Ceramic plate clamping jig

Abstract

The utility model discloses a ceramic plate clamping jig which comprises a base plate, a reference clamping block used for primarily positioning a ceramic plate is arranged below the base plate, a first clamping block, a second clamping block and a third clamping block which are used for clamping the ceramic plate are arranged below the base plate in a sliding mode, and a first locking mechanism and a second locking mechanism are arranged above the base plate in a sliding mode. The first clamping block penetrates through the base plate to be connected with the first locking mechanism, and the second clamping block and the third clamping block penetrate through the base plate to be connected with the second locking mechanism. The clamping end of the first clamping block corresponds to the clamping end of the reference clamping block in position, and the clamping end of the second clamping block corresponds to the clamping end of the third clamping block in position. The utility model aims to provide the ceramic plate clamping jig which can be used for conveniently and quickly clamping a ceramic plate and transferring the ceramic plate at ease.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor, especially a ceramic disc clamping jig. BACKGROUND

[0002] With the development of science and technology, China's development in emerging technology fields such as artificial intelligence, Internet of Things, 5G, and automotive electronics is extremely rapid, and some fields have even reached the world's leading level. The cornerstone of the development of the above-mentioned emerging technology fields is semiconductor, so China's demand for the semiconductor market continues to grow, and it is expected that the market size of China's semiconductor industry will continue to expand, with continuous breakthroughs in technological innovation and a broad future development prospect.

[0003] In the manufacturing process of chips, ceramic discs are commonly used as wafer clamping devices for transferring wafers to facilitate wafer flow in various processing technologies due to their good stability, thermal conductivity, corrosion resistance, and customizability.

[0004] However, the existing ceramic disc has the following problems: In order to maintain good stability and good thermal conductivity, the ceramic disc usually has high requirements for the surface, and the ceramic disc usually has high density, which results in the characteristics of the ceramic disc being very smooth and heavy, making it difficult for conventional jigs or mechanical hands to position and grasp the ceramic disc. Even if the ceramic disc is grasped, it may fall off during transportation, and the transportation process of the ceramic disc requires a lot of manpower and resources, which undoubtedly increases the operating costs and time costs of enterprises. SUMMARY

[0005] The utility model aims at providing a ceramic disc clamping jig that can conveniently and quickly clamp ceramic discs and safely transport them.

[0006] Technical scheme: The ceramic disc clamping jig comprises a substrate, a reference clamping block for initially positioning the ceramic disc is arranged below the substrate, a first clamping block, a second clamping block, and a third clamping block for clamping the ceramic disc are slidably arranged below the substrate, a first locking mechanism and a second locking mechanism are slidably arranged above the substrate, the first clamping block is connected with the first locking mechanism through the substrate, the second clamping block and the third clamping block are respectively connected with the second locking mechanism through the substrate, the clamping end of the first clamping block corresponds in position to the clamping end of the reference clamping block, and the clamping end of the second clamping block corresponds in position to the clamping end of the third clamping block.

[0007] Further, a plurality of auxiliary locking mechanisms are arranged above the substrate, and a plurality of fixing holes are arranged on the ceramic disc (workpiece), each of the auxiliary locking mechanisms comprises a longitudinal locking rod for passing through the fixing hole, the diameter of the longitudinal locking rod is smaller than the diameter of the fixing hole, the center axis of the longitudinal locking rod is arranged eccentrically relative to the center of the fixing hole, and a locking bottom plate is fixedly arranged at the bottom of the longitudinal locking rod. The locking bottom plate is used for hooking the bottom of the ceramic disc (workpiece) to assist in fixing.

[0008] Further, a guide shell is arranged on the longitudinal locking rod, a plurality of guide grooves are arranged in the guide shell, and a plurality of guide protrusions matched with the guide grooves are arranged on the longitudinal locking rod, and the guide protrusions are in sliding connection with the guide grooves.

[0009] Further, the auxiliary locking mechanism further comprises a height locking device, the height locking device comprises a transverse locking rod, and the locking end of the transverse locking rod corresponds in position to the longitudinal locking rod.

[0010] Further, the height locking device comprises a transverse locking bracket, the transverse locking rod is in sliding connection with the transverse locking bracket, the locking end of the transverse locking rod is provided with a transverse locking block, the transverse locking rod is sleeved with a transverse locking spring, and the two ends of the transverse locking spring are respectively in abutment with the transverse locking block and the transverse locking bracket.

[0011] Further, a foolproof plate is further included, a plurality of foolproof holes for the longitudinal locking rod to pass through are arranged on the foolproof plate, and one side of the foolproof plate is fixedly connected with the second locking mechanism.

[0012] Further, a transfer plate is arranged above the substrate, and a plurality of transfer handles for hand holding are arranged on the transfer plate.

[0013] Further, a plurality of lifting sliding blocks are arranged in sliding mode at any side edge of the substrate.

[0014] Further, a lifting handle is arranged at any side edge of the substrate, the lifting handle is hingedly connected with the substrate, and the lifting handle is hingedly connected with the lifting sliding block.

[0015] Further, the substrate comprises a first sub-plate and a second sub-plate.

[0016] Further, the first sub-plate and the second sub-plate are connected through a connecting shield.

[0017] Beneficial effects: compared with the prior art, the utility model has the following advantages: 1, the utility model through the benchmark clamping block clamping ceramic dish one top corner or edge, through the operation first locking mechanism and second locking mechanism sliding, respectively drive first clamping block, second clamping block and third clamping block clamping ceramic dish other top corner or edge, to realize clamping ceramic dish;2, while the benchmark clamping block, first clamping block, second clamping block and third clamping block clamping ceramic dish, prevent the board and second locking mechanism linkage, so that the position of prevent the hole and the position of longitudinal locking rod correspond, longitudinal locking rod passes through prevent the hole and fixed hole in proper order and rotates, because the center axis of longitudinal locking rod and the relative position of eccentricity of fixed hole center, therefore after longitudinal locking rod rotates, the bottom plate of its bottom can be abutted with the bottom of ceramic dish, thereby play the role of auxiliary fixing ceramic dish;3, after clamping ceramic dish, press the lifting handle, lifting slider passes through lifting crank linkage and thus slides downward relative to the base plate bottom end, so that ceramic dish moves upward relative to the ceramic dish below, so that ceramic dish is separated from the original work surface, and the staff only needs to hold the transfer handle and transfer the utility model with ceramic dish to transport vehicle or transport belt. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the perspective view of the utility model after grabbing workpiece from one angle.

[0019] Figure 2 It is the perspective view of the utility model after grabbing workpiece from another angle.

[0020] Figure 3 It is the perspective view of the utility model after grabbing workpiece from another angle.

[0021] Figure 4 It is the perspective view of the utility model after grabbing workpiece from another angle.

[0022] Figure 5 It is the perspective view of the utility model after grabbing workpiece from another angle.

[0023] Figure 6 It is the perspective view of the utility model after grabbing workpiece from another angle. Figure 1 It is the perspective view of the utility model after grabbing workpiece from another angle.

[0024] Figure 7 It is the perspective view of the utility model after grabbing workpiece from another angle. Figure 2 It is the perspective view of the utility model after grabbing workpiece from another angle.

[0025] Figure 8 It is the perspective view of the utility model after grabbing workpiece from another angle.

[0026] Figure 9 It is the perspective view of the utility model after grabbing workpiece from another angle.

[0027] Wherein: 1, jig body; 101, protective shell; 1011, observation port; 1021, first sub-plate; 10211, first slide; 1022, second sub-plate; 10221, second slide; 10222, third slide; 1023, connecting shield; 103, second clamping block; 104, third clamping block; 105, first clamping block; 106, reference clamping block; 107, fool-proof plate; 1081, first switch; 1082, first connecting rod; 1091, second switch; 1092, second connecting rod; 1093, third connecting rod;

[0028] 2, lifting handle; 201, lifting slider; 202, lifting housing; 203, lifting crank;

[0029] 3, workpiece; 301, fixing hole;

[0030] 4, transfer plate; 401, transfer handle;

[0031] 5, auxiliary locking mechanism; 501, operating handle; 502, guide housing; 503, guide protrusion; 504, longitudinal locking rod; 505, locking bottom plate; 506, transverse locking bracket; 507, transverse locking rod; 5071, transverse locking block. DETAILED DESCRIPTION

[0032] The technical scheme of the utility model will be further described below with reference to the drawings.

[0033] Referring to the drawings Figures 1-9 The utility model discloses a ceramic disc clamping jig, including jig body 1.

[0034] Jig body 1 includes the base plate, and the base plate includes first sub-plate 1021 and second sub-plate 1022, and first sub-plate 1021 and second sub-plate 1022 are connected through connecting shield 1023, and the top of first sub-plate 1021 and second sub-plate 1022 is respectively provided with protective shell 101, and the protective shell 101 is provided with observation port 1011 for the convenience of operator's observation, and first sub-plate 1021 is provided with first slide 10211 in the same direction with first connecting rod 1082, and second sub-plate 1022 is provided with second slide 10221 and third slide 10222 arranged obliquely.

[0035] The bottom end surface of the base plate is provided with reference clamping block 106 for primary positioning ceramic disc, and the lower portion of the base plate is slidably provided with first clamping block 105, second clamping block 103 and third clamping block 104 for clamping ceramic disc, wherein first clamping block 105 is slidably connected with first slide 10211, second clamping block 103 is slidably connected with second slide 10221, and third clamping block 104 is slidably connected with third slide 10222.

[0036] The first locking mechanism and the second locking mechanism are arranged above the substrate, wherein the first locking mechanism comprises a first switch 1081 and a first connecting rod 1082, the direction of the first switch 1081 is the same as that of the first connecting rod 1082, the first switch 1081 is fixedly connected with the first connecting rod 1082, and a first locking block for abutting and locking the third connecting rod 1093 is arranged on the first connecting rod 1082, so that the first switch 1081 and the second switch 1091 can only be opened or closed in sequence; the second locking mechanism comprises a second switch 1091 and a second connecting rod 1092, the direction of the second switch 1091 is perpendicular to that of the first connecting rod 1082, the second switch 1091 is fixedly connected with the second connecting rod 1092, the second connecting rod 1092 is fixedly connected with one end of the third connecting rod 1093, and the position of the other end of the third connecting rod 1093 corresponds to that of the first connecting rod 1082.

[0037] The first clamping block 105 is connected with the first connecting rod 1082 through the first slide 10211 on the substrate, the second clamping block 103 is connected with the second connecting rod 1092 through the second slide 10221 on the substrate, the third clamping block 104 is connected with the second connecting rod 1092 through the third slide 10222 on the substrate, the clamping end of the first clamping block 105 corresponds to the clamping end of the reference clamping block 106 in position, and the clamping end of the second clamping block 103 corresponds to the clamping end of the third clamping block 104 in position.

[0038] The anti-fool board 107 is further arranged, three anti-fool holes for the longitudinal locking rod 504 to pass through are arranged on the anti-fool board 107, and one side of the anti-fool board 107 is fixedly connected with the second locking mechanism.

[0039] The transfer plate 4 is arranged above the substrate, one end of the transfer plate 4 is fixedly connected with the first sub-plate 1021, the other end of the transfer plate 4 is fixedly connected with the second sub-plate 1022, and two transfer handles 401 for hand holding are arranged on the transfer plate 4.

[0040] Three fixing holes 301 are arranged on the workpiece 3. Three auxiliary locking mechanisms 5 are arranged above the substrate, and the auxiliary locking mechanisms 5 are detachably connected with the transfer plate 4. Each auxiliary locking mechanism 5 comprises a longitudinal locking rod 504 for penetrating through the fixing hole 301. An operating handle 501 is arranged at the top of the longitudinal locking rod 504. The diameter of the longitudinal locking rod 504 is smaller than that of the fixing hole 301. The center axis of the longitudinal locking rod 504 is arranged in an eccentric position relative to the center of the fixing hole 301. A locking bottom plate 505 is fixedly arranged at the bottom of the longitudinal locking rod 504. A guide shell 502 is sleeved outside the longitudinal locking rod 504. The guide shell 502 is provided with a plurality of guide through grooves. A plurality of guide protrusions 503 are arranged on the longitudinal locking rod 504 and are slidably connected with the guide through grooves. The auxiliary locking mechanism 5 further comprises a height locking device. The height locking device comprises a transverse locking rod 507 and a transverse locking bracket 506. The transverse locking rod 507 is slidably connected with the transverse locking bracket 506. A transverse locking block 5071 is arranged at the locking end of the transverse locking rod 507. A transverse locking spring is sleeved outside the transverse locking rod 507. The two ends of the transverse locking spring are respectively abutted with the transverse locking block 5071 and the transverse locking bracket 506.

[0041] A plurality of lifting sliding blocks 201 are slidably arranged at the opposite two side edges of the substrate.

[0042] A lifting handle 2 is arranged at each of the opposite two side edges of the substrate. The lifting handle 2 comprises a lifting crank 203 for being hingedly connected with the substrate. Two lifting housings 202 are fixedly arranged at the side edge of the substrate where the lifting handle 2 is arranged. The lifting housings 202 are hollow. The lifting sliding blocks 201 are slidably connected with the lifting housings 202. The lifting crank 203 is hingedly connected with the lifting sliding blocks 201.

[0043] When the utility model is used, first, the jig body 1 is covered on the ceramic plate, the reference clamping block 106 is abutted with one top corner (for the convenience of statement, the top corner is called "reference corner") of the ceramic plate, then the first switch 1081 and the second switch 1091 are pressed in turn, the first switch 1081 drives the first connecting rod 1082 and the first clamping block 105 to slide, so that the first clamping block 105 clamps the edge opposite to the reference corner, in the process, the first connecting rod 1082 is released from the limiting of the third connecting rod 1093, the second switch 1091 drives the second connecting rod 1092 and the third connecting rod 1093 to slide along the direction perpendicular to the first connecting rod 1082, because the second slide 10221 and the third slide 10222 are inclined, so the second clamping block 103 and the third clamping block 104 clamp the other two top corners of the ceramic plate, so that the ceramic plate is clamped, after clamping in place, the third connecting rod 1093 also limits the first connecting rod 1082, preventing the first connecting rod 1082 from returning; in the process of the second connecting rod 1092 sliding, the foolproof plate 107 is driven to move, so that the foolproof hole corresponds to the position of the fixed hole 301, so that the longitudinal locking rod 504 of the auxiliary locking mechanism 5 can pass through the foolproof hole and the fixed hole 301 in turn, then the longitudinal locking rod 504 rotates so that the locking bottom plate 505 abuts with the bottom of the ceramic plate, so as to assist the ceramic plate to be fixed; finally, the lifting handle 2 is pressed so that the bottom end surface of the lifting sliding block 201 is lower than the bottom end surface of the ceramic plate. The ceramic plate is separated from the original surface, the staff only needs to hold the transfer handle 401 to transfer the utility model together with the ceramic plate to the transport vehicle or the transport belt.

Claims

1. A ceramic disc clamping fixture, characterized in that: The base plate is provided with a reference clamping block below, and first, second and third clamping blocks are slidably arranged below the base plate.

2. The ceramic disc clamping jig according to claim 1, wherein: A plurality of auxiliary locking mechanisms are arranged above the base plate, and a plurality of fixing holes are arranged on the workpiece.

3. The ceramic disc clamping jig of claim 2, wherein: The longitudinal locking rod is provided with a plurality of guide protrusions, and the guide protrusions are slidably connected with the guide through grooves.

4. The ceramic disc holding fixture of claim 2, wherein: The auxiliary locking mechanism further comprises a height locking device, and the height locking device comprises a transverse locking rod and a transverse locking bracket.

5. The ceramic disc clamping jig of claim 1, wherein: The base plate is provided with a plurality of lifting sliding blocks slidably arranged on any side edge of the base plate.

6. The ceramic disc clamping jig of claim 1, wherein: The base plate comprises a first sub-plate and a second sub-plate.

7. The ceramic disc clamping jig of claim 1, wherein: The first sub-plate and the second sub-plate are connected by a connecting shield.

8. The ceramic disc clamping jig of claim 1, wherein: ​ 9. The ceramic disc clamping jig of claim 8, wherein: ​

Images