Supporting structure capable of preventing wafer from sagging and FOUP
By introducing a support structure consisting of a main skeleton, a secondary support, and an extension tongue into the wafer cassette, the problem of wafer sagging was solved, and the wafer processing quality and gripping stability were improved.
Patent Information
- Application Number
- CN202422670500.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-31
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-10-31
AI Technical Summary
In existing technologies, very thin wafers are suspended in the middle due to the support of the partition grooves on both sides in the wafer box, resulting in a sagging phenomenon that affects the gripping and processing quality of the robot arm.
Design a support structure including a main frame, a secondary support, and an extension tongue. The extension tongue contacts the bottom of the wafer and supports the wafer. The wafer is prevented from sagging by the cooperation of the main frame and the secondary support.
It effectively prevents wafer sagging, reduces the defect rate on the production line, and improves the yield rate of wafer processing.
Smart Images
Figure CN223598704U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to wafer storage box technical field especially, relate to a kind of support structure and FOUP of preventing wafer droop. BACKGROUND
[0002] The wafer of the FOUP on market currently places the way that the edge of wafer contacts the separation groove on the inside of shell, this way is used on ordinary wafer is no problem.But with the development of semiconductor technology, very thin wafer appears, when it is supported by two sides separation groove, it can lead to middle suspension and make wafer middle present arc to droop, thereby affecting mechanical hand to grab and place wafer, and it has certain influence to wafer processing. SUMMARY
[0003] The utility model aims at the technical problem existing in the background art, and proposes a kind of support structure that can prevent wafer droop.
[0004] To achieve the above technical purpose, the technical scheme adopted by the utility model in the first aspect is as follows:
[0005] A support structure that can prevent wafer droop includes a main skeleton, a plurality of auxiliary supports and a plurality of extension tongues, the first side of the plurality of auxiliary supports is arranged on the two sides of the main skeleton respectively, and the plurality of extension tongues are uniformly installed on the main skeleton, and the extension tongue is used to contact the bottom of wafer and support wafer.
[0006] Preferably, the extension tongue is in trapezoidal structure.
[0007] Preferably, a plurality of staggered reinforcing ribs are arranged on the surface of the extension tongue.
[0008] Preferably, a plurality of arc-shaped support ribs are arranged on the surface of the extension tongue.
[0009] Preferably, a plurality of embedding grooves are arranged on the main skeleton, the plurality of embedding grooves are uniformly arranged along the length direction of the main skeleton, and the ends of the plurality of extension tongues are correspondingly installed in the plurality of embedding grooves.
[0010] Preferably, the second side of the auxiliary support is bent towards the same direction as the extension tongue.
[0011] Preferably, a limiting rib is arranged on the end of the second side of the auxiliary support.
[0012] Preferably, an elastic rib is arranged on the top end of the main skeleton.
[0013] Preferably, a convex rib is arranged on the bottom end of the main skeleton.
[0014] The technical scheme adopted by the utility model in the second aspect is as follows:
[0015] A FOUP comprising a support structure as described in any of the above embodiments to prevent wafer sagging.
[0016] Compared with the prior art, the utility model has the following beneficial technical effects: it includes a main frame, multiple sub-supports and multiple extension tongues. The first side of the multiple sub-supports is respectively set on both sides of the main frame, and the multiple extension tongues are evenly installed on the main frame. By contacting the bottom of the wafer and supporting the wafer through the extension tongues, the wafer is prevented from sagging and the defect rate on the production line is effectively reduced. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;
[0018] Figure 2 for Figure 1 Enlarged view of part A in the middle;
[0019] Figure 3 This is a schematic diagram of the structure of the extended tongue according to an embodiment of the present invention;
[0020] Figure 4 This is the usage state of an embodiment of the present utility model. Figure 1 ;
[0021] Figure 5 This is the usage state of an embodiment of the present utility model. Figure 2 ;
[0022] Figure 6 for Figure 5 Enlarged view of part B in the middle;
[0023] Figure 7 This is the usage state of an embodiment of the present utility model. Figure 3 ;
[0024] Figure 8 for Figure 7 Enlarged view of the central CC section.
[0025] Reference numerals: 100 Main frame, 101 Insertion groove, 102 Elastic rib, 103 Protruding rib, 200 Secondary support, 201 Limiting rib, 300 Extension tongue, 301 Reinforcing rib, 302 Supporting rib. Detailed Implementation
[0026] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.
[0027] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more features. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.
[0028] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a link, or a specific connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0029] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.
[0030] like Figures 1-8 As shown, the present invention provides a support structure to prevent wafer sagging in the first aspect, which includes a main frame 100, a plurality of sub-supports 200 and a plurality of extension tongues 300. The first sides of the plurality of sub-supports 200 are respectively disposed on both sides of the main frame 100, and the plurality of extension tongues 300 are evenly installed on the main frame 100. The extension tongues 300 are used to contact the bottom of the wafer and support the wafer.
[0031] Because existing wafer cassettes only rely on the two side partition slots to support the wafer, this causes the middle of the wafer to be suspended, resulting in the wafer drooping downwards in an arc shape, which affects the wafer yield. In this specific embodiment, in addition to the existing wafer cassette, a support structure that can prevent the wafer from drooping is added. Multiple extension tongues 300 correspond to the partition slots respectively. When the wafer is placed into the partition slot for support, the corresponding extension tongue 300 supports the bottom of the wafer to avoid the wafer drooping downwards in the middle.
[0032] Further, the second side of the auxiliary support 200 is bent towards the same direction as the extension tongue 300 extends, and a limiting rib 201 is arranged on the end of the second side of the auxiliary support 200.
[0033] Further, a plurality of embedding grooves 101 are arranged on the main skeleton 100, and the plurality of embedding grooves 101 are uniformly arranged along the length direction of the main skeleton 100, and the ends of the plurality of extension tongues 300 are respectively arranged in the plurality of embedding grooves 101.
[0034] Specifically, the extension tongue 300 is inserted into the embedding groove 101 in the form of a pile, and in order to ensure the stability of the connection mode, a screw fixing mode is adopted in the embodiment, and of course, other fixing modes such as buckling, riveting, and sticking can also be adopted.
[0035] Further, the extension tongue 300 has a trapezoidal structure.
[0036] Specifically, the extension tongue 300 is inserted into the embedding groove 101 in the form of a pile, and the part extended by the extension tongue 300 is not suitable to be too long and too heavy, which can easily cause the part extended by the extension tongue 300 to sag, so that the extension tongue 300 has a trapezoidal structure in the embodiment, and of course, the structure is not limited to the trapezoidal structure, and other shapes can be adopted to solve the problem of the part being too long and too heavy.
[0037] Further, a plurality of staggered reinforcing ribs 301 are arranged on the surface of the extension tongue 300.
[0038] Specifically, in order to prevent the part extended by the extension tongue 300 from sagging, as shown in the accompanying drawings, the plurality of staggered reinforcing ribs 301 are arranged on the surface of the extension tongue 300 to ensure the stability of the extension tongue 300. Figure 3
[0039] Further, a plurality of circular-arc-shaped supporting ribs 302 are arranged on the surface of the extension tongue 300 for contacting the wafer.
[0040] Specifically, the supporting rib 302 is used for supporting the wafer.
[0041] Further, the top end of the main skeleton 100 is provided with an elastic rib 102, and the bottom end of the main skeleton 100 is provided with a convex rib 103.
[0042] Further, the utility model also provides a FOUP in the second aspect, which comprises the support structure capable of preventing the wafer from sagging.
[0043] Specifically, the FOUP refers to a front opening wafer transfer box, as shown in the accompanying drawings. Figure 4 Figure 5 As shown, the support structure capable of preventing wafer sagging is applied in the FOUP, the second side of the sub-support 200 is bent towards the same direction as the extension tongue 300 extends, and the second side of the sub-support 200 has a certain elasticity, and the limiting ribs 201 thereof are in contact with the two side separation grooves in the FOUP, wherein the top end of the main framework 100 is provided with elastic ribs 102, which are specifically an arched protruding rib structure, and the FOUP comprises a box body structure, when the main framework 100 is installed in the box body, the elastic ribs 102 are in contact with the inner wall of one side of the box body and are deformed, and the positioning hole is arranged on the wall opposite to the wall of the inner wall, under the deforming force of the elastic ribs 102, the protruding ribs 103 on the main framework 100 are matched with the positioning hole correspondingly, so that the fixed installation effect of the main framework 100 is achieved, and the limiting ribs 201 are used to ensure that the fixed installation of the main framework 100 is in a vertical state.
[0044] The above is one or more embodiments provided in combination with specific contents, and it is not considered that the specific implementation of the utility model is limited to these descriptions. Any approximation, similarity or replacement of the method and structure of the utility model, or any technical deduction or replacement under the concept of the utility model, should be regarded as the protection range of the utility model.
Claims
1. A support structure capable of preventing a wafer from sagging, characterized by, The utility model relates to a support structure capable of preventing wafer sagging, comprising: a main skeleton (100) provided with elastic ribs (102) on the top end thereof; a plurality of auxiliary supports (200) respectively arranged on both sides of the main skeleton (100); a plurality of extension tongues (300) uniformly mounted on the main skeleton (100), the extension tongues (300) being used for contacting the bottom of the wafer and supporting the wafer.
2. The support structure according to claim 1, wherein The extension tongues (300) have a trapezoidal structure.
3. The support structure of claim 1, wherein the support structure is configured to prevent the wafer from sagging. The surfaces of the extension tongues (300) are provided with a plurality of staggered reinforcing ribs (301).
4. The support structure according to claim 3, wherein The surfaces of the extension tongues (300) used for contacting the wafer are provided with a plurality of arc-shaped supporting ribs (302).
5. The support structure of claim 1, wherein the support structure is configured to prevent the wafer from sagging. The main skeleton (100) is provided with a plurality of embedding grooves (101) uniformly arranged along the length direction of the main skeleton (100), and the ends of the plurality of extension tongues (300) are respectively mounted in the plurality of embedding grooves (101).
6. The support structure of claim 1, wherein, The second side of the auxiliary support (200) is bent towards the same direction in which the extension tongue (300) extends.
7. The support structure according to claim 6, wherein The end of the second side of the auxiliary support (200) is provided with a limiting rib (201).
8. The support structure of claim 1, wherein, The bottom end of the main skeleton (100) is provided with a convex rib (103).
9. A FOUP, characterized by, The utility model relates to a support structure capable of preventing wafer sagging, comprising: a main skeleton (100) provided with elastic ribs (102) on the top end thereof; a plurality of auxiliary supports (200) respectively arranged on both sides of the main skeleton (100); a plurality of extension tongues (300) uniformly mounted on the main skeleton (100), the extension tongues (300) being used for contacting the bottom of the wafer and supporting the wafer. The extension tongues (300) have a trapezoidal structure. The surfaces of the extension tongues (300) are provided with a plurality of staggered reinforcing ribs (301). The surfaces of the extension tongues (300) used for contacting the wafer are provided with a plurality of arc-shaped supporting ribs (302). The main skeleton (100) is provided with a plurality of embedding grooves (101) uniformly arranged along the length direction of the main skeleton (100), and the ends of the plurality of extension tongues (300) are respectively mounted in the plurality of embedding grooves (101). The second side of the auxiliary support (200) is bent towards the same direction in which the extension tongue (300) extends. The end of the second side of the auxiliary support (200) is provided with a limiting rib (201). The bottom end of the main skeleton (100) is provided with a convex rib (103). The utility model relates to a support structure capable of preventing wafer sagging, comprising: a main skeleton (100) provided with elastic ribs (102) on the top end thereof; a plurality of auxiliary supports (200) respectively arranged on both sides of the main skeleton (100); a plurality of extension tongues (300) uniformly mounted on the main skeleton (100), the extension tongues (300) being used for contacting the bottom of the wafer and supporting the wafer. The extension tongues (300) have a trapezoidal structure. The surfaces of the extension tongues (300) are provided with a plurality of staggered reinforcing ribs (301). The surfaces of the extension tongues (300) used for contacting the wafer are provided with a plurality of arc-shaped supporting ribs (302). The main skeleton (100) is provided with a plurality of embedding grooves (101) uniformly arranged along the length direction of the main skeleton (100), and the ends of the plurality of extension tongues (300) are respectively mounted in the plurality of embedding grooves (