Silicon carbide crystal growth device

Abstract

The utility model discloses a silicon carbide crystal growing device which comprises a bottom shell, a plurality of middle shells and a top shell, the middle shells are detachably arranged between the bottom shell and the top shell, an air inlet is formed in the top shell so that gas silicon carbide can be conveniently introduced, mounting columns are fixedly arranged in the bottom shell and the middle shells, and the mounting columns are fixedly connected with the bottom shell and the middle shells. A fixing structure is detachably arranged on the mounting column, the fixing structure comprises a mounting frame, a mounting piece and a mounting block, and the seed wafer is fixed through the fixing structure; the bottom shell is connected with the middle shells through connecting structures, the middle shells are connected through connecting structures, the middle shells are connected through connecting structures, the middle shells are connected with the top shell through connecting structures, each connecting structure comprises a connecting ring, a limiting block and a first adjusting rod, the limiting blocks are movably arranged on the connecting rings, and the first adjusting rods are arranged on the limiting blocks. And the whole growth device can be conveniently formed through the connecting structure.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of silicon carbide production, more particularly, it relates to a silicon carbide crystal growth device. BACKGROUND

[0002] Silicon carbide has a relatively important role in industrial production, various electrical components can be made through silicon carbide, and the production of silicon carbide generally has various ways, the silicon carbide raw material can be sublimated into a gaseous state through high temperature, and the silicon carbide seed crystal with high purity is placed in the low temperature area of the growth device, the high-temperature silicon carbide gas enters the low-temperature area of the seed crystal from the high-temperature area, and is attached to the silicon carbide seed crystal, so that the growth of the silicon carbide crystal is realized, the existing growth device is generally located in the structure of a crucible, the height of the crucible is fixed, so the height of the silicon carbide crystal that can be grown is fixed, so it is inconvenient to produce silicon carbide with the required length or height according to the needs, and in the process of growing silicon carbide, the sublimated silicon carbide gas exists, the growth device is easy to overflow with silicon carbide gas, thereby causing waste of silicon carbide and increasing the production cost of the silicon carbide crystal. SUMMARY

[0003] (I) Technical problems solved

[0004] In view of the problems in the prior art, the utility model provides a silicon carbide crystal growth device to solve the technical problems mentioned in the background art.

[0005] (II) Technical scheme

[0006] In order to achieve the above-mentioned purpose, the utility model provides the following technical scheme: a silicon carbide crystal growth device, comprising a bottom shell, an intermediate shell and a top shell, the intermediate shell is provided with a plurality of, the intermediate shell is detachably arranged between the bottom shell and the top shell, an air inlet is formed in the top shell, which is convenient for the inlet of gaseous silicon carbide, the inside of the bottom shell and the intermediate shell is fixedly provided with a mounting column, the mounting column is detachably provided with a fixing structure, the fixing structure comprises a mounting frame, a mounting sheet and a mounting block, the seed crystal sheet is fixed through the fixing structure.

[0007] The fixing structure is provided with a plurality of groups, the bottom shell and the intermediate shell, the intermediate shell and the intermediate shell, and the intermediate shell and the top shell are connected through the connecting structure, the connecting structure comprises a connecting ring, a limiting block and a first adjusting rod, the connecting structure is provided with a plurality of groups, the limiting block is movably arranged on the connecting ring, and the whole growth device is conveniently formed through the connecting structure.

[0008] The utility model further sets up, the upper end of the bottom shell and the intermediate shell is fixedly provided with a sealing block, the lower end of the top shell and the intermediate shell is provided with a sealing groove, the sealing block and the sealing groove are matched with each other, so that the connecting part is sealed through the cooperation of the sealing groove and the sealing block.

[0009] The utility model further sets up, the side end of bottom shell, middle shell and top shell all is provided with extension ring, the connecting ring sleeve sets up installs on extension ring, be provided with screw thread on first adjusting lever, first adjusting lever and limit block are connected through bearing rotation, be provided with slot on connecting ring, thereby facilitate the cooperation between connecting ring and extension ring.

[0010] The utility model further sets up, limit block can move and set up in slot, adjusting lever and connecting ring are connected through screw thread, the extension ring of bottom shell, middle shell and top shell all sets up limit slot, limit slot and limit block cooperate with each other, thereby facilitate connecting ring fixed with extension ring on.

[0011] The utility model further sets up, the side end fixed setting of mounting bracket has connecting column, the mounting piece fixed setting is set up on connecting column, the mutual cooperation between mounting piece and mounting column, the mounting block sets up multiple, the mounting groove is set up on mounting bracket, the mounting block sets up in mounting groove, thereby facilitate the assembly to fixed structure.

[0012] The utility model further sets up, the mounting column and mounting piece all sets up positioning hole, the positioning hole of mounting column sets up multiple, be provided with screw thread in positioning hole, the positioning hole of mounting column and the positioning hole set up on mounting piece between bolt connection, thereby facilitate the connection between mounting bracket and mounting column.

[0013] The utility model further sets up, be provided with threaded rod in mounting groove, threaded rod and mounting bracket are connected, be provided with two threads of opposite rotation on threaded rod, threaded rod passes through mounting block, threaded rod and mounting block are connected through screw thread, thereby drive mounting block between each other close or away through threaded rod.

[0014] The utility model further sets up, the connecting plate rotatablely set up on mounting block, be provided with clamping block and second adjusting lever on connecting plate, second adjusting lever and clamping block are connected, be provided with screw thread on the upper end of second adjusting lever, second adjusting lever and connecting plate are connected through screw thread, be provided with damping between connecting plate and mounting block, drive clamping block to drop through second adjusting lever.

[0015] (Three) beneficial effects

[0016] Compared with the prior art, the utility model provides a silicon carbide crystal growth device, has the following beneficial effects:

[0017] 1. The utility model discloses a fixed structure is set up, when cultivating silicon carbide crystal of different height or length, according to the height required, the middle shell layer is cumulatively installed on the bottom shell, and through the cooperation of mounting column and mounting piece, the bolt is inserted into the positioning hole, and the mounting frame is fixed at the height required, according to the width of seed crystal piece, rotate the threaded rod, through the thread of two opposite directions set up on the threaded rod and the thread connection between the mounting block, drive the mounting block to approach or away from each other, thereby through the cooperation of two mounting blocks, the seed crystal piece is supported and fixed, rotates the connecting plate, makes the clamping block towards the seed crystal piece, rotates the second adjusting rod, and the clamping block is lowered through the thread connection of the second adjusting rod and the connecting plate, thereby the seed crystal piece is fixed between two fixed structures through the cooperation of the clamping block and the mounting block, thereby it is convenient for the height adjustment fixed structure according to the required growth silicon carbide, thereby it is convenient for silicon carbide to grow on the seed crystal piece.

[0018] 2. The utility model discloses a connecting structure is set up, when the middle shell and the middle shell, the middle shell and the bottom shell, the middle shell and the top shell are connected, the connecting ring is set up and installed on the extension ring of the combined bottom shell, middle shell and top shell structure, make the slot set up on the connecting ring and the limit slot of the extension ring are in alignment, rotate the first adjusting rod, and drive the limit block to descend through the thread connection of the first adjusting rod and the connecting ring, make the limit block from the slot into the limit slot, thereby through the clamping of the limit slot, the connecting ring is connected between the extension ring, thereby the middle shell and the middle shell, the middle shell and the bottom shell, the middle shell and the top shell are connected, thereby it is convenient for the assembly and disassembly of whole growth device.

[0019] 3. The utility model discloses a sealing groove and sealing block are set up through the cooperation, and the connecting ring is set up and installed in the joint of extension ring and extension ring connection, when the middle shell and the middle shell, the middle shell and the bottom shell, the middle shell and the top shell are connected, the gap between the middle shell and the middle shell, the middle shell and the bottom shell, the middle shell and the top shell is sealed simultaneously, reduces the overflow of gaseous silicon carbide, thereby reduces the loss of gaseous silicon carbide, thereby saves the growth cost of silicon carbide. ACCURACY OF DRAWINGS

[0020] Figure 1 It is a kind of silicon carbide crystal growth device's overall structure schematic diagram;

[0021] Figure 2 It is a kind of silicon carbide crystal growth device's bottom shell, middle shell and the cooperation structure schematic diagram of connecting ring;

[0022] Figure 3 It is a kind of silicon carbide crystal growth device's middle shell and the cooperation structure schematic diagram of fixed structure;

[0023] Figure 4 It is a kind of silicon carbide crystal growth device's fixed structure structure schematic diagram;

[0024] Figure 5 It is a structure diagram of a connecting structure of a silicon carbide crystal growth device.

[0025] In the figure: 1, bottom shell; 2, middle shell; 3, top shell; 4, mounting column; 5, mounting frame; 6, mounting piece; 7, mounting block; 8, connecting ring; 9, limiting block; 10, first adjusting rod; 11, sealing block; 12, sealing groove; 13, extension ring; 14, missing groove; 15, limiting groove; 16, connecting column; 17, mounting groove; 18, positioning hole; 19, threaded rod; 20, connecting plate; 21, clamping block; 22, second adjusting rod. DETAILED DESCRIPTION

[0026] It should be noted that the embodiments and features in the embodiments in the present application can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0027] It should be noted that, unless otherwise specified, all technical and scientific terms used in the present application have the same meaning as generally understood by those skilled in the art to which the present application belongs.

[0028] In the present application, unless otherwise stated, the directions used such as "up, down" are generally with respect to the directions shown in the drawings, or with respect to the vertical, perpendicular or gravitational direction; similarly, for the convenience of understanding and description, "left, right" is generally with respect to the left and right shown in the drawings; "inner, outer" refers to the inner and outer with respect to the contour of each component itself, but the above directional words are not used to limit the present application.

[0029] Please refer to Figures 1-5 A silicon carbide crystal growth device, comprising a bottom shell 1, a middle shell 2 and a top shell 3, characterized in that: the middle shell 2 is provided with a plurality of middle shells 2, which are detachably arranged between the bottom shell 1 and the top shell 3, and the inside of the bottom shell 1 and the middle shell 2 is fixedly provided with a mounting column 4, and the mounting column 4 is detachably provided with a fixing structure, which comprises a mounting frame 5, a mounting piece 6 and a mounting block 7.

[0030] The fixing structure is provided with a plurality of groups, and the bottom shell 1 and the middle shell 2, the middle shell 2 and the middle shell 2, and the middle shell 2 and the top shell 3 are connected through a connecting structure, the connecting structure comprises a connecting ring 8, a limiting block 9 and a first adjusting rod 10, the connecting structure is provided with a plurality of groups, and the limiting block 9 is movably arranged on the connecting ring 8.

[0031] In the present embodiment, the bottom shell 1, the middle shell 2 and the top shell 3 cooperate to form the main structure of the entire growth device, and the fixing structure facilitates the fixation of the seed crystal wafer.

[0032] More specifically, the bottom shell 1 is connected with the middle shell 2, the middle shell 2 is connected with the middle shell 2, and the middle shell 2 is connected with the top shell 3 through the connecting structure.

[0033] Please refer to Figures 1-5 As an embodiment of fixing the seed crystal wafer, the side end of the mounting frame 5 is fixedly provided with a connecting column 16, the mounting piece 6 is fixedly arranged on the connecting column 16, the mounting piece 6 cooperates with the mounting column 4, a plurality of mounting blocks 7 are arranged, the mounting groove 17 is arranged on the mounting frame 5, the mounting block 7 is arranged in the mounting groove 17, the positioning hole 18 is arranged on the mounting column 4 and the mounting piece 6, a plurality of positioning holes 18 are arranged on the mounting column 4, the positioning hole 18 is provided with a thread, the positioning hole 18 arranged on the mounting column 4 is bolted with the positioning hole 18 arranged on the mounting piece 6, the threaded rod 19 is arranged in the mounting groove 17, the threaded rod 19 is rotatably connected with the mounting frame 5, the threaded rod 19 is provided with two threads with opposite rotation directions, the threaded rod 19 passes through the mounting block 7, the threaded rod 19 is threadedly connected with the mounting block 7, the connecting plate 20 is rotatably arranged on the mounting block 7, the clamping block 21 and the second adjusting rod 22 are arranged on the connecting plate 20, the second adjusting rod 22 is rotatably connected with the clamping block 21, the second adjusting rod 22 is provided with a thread at the upper end, and the second adjusting rod 22 is threadedly connected with the connecting plate 20.

[0034] Specifically, when cultivating silicon carbide crystals with different heights or lengths, according to the required height, the middle shell 2 is installed on the bottom shell 1 layer by layer, the bolt is inserted into the positioning hole 18 through the cooperation of the mounting column 4 and the mounting piece 6, the mounting frame 5 is fixed at the required height, according to the width of the seed crystal wafer, the threaded rod 19 is rotated, the two threads with opposite rotation directions arranged on the threaded rod 19 and the threaded connection between the threaded rod 19 and the mounting block 7 drive the mounting block 7 to move closer or farther away from each other, thereby supporting and fixing the seed crystal wafer through the cooperation of the two mounting blocks 7, the connecting plate 20 is rotated to make the clamping block 21 face the seed crystal wafer, the second adjusting rod 22 is rotated, the clamping block 21 is lowered through the threaded connection between the second adjusting rod 22 and the connecting plate 20, thereby fixing the seed crystal wafer between the two fixing structures through the cooperation of the clamping block 21 and the mounting block 7.

[0035] Please refer to Figures 1-5As an embodiment of the whole growth device assembly: the upper end of the bottom shell 1 and the intermediate shell 2 are fixedly provided with sealing blocks 11, the lower end of the top shell 3 and the intermediate shell 2 are provided with sealing grooves 12, the sealing blocks 11 and the sealing grooves 12 are matched with each other, the side end of the bottom shell 1, the intermediate shell 2 and the top shell 3 are provided with extension rings 13, the connecting ring 8 is sleeved and installed on the extension ring 13, the first adjusting rod 10 is provided with threads, the first adjusting rod 10 and the limiting block 9 are rotationally connected through a bearing, the connecting ring 8 is provided with a missing slot 14, the limiting block 9 is movably arranged in the missing slot 14, the adjusting rod and the connecting ring 8 are threadedly connected, the extension ring 13 of the bottom shell 1, the intermediate shell 2 and the top shell 3 is provided with a limiting groove 15, and the limiting groove 15 and the limiting block 9 are matched with each other;

[0036] Specifically, when connecting the intermediate shell 2 and the intermediate shell 2, the intermediate shell 2 and the bottom shell 1, and the intermediate shell 2 and the top shell 3, the connecting ring 8 is sleeved and installed on the extension ring 13 of the combined bottom shell 1, intermediate shell 2 and top shell 3 structure, the missing slot 14 provided on the connecting ring 8 is aligned with the limiting groove 15 provided on the extension ring 13, the first adjusting rod 10 is rotated, the limiting block 9 is lowered through the thread connection between the first adjusting rod 10 and the connecting ring 8, the limiting block 9 enters the limiting groove 15 from the missing slot 14, and the connecting ring 8 and the extension ring 13 are connected through the clamping of the limiting groove 15, so that the intermediate shell 2 and the intermediate shell 2, the intermediate shell 2 and the bottom shell 1, and the intermediate shell 2 and the top shell 3 are connected.

[0037] In summary, the whole is used:

[0038] When cultivating silicon carbide crystals of different heights or lengths, according to the required height, the intermediate shell 2 is installed on the bottom shell 1 layer by layer, the bolt is inserted into the positioning hole 18 through the cooperation of the mounting column 4 and the mounting piece 6, the mounting frame 5 is fixed at the required height, according to the width of the seed crystal piece, the threaded rod 19 is rotated, the two threads with opposite directions provided on the threaded rod 19 and the threaded connection between the mounting block 7 drive the mounting block 7 to move closer or farther away, so that the seed crystal piece is supported and fixed through the cooperation of the two mounting blocks 7, the connecting plate 20 is rotated, the clamping block 21 is directed towards the seed crystal piece, the second adjusting rod 22 is rotated, the clamping block 21 is lowered through the threaded connection between the second adjusting rod 22 and the connecting plate 20, so that the seed crystal piece is fixed between the two fixed structures through the cooperation of the clamping block 21 and the mounting block 7.

[0039] When assembling the whole growth device, the connecting ring 8 is sleeved on the extension ring 13 of the combined bottom shell 1, middle shell 2 and top shell 3 structure, the missing slot 14 provided on the connecting ring 8 is aligned with the limiting slot 15 provided on the extension ring 13, the first adjusting rod 10 is rotated, the limiting block 9 is driven to descend through the threaded connection between the first adjusting rod 10 and the connecting ring 8, the limiting block 9 enters the limiting slot 15 from the missing slot 14, and the connecting ring 8 is connected with the extension ring 13 through the clamping of the limiting slot 15, so as to connect the middle shell 2 with the middle shell 2, the middle shell 2 with the bottom shell 1 and the middle shell 2 with the top shell 3.

[0040] In all the above-mentioned solutions, the connection between the two components can be selected according to the actual situation, such as welding, bolt and nut cooperation connection, bolt or screw connection or other known connection mode, which will not be described one by one. In the above, when it is mentioned that it is fixedly connected, it is preferred to be welded. Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide crystal growing apparatus comprising a base housing (1), an intermediate housing (2) and a top housing (3), characterised in that: The intermediate shell (2) is provided with a plurality of, the intermediate shell (2) is detachably arranged between the bottom shell (1) and the top shell (3), the inside of the bottom shell (1) and the intermediate shell (2) is fixedly provided with the mounting column (4), the mounting column (4) is detachably provided with the fixed structure, the fixed structure includes the mounting frame (5), the mounting piece (6) and the mounting block (7); The fixed structure is provided with a plurality of groups, the bottom shell (1) and the intermediate shell (2), the intermediate shell (2) and the intermediate shell (2), the intermediate shell (2) and the top shell (3) are connected through the connecting structure, the connecting structure includes the connecting ring (8), the limiting block (9) and the first adjusting rod (10), the connecting structure is provided with a plurality of groups, the limiting block (9) is movably arranged on the connecting ring (8).

2. A silicon carbide crystal growth apparatus as defined in claim 1, wherein: The upper end of the bottom shell (1) and the intermediate shell (2) is fixedly provided with the sealing block (11), the lower end of the top shell (3) and the intermediate shell (2) is provided with the sealing groove (12), the sealing block (11) and the sealing groove (12) are matched with each other.

3. A silicon carbide crystal growth apparatus as defined in claim 1, wherein: The side end of the bottom shell (1), the intermediate shell (2) and the top shell (3) is provided with the extension ring (13), the connecting ring (8) is sleeved and mounted on the extension ring (13), the first adjusting rod (10) is provided with a screw thread, the first adjusting rod (10) and the limiting block (9) are rotatably connected through the bearing, the connecting ring (8) is provided with a slot (14).

4. A silicon carbide crystal growth apparatus as defined in claim 3, wherein: The limiting block (9) is movably arranged in the slot (14), the adjusting rod and the connecting ring (8) are screw connected, the extension ring (13) of the bottom shell (1), the intermediate shell (2) and the top shell (3) is provided with a limiting groove (15), the limiting groove (15) and the limiting block (9) are matched with each other.

5. A silicon carbide crystal growth apparatus as defined in claim 1, wherein: The side end of the mounting frame (5) is fixedly provided with the connecting column (16), the mounting piece (6) is fixedly arranged on the connecting column (16), the mounting piece (6) and the mounting column (4) are matched with each other, the mounting block (7) is provided with a plurality of, the mounting groove (17) is formed in the mounting frame (5), and the mounting block (7) is arranged in the mounting groove (17).

6. A silicon carbide crystal growth apparatus as defined in claim 5, wherein: The mounting column (4) and the mounting piece (6) are provided with a plurality of positioning holes (18), the positioning holes (18) on the mounting column (4) are provided with a plurality of threads, and the positioning holes (18) are provided with a plurality of threads.

7. A silicon carbide crystal growth apparatus as defined in claim 5, wherein: The mounting groove (17) is provided with a threaded rod (19), the threaded rod (19) and the mounting frame (5) are rotatably connected, the threaded rod (19) is provided with two threads with opposite rotation directions, the threaded rod (19) passes through the mounting block (7), and the threaded rod (19) and the mounting block (7) are screw connected.

8. A silicon carbide crystal growth apparatus as defined in claim 5, wherein: The mounting block (7) is rotatably provided with a connecting plate (20), the connecting plate (20) is provided with a clamping block (21) and a second adjusting rod (22), the second adjusting rod (22) is rotatably connected with the clamping block (21), the upper end of the second adjusting rod (22) is provided with a thread, and the second adjusting rod (22) is threadedly connected with the connecting plate (20).

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