Semiconductor storage container cleaning carrier

Abstract

The embodiment of the utility model provides a semiconductor storage container cleaning carrier, and relates to the technical field of semiconductor storage container processing. The utility model provides a semiconductor storage container cleaning carrier. The semiconductor storage container cleaning carrier comprises a loading frame, a first limiting assembly for clamping a box body, a second limiting assembly for clamping a wafer box, a third limiting assembly for clamping a box cover and a fixing assembly. The fixing assembly comprises a locking piece arranged at the top end of the loading frame in the first direction, a fixing rod and a mounting base, and the fixing rod is further provided with a first abutting piece abutting against the box body, a second abutting piece abutting against the wafer box and a third abutting piece abutting against the box cover so as to be matched with the first limiting assembly, the second limiting assembly and the third limiting assembly. And meanwhile, the box body, the film box and the box cover are fixed. The semiconductor storage container cleaning carrier provided by the utility model has the effect of solving the problem that the operation is complicated and tedious when the storage container is mounted on the cleaning carrier at present.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor storage container processing technical field, and specifically, relates to a semiconductor storage container cleaning carrier. BACKGROUND

[0002] In the field of semiconductor manufacturing, wafer storage and transportation are very important, in order to simplify transportation and reduce the risk of contamination as much as possible, the wafer is usually stored in a wafer storage container composed of a wafer box, a box body and a box cover. After the semiconductor device goes through different processes, various pollutants (such as solid particles, organic matter, etc.) generated on the surface of the semiconductor device will contaminate the storage container when the wafer is stored in the storage container. Therefore, the semiconductor storage container needs to be cleaned, and the wafer box, the box body and the box cover are usually installed on the carrier and then sent to a special cleaning equipment for cleaning.

[0003] At present, during the process of installing the storage container on the cleaning carrier, the wafer box, the box body and the box cover need to be installed and fixed respectively, which is complicated and tedious to operate. UTILITY MODEL CONTENTS

[0004] The utility model aims to provide a semiconductor storage container cleaning carrier, which can improve the problem of complicated and tedious operation when the storage container is installed on the cleaning carrier.

[0005] The embodiment of the utility model can be implemented as follows:

[0006] In a first aspect, the utility model provides a semiconductor storage container cleaning carrier, the storage container includes a box body, a wafer box and a box cover, and the cleaning carrier includes:

[0007] The loading frame has a first region, a second region and a third region arranged along a first direction, the first region is used for accommodating the box body, the second region is used for accommodating the wafer box, and the third region is used for accommodating the box cover;

[0008] The first limiting component is arranged at the bottom of the loading frame and is used for clamping and limiting the box body;

[0009] The second limiting component is arranged at the bottom of the loading frame and is used for clamping and limiting the wafer box;

[0010] The third limiting component is arranged at the bottom of the loading frame and is used for clamping and limiting the box cover;

[0011] The fixing assembly comprises a locking member arranged at the top end of the loading frame in the first direction, a fixing rod and a mounting base, one end of the fixing rod is hingedly arranged on the mounting base, the other end of the fixing rod is movable relative to the locking member and is locked by the locking member, and the fixing rod is further provided with a first abutting member, a second abutting member and a third abutting member; the first abutting member extends into the first area and abuts against the box body, the second abutting member extends into the second area and abuts against the film box, and the third abutting member extends into the third area and abuts against the box cover.

[0012] In an optional embodiment, the locking member comprises a base mounted on the loading frame, a stopper and a locking portion connected with the stopper, the base has a clamping groove, and the locking portion is configured to drive the stopper to move relative to the base under external force to block the fixing rod in the clamping groove.

[0013] In an optional embodiment, the fixing rod further comprises an abutting portion, and the abutting portion has a first abutting plane;

[0014] The stopper has a second abutting plane matched with the first abutting plane, and the first abutting plane abuts against the second abutting plane when the fixing rod is located in the clamping groove.

[0015] In an optional embodiment, the first limiting assembly comprises a first clamping member and a second clamping member, the box body has an open end and a closed end, the box body is arranged in the first area with the open end and the closed end in the first direction, the first clamping member is used for clamping the open end of the box body, and the second clamping member is used for clamping the closed end of the box body.

[0016] The first clamping member comprises a first clamping portion, and the second clamping member comprises a second clamping portion, the first clamping portion and the second clamping portion limit the box body in the first direction, and the first clamping portion cooperates with the box body to limit the box body in a second direction;

[0017] The second direction is perpendicular to the first direction in the horizontal direction.

[0018] In an optional embodiment, the first clamping member further comprises a first limiting portion abutting against the bottom of the open end of the box body, the second clamping member further comprises a second limiting portion abutting against the bottom of the closed end of the box body, and the first limiting portion, the second limiting portion and the first abutting member cooperate to limit the box body in the height direction;

[0019] The second limiting portion is higher than the first limiting portion in the horizontal direction, so that the closed end of the box body is higher than the open end of the box body.

[0020] In an optional embodiment, the second limiting assembly comprises a third clamping member and a fourth clamping member, the third clamping member and the fourth clamping member are arranged on the loading frame along the first direction, and the third clamping member and the second clamping member are staggered and spaced along a second direction.

[0021] In an optional embodiment, the third clamping member has a third clamping portion and a third limiting portion, and the third limiting portion is located on one side of the third clamping portion; the fourth clamping member has a fourth clamping portion and a fourth limiting portion, and the fourth limiting portion is located on one side of the fourth clamping portion.

[0022] When the film box is placed on the second limiting assembly, the third clamping portion and the fourth clamping portion jointly limit the film box in the first direction, the third limiting portion and the fourth limiting portion jointly limit the film box in the second direction, and the third limiting portion, the fourth limiting portion and the second abutting member cooperate to limit the film box in the height direction.

[0023] In an optional embodiment, a first through hole is formed in the third clamping member, and the first through hole penetrates the third clamping portion and the third limiting portion;

[0024] A second through hole is formed in the fourth clamping member, and the second through hole penetrates the fourth clamping portion and the fourth limiting portion.

[0025] In an optional embodiment, the third limiting assembly comprises a fifth clamping member, the fifth clamping member is arranged on the loading frame, and the fifth clamping member comprises a fifth clamping portion and a fifth limiting portion.

[0026] The fourth clamping member further comprises a sixth clamping portion and a sixth limiting portion arranged opposite to the fourth clamping portion, when the box cover is placed in the third region, the fifth clamping portion and the sixth clamping portion limit the box cover in the first direction, the sixth clamping portion cooperates with the box cover to limit the box cover in the second direction, and the fifth limiting portion, the sixth limiting portion and the third abutting member cooperate to limit the box cover in the height direction.

[0027] In an optional embodiment, the first clamping member, the second clamping member and the third clamping member are all provided with a gasket.

[0028] The semiconductor storage container cleaning carrier provided by the embodiment of the utility model has the advantages of:

[0029] By setting the first limiting assembly, the second limiting assembly and the third limiting assembly, the box body, the sheet box and the cover body can be respectively limited in the horizontal direction, and by setting the hinged fixing rod and the first abutting piece, the second abutting piece and the third abutting piece are all arranged on the fixing rod, the fixing rod can be rotated and the box body, the sheet box and the cover body can be respectively limited in the height, the effect that the box body, the sheet box and the cover body are fixed on the carrier by one key is realized, the structure is simple and the operation is convenient. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows, and it should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation to the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of the drawings.

[0031] Figure 1 The structure schematic view of the semiconductor storage container cleaning carrier is provided for the present embodiment;

[0032] Figure 2 The structure schematic view of the fixing assembly in the semiconductor storage container cleaning carrier is provided for the present embodiment;

[0033] Figure 3 The structure schematic view of the locking piece in the semiconductor storage container cleaning carrier is provided for the present embodiment;

[0034] Figure 4 The structure schematic view of the first clamping piece in the semiconductor storage container cleaning carrier is provided for the present embodiment;

[0035] Figure 5 The structure schematic view of the second clamping piece in the semiconductor storage container cleaning carrier is provided for the present embodiment;

[0036] Figure 6 The structure schematic view of the third clamping piece in the semiconductor storage container cleaning carrier is provided for the present embodiment;

[0037] Figure 7 The structure schematic view of the fourth clamping piece in the semiconductor storage container cleaning carrier is provided for the present embodiment;

[0038] Figure 8 The structure schematic view of the fifth clamping piece in the semiconductor storage container cleaning carrier is provided for the present embodiment.

[0039] Icon:

[0040] 110 - box body; 120 - sheet box; 130 - box cover; 200 - loading rack; 210 - first region; 220 - second region; 230 - third region; 300 - first limiting assembly; 310 - first clamping piece; 311 - first clamping part; 312 - first limiting part; 320 - second clamping piece; 321 - second clamping part; 322 - second limiting part; 400 - second limiting assembly; 410 - third clamping piece; 411 - third clamping part; 412 - third limiting part; 413 - first through hole; 420 - fourth clamping piece; 421 - fourth clamping part; 422 - fourth limiting part; 423 - second through hole; 424 - sixth clamping part; 425 - sixth limiting part; 500 - third limiting assembly; 510 - fifth clamping piece; 511 - fifth clamping part; 512 - fifth limiting part; 600 - fixing assembly; 610 - locking piece; 611 - base; 612 - stop block; 613 - locking part; 614 - clamping groove; 615 - second abutting plane; 620 - fixing rod; 621 - first abutting piece; 622 - second abutting piece; 623 - third abutting piece; 624 - abutting part; 625 - first abutting plane; 630 - mounting seat. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.

[0043] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0044] In the description of the utility model, it needs to be explained that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the utility model product is used, it is only for the convenience of describing the utility model and simplifying the description, and it does not indicate or imply that the device or element indicated must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0045] In addition, if the terms "first", "second" and the like are used only for differentiation in description and cannot be understood as indicating or implying relative importance.

[0046] It should be noted that the features in the embodiments of the utility model can be combined with each other without conflict.

[0047] In the field of semiconductor manufacturing, the storage and transportation of wafers is a crucial link, and in order to simplify transportation and minimize the risk of wafer contamination, wafers are usually stored in wafer storage containers for transportation. The wafer storage container is usually composed of a wafer box, a box body and a box cover. The wafers are stored in the wafer box, and the closed container for containing the wafers is formed by the cooperation of the box body and the box cover. After the semiconductor device is processed by different processes, especially the chemical wet process, various contaminants (such as solid particles, organic matter, gaseous molecular contaminants, etc.) will be generated on the surface of the semiconductor device, which will contaminate the semiconductor storage container and further contaminate the next batch of stored wafers. Therefore, the semiconductor storage container needs to be sent to a dedicated device for processing, such as cleaning and drying the semiconductor storage container, to ensure the cleanliness of the semiconductor storage container.

[0048] At present, when the semiconductor storage container is cleaned, the wafer box, the box body and the box cover are usually installed on the carrier, and then the carrier is sent to a dedicated cleaning device for cleaning. During the process of installing the storage container on the carrier at present, the wafer box, the box body and the box cover need to be installed and fixed respectively, which leads to complex and tedious operation process when the semiconductor storage container is installed on the carrier, and further affects the cleaning efficiency of the semiconductor storage container.

[0049] In view of the above problems existing when the semiconductor storage container is installed on the carrier, the utility model provides a semiconductor storage container cleaning carrier to realize the effect of simultaneously installing and fixing the wafer box, the box body and the box cover to the carrier, simplify the installation process of the semiconductor storage container to the carrier, and improve the cleaning efficiency of the semiconductor storage container.

[0050] The overall structure, working principle and technical effects of the semiconductor storage container cleaning carrier provided by the utility model will be described in detail below through embodiments and in conjunction with the drawings.

[0051] Please refer toFigure 1 The utility model provides a semiconductor storage container cleaning carrier, in order to facilitate storage container installation to carrier. Among them, the storage container includes box body 110, sheet box 120 and box cover 130, box body 110 has open end and closed end, and when box body 110 and box cover 130 buckle, constitute the closed container containing sheet box 120. The carrier includes loading frame 200, first limiting component 300, second limiting component 400, third limiting component 500 and fixed component 600, and loading frame 200 is the frame structure, wherein, the length direction along loading frame 200 is set as the first direction in horizontal direction, and the width direction along loading frame 200 is set as the second direction in horizontal direction, and the first direction and the second direction are perpendicular in horizontal direction.

[0052] The first area 210 for containing box body 110, the second area 220 for containing sheet box 120, the third area 230 for containing box cover 130 are arranged along the first direction in loading frame 200. Among them, the first limiting component 300 is arranged at the bottom of loading frame 200 and is used to hold and limit box body 110;The second limiting component 400 is arranged at the bottom of loading frame 200 and is used to hold and limit sheet box 120;The third limiting component 500 is arranged at the bottom of loading frame 200 and is used to hold and limit box cover 130.

[0053] Please refer to Figure 1 And Figure 2 The fixed component 600 includes locking piece 610, fixed rod 620 and mounting seat 630, and locking piece 610, fixed rod 620 and mounting seat 630 are arranged at the top end of loading frame 200 along the first direction. Among them, one end of fixed rod 620 is hingedly installed on mounting seat 630, and the other end of fixed rod 620 moves relative to locking piece 610 and can be locked by locking piece 610. First abutting piece 621, second abutting piece 622 and third abutting piece 623 are arranged on fixed rod 620 along the first direction. When fixed rod 620 is fixed to loading frame 200 by locking piece 610, first abutting piece 621 extends downward into first area 210 and abuts against box body 110, second abutting piece 622 extends downward into second area 220 and abuts against sheet box 120, and third abutting piece 623 extends downward into third area 230 and abuts against box cover 130.

[0054] Specifically, the first limiting assembly 300, the second limiting assembly 400, and the third limiting assembly 500 can fix the box body 110, the sheet box 120, and the box cover 130 in the horizontal direction, and the first limiting assembly 300, the second limiting assembly 400, the third limiting assembly 500, and the fixing assembly 600 can fix the box body 110, the sheet box 120, and the box cover 130 in the height direction, so as to fix the box body 110, the sheet box 120, and the box cover 130 in the loading rack 200 at the same time.

[0055] By setting the first limiting assembly 300, the second limiting assembly 400, and the third limiting assembly 500, the box body 110, the sheet box 120, and the box cover 130 can be respectively limited in the horizontal direction. By setting the hinged fixing rod 620, and the first abutting piece 621, the second abutting piece 622, and the third abutting piece 623 are all arranged on the fixing rod 620, the fixing rod 620 can be rotated to limit the box body 110, the sheet box 120, and the box cover 130 in the height direction, so as to realize the effect of fixing the box body 110, the sheet box 120, and the box cover 130 on the carrier by one key. The box body 110, the sheet box 120, and the box cover 130 do not need to be fixed separately, so as to realize the effect of conveniently installing the storage container on the loading rack 200, and the structure is simple and the operation is convenient.

[0056] In some optional embodiments, the loading rack 200 is welded by a metal structure (SUSL round pipe), and PVDF injection molding is performed on the outside of the round pipe, so as to avoid corrosion of the metal material by the cleaning liquid while ensuring the structural strength of the loading rack 200. At the same time, the loading rack 200 adopts an integrated design to avoid residues of the cleaning liquid in the gap.

[0057] Further, please refer to Figure 1 In other optional embodiments, the loading rack 200 includes at least one first region 210, at least one second region 220, and at least one third region 230, that is, at least one first limiting assembly 300, at least one second limiting assembly 400, at least one third limiting assembly 500, and at least one fixing assembly 600 are arranged on the loading rack 200. The loading rack 200 can accommodate multiple storage containers at the same time, so as to realize the effect of simultaneously cleaning multiple storage containers, and further improve the cleaning efficiency of the storage containers.

[0058] Please refer to Figure 2 and Figure 3In some optional embodiments, the locking member 610 comprises a base 611 mounted on the loading rack 200, a block 612 and a locking portion 613 connected with the block 612, the base 611 has a clamping groove 614 accommodating the fixing rod 620, the fixing rod 620 can rotate into the clamping groove 614. The block 612 is slidingly arranged on the base 611, and the locking portion 613 is arranged on the base 611 and connected with the block 612, the locking portion 613 is used to drive the block 612 to slide in a direction perpendicular to the depth of the clamping groove 614 to enter or exit the clamping groove 614 under the action of external force. Thus, when the fixing rod 620 is located in the clamping groove 614, the block 612 is driven to enter the clamping groove 614 to block the fixing rod 620 in the clamping groove 614, achieving the effect of fixing the fixing rod 620.

[0059] It can be understood that the locking portion 613 can be a spring driving mechanism, an electromagnetic driving mechanism, a pneumatic driving structure, etc., as long as it can drive the block 612 to move linearly, and the specific structure of the locking portion 613 is not limited in the embodiment.

[0060] Further, please refer to Figure 2 and Figure 3 In order to facilitate the fixing of the fixing rod 620 to the base 611, in the embodiment, the fixing rod 620 further comprises an abutting portion 624, the abutting portion 624 is located at one end of the fixing rod 620 in contact with the base 611, and the abutting portion 624 has a first abutting plane 625. The block 612 has a second abutting plane 615, the second abutting plane 615 is adapted to the first abutting plane 625, and the first abutting plane 625 abuts against the second abutting plane 615 when the fixing rod 620 is located in the clamping groove 614. Thus, when the fixing rod 620 is fixed, the fixing effect is better, and the relative displacement of the fixing rod 620 in the clamping groove 614 is avoided.

[0061] Please refer to Figure 1 , Figure 4 and Figure 5In some optional embodiments, the first limiting assembly 300 comprises a first clamping member 310 and a second clamping member 320, both of which are arranged on the loading rack 200 and are located on two sides of the first region 210 along the first direction. When the cartridge 110 is placed in the first region 210, the open end and the closed end of the cartridge 110 are arranged along the first direction, and at this time, the first clamping member 310 is used to abut against the open end of the cartridge 110, and the second clamping member 320 is used to abut against the closed end of the cartridge 110. The first clamping member 310 comprises a first clamping portion 311, and the second clamping member 320 comprises a second clamping portion 321, and the first clamping portion 311 and the second clamping portion 321 limit the cartridge 110 along the first direction. The first clamping portion 311 cooperates with the cartridge 110 to limit the cartridge 110 along the second direction, so as to fix the cartridge 110 in the horizontal direction.

[0062] Further, please refer to Figure 1 、 Figure 4 and Figure 5 The first clamping member 310 further comprises a first limiting portion 312, which abuts against the bottom of the open end of the cartridge 110; the second clamping member 320 further comprises a second limiting portion 322, which abuts against the bottom of the closed end of the cartridge 110, so as to cooperate with the first abutting member 621 to fix the cartridge 110 in the height direction.

[0063] Further, in order to facilitate the rapid discharge of the cleaning liquid in the cartridge 110 during the cleaning process of the cartridge 110, in the present embodiment, the second limiting portion 322 is higher than the first limiting portion 312 in the horizontal direction, so that when the cartridge 110 is located on the first clamping member 310 and the second clamping member 320, the closed end of the cartridge 110 is higher than the open end of the cartridge 110, and the cartridge 110 is in an inclined state, so that the cleaning liquid in the cartridge 110 can flow out quickly. Preferably, the inclination range of the cartridge 110 is 20°-40°, so as to ensure the stability of the cartridge 110 while ensuring the flow of the liquid in the cartridge 110.

[0064] Please refer to Figure 1 、 Figure 6 and Figure 7The second limiting assembly 400 comprises a third clamping piece 410 and a fourth clamping piece 420. The third clamping piece 410 and the fourth clamping piece 420 are arranged on the loading rack 200 along the first direction and are respectively located on two sides of the second area 220. When the film cassette 120 is placed in the second area 220, the third clamping piece 410 and the fourth clamping piece 420 are matched to clamp and limit the film cassette 120. The third clamping piece 410 and the second clamping piece 320 are staggered and spaced along the second direction to improve the space utilization of the loading rack 200.

[0065] Further, please refer to Figure 1 、 Figure 6 and Figure 7 In some optional embodiments, the third clamping piece 410 has a third clamping portion 411 and a third limiting portion 412, and the third limiting portion 412 is located on one side of the third clamping portion 411. The fourth clamping piece 420 has a fourth clamping portion 421 and a fourth limiting portion 422, and the fourth limiting portion 422 is located on one side of the fourth clamping portion 421. When the film cassette 120 is placed between the third clamping piece 410 and the fourth clamping piece 420, the third clamping portion 411 and the fourth clamping portion 421 jointly limit the film cassette 120 in the first direction, and the third limiting portion 412 and the fourth limiting portion 422 jointly limit the film cassette 120 in the second direction.

[0066] Please refer to Figure 1 、 Figure 6 and Figure 7 In order to avoid the existence of dead angles between the film cassette 120 and the third clamping portion 411 and the fourth clamping portion 421, which causes the corners of the film cassette 120 cannot be fully cleaned. In some optional embodiments, a first through hole 413 is formed on the third clamping piece 410, and the first through hole 413 penetrates the third clamping portion 411 and the third limiting portion 412. A second through hole 423 is formed on the fourth clamping piece 420, and the second through hole 423 penetrates the fourth clamping portion 421 and the fourth limiting portion 422. The arrangement of the first through hole 413 and the second through hole 423 reduces the contact area between the third clamping portion 411 and the film cassette 120, reduces the contact area between the fourth clamping portion 421 and the film cassette 120, and makes the bottom four vertices of the film cassette 120 not contact with the second limiting assembly 400. Therefore, the corners of the film cassette 120 can be fully cleaned during cleaning, and the cleaning effect of the film cassette 120 is improved.

[0067] Please refer to Figure 1 and Figure 8In some optional embodiments, the third limiting component 500 comprises a fifth clamping piece 510 mounted to the loading rack 200, and the fifth clamping piece 510 comprises a fifth clamping portion 511 and a fifth limiting portion 512. Further, the fourth clamping piece 420 further comprises a sixth clamping portion 424 and a sixth limiting portion 425 arranged opposite to the fourth clamping portion 421. When the box cover 130 is placed in the third area 230, the fifth clamping portion 511 and the sixth clamping portion 424 limit the box cover 130 in the first direction, and the sixth clamping portion 424 cooperates with the box cover 130 to limit the box cover 130 in the second direction. Meanwhile, the fifth limiting portion 512 and the sixth limiting portion 425 cooperate with the third abutting piece to limit the box cover 130 in the height direction, thereby fixing the box cover 130.

[0068] It can be understood that, in the embodiment, the first clamping piece 310, the second clamping piece 320, the third clamping piece 410, the fourth clamping piece 420 and the fifth clamping piece 510 are detachably arranged on the loading rack 200 through pipe clamps or pipe clips, thereby facilitating the production, installation and transportation of the carrier. Meanwhile, the positions of the first clamping piece 310, the second clamping piece 320, the third clamping piece 410, the fourth clamping piece 420 and the fifth clamping piece 510 on the loading rack 200 can be adjusted, thereby facilitating the adjustment of the installation position of the storage container on the loading rack 200 and enabling the carrier to be applicable to storage containers of different sizes, and the compatibility and application range of the carrier are improved.

[0069] It can be understood that, please refer to Figure 1 and Figure 2 Since the structures of the box body 110, the cassette 120 and the box cover 130 are different, the structures and lengths of the first abutting piece 621, the second abutting piece 622 and the third abutting piece 623 are also different. It is only required that the first abutting piece 621 abuts against the box body 110, the second abutting piece 622 abuts against the cassette 120 and the third abutting piece 623 abuts against the box cover 130 when the fixing rod 620 is mounted on the loading rack 200. The specific structures of the first abutting piece 621, the second abutting piece 622 and the third abutting piece 623 are not limited in the utility model.

[0070] Please refer to Figure 1 In some optional embodiments, the first clamping piece 310, the second clamping piece 320, the third clamping piece 410 and the fifth clamping piece 510 are all provided with gaskets made of flexible corrosion-resistant materials such as rubber and silica gel, so as to reduce the collision between the storage container and the cleaning carrier and avoid the deformation and damage of the storage container caused by the collision with the carrier to a certain extent.

[0071] In summary, the utility model provides a kind of specific implementation principle of semiconductor storage container cleaning carrier, which is as follows: the box body 110 is limited by setting the first limiting assembly 300, the second limiting assembly 400 limits the sheet box 120, the third limiting assembly 500 limits the box cover 130, and the fixed assembly 600 is further set to resist the box body 110, the sheet box 120 and the box cover 130, which has the effect of fixing the box body 110, the sheet box 120 and the box cover 130 at the same time, and then the storage container is easily installed on the cleaning carrier, improving the problem of complicated operation when the storage container is installed on the cleaning carrier.

[0072] The above is only a specific embodiment of the utility model, but the protection scope of the utility model is not limited to this. Any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered within the protection scope of the utility model.

Claims

1. A semiconductor storage container cleaning device, said storage container comprising a box body, a cassette and a cassette cover, characterized by, The cleaning carrier comprises: a loading rack having a first region, a second region and a third region arranged along a first direction, the first region being used for accommodating a box, the second region being used for accommodating a sheet box, and the third region being used for accommodating a box cover; a first limiting assembly arranged at the bottom of the loading rack and used for clamping and limiting the box; a second limiting assembly arranged at the bottom of the loading rack and used for clamping and limiting the sheet box; a third limiting assembly arranged at the bottom of the loading rack and used for clamping and limiting the box cover; a fixing assembly comprising a locking member, a fixing rod and a mounting seat arranged at the top end of the loading rack along the first direction, one end of the fixing rod being hingedly arranged on the mounting seat, the other end of the fixing rod being movable relative to the locking member and locked by the locking member, and the fixing rod further comprising a first abutting member, a second abutting member and a third abutting member, the first abutting member extending into the first region and abutting against the box, the second abutting member extending into the second region and abutting against the sheet box, and the third abutting member extending into the third region and abutting against the box cover.

2. The semiconductor storage container cleaning carrier according to claim 1, characterized by, The locking member comprises a base arranged on the loading rack, a stopper and a locking portion connected with the stopper, the base having a clamping groove, and the locking portion being configured to drive the stopper to move relative to the base under external force so as to block the fixing rod in the clamping groove.

3. The semiconductor storage container cleaning carrier according to claim 2, wherein The fixing rod further comprises an abutting portion having a first abutting plane. The stopper has a second abutting plane matched with the first abutting plane, and the first abutting plane abuts against the second abutting plane when the fixing rod is located in the clamping groove.

4. The semiconductor storage container cleaning carrier according to Claim 1, wherein The first limiting assembly comprises a first clamping member and a second clamping member, the box having an open end and a closed end, the box being arranged in the first region along the first direction with the open end and the closed end, the first clamping member being used for clamping the open end of the box, and the second clamping member being used for clamping the closed end of the box. The first clamping member comprises a first clamping portion, and the second clamping member comprises a second clamping portion, the first clamping portion and the second clamping portion limiting the box in the first direction, and the first clamping portion cooperating with the box to limit the box in a second direction; wherein the second direction is perpendicular to the first direction in the horizontal direction.

5. The semiconductor storage container cleaning carrier according to Claim 4, wherein The first clamping member further comprises a first limiting portion abutting against the bottom of the open end of the box, and the second clamping member further comprises a second limiting portion abutting against the bottom of the closed end of the box, the first limiting portion, the second limiting portion and the first abutting member cooperating to limit the box in the height direction; the second limiting portion being higher than the first limiting portion in the horizontal direction so that the closed end of the box is higher than the open end of the box.

6. The semiconductor storage container cleaning carrier according to claim 4, The second limiting assembly comprises a third clamping member and a fourth clamping member, the third clamping member and the fourth clamping member are arranged on the loading frame along the first direction, and the third clamping member and the second clamping member are staggered and spaced along the second direction.

7. The semiconductor storage container cleaning carrier according to Claim 6, wherein The third clamping member has a third clamping portion and a third limiting portion, and the third limiting portion is located on one side of the third clamping portion; the fourth clamping member has a fourth clamping portion and a fourth limiting portion, and the fourth limiting portion is located on one side of the fourth clamping portion. When the film box is placed on the second limiting assembly, the third clamping portion and the fourth clamping portion jointly limit the film box in the first direction, the third limiting portion and the fourth limiting portion jointly limit the film box in the second direction, and the third limiting portion, the fourth limiting portion and the second abutting member cooperate to limit the film box in the height direction.

8. The semiconductor storage container cleaning carrier according to Claim 7, wherein A first through hole is formed in the third clamping member, and the first through hole penetrates the third clamping portion and the third limiting portion; A second through hole is formed in the fourth clamping member, and the second through hole penetrates the fourth clamping portion and the fourth limiting portion.

9. The semiconductor storage container cleaning carrier according to Claim 7, wherein The third limiting assembly comprises a fifth clamping member, and the fifth clamping member is arranged on the loading frame, and the fifth clamping member comprises a fifth clamping portion and a fifth limiting portion. The fourth clamping member further comprises a sixth clamping portion and a sixth limiting portion arranged opposite to the fourth clamping portion, when the box cover is placed in the third area, the fifth clamping portion and the sixth clamping portion limit the box cover in the first direction, and the sixth clamping portion cooperates with the box cover to limit the box cover in the second direction, and the fifth limiting portion, the sixth limiting portion and the third abutting member cooperate to limit the box cover in the height direction.

10. The semiconductor storage container cleaning carrier according to Claim 9, wherein The first clamping member, the second clamping member, the third clamping member, the fourth clamping member and the fifth clamping member are all provided with gaskets.

Images