Rotary target material with composite structure

Abstract

The utility model discloses a rotary target material with a composite structure, which relates to the technical field of target material sputtering and comprises a target material body, the target material comprises a target material body and further comprises two annular grooves which are integrally formed in the end of the target material body, the two annular grooves are located at the upper end and the lower end of the target material body respectively, metal rings are arranged at the upper end and the lower end of the target material body, the metal rings are embedded in the annular grooves, and a coating is sprayed to the surface of the target material body. Metal rings made of a pure zirconium material are added to the two ends of a conventional plasma spraying zirconium oxide rotating target material and are embedded into clamping grooves in the two ends of the target material, pure zirconium is metal and good in conductivity, it can be guaranteed that no insulating ceramic film is formed at the two ends of the rotating target material in the target material sputtering process, arc discharge is avoided, and the target material utilization rate is increased.

Description

TECHNICAL FIELD

[0001] The utility model relates to target material sputtering technical field, concretely is a kind of composite structure rotating target material. BACKGROUND

[0002] In the production process of coating glass, the target material is generally ionized by the process of magnetron sputtering to sputter particles, and in this process, the sputtered particles react with the reaction gas (oxygen or nitrogen) filled in the chamber to form a compound dielectric film with low absorption, high stability and certain refractive index. The compound is generally an oxide or nitride. As can be seen, the physical properties of the dielectric film formed are mainly affected by the ionized target material and the chamber atmosphere, and are not very stable, which will eventually be reflected on the product.

[0003] The existing zirconia rotating target material is formed by integral spraying, and the conductivity is improved by controlling the oxygen content in the zirconia and the phase composition of the coating. During use, due to the magnet structure and size of the target material core, the sputtering amount of the zirconia rotating target material at both ends is very small, which will cause oxygen enrichment at both ends of the rotating target material during the target material sputtering process. Oxygen enrichment at the ends will cause the conductivity of the target material to decrease and the resistivity to increase, resulting in arc discharge at the ends of the rotating target material. The craters caused by arc discharge at both ends of the zirconia target material seriously reduce the service life of the target material. Therefore, a composite structure rotating target material is proposed to solve the problems mentioned above. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a composite structure rotating target material to solve the problems mentioned in the background art, such as oxygen enrichment at both ends of the rotating target material during the target material sputtering process, oxygen enrichment at the ends causing the conductivity of the target material to decrease and the resistivity to increase, resulting in arc discharge at the ends of the rotating target material, craters caused by arc discharge at both ends of the zirconia target material, and serious reduction of the service life of the target material.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a composite structure rotating target material, comprising a target material body;

[0006] Further comprising:

[0007] An annular groove is integrally formed at the end of the target material body, and the annular groove is provided with two and located at the upper and lower ends of the target material body, respectively. The upper and lower ends of the target material body are provided with metal rings, which are embedded in the interior of the annular groove. The surface of the target material body is sprayed with a coating.

[0008] Preferably, the inner wall of the annular groove is integrally formed with a sliding groove, the bottom of the annular groove is provided with a clamping groove, and the sliding groove is in communication with the clamping groove.

[0009] Preferably, the end of the target body is provided with an end head, and the end head is provided with two groups of internal threads arranged at the upper and lower ends of the target body.

[0010] Preferably, the inside of the target body is provided with a magnet structure.

[0011] Preferably, the metal ring is made of pure zirconium material.

[0012] Compared with the prior art, the utility model has the beneficial effects that:

[0013] (1), in conventional plasma spraying zirconia rotating target material two ends add pure zirconium material's metal ring, with the clamping groove of target two ends and carry out the inlay, pure zirconium is metal, and the electric conductivity is good, can guarantee the two ends of rotating target material not to form the insulating ceramic film in the sputtering process of target material, avoids arc discharge, and improves target material use rate.

[0014] (2), by setting the clamping block on the inner side of the metal ring, setting the sliding groove and the clamping groove on the inner side of the annular groove, when the metal ring is connected with the annular groove, the clamping block is first connected with the sliding groove, so that the clamping block is slid to the bottom of the sliding groove, and the metal ring is inlaid with the annular groove, then the metal ring is rotated to make the clamping block rotate to the inside of the clamping groove, so as to lock the metal ring, which is convenient for fixing the metal ring and prevents the metal ring from falling off in the process of sputtering of rotating target material. BRIEF DESCRIPTION OF DRAWINGS

[0015] Fig. 1 It is the overall structure schematic diagram of the utility model;

[0016] Fig. 2 It is the metal ring exploded view schematic diagram of the utility model;

[0017] Fig. 3 It is the overall structure front view of the utility model;

[0018] In the drawing: 1, target body;2, annular groove;3, sliding groove;4, clamping groove;5, end head;6, internal thread;7, metal ring;8, clamping block;9, magnet structure;10, coating. DETAILED DESCRIPTION

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0020] This invention provides a composite rotating target, the device including a target body 1. The main problem addressed by this invention is that during the sputtering process, oxygen buildup occurs at both ends of the rotating target. This end oxygen buildup reduces the conductivity and increases the resistivity of the target material, resulting in arc discharge at the ends of the rotating target and pitting at the ends of the zirconia target, severely reducing the target's lifespan.

[0021] For the device provided by this utility model, please refer to Figs. 1-3 The following is a detailed introduction.

[0022] An annular groove 2 is integrally formed at the end of the target body 1, and two annular grooves 2 are provided, located at the upper and lower ends of the target body 1 respectively. Metal rings 7 are provided at both the upper and lower ends of the target body 1, and the metal rings 7 are fitted inside the annular grooves 2. The surface of the target body 1 is coated with a coating 10. Sliding grooves 3 are integrally formed around the inner wall of the annular groove 2. A locking groove 4 is provided at the bottom of the annular groove 2, and the sliding groove 3 communicates with the locking groove 4. A locking block 8 is provided at the end of the inner wall of the metal ring 7 near the target body 1, and the locking block 8 is slidably engaged with the locking groove 4 through the sliding groove 3, facilitating the connection between the metal ring 7 and the target body 1. The target body 1 is fixed by interlocking. The end of the target body 1 is provided with an end head 5, and the end head 5 is provided with two sets respectively located at the upper and lower ends of the target body 1. The inner side of the end head 5 is provided with an internal thread 6 to facilitate the docking of the target body 1 with the external structure. The target body 1 is provided with a magnet structure 9 inside. The magnet structure 9 can generate a magnetic field, and the magnetic field distribution on the target surface can be controlled by adjusting the magnitude and direction of the magnetic field. The metal ring 7 is made of pure zirconium material. Pure zirconium is a metal material with good electrical conductivity. During the target sputtering process, it can ensure that an insulating ceramic film does not form at both ends of the rotating target, avoid arc discharge, and improve the utilization rate of the target.

[0023] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A composite structure rotating target material, comprising a target material body (1); characterized in that Further comprising: a ring-shaped groove (2) integrally arranged at the end of the target material body (1), and the ring-shaped groove (2) is arranged at the upper and lower ends of the target material body (1) respectively, the upper and lower ends of the target material body (1) are provided with metal rings (7), the metal rings (7) are embedded in the inside of the ring-shaped groove (2), and the surface of the target material body (1) is sprayed with a coating (10).

2. The composite structure rotating target according to claim 1, wherein: The inner wall of the ring-shaped groove (2) is integrally provided with a sliding groove (3) around, the bottom of the ring-shaped groove (2) is provided with a clamping groove (4), and the sliding groove (3) and the clamping groove (4) are communicated, one end of the inner wall of the metal ring (7) close to the target material body (1) is provided with a clamping block (8), and the clamping block (8) is slidably connected with the clamping groove (4) through the sliding groove (3).

3. The composite structure rotating target of claim 1, wherein: The end of the target material body (1) is provided with an end head (5), and the end head (5) is provided with two groups arranged at the upper and lower ends of the target material body (1) respectively, and the inner side of the end head (5) is provided with an internal thread (6).

4. The composite structure rotating target of claim 1, wherein: The inside of the target material body (1) is provided with a magnet structure (9).

5. The composite structure rotating target of claim 1, wherein: The metal ring (7) is made of pure zirconium material.

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