A nitrogen filling device of a wafer storage cabinet

Abstract

The utility model relates to the technical field of semiconductor process equipment discloses a nitrogen filling device of wafer storage cabinet, including the box, the outside rotation of cabinet door is connected with the box, the inner wall sliding connection has the button of cabinet door, the outside sliding connection has the lock box of button, the inner wall sliding connection has the baffle of lock box, both ends fixedly connected with the elastic plate of baffle, the one end fixedly connected with the lock block of elastic plate away from baffle, the outside fixedly connected with spring no.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor process equipment especially relates to a nitrogen filling device of wafer storage cabinet. BACKGROUND

[0002] The nitrogen filling device of wafer storage cabinet is a device for filling nitrogen into the interior of wafer storage cabinet. Its basic principle is to use nitrogen source, nitrogen is transported into the storage cabinet through pipeline system, and nitrogen plays a key role in wafer storage. Wafers are very sensitive to impurities such as oxygen and water vapor in the environment, effectively exclude oxygen and water vapor in the storage environment, prevent wafer surface oxidation and corrosion.

[0003] In the prior art, the nitrogen filling device of part of wafer storage cabinet cannot be effectively sealed and fixed, external air and dust can continuously enter the interior of the storage cabinet, accelerate the wear and corrosion of the wafer in the interior of the storage cabinet, cause the damage of the wafer to increase, thereby increase the production cost, therefore a nitrogen filling device of wafer storage cabinet is proposed to solve the above problems. UTILITY MODEL CONTENT

[0004] In order to make up for the above shortcomings, the utility model provides a nitrogen filling device of wafer storage cabinet, which aims at improving the problem that the nitrogen in the interior cannot be effectively sealed in the prior art.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A nitrogen filling device of wafer storage cabinet, including the box, the outer rotation of the box is connected with the cabinet door, the inner wall of the cabinet door is connected with the button, the outer of the button is connected with the lock box, the inner wall of the lock box is connected with the baffle, the both ends of the baffle are fixedly connected with the elastic plate, the end away from the baffle of the elastic plate is fixedly connected with the lock block, the outer of the baffle is fixedly connected with spring one, the end away from the baffle of spring one is fixedly connected with the support plate, the inner wall of the box is fixedly connected with the fixed assembly for fixing the subsequent components;

[0007] As a further description of the above technical scheme:

[0008] The fixed assembly includes the shell, the inner wall of the shell is fixedly connected with a plurality of limiting sleeves, the inner wall of the plurality of limiting sleeves is slidably connected with a limiting column, the outer of the limiting column is fixedly connected with spring two, the end away from the spring two of the limiting column is fixedly connected with the sealing cone, the outer of the shell is fixedly connected on the inner wall of the box;

[0009] As a further description of the above technical scheme:

[0010] An input hole is provided on the top of the box. An output pipe is fixedly connected to the inner wall of the input hole. An air pump is fixedly connected to the end of the output pipe away from the input hole. An input pipe is fixedly connected to the end of the air pump away from the output pipe. A nitrogen cylinder is fixedly connected to the end of the input pipe away from the air pump.

[0011] As a further description of the above technical solution:

[0012] The inner wall of the box is slidably connected with multiple storage panels, and the top of the multiple storage panels is fixedly connected with multiple pads. The inner wall of the box is provided with a slot, and the outside of the box is fixedly connected with a sealing gasket.

[0013] As a further description of the above technical solution:

[0014] One end of each of the springs away from the limiting post is fixedly connected to the inner wall of the limiting sleeve, and the outer side of the sealing cone is in contact with the inner wall of the outer shell;

[0015] As a further description of the above technical solution:

[0016] The two locking blocks are externally slidably connected to the inner wall of the lock box, and the two ends of the support plate are fixedly connected to the inner wall of the lock box;

[0017] As a further description of the above technical solution:

[0018] The outer side of the sealing gasket is in contact with the outer side of the cabinet door, and the outer side of the lock box is slidably connected to the inner wall of the sealing gasket.

[0019] As a further description of the above technical solution:

[0020] Pull plates are fixedly connected to the outside of the multiple storage panels, and the bottom of the air pump is fixedly connected to the top of the box.

[0021] This utility model has the following beneficial effects:

[0022] 1. In this utility model, pressing the button causes the baffle to move and squeeze the spring plates at both ends. The spring plates squeeze the two locking blocks inward and retract them. When the lock box enters the bottom of the slot, releasing the button releases the elastic potential energy stored in the spring to the baffle. Then, the locking blocks pop out and jam the inner wall of the cabinet, preventing it from moving. At the same time, the cabinet door is squeezed and pressed tightly against the sealing gasket to seal, thus enhancing the sealing performance of the cabinet interior.

[0023] 2. The utility model discloses a sealing cone is pressed to the limiting post behind sealing cone is pressed to the spring no. 2 after the pressure of limiting post is applied to the spring no. 2 and moves, when oxygen is completely discharged, close the air pump, at this time because of the elastic potential energy of the limiting sleeve, all limiting sleeve releases pressure to the limiting post, and the limiting post will push sealing cone and move to the inner wall of the shell and be stuck and cannot move, reduce the consumption of nitrogen, reduce the cost. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a kind of nitrogen filling device's perspective schematic view of wafer storage cabinet proposed in the utility model;

[0025] Figure 2 It is the structure schematic view of the elastic plate of the nitrogen filling device of wafer storage cabinet proposed in the utility model;

[0026] Figure 3 It is the structure schematic view of the cushion block of the nitrogen filling device of wafer storage cabinet proposed in the utility model;

[0027] Figure 4 It is the structure schematic view of the sealing cone of the nitrogen filling device of wafer storage cabinet proposed in the utility model

[0028] Figure 5 It is Figure 4 The enlarged view of A in the middle.

[0029] Legend:

[0030] 1, box body;2, cabinet door;3, button;4, lock box;5, baffle;6, elastic plate;7, lock block;8, spring no. 1;9, support plate;10, shell;11, limiting sleeve;12, limiting post;13, spring no. 2;14, sealing cone;15, nitrogen cylinder;16, input pipe;17, air pump;18, output pipe;19, input hole;20, placing plate;21, cushion block;22, clamping groove;23, sealing pad. DETAILED DESCRIPTION

[0031] The technical scheme in the embodiments of the utility model will be described clearly and completely in conjunction with the drawings in the embodiments of the utility model below, and obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without making creative labor belong to the range of protection of the utility model.

[0032] Refer to Figures 1-2The utility model provides a kind of nitrogen filling device of wafer storage cabinet, including box 1, box 1 is made of firm and corrosion-resistant material, can effectively resist the erosion of external environment, provide stable and reliable storage environment for internal wafer.Box 1 is rotatably connected with cabinet door 2 outside, cabinet door 2 is connected with box 1 by carefully designed hinge, rotating flexible and good sealing, ensure that still can keep close adhesion with box 1 in frequent opening and closing process, effectively prevent foreign matter from entering.Cabinet door 2's inner wall is slidably connected with button 3, button 3 surface is treated specially, with the characteristics of antiskid and comfortable touch, convenient operator accurate pressing.Button 3 is slidably connected with lock box 4 outside, lock box 4 is made of high-strength material, can withstand greater external force impact, protect the stable operation of internal lock structure.

[0033] Lock box 4's inner wall is slidably connected with baffle 5, baffle 5 can stably slide in the inner wall of lock box 4 under the action of button 3, its sliding track is precisely processed, ensure the accuracy and smoothness of baffle 5 movement.Both ends of baffle 5 are fixedly connected with elastic plate 6, elastic plate 6 is made of metal material with good elasticity, with higher elastic recovery capacity, can rebound quickly after being extruded, drive lock block 7 to complete locking and unlocking action.Lock block 7 is fixedly connected with elastic plate 6 away from baffle 5, the shape and size of lock block 7 are carefully designed, and perfectly matched with the clamping groove 22 of the inner wall of box 1, can firmly clamp the inner wall of box 1, realize the reliable locking of cabinet door 2, effectively prevent cabinet door 2 from opening accidentally.Spring one 8 is fixedly connected with the outer portion of baffle 5, spring one 8 is made of high-quality spring steel, with higher elastic coefficient and fatigue life, can provide stable elastic recovery force for baffle 5, ensure that baffle 5 can reset quickly after button 3 is released.

[0034] Spring one 8 is fixedly connected with support plate 9 away from baffle 5, support plate 9 is made of solid metal plate material, with good rigidity and stability, provides solid support for spring one 8, ensure that spring one 8 will not displace or deform in working process.The inner wall of box 1 is fixedly connected with fixing assembly for fixing subsequent components, and the fixing assembly is tightly combined with the inner wall of box 1 by welding or bolt connection etc., can withstand greater external force, ensure that the installation of internal components is firm and reliable.

[0035] Refer to Figures 4-5The fixed assembly comprises a shell 10 made of thick metal material with good protection performance and structural strength, which can provide stable support and protection for the internal limiting sleeve 11, limiting column 12 and other components. A plurality of limiting sleeves 11 are fixedly connected to the inner wall thereof, which are made of high-precision processing technology, with smooth inner wall and high cooperation precision with the limiting column 12, which can effectively limit the movement direction of the limiting column 12 and ensure that it will not deviate or shake during work. The inner wall of the plurality of limiting sleeves 11 is slidably connected to the limiting column 12, and the surface of the limiting column 12 is specially treated to have a low friction coefficient, which can smoothly slide in the limiting sleeve 11 and reduce energy loss and component wear caused by friction. The limiting column 12 is fixedly connected to the outside of the spring 13, which is selected according to the working pressure and elastic demand of the device, which can store elastic potential energy when the limiting column 12 is subjected to external force, and quickly release after the external force disappears, pushing the limiting column 12 and the sealing cone 14 to return to the initial position.

[0036] The limiting column 12 is fixedly connected to the sealing cone 14 at the end away from the spring 13, which is made of special sealing material and has good sealing performance and wear resistance, which can tightly fit with the inner wall of the shell 10 to effectively prevent external oxygen and dust from entering the inside of the box 1. The shell 10 is fixedly connected to the inner wall of the box 1, further enhancing the sealing between the fixed assembly and the box 1, preventing gas leakage.

[0037] Referring to Figure 1 and Figure 3 , the top of the box 1 is provided with an input hole 19, and the position of the input hole 19 is carefully designed to ensure that the nitrogen can uniformly enter the inside of the box 1. The inner wall of the input hole 19 is polished to be smooth and burr-free, reducing the resistance when the nitrogen flows. The inner wall of the input hole 19 is fixedly connected to the output pipe 18, which is made of corrosion-resistant and pressure-resistant material, has good sealing performance and flexibility, can withstand the nitrogen pressure output by the air pump 17, and ensure that the nitrogen is smoothly delivered to the inside of the box 1.

[0038] The output pipe 18 is fixedly connected to the air pump 17 at the end away from the input hole 19, and the air pump 17 is selected from high-efficiency and low-noise models, which can stably provide the required nitrogen pressure and flow. The air pump 17 inside adopts advanced compression technology and sealing structure, which improves the compression efficiency and delivery stability of nitrogen, while reducing energy consumption and noise. The air pump 17 is fixedly connected to the input pipe 16 at the end away from the output pipe 18, and the length and diameter of the input pipe 16 are reasonably designed according to the distance and flow demand of the nitrogen cylinder 15 and the air pump 17, to ensure that the nitrogen can be smoothly delivered from the nitrogen cylinder 15 to the air pump 17.

[0039] The input pipe 16 is fixedly connected with the nitrogen cylinder 15 at the end away from the air pump 17. The nitrogen cylinder 15 is made of high-strength and high-pressure-resistant material, and has good safety and sealing performance. The nitrogen cylinder 15 is equipped with a pressure regulating valve and a safety valve, which can adjust the nitrogen output pressure according to the working requirements of the device, and automatically release pressure when the pressure is too high, to ensure the safe operation of the device. The inner wall of the box body 1 is slidably connected with a plurality of storage plates 20. The storage plates 20 are made of lightweight and high-strength materials, and the surface is treated with anti-static treatment, which can effectively prevent the wafer from being damaged by static electricity during placement and removal. The sliding track of the storage plate 20 is designed reasonably, and the operation is light, which is convenient for users to adjust the position of the storage plate 20 according to the actual needs.

[0040] With reference to Figures 1-3 , the top of the plurality of storage plates 20 is fixedly connected with a plurality of cushion blocks 21. The cushion blocks 21 are made of soft and elastic materials such as silica gel or rubber, which can provide good cushioning and protection for the wafers, and avoid damage to the wafers during storage due to external impact. The inner wall of the box body 1 is provided with a clamping groove 22, and the size and shape of the clamping groove 22 are matched with the locking block 7. The inside of the clamping groove 22 is treated with smoothness to reduce the friction of the locking block 7 during insertion and removal, and to improve the smoothness of locking and unlocking. The outer wall of the box body 1 is fixedly connected with a sealing gasket 23, which is made of high-quality rubber material and has good elasticity and sealing performance. The sealing gasket 23 can be tightly squeezed when the cabinet door 2 is closed, forming an effective sealing barrier to prevent external air and impurities from entering the box body 1, and ensuring the stability of the nitrogen environment in the box body 1.

[0041] With reference to Figures 4-5 , the plurality of spring twos 13 are fixedly connected to the inner wall of the limiting sleeve 11 away from the limiting column 12. This connection method adopts reliable welding or riveting process to ensure that the spring two 13 will not fall off or loosen during work, and provides stable elastic support for the limiting column 12. The outer wall of the sealing cone 14 is in contact with the inner wall of the shell 10, and the contact part adopts a special sealing structure such as conical sealing or lip sealing, which further improves the sealing effect and effectively prevents the invasion of oxygen and dust.

[0042] With reference to Figure 2 , the outer walls of the two locking blocks 7 are slidably connected to the inner walls of the lock box 4. The locking block 7 and the inner wall of the lock box 4 adopt a gap fit, which can ensure the smooth sliding of the locking block 7 in the lock box 4, and can avoid shaking and instability caused by too large gap. The two ends of the supporting plate 9 are fixedly connected to the inner walls of the lock box 4, and the connection method adopts firm bolt connection or welding process to ensure that the supporting plate 9 can withstand the elastic force of the spring one 8 and the impact force of the baffle 5, and provide stable support for the entire lock structure.

[0043] With reference to Figures 1-3The outer part of the sealing gasket 23 is in contact with the outer part of the cabinet door 2, and the surface of the sealing gasket 23 has a certain roughness, which can increase the friction with the cabinet door 2 and improve the reliability of the sealing. The outer part of the lock box 4 is slidingly connected to the inner wall of the sealing gasket 23, and a sealing sliding structure is adopted between the lock box 4 and the sealing gasket 23, such as a sealing ring or a sealing lip, which can not only ensure the normal sliding of the lock box 4, but also prevent gas from leaking between the lock box 4 and the sealing gasket 23. The outer part of the plurality of shelves 20 is fixedly connected with a pull plate, the pull plate is designed to be easy to hold, and the surface is treated with anti-skid treatment, which is convenient for users to easily pull the shelves 20 for operation. The bottom of the air pump 17 is fixedly connected to the top of the box body 1, and the connection part is treated with shock-absorbing pad or shock-absorbing spring to reduce the influence of vibration generated by the air pump 17 during operation on the box body 1 and other components, and to ensure stable operation of the device.

[0044] Working principle: In use, the wafer is placed in the cushion block 21 above the shelf 20 in the box body 1, and then the handle on the surface of the cabinet door 2 is held while the button 3 is pressed. At this time, the pressing of the button 3 will move the baffle 5 behind the button 3, and then the movement of the baffle 5 will squeeze the elastic plates 6 at both ends, and the squeezing of the elastic plates 6 will make the two lock blocks 7 shrink inward. When the lock box 4 enters the bottom of the clamping groove 22, the button 3 is released, because the baffle 5 also squeezes the spring 8 when the button 3 is pressed, the support plate 9 behind the spring 8 does not move, so when the button 3 is released, the elastic potential energy stored in the spring 8 is released to the baffle 5, and then the elastic plates 6 also rebound, and then the lock blocks 7 are popped out to clamp the inner wall of the box body 1 and cannot be moved, and at the same time the cabinet door 2 is squeezed to tightly seal the sealing gasket 23.

[0045] After the cabinet door 2 is closed, the nitrogen cylinder 15 inputs nitrogen into the air pump 17 through the input pipe 16, and then the nitrogen is compressed by the air pump 17 and input into the box body 1 through the output pipe 18. The shelf 20 is provided with a plurality of holes, and the volume of nitrogen is larger than that of oxygen, so the nitrogen will quickly sink and squeeze the oxygen out of the shell 10. When the oxygen squeezes the sealing cone 14, the limiting column 12 behind the sealing cone 14 is pressed to move the spring 13, and when the oxygen is completely discharged, the air pump 17 is closed. At this time, due to the elastic potential energy of the limiting sleeve 11, all the limiting sleeves 11 release pressure to the limiting column 12, and the limiting column 12 pushes the sealing cone 14 to move forward to the inner wall of the shell 10 to be clamped and cannot be moved, and at the same time it also prevents the outside oxygen and dust from entering.

[0046] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and is not intended to limit the present application, although the foregoing embodiments of the present application has been described in detail, for the skilled in the art, it still can be modified, or for part of the technical features of the equivalent replacement, the spirit and principles of the present application, made any modification, equivalent replacement, improvement, etc., should be included within the scope of the present application.

Claims

1. A nitrogen filling device for a wafer storage cabinet, comprising a cabinet (1), characterized in that: The outer rotating connection of the box (1) has a cabinet door (2), the inner wall of the cabinet door (2) is slidingly connected with a button (3), the outer sliding connection of the button (3) has a lock box (4), the inner wall of the lock box (4) is slidingly connected with a baffle (5), the both ends of the baffle (5) are fixedly connected with a spring plate (6), the end of the spring plate (6) away from the baffle (5) is fixedly connected with a lock block (7), the outer of the baffle (5) is fixedly connected with a spring one (8), the end of the spring one (8) away from the baffle (5) is fixedly connected with a support plate (9), the inner wall of the box (1) is fixedly connected with a fixed component for fixing subsequent components.

2. The nitrogen filling device of the wafer storage cabinet according to claim 1, wherein: The fixed component comprises a shell (10), a plurality of limiting sleeves (11) are fixedly connected to the inner wall of the shell (10), a limiting column (12) is slidingly connected to the inner wall of the plurality of limiting sleeves (11), a spring two (13) is fixedly connected to the outer of the limiting column (12), a sealing cone (14) is fixedly connected to the end of the limiting column (12) away from the spring two (13), the outer of the shell (10) is fixedly connected to the inner wall of the box (1).

3. The nitrogen filling device of the wafer storage cabinet according to claim 1, wherein: The top of the box (1) is provided with an input hole (19), the inner wall of the input hole (19) is fixedly connected with an output pipe (18), the end of the output pipe (18) away from the input hole (19) is fixedly connected with an air pump (17), the end of the air pump (17) away from the output pipe (18) is fixedly connected with an input pipe (16), the end of the input pipe (16) away from the air pump (17) is fixedly connected with a nitrogen cylinder (15).

4. The nitrogen filling device of the wafer storage cabinet according to claim 3, characterized in that: The inner wall of the box (1) is slidingly connected with a plurality of storage plates (20), the top of the plurality of storage plates (20) is fixedly connected with a plurality of cushion blocks (21), the inner wall of the box (1) is provided with a clamping groove (22), the outer of the box (1) is fixedly connected with a sealing gasket (23).

5. The nitrogen filling device for wafer storage cabinet according to claim 2, wherein: The end of the plurality of spring two (13) away from the limiting column (12) is fixedly connected to the inner wall of the limiting sleeve (11), the outer of the sealing cone (14) is in contact with the inner wall of the shell (10).

6. The nitrogen filling device of a wafer storage cabinet according to claim 1, characterized in that: The outer of the two lock blocks (7) is slidingly connected to the inner wall of the lock box (4), the both ends of the support plate (9) are fixedly connected to the inner wall of the lock box (4).

7. The nitrogen filling device of a wafer storage cabinet according to claim 4, characterized in that: The outer of the sealing gasket (23) is in contact with the outer of the cabinet door (2), the outer of the lock box (4) is slidingly connected to the inner wall of the sealing gasket (23).

8. The nitrogen filling device of the wafer storage cabinet according to claim 4, characterized in that: The outer of the plurality of storage plates (20) is fixedly connected with a pull plate, the bottom of the air pump (17) is fixedly connected to the top of the box (1).

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