A conveying lift switching device for an atmospheric plasma processing apparatus

Abstract

The utility model discloses a conveying and lifting switching device of atmospheric plasma processing equipment applies in the technical field of plasma processing equipment, and its technical scheme main points are: including conveying seat, conveying seat is along the conveying direction based on first synchronous drive assembly even and parallel rotation connection has a plurality of lower conveying roller, the lower conveying roller is along the vertical to the conveying direction coaxial heart dense arrangement connection has the support ring for supporting the bottom surface of wafer, conveying seat is based on the lifting adjustment component and is along the vertical direction swing joint and is used for abutting the upper surface of substrate upper conveying component and is used for the plasma processing of the upper surface of substrate upper plasma processing platform, conveying seat is fixedly connected with lower plasma processing platform for the plasma processing of the lower surface of substrate in the bottom of conveying roller, has the technical effect: simple structure can apply the conveying requirement of flexible wafer, can apply the processing requirement under the condition of different thickness carrier.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of plasma processing equipment, in particular to a conveying lifting switching device of atmospheric plasma processing equipment. BACKGROUND

[0002] Atmospheric plasma processing is processing and treating the surface of plate by plasma, and is usually applied to the industries of circuit board, mobile phone touch screen and glass, the 'active' components of plasma include ion, electron, active group, excited state nuclide (metastable state), photon and the like, atmospheric plasma processing is just processing the surface of substrate by utilizing the properties of these active components, so as to realize the modification of the surface of plate, increase the surface tension and improve the dyne value.

[0003] At present, such as the announcement number CN206140892U of Chinese utility model, discloses a kind of atmospheric pressure low temperature plasma agricultural film processing equipment, including plasma processing base, low temperature plasma discharge component and low temperature plasma power supply, the plasma processing base both ends are equipped with end plate, the low temperature plasma discharge component, 2 groups of conveying rollers, 2 groups of discharge rollers are all installed between both end plates, power component includes internal power and external power, the discharge roller is connected with external power, the internal power is connected with conveying roller.

[0004] The existing utility model realizes the conveying of agricultural film by conveying roller, on the one hand, the agricultural film keeps taut in the conveying process, but for single flexible substrate, the existing utility model cannot keep the flexible substrate flat in the conveying process, thereby affecting the plasma processing effect of flexible substrate, on the other hand, the position of plasma discharge component of the existing utility model is fixed, while in the process of plasma processing on the surface of flexible substrate, the substrate needs to be placed on carrier, and the carrier has a certain thickness, which requires that the distance between plasma discharge component and conveying plane can be flexibly switched, and it is necessary to improve. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a kind of conveying lifting switching device of atmospheric plasma processing equipment, its advantage is simple structure, can be suitable for the conveying requirement of flexible substrate, can be suitable for processing requirement under the condition of different thickness carrier.

[0006] The technical purpose is achieved by the following technical scheme: a conveying lifting switching device of atmospheric plasma processing equipment, comprising a conveying seat; a plurality of lower conveying rollers are uniformly and parallel connected to the conveying seat along a conveying direction based on a first synchronous driving assembly; a plurality of support rings for supporting a bottom surface of a substrate are densely arranged and connected to the lower conveying rollers along a coaxial center perpendicular to the conveying direction; an upper conveying assembly for abutting an upper surface of the substrate and an upper plasma processing table for plasma processing on the upper surface of the substrate are movably connected to the conveying seat along a vertical direction based on a lifting adjusting assembly; and a lower plasma processing table for plasma processing on a lower surface of the substrate is fixedly connected to the conveying seat at the bottom of the conveying rollers.

[0007] The utility model further sets up: adjacent the support ring on the lower conveying roller is set up mutually staggered.

[0008] The utility model further sets up: the first synchronous driving assembly includes rotating connection on the conveying seat and the first synchronous driving shaft of axle line along with parallel to the conveying direction set and the first drive wheel of coaxial fixed connection on the first synchronous driving shaft, the conveying seat is fixedly connected with first synchronous driving motor, the rotation axis of first synchronous driving motor is fixedly connected with the second drive wheel, the first drive wheel with the second drive wheel is based on synchronous belt drive, the first synchronous driving shaft is fixedly connected with the first staggered helical gear along the conveying direction even interval, the lower conveying roller is fixedly connected with the second staggered helical gear of cooperation with the first staggered helical gear on the coaxial center.

[0009] The utility model further sets up: the lifting adjusting assembly includes lifting adjusting seat along with vertical direction movably connected on the conveying seat and guide shaft along with vertical direction fixedly connected on the conveying seat, the lifting adjusting seat is fixedly connected with the guide sleeve of cooperation with the guide shaft, the conveying seat is fixedly connected with lifting adjusting electric jar of driving the lifting adjusting seat lifting.

[0010] The utility model further sets up: the upper conveying assembly includes a plurality of upper conveying rollers along with conveying direction arrangement rotating connection on the lifting adjusting seat and the second synchronous driving assembly for driving a plurality of the upper conveying rollers synchronous rotation fixedly connected on the lifting adjusting seat, the upper conveying roller is correspondingly set up in the lower conveying roller's directly above, the first synchronous driving assembly with the second synchronous driving assembly is coupled.

[0011] The utility model further sets up: second synchronous drive subassembly includes the second synchronous drive shaft that the axis is along parallel to the conveying direction rotation is connected in the lift adjustment seat and the third drive wheel that coaxial fixed connection is in second synchronous drive shaft, second synchronous drive motor is fixedly connected on the lift adjustment seat, fourth drive wheel is fixedly connected on the rotation axis of second synchronous drive motor, it is synchronous belt drive between third drive wheel and fourth drive wheel, third stagger helical gear is fixedly connected on second synchronous drive shaft along the conveying direction even interval, the fourth stagger helical gear that coaxial fixed connection has with third stagger helical gear cooperation is fixedly connected on the upper conveying roller.

[0012] The utility model further sets up: the lift adjustment seat is equipped with the taut component for guaranteeing the taut synchronous belt, the taut component includes the taut adjustment seat that fixed connection is in the lift adjustment seat and the adjusting rod that sliding connection is along the vertical direction in the taut adjustment seat, taut wheel is rotationally connected on the adjusting rod, the taut adjustment seat is rotationally connected with the adjusting screw rod that drives the adjusting rod along the vertical direction and adjusts.

[0013] Summarized above, the utility model has following beneficial effect:

[0014] 1. Even and parallel rotation several lower conveying rollers on the conveying seat and densely arrange several support rings on the lower conveying roller and set up the support ring on the adjacent conveying roller and each other staggered, through the support ring and thus support the bottom surface of the flexible substrate to ensure that the flexible substrate remains flat, avoid affecting the plasma treatment effect of the double sides of the flexible substrate;

[0015] 2. The upper conveying assembly along the vertical direction activity is set up on the conveying seat based on the lift adjustment assembly, and the lift adjustment assembly drives the lifting seat along the direction of the guide shaft to lift through the lift adjustment cylinder, so as to realize the flexible adjustment of the distance between the upper plasma treatment table and the conveying seat, and the second synchronous drive assembly coupled with the first synchronous drive assembly is arranged on the lift adjustment seat, the upper conveying roller is driven individually through the second synchronous drive assembly, so that the upper conveying roller and the lower conveying roller can move synchronously when the height of the lift adjustment seat is adjusted, and the plasma treatment effect of the flexible plate is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the structure schematic diagram of the whole of the embodiment;

[0017] Figure 2 It is Figure 1 the A part enlarged schematic view of;

[0018] Figure 3 It is Figure 1 the B part enlarged schematic view of;

[0019] Figure 4 yes Figure 1 Enlarged schematic diagram of part C;

[0020] Figure 5 yes Figure 1 Enlarged schematic diagram of part D.

[0021] Reference numerals: 1. Conveyor seat; 2. First synchronous drive assembly; 21. First synchronous drive shaft; 22. First drive wheel; 23. First synchronous drive motor; 24. Second drive wheel; 25. Synchronous belt; 26. First interlaced helical gear; 27. Second interlaced helical gear; 3. Lower conveyor roller; 31. Support ring; 4. Lifting adjustment assembly; 41. Lifting adjustment seat; 42. Guide shaft; 43. Guide sleeve; 44. Lifting adjustment electric cylinder; 5. Upper conveyor assembly; 51. Upper conveyor roller; 52. Second synchronous drive assembly; 59. Second synchronous drive shaft; 53. Third drive wheel; 54. Second synchronous drive motor; 55. Fourth drive wheel; 56. Third interlaced helical gear; 57. Fourth interlaced helical gear; 58. Tensioning assembly; 581. Tensioning adjustment seat; 582. Tensioning wheel; 583. Adjusting screw; 584. Adjusting rod; 6. Upper plasma treatment stage. Detailed Implementation

[0022] The present invention will be further described in detail below with reference to the accompanying drawings.

[0023] Example:

[0024] refer to Figures 1 to 5 A conveying and lifting switching device for an atmospheric plasma treatment equipment includes a conveying base 1. Several lower conveying rollers 3 are uniformly and rotatably connected to the conveying base 1 along the conveying direction based on a first synchronous drive component 2. Support rings 31 for supporting the bottom surface of a substrate are densely arranged coaxially along the lower conveying rollers 3, perpendicular to the conveying direction. The support rings 31 on adjacent lower conveying rollers 3 are staggered, thus supporting the bottom surface of the flexible substrate to ensure its flatness and simultaneously adapting to the conveying requirements of both rigid and flexible substrates. An upper conveying component 5 for abutting the upper surface of the substrate and an upper plasma treatment stage 6 for plasma treatment of the upper surface of the substrate are movably connected to the conveying base 1 along the vertical direction based on a lifting adjustment component 4. A lower plasma treatment stage for plasma treatment of the lower surface of the substrate is fixedly connected to the bottom of the conveying rollers on the conveying base 1. Plasma treatment is performed on the square double-sided substrate by the upper and lower plasma treatment stages 6 respectively positioned above and below.

[0025] refer to Figure 1 and Figure 2, specifically, the first synchronous drive assembly 2 includes a first synchronous drive shaft 21 rotatably connected to the conveying seat 1 and having an axis line arranged along the conveying direction, and a first drive wheel 22 coaxially fixed to the first synchronous drive shaft 21, a first synchronous drive motor 23 fixed to the conveying seat 1, a second drive wheel 24 fixed to a rotating shaft of the first synchronous drive motor 23, the first drive wheel 22 and the second drive wheel 24 being driven by a synchronous belt 25, the first synchronous drive motor 23 driving the first synchronous drive shaft 21 to rotate by a belt drive structure, and a first crossed helical gear 26 fixed to the first synchronous drive shaft 21 along the conveying direction, the lower conveying roller 3 being coaxially fixed to a second crossed helical gear 27 matched with the first crossed helical gear 26, so that the lower conveying roller 3 and the lower telescopic roller are synchronously rotated by the matched crossed helical gears. In this embodiment, the first synchronous drive assembly 2 is provided with two groups and symmetrically arranged at two ends of the conveying seat 1 along the conveying direction, and the two groups of the first synchronous drive assembly 2 are used to synchronously drive the lower conveying roller 3 to rotate.

[0026] Referring to Figure 1 and Figure 3 , specifically, the lifting adjusting assembly 4 includes a lifting adjusting seat 41 movably connected to the conveying seat 1 along the vertical direction, and a guide shaft 42 fixed to the conveying seat 1 along the vertical direction, a guide sleeve 43 fixed to the lifting adjusting seat 41 and matched with the guide shaft 42, and a lifting adjusting electric cylinder 44 fixed to the conveying seat 1 and used to drive the lifting adjusting seat 41 to lift, the lifting adjusting assembly 4 driving the lifting seat to lift along the direction of the guide shaft 42 by the lifting adjusting electric cylinder 44, so as to flexibly adjust the distance between the upper plasma processing table 6 and the conveying seat 1.

[0027] Referring to Figure 3 and Figure 4 , specifically, the upper conveying assembly 5 includes a plurality of upper conveying rollers 51 rotatably connected to the lifting adjusting seat 41 along the conveying direction, and a second synchronous drive assembly 52 fixed to the lifting adjusting seat 41 and used to synchronously drive the plurality of upper conveying rollers 51 to rotate, the upper conveying rollers 51 being arranged above the lower conveying rollers 3, the first synchronous drive assembly 2 being coupled with the second synchronous drive assembly 52, so as to ensure that the upper conveying rollers 51 and the lower conveying rollers 3 move synchronously.

[0028] Referring to Figure 3 and Figure 4, specifically, the second synchronous driving assembly 52 comprises a second synchronous driving shaft 59 which is rotatably connected to the lifting adjusting base 41 along the parallel direction of the conveying direction, and a third driving wheel 53 which is coaxially fixedly connected to the second synchronous driving shaft 59, a second synchronous driving motor 54 is fixedly connected to the lifting adjusting base 41, a fourth driving wheel 55 is fixedly connected to the rotating shaft of the second synchronous driving motor 54, the third driving wheel 53 and the fourth driving wheel 55 are driven based on the synchronous belt 25, the second synchronous driving shaft 59 is uniformly and fixedly connected with third staggered helical gears 56 along the conveying direction, the upper conveying roller 51 is coaxially fixedly connected with fourth staggered helical gears 57 which are matched with the third staggered helical gears 56, and the second synchronous driving assembly 52 is driven by the first synchronous driving assembly 2 to rotate the second synchronous driving shaft 59 and realize synchronous rotation of the upper conveying shaft through the staggered helical gear mechanism.

[0029] Reference Figure 1 And Figure 5 , specifically, the lifting adjusting base 41 is provided with a tightening assembly 58 for ensuring that the synchronous belt 25 is kept tight, the tightening assembly 58 comprises a tightening adjusting base 581 which is fixedly connected to the lifting adjusting base 41, and an adjusting rod 584 which is slidingly connected to the tightening adjusting base 581 along the vertical direction, the tightening adjusting base 581 is rotatably connected with a tightening wheel 582, and the tightening adjusting base 581 is rotatably connected with an adjusting screw 583 which drives the adjusting rod 584 to adjust along the vertical direction, the tightening wheel 582 is driven by the adjusting screw 583 to move along the setting direction on the tightening adjusting base 581 so as to abut against the synchronous belt 25, so as to ensure that the synchronous belt 25 is always kept tight.

[0030] Brief description of the use process: the substrate is conveyed on the conveying base 1 along the conveying direction, the lifting adjusting assembly 4 drives the lifting base to lift along the direction of the guide shaft 42 through the lifting adjusting cylinder 44, so as to realize flexible adjustment of the distance between the upper plasma processing table 6 and the conveying base 1, and the second synchronous driving assembly 52 drives the upper conveying roller separately, so as to ensure that the upper conveying roller and the lower conveying roller 3 move synchronously when the height of the lifting adjusting base 41 is adjusted, and the upper plasma processing table 6 and the lower plasma processing table are respectively arranged above and below, so as to realize plasma processing on the square double plate of the substrate.

[0031] The specific embodiment is only an explanation of the utility model, and is not a limitation of the utility model, and the person skilled in the art can make a modification with creative contribution according to the needs after reading the specification, but as long as it is within the scope of the claims of the utility model, it is protected by the patent law.

Claims

1. A conveying-lifting switching device of an atmospheric plasma processing apparatus, comprising a conveying seat (1); characterized in that, The conveying seat (1) is uniformly and parallel connected with a plurality of lower conveying rollers (3) based on a first synchronous driving assembly (2) along a conveying direction, a plurality of support rings (31) for supporting the bottom surface of the substrate are arranged and connected coaxially along a direction perpendicular to the conveying direction on the lower conveying rollers (3), the conveying seat (1) is movably connected with an upper conveying assembly (5) for abutting the upper surface of the substrate and an upper plasma processing table (6) for plasma processing of the upper surface of the substrate based on a lifting adjusting assembly (4) along a vertical direction, and the conveying seat (1) is fixedly connected with a lower plasma processing table at the bottom of the conveying rollers for plasma processing of the lower surface of the substrate.

2. The conveying lift changeover apparatus of an atmospheric plasma processing apparatus according to claim 1, wherein The support rings (31) on the adjacent lower conveying rollers (3) are arranged alternately.

3. The transport elevation changeover apparatus of claim 1, wherein The first synchronous driving assembly (2) comprises a first synchronous driving shaft (21) rotatably connected to the conveying seat (1) and arranged along a direction parallel to the conveying direction, and a first driving wheel (22) fixedly connected coaxially to the first synchronous driving shaft (21), a first synchronous driving motor (23) is fixedly connected to the conveying seat (1), a second driving wheel (24) is fixedly connected to the rotating shaft of the first synchronous driving motor (23), the first driving wheel (22) and the second driving wheel (24) are driven based on a synchronous belt (25), a first staggered helical gear (26) is fixedly connected to the first synchronous driving shaft (21) along the conveying direction, and a second staggered helical gear (27) fixedly connected coaxially to the lower conveying roller (3) is matched with the first staggered helical gear (26).

4. The transport elevator switch apparatus of claim 1, wherein, The lifting adjusting assembly (4) comprises a lifting adjusting seat (41) movably connected to the conveying seat (1) along a vertical direction, and a guide shaft (42) fixedly connected to the conveying seat (1) along a vertical direction, a guide sleeve (43) fixedly connected to the lifting adjusting seat (41) is matched with the guide shaft (42), and a lifting adjusting electric cylinder (44) fixedly connected to the conveying seat (1) drives the lifting adjusting seat (41) to lift.

5. The transport elevator changeover apparatus of claim 4, wherein, The upper conveying assembly (5) comprises a plurality of upper conveying rollers (51) rotatably connected to the lifting adjusting seat (41) along a conveying direction, and a second synchronous driving assembly (52) fixedly connected to the lifting adjusting seat (41) for driving a plurality of the upper conveying rollers (51) to rotate synchronously, the upper conveying rollers (51) are correspondingly arranged above the lower conveying rollers (3), and the first synchronous driving assembly (2) is coupled with the second synchronous driving assembly (52).

6. The transport elevator changeover apparatus of claim 5, wherein, The second synchronous driving assembly (52) comprises a second synchronous driving shaft (59) with its axis line rotatingly connected to the lifting adjusting base (41) along the conveying direction, and a third driving wheel (53) coaxially fixedly connected to the second synchronous driving shaft (59), the lifting adjusting base (41) is fixedly connected with a second synchronous driving motor (54), a rotating shaft of the second synchronous driving motor (54) is fixedly connected with a fourth driving wheel (55), the third driving wheel (53) and the fourth driving wheel (55) are driven based on a synchronous belt (25), the second synchronous driving shaft (59) is uniformly and interval fixedly connected with a third staggered helical gear (56) along the conveying direction, and the upper conveying roller (51) is coaxially fixedly connected with a fourth staggered helical gear (57) matched with the third staggered helical gear (56).

7. The transport elevation changeover apparatus of claim 6, wherein, The lifting adjusting base (41) is provided with a tightening assembly (58) for ensuring that the synchronous belt (25) is kept tight, the tightening assembly (58) comprises a tightening adjusting base (581) fixedly connected to the lifting adjusting base (41), and an adjusting rod (584) slidingly connected to the tightening adjusting base (581) along the vertical direction, the adjusting rod (584) is rotatably connected with a tightening wheel (582), and the tightening adjusting base (581) is rotatably connected with an adjusting screw rod (583) for driving the adjusting rod (584) to adjust along the vertical direction.

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