Refrigerant type testing head

Abstract

The utility model provides a refrigerant type testing head. The refrigerant type testing head comprises a testing head body, a flow channel structure, a refrigerant pipe heat preservation shell and a testing jig structure. The top of the testing jig structure is provided with the testing head main body, the testing head main body is internally provided with the flow channel structure, one end of the flow channel structure is located outside the testing head main body and is sleeved with the refrigerant pipe heat preservation shell, and the testing assemblies are installed above the testing head main body and below the testing jig structure. The device has the beneficial effects that high-power pressing is realized by adopting refrigerant type cooling, the drying air curtain can play a role in preventing condensation on the refrigerant type testing head, and the structural arrangement of the testing head also has no strict requirement on the environment humidity of equipment; and when the refrigerant leaks, a pressure monitoring alarm is given, a worker can be reminded to check in time, the leakage does not cause damage to the test system, and the practicability of the system is further improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the chip test field especially, and it relates to a refrigerant type test head. BACKGROUND

[0002] With the continuous progress and update of system-on-chip technology, its heat power presents a clear upward trend. This change puts forward higher requirements for testing equipment. Under the condition of limited size, the market urgently needs a test head that can realize high-power compression through an automatic temperature control (ATC) system.

[0003] Currently, traditional liquid-cooled test heads have shown some limitations in practical applications. For example, their compression capacity is weak, there is a potential risk of liquid leakage, the heat exchange efficiency is limited, and the liquid medium may react with the flow channel, causing additional loss and blockage. These objective drawbacks limit the performance of the test head in terms of efficient heat dissipation, which is not conducive to the stable testing and evaluation of system-on-chip.

[0004] In order to cope with these challenges, it is particularly important to develop a new type of efficient and safe test head solution. This not only relates to the accuracy of chip testing, but also directly affects the sustainable development and product quality of the entire electronic manufacturing industry. SUMMARY

[0005] Therefore, the utility model aims to propose a refrigerant type test head to solve at least one problem existing in the prior art.

[0006] To achieve the above purpose, the technical scheme of the utility model is as follows:

[0007] A refrigerant type test head, comprising a test head main body, a flow channel structure, a refrigerant pipe heat preservation shell, and a test fixture structure; the test fixture structure is installed on the top of the test head main body, the flow channel structure is installed inside the test head main body, one end of the flow channel structure is located outside the test head main body, and the refrigerant pipe heat preservation shell is sleeved on the one end of the flow channel structure; the test head main body is installed above the test fixture structure.

[0008] Further, the test head body comprises guide columns, a flow channel heat preservation shell, an air bag core, ball bushings, jackscrews, bushing pressing plates, dry gas connectors, air bag connectors, a test head base plate and hooks, the flow channel heat preservation shell is provided with one guide column at each of the four corners of the bottom, the test head base plate is installed at the top of the flow channel heat preservation shell, the flow channel heat preservation shell and the test head base plate are connected through four ball bushings, two ball bushings form a group, two groups of ball bushings are arranged in parallel, one bushing pressing plate is installed between each group of ball bushings, the air bag core is installed at the center of the top of the flow channel heat preservation shell, one dry gas connector is installed at each of the left and right sides of the test head base plate, the air bag connector is installed on one side of the dry gas connector, one hook is installed at each of the front and rear sides of the test head base plate, one jack screw is installed at each of the four corners of the test head base plate, and the flow channel structure, the flow channel heat preservation shell, the air bag core, the ball bushings and the bushing pressing plates form an integrated structure.

[0009] Further, the flow channel structure comprises a flow channel body, a refrigerant pipe body and a refrigerant pipe connector, the flow channel body, the refrigerant pipe body and the refrigerant pipe connector are connected into an integrated flow channel structure in a welding manner, and the refrigerant pipe connector is connected to a refrigerant type refrigerator through an external pipeline.

[0010] Further, the test head body further comprises an air bag body, the flow channel heat preservation shell is made of an engineering plastic resistant to high and low temperatures, the bottom of the test head base plate is hollowed out to form the air bag body, and when the air bag connector is inflated, the flow channel structure can slide up and down along the guide columns.

[0011] Further, the test head body further comprises a test head heat preservation shell and a dry gas path cover plate, the bottom of the test head base plate is further provided with the dry gas path cover plate, the lower surface of the dry gas path cover plate is provided with a gas path flow channel, a plurality of dry gas outlet holes are formed in the test head base plate, and the outside of the flow channel heat preservation shell is provided with the test head heat preservation shell.

[0012] Further, the test head body further comprises a jig connecting plate, a heat conduction sheet and a heating sheet, the test jig structure comprises a secondary test jig, a temperature sensor and a primary test jig, the jig connecting plate is installed on the flow channel structure, a plurality of fixed hole positions are arranged on the jig connecting plate to adapt to different test jigs, the secondary test jig is installed on the jig connecting plate through bolts, the heat conduction sheet and the heating sheet are installed between the secondary test jig and the jig connecting plate, the temperature sensor is arranged at the center of the secondary test jig, and the primary test jig is installed on the guide column.

[0013] Further, the refrigerant pipe heat preservation shell comprises a heat preservation shell lower cover, a heat preservation shell upper cover, a connecting plate, a dry gas manifold block and an air connector body, the heat preservation shell lower cover and the heat preservation shell upper cover form a heat preservation shell structure through the connecting plate, the dry gas manifold block is installed at the top of the heat preservation shell structure, and the dry gas manifold block is provided with the air connector body on one side.

[0014] Further, the test assembly comprises a test seat, spring needles and a first cylinder, the spring needles are arranged in the test seat, a test process is that the test head presses the chip into the test seat, the chip contacts the spring needles, the test head body is installed on the first cylinder through a hook, the first cylinder is installed together with a first test fixture through guide columns, the first test fixture contacts the outer circle of the chip.

[0015] Compared with the prior art, the refrigerant type test head has the following advantages:

[0016] The refrigerant type test head has the following advantages: BRIEF DESCRIPTION OF DRAWINGS

[0017] The drawings constituting a part of the present application are used to provide a further understanding of the present application, the illustrative embodiments of the present application and the description thereof are used to explain the present application, and do not constitute an improper limitation on the present application. In the drawings:

[0018] Figure 1 The general assembly schematic view described in the embodiment of the present application;

[0019] Figure 2 The floating mechanism schematic view of the refrigerant flow channel described in the embodiment of the present application;

[0020] Figure 3 The anti-condensation mechanism schematic view of the refrigerant flow channel described in the embodiment of the present application;

[0021] Figure 4 The temperature control mechanism schematic view described in the embodiment of the present application;

[0022] Figure 5 The refrigerant test head application schematic view described in the embodiment of the present application.

[0023] BRIEF DESCRIPTION OF DRAWINGS

[0024] 10, test head body; 20, flow channel structure; 30, refrigerant pipe heat preservation shell; 40, test fixture structure;

[0025] 1001, guide column; 1002, flow passage heat preservation shell; 1003, air bag core; 1004, ball bushing; 1005, jackscrew; 1006, bushing pressing plate; 1007, dry gas joint; 1008, air bag joint; 1009, test head base plate; 1010, hook; 1011, test head heat preservation shell; 1012, air bag body; 1013, dry gas channel cover plate; 1014, dry gas outlet hole; 1015, jig connecting plate; 1016, heat conduction sheet; 1017, heating sheet;

[0026] 2001, flow passage main body; 2002, refrigerant pipe body; 2003, refrigerant pipe joint;

[0027] 3001, heat preservation shell lower cover; 3002, heat preservation shell upper cover; 3003, connecting plate; 3004, dry gas manifold block; 3005, joint body;

[0028] 4001, secondary test jig; 4002, temperature sensor; 4003, primary test jig;

[0029] 5001, test seat; 5002, spring needle; 5003, chip; 5004, primary cylinder. DETAILED DESCRIPTION

[0030] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0031] In the description of the present application, it should be understood that the orientation or position relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0032] In the description of the utility model, it is necessary to explain that, unless there is definite stipulation and limitation, the term "installation", "connection" should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through intermediate medium, can be two elements inside the communication。For ordinary skilled in the art, the above-mentioned terms can be understood by the specific meaning in the utility model through specific circumstances.

[0033] The utility model will be described in detail below with reference to the drawings and in combination with embodiments.

[0034] As Figures 1 to 5 Indicated, a kind of refrigerant test head includes test head main body 10, flow passage structure 20, refrigerant pipe heat preservation shell 30 and test fixture structure 40;The test fixture structure 40 top installation test head main body 10, test head main body 10 inside installation flow passage structure 20, flow passage structure 20 one end is located outside test head main body 10, and is sleeved with refrigerant pipe heat preservation shell 30, test head main body 10 top and test fixture structure 40 below are all installed with test assembly.

[0035] The utility model discloses technical effect;With refrigerant type cooling to realize high-power pressing, dry air curtain can prevent the effect of refrigerant type test head dewing, the structure of this test head is also strictly required to the equipment environment humidity;And when refrigerant leakage will have pressure monitoring alarm, can remind staff to check in time, and leakage will not cause damage to test system, further improve the practicality of the present application.

[0036] In a preferred embodiment of the present application, the test head body 10 comprises guide posts 1001, a flow channel heat preservation shell 1002, a balloon core 1003, ball bushings 1004, jackscrews 1005, bushing pressing plates 1006, dry gas connectors 1007, balloon connectors 1008, a test head base plate 1009, and hooks 1010. The flow channel heat preservation shell 1002 is provided with one guide post 1001 at each of the four corners of the bottom, and is provided with the test head base plate 1009 at the top. The flow channel heat preservation shell 1002 and the test head base plate 1009 are connected by four ball bushings 1004, two ball bushings 1004 for each group, and the two groups of ball bushings 1004 are arranged in parallel. One bushing pressing plate 1006 is arranged between each group of ball bushings 1004. The balloon core 1003 is arranged at the center of the top of the flow channel heat preservation shell 1002. One dry gas connector 1007 is arranged at each of the left and right sides of the test head base plate 1009. The dry gas connector 1007 is provided with the balloon connector 1008 on one side. One hook 1010 is arranged at each of the front and back sides of the test head base plate 1009. One jackscrew 1005 is arranged at each of the four corners of the test head base plate 1009. The flow channel structure 20 is integrated with the flow channel heat preservation shell 1002, the balloon core 1003, the ball bushings 1004, and the bushing pressing plates 1006. The test head body 10 further comprises a balloon body 1012. The flow channel heat preservation shell 1002 is made of high-temperature-resistant engineering plastic. The bottom of the test head base plate 1009 is hollowed out to form the balloon body 1012. When the balloon connector 1008 is inflated, the flow channel structure 20 can slide up and down along the guide posts. The test head body 10 further comprises a test head heat preservation shell 1011 and a dry gas path cover plate. The bottom of the test head base plate 1009 is further provided with the dry gas path cover plate. The dry gas path cover plate is provided with a gas path flow channel below. The test head base plate 1009 is further provided with a plurality of dry gas outlet holes 1014. The test head heat preservation shell 1011 is arranged outside the flow channel heat preservation shell 1002. In this embodiment, the test head body 10 can carry test components and can also play a heat preservation role for the flow channel structure 20.

[0037] In a preferred embodiment of the present application, the flow channel structure 20 comprises a flow channel body 2001, a refrigerant pipe body 2002, and a refrigerant pipe connector 2003. The flow channel body 2001, the refrigerant pipe body 2002, and the refrigerant pipe connector 2003 are connected in an integrated flow channel structure 20 by welding. The refrigerant pipe connector 2003 is connected to a refrigerant type refrigeration machine by an external pipeline and monitors the system pressure. In actual use, the refrigeration capacity of the refrigerant type refrigeration machine can be used to cool the refrigerant test head through the flow channel structure 20. The arrangement of the flow channel body 2001 can also reduce the overall weight of the test head, and has strong practicality.

[0038] In a preferred embodiment of the present application, the coolant pipe insulation shell 30 comprises an insulation shell lower cover 3001, an insulation shell upper cover 3002, a connecting plate 3003, a dry gas manifold block 3004, and a gas joint body 3005. The insulation shell lower cover 3001 and the insulation shell upper cover 3002 form an insulation shell structure through the connecting plate 3003. The dry gas manifold block 3004 is installed at the top of the insulation shell structure. The dry gas manifold block 3004 is provided with the gas joint body 3005 on one side. In this embodiment, the structure of the coolant pipe insulation shell 30 can provide insulation for the coolant pipe body 2002 of the flow channel structure 20, further improving the cooling effect of the refrigerant-type chiller.

[0039] In a preferred embodiment of the present application, the test head main body 10 further comprises a jig connecting plate 1015, a heat conduction sheet 1016, and a heating sheet 1017. The test jig structure 40 comprises a secondary test jig 4001, a temperature sensor 4002, and a primary test jig 4003. The jig connecting plate 1015 is installed on the flow channel structure 20. The jig connecting plate 1015 is provided with a plurality of fixed hole positions for adapting different test jigs. The secondary test jig 4001 is installed on the jig connecting plate 1015 through bolts. The heat conduction sheet 1016 and the heating sheet 1017 are installed between the secondary test jig 4001 and the jig connecting plate 1015. The temperature sensor 4002 is arranged at the center of the secondary test jig 4001. The primary test jig 4003 is installed on the guide column. The test assembly comprises a test seat 5001, a spring needle 5002, and a primary cylinder 5004. The spring needle 5002 is arranged in the test seat 5001. In the test process, the test head presses the chip 5003 into the test seat 5001, and the chip 5003 contacts the spring needle 5002. The test head main body 10 is installed on the primary cylinder 5004 through the hook 1010. The primary cylinder 5004 is installed together with the primary test jig 4003 through the guide column and the primary test jig 4003. The primary test jig 4003 contacts the outer circle of the chip 5003. In this embodiment, when the secondary test jig 4001 of the test jig structure 40 contacts the Die of the chip 5003, the pressure acting on the Die of the chip 5003 can be adjusted by controlling the pressure of the air bag body 1012 to prevent damage to the Die due to excessive pressure. At the same time, it can ensure that the secondary test jig 4001 is tightly attached to the Die of the chip 5003 to balance the heat generated in the Die during the operation of the chip 5003.

[0040] Embodiment 1

[0041] As Figure 1As shown, this test head consists of a test head body 10, a flow channel structure 20, a refrigerant pipe insulation shell 30, and a test fixture structure 40. The refrigerant pipe insulation shell 30 includes a lower insulation shell cover 3001, an upper insulation shell cover 3002, a connecting plate 3003, a drying gas manifold block 3004, and a gas connector body 3005. The lower insulation shell cover 3001 and the upper insulation shell cover 3002 form an insulation shell structure through the connecting plate 3003. The drying gas manifold block 3004 is installed on the top of the insulation shell structure, and the gas connector body 3005 is provided on one side of the drying gas manifold block 3004.

[0042] like Figure 2 As shown, the main body 2001, refrigerant pipe body 2002, and refrigerant pipe connector 2003 are welded together to form an integrated flow channel structure 20. The area of ​​the main body 2001 without refrigerant flow channel placement is hollowed out to reduce the overall weight of the test head. The refrigerant pipe connector 2003 is ultimately connected to a refrigerant-type chiller (not shown in this figure) via other pipes. The chiller cools the refrigerant test head and monitors the system pressure. The flow channel structure 20 is integrated with the flow channel insulation shell 1002, airbag core 1003, ball bushing 1004, and bushing pressure plate 1006. The flow channel insulation shell 1002 is made of high and low temperature resistant engineering plastic, which insulates the flow channel structure 20 and prevents the ball bushing 1004 and airbag core 1003 from malfunctioning due to excessively low temperatures. It also prevents low-temperature radiation to some extent and prevents condensation on other peripheral components due to excessively low temperatures. The guide post 1001 passes through the ball bushing 1004 and connects to the test head base plate 1009. The guide post 1001 has a flat section, which, in conjunction with the set screw 1005 on the test head base plate 1009, prevents the guide post from slipping during installation and ensures that the guide post is aligned in the same direction after installation. The back of the test head base plate 1009 has a hollowed-out section to form the airbag body 1012. When the airbag connector 1008 is inflated, the flow channel structure 20 can slide up and down along the guide post 1001.

[0043] like Figure 3 As shown, the back of the test head substrate 1009 has a drying air passage cover 1013, and there is an air passage under the cover. When the drying air is connected through the drying air connector 1007, it will eventually exit from the drying air outlet 1014. There are two drying air connectors 1007 in total, and a total of eight drying air outlets 1014 can be used to exit the drying air. When the test head insulation shell 1011 is connected to the test head substrate 1009, the air exiting from the eight drying air outlets 1014 will form a downward-facing annular air curtain, which can prevent condensation on the test head.

[0044] like Figure 4As shown, the fixture connecting plate 1015 is installed on the flow channel structure 20. The fixture connecting plate has multiple sets of fixing holes to adapt to different test fixtures. The secondary test fixture 4001 is installed on the fixture connecting plate 1015 by bolts, with a heating element 1017 and a heat-conducting element 1016 sandwiched in the middle. The heating element 1017 can heat to balance the coldness of the refrigerant. The temperature sensor 4002 is arranged in the center of the secondary test fixture. The heat-conducting element 1016 is a flexible heat-conducting material that can fill the gap between workpieces and increase the temperature transmission efficiency. The primary test fixture 4003 is installed on the guide post 1001.

[0045] like Figure 5 As shown, chip 5003 is a bare die. Spring pin 5002 is positioned within test socket 5001. During testing, the test head presses chip 5003 into test socket 5001, bringing chip 5003 into contact with spring pin 5002, thus completing a series of electrical tests. Chip 5003 generates heat during operation, requiring the test head to balance this heat and maintain chip 5003 at a set temperature. The test head is mounted on primary cylinder 5004 via hook 1010. Primary cylinder 5004 is connected to primary test fixture 4003 via guide post 1001. Primary test fixture 4003 contacts the outer ring of chip 5003. The pressure applied to the outer ring of chip 5003 can be controlled by adjusting the air pressure in cylinder 5004, providing the main pressure for chip testing. Figure 2 Figure 4 In the description, the secondary test fixture 4001 is mounted on the flow channel structure 20, which can slide up and down along the guide post. The secondary test fixture 4001 contacts the die of the chip 5003, and the pressure applied to the die of the chip 5003 is adjusted by controlling the pressure of the airbag body 1012 to prevent excessive pressure from damaging the die. At the same time, it can ensure that the secondary test fixture 4001 is in close contact with the die of the chip 5003, which is beneficial to the heat conduction.

[0046] Furthermore, in the flow channel 20 system, temperature control is achieved through the combined action of the cooling refrigerant from the refrigerator and the heating element 1017, working together to maintain a set stable dynamic balance. During the testing phase, when the chip 5003 generates heat, the heating element 1017 adjusts its heat output to maintain dynamic balance within the preset temperature range. This refrigerant-based cooling method can deliver a large cooling capacity and achieve a high dynamic balance value in the initial stage, making it suitable for suppressing the temperature of high-power chips.

[0047] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A refrigerant-type test head, characterized in that: It includes a test head body, a flow channel structure, a refrigerant pipe insulation shell, and a test fixture structure; the test head body is installed on the top of the test fixture structure, the flow channel structure is installed inside the test head body, one end of the flow channel structure is located outside the test head body and is fitted with a refrigerant pipe insulation shell, and test components are installed above the test head body and below the test fixture structure.

2. The refrigerant-type test head according to claim 1, characterized in that: The test head body includes guide posts, a flow channel insulation shell, an air bladder core, ball bushings, set screws, bushing pressure plates, a dry gas connector, an air bladder connector, a test head base plate, and hooks. A guide post is installed at each of the four corners of the bottom of the flow channel insulation shell. The test head base plate is installed at the top of the flow channel insulation shell. The flow channel insulation shell and the test head base plate are connected by four ball bushings, with two ball bushings forming a group. The two groups of ball bushings are arranged in parallel, and a bushing pressure plate is installed between each group of ball bushings. An air bladder core is installed at the center of the top of the flow channel insulation shell. A dry gas connector is installed on each of the left and right sides of the test head base plate, and an air bladder connector is installed on one side of each dry gas connector. A hook is installed on each of the front and rear sides of the test head base plate, and a set screw is installed at each of the four corners of the test head base plate. The flow channel structure, flow channel insulation shell, air bladder core, ball bushings, and bushing pressure plates form an integrated structure.

3. A refrigerant-type test head according to claim 1, characterized in that: The flow channel structure includes a flow channel body, a refrigerant pipe body, and a refrigerant pipe connector. The flow channel body, refrigerant pipe body, and refrigerant pipe connector are connected to form an integrated flow channel structure by welding. The refrigerant pipe connector is connected to a refrigerant-type refrigeration unit through an external pipe.

4. A refrigerant-type test head according to claim 3, characterized in that: The test head body also includes an airbag body, and the flow channel insulation shell is made of engineering plastic resistant to high and low temperatures. The bottom of the test head substrate has a hollowed-out area to form the airbag body. When the airbag air connector is inflated, the flow channel structure can slide up and down along the guide post.

5. A refrigerant-type test head according to claim 1, characterized in that: The test head body also includes a test head insulation shell and a drying gas path cover plate. A drying gas path cover plate is also installed at the bottom of the test head base plate. There is a gas path flow channel under the drying gas path cover plate. Multiple drying gas outlet holes are also opened on the test head base plate. The test head insulation shell is provided outside the flow channel insulation shell.

6. A refrigerant-type test head according to claim 1, characterized in that: The test head body also includes a fixture connecting plate, a heat-conducting plate, and a heating plate. The test fixture structure includes a secondary test fixture, a temperature sensor, and a primary test fixture. The fixture connecting plate is mounted on the flow channel structure. The fixture connecting plate has multiple sets of fixing holes to adapt to different test fixtures. The secondary test fixture is mounted on the fixture connecting plate by bolts. The heat-conducting plate and the heating plate are installed between the secondary test fixture and the fixture connecting plate. The temperature sensor is arranged in the center of the secondary test fixture. The primary test fixture is mounted on the guide post.

7. A refrigerant-type test head according to claim 1, characterized in that: The refrigerant pipe insulation shell includes a lower insulation shell cover, an upper insulation shell cover, a connecting plate, a drying gas manifold block, and a gas connector body. The lower insulation shell cover and the upper insulation shell cover form an insulation shell structure through the connecting plate. The drying gas manifold block is installed on the top of the insulation shell structure, and a gas connector body is provided on one side of the drying gas manifold block.

8. A refrigerant-type test head according to claim 1, characterized in that: The test assembly includes a test socket, a spring pin, and a first-stage cylinder. The spring pin is arranged in the test socket. During the test, the test head presses the chip into the test socket, and the chip contacts the spring pin. The test head body is mounted on the first-stage cylinder via a hook. The first-stage cylinder is mounted together with the first-stage test fixture via a guide post. The first-stage test fixture contacts the outer ring of the chip.

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