductive sample to be tested, and the auxiliary electrode is provided with holes, so that the sample to be tested is exposed from the holes. When the plasma at the high-purity argon ionization position bombards the surface of the cathode, not only the auxiliary electrode of the conductive cavity is bombarded, but also the non-conductive sample to be tested is bombarded by the plasma with the same intensity. The plasma containing the information of the sample to be tested enters the MS behind the device, and different elements are separated according to the mass-to-charge ratio to obtain the sample information. Compared with the prior art, the sample is usually crushed into small particles and pressed on the indium strip for testing, and the test result is more accurate and stable.

[0018] To make the structure characteristics and effects of the present application clearer, the present application will be described in detail below in combination with the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0019] Fig. 1 is a top view of the auxiliary testing device;

[0020] Fig. 2 is a side sectional view of the auxiliary testing device.

[0021] Reference signs: 1, sample to be tested; 2, auxiliary electrode; 3, hole. DETAILED DESCRIPTION

[0022] To make the structure characteristics and effects of the present application clearer, the present application will be described in detail below in combination with the drawings and specific embodiments.

[0023] As shown in Figs. 1-2 In one embodiment, a non-conductor GDMS auxiliary testing device includes a block-shaped sample to be tested 1, wherein the size of the block-shaped sample to be tested 1 is not less than 2cm*2cm*1cm, and in some embodiments, 2cm*2cm*1cm can be selected.

[0024] The auxiliary electrode 2 is wrapped outside the sample to be tested 1, and in some embodiments, the auxiliary electrode 2 can be an indium sheet, specifically, the indium sheet completely wraps the front and side of the test surface of the sample to be tested 1, and partially wraps the bottom, forming a continuous conductor, avoiding covering only the surface of the test surface with an indium sheet, and still having the problem that the sample cannot conduct electricity during testing.

[0025] A plurality of openings 3 are formed on the surface of the indium sheet, so that the sample to be tested 1 is exposed from the openings 3. When the plasma ionized by the high-purity argon bombards the surface of the cathode, not only the surface of the indium sheet with strong conductivity is bombarded, but also the exposed quartz surface is bombarded by plasma with the same intensity. The plasma containing the sample information enters the GDMS behind the device, and different elements are separated according to the mass-to-charge ratio to obtain the sample information.

[0026] Optionally, the purity of the indium sheet is not less than 7N, and the high-softness and high-purity indium is used as the auxiliary electrode 2. The high-softness of the indium facilitates the processing of the indium sheet and the perforation of the indium sheet during sample preparation, and the background influence during testing is small, so that the measured data more accurately represents the content information of the sample itself. Indium is a high-conductivity metal, which can change the conductivity of the cathode sample, so that the sample which is not conductive can generate effective ion sputtering on the sample surface by the auxiliary action of indium, and the plasma containing the sample information is separated by the mass spectrometry system behind the instrument to obtain the sample information. The device effectively solves the problem that the sample of this type cannot be tested due to the conductivity problem during GDMS testing, and can also be used for non-conductive coating samples that cannot be destroyed.

[0027] Optionally, the diameter of the opening 3 is 0.8-1.2cm, and preferably, the diameter of the opening 3 is 1cm, which can effectively reduce the problem that when the diameter of the opening 3 is too large, the sample to be tested 1 is exposed too much, and the sample will face the problems of difficult stability of current and voltage, large fluctuation of main element and impurity signal, and too strong background noise during testing. Optionally, the opening 3 is provided with four openings 3 which are regularly distributed.

[0028] Optionally, the opening 3 is drilled by a detachable tantalum groove, and the purity of the tantalum groove is 4N. Drilling by the tantalum groove can effectively reduce the problem that drilling by other materials may introduce other metal materials, causing inaccurate test results.

[0029] The above description of disclosed embodiments enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A non-conductor GDMS assisted testing device, characterized in that, The block-shaped sample to be tested; The auxiliary electrode is wrapped outside the sample to be tested; A plurality of openings are provided through the surface of the auxiliary electrode, and the openings are used for the wrapped sample to be tested to be in contact with the emitted plasma.

2. The non-conductor GDMS assisted testing device of claim 1, wherein, The size of the sample to be tested is not less than 2cm*2cm*1cm.

3. The non-conductive GDMS assisted testing device of claim 1, wherein, The auxiliary electrode is an indium sheet.

4. The non-conductive GDMS assisted testing device of claim 1, wherein, The auxiliary electrode completely wraps the front surface and the side surface of the sample to be tested, and partially wraps the bottom of the sample to be tested.

5. The non-conductive GDMS assisted testing device of claim 1, wherein, The diameter of the opening is 0.8-1.2cm.

6. The non-conductive GDMS assisted testing device of claim 1, wherein, Four openings are provided, and the four openings are regularly distributed.

7. The non-conductive GDMS assisted testing device of claim 3, wherein, The purity of the indium sheet is not less than 7N.

8. The non-conductive GDMS assisted testing device of claim 1, wherein, The test surface of the sample to be tested is a smooth plane.

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