Vacuum pump protection device

Abstract

The utility model discloses a vacuum pump protection device, which belongs to the field of auxiliary structures of vacuum pumps, and at least comprises a connecting piece, a rotary knob, a protective cover and a protective cover, the power piece is fixedly connected with the connecting piece and allows the connecting piece to drive an output shaft of the power piece to rotate; the detector is used for detecting the rotating speed of the power part; the controller is electrically connected to the detector and the power part, and the controller adjusts the rotating speed of the power part according to the rotating speed, detected by the detector, of the power part; and the power supply is electrically connected to the power piece, the detector and the controller. By means of the vacuum pump protection device, the problem that the vacuum pump is stuck can be automatically solved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum pump auxiliary structure field, especially relate to a vacuum pump protection device. BACKGROUND

[0002] In semiconductor manufacturing, it is necessary to set the operation chamber as a vacuum environment, so it is necessary to set a vacuum pump to vacuumize the operation chamber. When the vacuum pump stops rotating abnormally, the reaction or generated substances in the operation chamber enter the vacuum pump along the vacuum pipeline and deposit on the rotor. When the deposits are too much, the vacuum pump may be stuck.

[0003] A knob connected with the vacuum pump is arranged on the outer surface of the vacuum pump. When the vacuum pump stops rotating abnormally, the knob needs to be manually tightened to rotate the vacuum pump, so as to drive the vacuum pump to rotate, avoiding that the foreign matter deposits on the rotor in the vacuum pump, but is extracted by the gas treatment device connected with the output end of the vacuum pump. However, when the knob is rotated by manpower, if the manpower is too large, the structure of the vacuum pump will be damaged. If the foreign matter is too much, the knob cannot be rotated by manpower. SUMMARY

[0004] The utility model discloses a vacuum pump protection device, can solve the problem that the vacuum pump is stuck by foreign matter under abnormal conditions automatically.

[0005] To solve the above technical problems, the utility model is realized through the following technical schemes:

[0006] The utility model provides a vacuum pump protection device, at least includes:

[0007] The connecting piece is clamped with the knob on the vacuum pump,

[0008] The power piece is fixedly connected with the connecting piece, and the connecting piece drives the output shaft of the power piece to rotate,

[0009] The detector detects the rotating speed of the power piece,

[0010] The controller is electrically connected with the detector and the power piece, and the controller adjusts the rotating speed of the power piece according to the rotating speed of the power piece detected by the detector, and

[0011] The power supply is electrically connected with the power piece, the detector and the controller.

[0012] In an embodiment of the utility model, the connecting piece is in columnar structure, the shape of the end face of the connecting piece is same with the shape of the concave part on the knob, and the outer diameter size of the connecting piece is equal to the inner diameter size of the concave part.

[0013] In one embodiment of this utility model, the detector is disposed in the power component.

[0014] In one embodiment of this utility model, the power component is a DC geared motor with a Hall encoder.

[0015] In one embodiment of this utility model, the control is provided with a speed threshold range, and the speed threshold range is set between the minimum speed threshold and the maximum speed threshold;

[0016] When the detector detects that the rotational speed of the power component is within the speed threshold range, the controller does not transmit any output information to the power component; and

[0017] When the detector detects that the rotational speed of the power component is less than the minimum rotational speed threshold, the controller outputs control information to the power component, and the control information includes a set rotational speed. The power component rotates according to the rotational speed set in the control information.

[0018] In one embodiment of this utility model, the vacuum pump protection device further includes a switch, which is electrically connected to the controller.

[0019] In one embodiment of the present invention, the vacuum pump protection device further includes a display, which is electrically connected to the controller and displays the current rotational speed of the power component.

[0020] In one embodiment of the present invention, the vacuum pump protection device further includes a housing, the power component, the detector, the controller and the power supply are disposed within the housing, and the connector extends out of the housing.

[0021] In one embodiment of the present invention, the vacuum pump protection device further includes a fixing member, which fixes the outer shell and the housing of the vacuum pump in a fixed connection.

[0022] In one embodiment of this utility model, the fixing member includes:

[0023] Two baffles, the two baffles being arranged in parallel, and the housing being placed between the two baffles; and;

[0024] Bolts are used to fix the housing and one of the baffles together, and the other baffle has a predetermined distance from the housing.

[0025] In summary, the unexpected effect of the vacuum pump protection device is that: the rotation speed information of the vacuum pump is transmitted to the power piece through the connecting piece, the rotation speed information of the power piece is detected in real time through the detector, and then the rotation speed information of the vacuum pump is obtained, when the vacuum pump stops rotating abnormally, the controller controls the power piece to rotate actively, and then drives the knob engaged with the connecting piece to rotate, so that foreign matters cannot be deposited on the rotor in the vacuum pump. If part of the foreign matters is deposited on the rotor, the foreign matters on the rotor are lifted when the rotor rotates, the foreign matters between the spiral rotors of the vacuum pump can be cleaned, the vacuum pump returns to the normal working state, and the vacuum pump is prevented from being stuck. The controller limits the rotation speed of the power piece, prevents the rotation speed of the power piece from being too large, prevents the torque output by the power piece from being too large, and prevents the vacuum pump structure from being damaged. Therefore, the vacuum pump protection device can automatically process the problem of the vacuum pump being stuck, and the vacuum pump structure is prevented from being damaged in the processing process.

[0026] Of course, implementing any product of the present application does not necessarily require all the advantages described above. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0028] Figure 1 It is a structural schematic view of the vacuum pump in an embodiment.

[0029] Figure 2 It is a structural block diagram of the vacuum pump protection device in an embodiment.

[0030] Figure 3 It is a circuit diagram of the vacuum pump protection device in an embodiment.

[0031] Figure 4 It is a structural schematic view of the vacuum pump protection device in an embodiment.

[0032] Label explanation:

[0033] 101, housing; 102, spiral rotor; 103, screw rod; 104, knob; 1041, recess; 105, flip cover; 201, power piece; 202, detector; 2021, hall encoder; 203, controller; 204, power supply; 2041, power conversion circuit; 205, switch; 206, display; 207, shell; 208, connecting piece; 2091, baffle; 2092, bolt; M, motor. DETAILED DESCRIPTION

[0034] The other advantages and effects of the present application can be easily understood by those skilled in the art from the contents disclosed in the present specification. The present application can also be implemented or applied in other different embodiments, and each detail in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present application.

[0035] It should be noted that the diagrams provided in the present embodiment only schematically illustrate the basic concepts of the present application, and only show the components related to the present application in the diagrams, not the number, shape and size of the components when actually implemented. The shapes, number and proportions of the components when actually implemented can be randomly changed, and the layout pattern of the components can be more complex.

[0036] In the present application, it should be noted that if terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like are used, the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, if the terms "first" and "second" appear, they are only used for description and differentiation purposes, and cannot be understood as indicating or implying relative importance.

[0037] A vacuum pump refers to a device or equipment that uses mechanical, physical, chemical or physical-chemical methods to pump a container to obtain a vacuum. It is a device used to improve, generate and maintain a vacuum in a closed space. In the process of manufacturing semiconductors, a dry pump (Dry pump) is arranged at the gas outlet of an operation chamber such as a deposition chamber or an etching chamber, and the dry pump is used to pump the working chamber of a semiconductor deposition device or a semiconductor etching device to a vacuum.

[0038] Please refer to Figure 1As shown in the figure, in an embodiment, two spiral rotors 102 with the same cross section are arranged in the housing 101 of the vacuum pump. The two spiral rotors 102 are fixedly connected to two parallel screw rods 103, and the two parallel screw rods 103 are driven by the same gear (not shown in the figure). The two spiral rotors 102 have gaps with the housing 101 of the vacuum pump, so that when the spiral rotors 102 rotate with the screw rods 103, the gas can be sucked from the gas inlet and discharged from the gas outlet. Since the spiral rotors 102 have gaps with the housing 101 of the vacuum pump, when the gas in the operation chamber contains foreign matters such as reactants or products, if the spiral rotors 102 stop rotating, the foreign matters will adhere to the spiral rotors 102. When the foreign matters deposited on the spiral rotors 102 are too much, the vacuum pump will be stuck. A knob 104 is further arranged on the housing 101 of the vacuum pump. The knob 104 is connected with the gear through the housing 101. When the vacuum pump abnormally stops rotating, the knob 104 can be manually rotated to drive the gear to rotate, and then drive the screw rods 103 and the spiral rotors 102 on the screw rods 103 to rotate. A flip cover 105 is arranged outside the housing 101 of the vacuum pump. When the flip cover 105 is closed, the knob 104 is covered, and the communication between the inside and outside of the housing 101 is avoided.

[0039] Please refer to Figures 1 to 4 As shown in the figure, in an embodiment, a vacuum pump protection device is fixed on the housing 101 of the vacuum pump, which can provide a suitable force for the vacuum pump when the vacuum pump abnormally stops rotating, so that the vacuum pump can work again and avoid the foreign matters from being deposited on the spiral rotors 102 in the vacuum pump. Specifically, the vacuum pump protection device comprises an outer shell 207, a power element 201, a detector 202, a controller 203, a power supply 204 and a switch 205 arranged in the outer shell 207, and a connecting element 208 fixed on the power element 201 and extending out of the outer shell 207. The connecting element 208 can be clamped with the knob 104 on the vacuum pump, the power element 201 is fixedly connected with the connecting element 208, and the connecting element 208 is allowed to drive the power element 201 to rotate, and the power element 201 is also allowed to drive the connecting element 208 to rotate. The detector 202 can detect the rotating speed of the power element 201. The controller 203 is electrically connected with the detector 202 and the power element 201, and can adjust the rotating speed of the power element 201 according to the rotating speed output by the detector 202. The power supply 204 is electrically connected with the controller 203, the detector 202 and the power element 201, and supplies power for the controller 203, the detector 202 and the power element 201. The switch 205 is electrically connected with the controller 203, and is used to start the vacuum pump protection device.

[0040] Please refer to Figure 1 and Figure 4As shown, in one embodiment of this utility model, the knob 104 has a recess 1041, and the connector 208 is, for example, columnar. The shape of the recess 1041 on the knob 104 is the same as the shape of the end face of the connector 208, and the inner diameter of the recess 1041 on the knob 104 is equal to the outer diameter of the connector 208, so that the columnar connector 208 is engaged in the recess 1041 on the knob 104. In this embodiment, the recess 1041 on the knob 104 is, for example, hexagonal, and the connector 208 has a hexagonal end face. In other embodiments, the recess 1041 on the knob 104 is, for example, triangular, quadrilateral, pentagonal, or octagonal, and the connector 208 has a corresponding triangular, quadrilateral, pentagonal, or octagonal end face.

[0041] Please see Figure 2 , Figure 3 and Figure 4 As shown, in one embodiment of this utility model, the power component 201 is, for example, a motor M. The output shaft of the motor M is fixedly connected to the connector 208. When the motor M is electrically connected to the power supply 204 and receives control information from the controller 203, the motor M rotates, and the output shaft of the motor M drives the connector 208 to rotate. When the motor M is not connected to the power supply 204, or has not received control information from the controller 203, the motor M will not rotate actively. However, at this time, the connector 208 can drive the output shaft of the motor M to rotate, thereby causing the motor M to rotate passively.

[0042] Please see Figure 2 and Figure 3 As shown, in one embodiment of this utility model, the detector 202 is a position sensor. Specifically, the detector 202 is implemented, for example, using a Hall encoder 2021. The Hall encoder 2021 is electrically connected to the motor M, and the Hall encoder 2021 includes a rotating disk (not shown in the figure) and at least two Hall sensors (not shown in the figure). The rotating disk typically has a fixed number of magnetic poles, and the number of magnetic poles determines the resolution of the encoder. Each Hall sensor is mounted around the rotating disk, with the Hall encoder 2021 placed at a fixed interval. The Hall sensors can identify the phase position information of the motor M winding and convert the phase position information of the motor M winding into an electrical signal, which is then transmitted to the controller 203. Therefore, the electrical signal output by the Hall encoder 2021 is the rotational speed signal of the power component 201.

[0043] Please see Figure 2 and Figure 3As shown, in one embodiment of this utility model, the Hall encoder 2021 has a signal output terminal A and a signal output terminal B. The signal output terminals A and B of the Hall encoder 2021 output the rotational speed signal of the power component 201 from the Hall encoder 2021 to the controller 203, specifically to the data terminals PA2 and PA3 of the controller 203. The power supply terminal VCC of the Hall encoder 2021 is electrically connected to the output terminal of the power supply 204.

[0044] Please see Figure 2 and Figure 3 As shown, it should be noted that in this application, the detector 202 can only detect the rotational speed of the power component 201. In one embodiment of this utility model, the detector 202 is disposed in the power component 201. That is, the power component 201 is a motor M with a Hall encoder 2021, and is a DC geared motor M with a Hall encoder 2021.

[0045] Please see Figure 2 and Figure 3 As shown, in one embodiment of this utility model, the controller 203 is electrically connected to the detector 202, the power component 201, and the power supply 204. The controller 203 can be implemented using a control chip. In this embodiment, for example, an STM32F103C8T6 control chip is used, and the specific connection relationship is as follows. Figure 3 As shown, a speed threshold range is set within the controller 203, between a minimum speed threshold and a maximum speed threshold. The minimum and maximum speed thresholds are set according to the model of the vacuum pump. When the controller 203 receives the speed signal of the power component 201 from the detector 202, it compares the speed of the power component 201 with the speed threshold range. The output of the controller 203 differs depending on the relationship between the speed of the power component 201 and the speed threshold range.

[0046] Please see Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in one embodiment of this utility model, when the vacuum pump is in normal working condition, the connector 208 engages with the knob 104, driving the power component 201 to rotate. At this time, the rotational speed of the power component 201 is within the rotational speed threshold range, and the controller 203 does not transmit any output information to the power component 201.

[0047] Please see Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, in one embodiment of this utility model, when the vacuum pump stops rotating due to an abnormality, the rotational speed of the power component 201 drops to zero or close to zero. At this time, the rotational speed of the power component 201 is less than the minimum rotational speed threshold, and the controller 203 outputs control information to the power component 201, which includes a set rotational speed. After receiving the control information, the power component 201 actively rotates according to the rotational speed set in the control information. At this time, the active rotation of the power component 201 drives the connecting piece 208 connected to the power component 201 to rotate, which in turn drives the knob 104 to rotate, causing the two spiral rotors 102 in the vacuum pump to rotate, and the vacuum pump returns to normal working state. When the vacuum pump returns to normal state, the rotational speed of the power component 201 returns to the rotational speed threshold range, and the controller 203 returns to a state of no output to the power component 201. At this time, the foreign object removal from the vacuum pump is completed.

[0048] Please see Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown in one embodiment of this utility model, when the vacuum pump stops rotating due to an abnormality, the rotational speed of the power component 201 drops to zero or close to zero. At this time, the rotational speed of the power component 201 is less than the minimum rotational speed threshold, and the controller 203 outputs control information to the power component 201, which includes a set rotational speed. After receiving the control information, the power component 201 actively rotates according to the rotational speed set in the control information. When the active rotation of the power component 201 cannot drive the connecting piece 208 connected to the power component 201 to rotate, the rotational speed set in the control information output by the controller 203 increases to increase the output torque of the power component 201. However, if the rotational speed set in the control information output by the controller 203 is equal to the maximum rotational speed threshold, and the active rotation of the power component 201 still cannot drive the connecting piece 208 connected to the power component 201 to rotate, the controller 203 outputs an alarm message and no longer increases the rotational speed set in the control information to avoid damage to the vacuum pump.

[0049] Please see Figure 2 and Figure 3As shown, in one embodiment of this utility model, the power supply 204 is electrically connected to the controller 203, the detector 202, and the power unit 201, supplying power to the controller 203, the detector 202, and the power unit 201. In this embodiment, the power supply 204 includes a DC power supply and a power conversion circuit 2041. The DC power supply outputs a constant DC source, such as a 24V DC source. The power conversion circuit 2041 is, for example, a low dropout regulator (LDO) or a DC-to-DC converter, converting the voltage output from the DC source into the DC voltage required by the controller 203, the detector 202, and the power unit 201, such as 12V, 5V, 3.3V, and 1.0V DC voltages.

[0050] Please see Figure 2 and Figure 3 As shown, in one embodiment of this utility model, switch 205 is electrically connected to controller 203, specifically to data terminal PB1 of controller 203. When it is necessary to shut down the vacuum pump protection device, the entire vacuum pump protection device can be shut down via switch 205.

[0051] Please see Figure 2 and Figure 3 As shown, in one embodiment of this utility model, the vacuum pump protection device further includes a display 206, which is electrically connected to the controller 203. The signal input resistor of the display 206 is connected to the data terminal of the controller 203, specifically as follows... Figure 3 As shown. The display 206 is used to display the current rotational speed of the power component 201, and the rotational speed of the power component 201 can be determined by the rotational speed displayed on the display 206. When the controller 203 outputs alarm information, the display 206 can display the abnormal information.

[0052] Please see Figure 1 and Figure 4 As shown, in one embodiment of this utility model, the vacuum pump protection device further includes a fixing component. The fixing component secures the outer casing 207 to the housing 101 of the vacuum pump, thereby fixing the vacuum pump protection device to the vacuum pump. In this embodiment, the fixing component includes two baffles 2091 and a bolt 2092. The two baffles 2091 are arranged in parallel, with the housing 101 placed between the two baffles 2091. The bolt 2092 securely connects the housing 101 and one baffle 2091, and there is a preset distance between the other baffle 2091 and the housing 101.

[0053] In summary, the utility model provides a vacuum pump protection device, vacuum pump protection device includes the casing, sets up the power part, detector, controller, power supply and switch in the casing, extends the connecting piece of casing, and fixes the fixed part of casing and vacuum pump shell, wherein, connecting piece can be with the knob of vacuum pump and is engaged, power part and connecting piece fixed connection, and allow connecting piece to drive power part's output shaft rotation, detector detects the rotating speed of power part, controller electric connection in detector and power part, controller according to the rotating speed of power part that detector detects, adjust the rotating speed of power part, power supply is power part, detector and controller power supply, the utility model provides a vacuum pump protection device, unexpected effect is: through connecting piece, the rotating speed information of vacuum pump is passed to power part, through detector, the rotating speed information of power part is detected in real time, and then obtains the rotating speed information of vacuum pump, when vacuum pump stops rotating due to abnormal, controller controls power part and actively rotates, and then drives the knob rotation of being engaged with connecting piece, so that foreign matter does not deposit on the rotor in vacuum pump, if part foreign matter deposits on the rotor, along with the rotor rotation, the foreign matter on the rotor is lifted when rotating, can realize the foreign matter cleaning between vacuum pump helical rotor, make vacuum pump restore normal working condition, avoid vacuum pump to be jammed, and controller realizes the restriction of power part rotating speed, avoid power part rotating speed too big, lead to the torque of power part output too big, and then lead to vacuum pump structure damage, so through the vacuum pump protection device provided by the utility model, can realize the automatic processing vacuum pump jam problem, and avoid vacuum pump structure damage in the processing process.

[0054] The above disclosed embodiments of the utility model are only used to help the explanation of the utility model. The embodiments do not describe all the details, and also do not limit the utility model to the specific implementation. Obviously, according to the content of the specification, many modifications and changes can be made. The specification selects and describes these embodiments, in order to better explain the principle and practical application of the utility model, so that the person skilled in the art can well understand and use the utility model. The utility model is limited by the claims and the whole scope and equivalents.

Claims

1. A vacuum pump protection device, characterized in that, At least comprising: a connecting piece, which is engaged with a knob on a vacuum pump; a power piece, which is fixedly connected with the connecting piece and is allowed to rotate with an output shaft of the power piece driven by the connecting piece; a detector, which detects the rotating speed of the power piece; a controller, which is electrically connected with the detector and the power piece, and adjusts the rotating speed of the power piece according to the rotating speed of the power piece detected by the detector; a power supply, which is electrically connected with the power piece, the detector and the controller. The connecting piece is in a columnar structure, the shape of the end surface of the connecting piece is the same as that of a concave part on the knob, and the outer diameter of the connecting piece is equal to the inner diameter of the concave part.

2. Vacuum pump protection device according to claim 1, characterized in that The detector is arranged in the power piece.

3. The vacuum pump protection device of claim 1, wherein, The power piece is a direct current speed-reducing motor with a Hall encoder.

4. The vacuum pump protection device of claim 1, wherein, The controller is provided with a rotating speed threshold range, which is set between a minimum rotating speed threshold and a maximum rotating speed threshold.

5. The vacuum pump protection device of claim 1, wherein, When the rotating speed of the power piece detected by the detector is within the rotating speed threshold range, the controller has no output information to the power piece. When the rotating speed of the power piece detected by the detector is less than the minimum rotating speed threshold, the controller outputs control information to the power piece, and the control information contains a set rotating speed, and the power piece rotates according to the set rotating speed in the control information. The vacuum pump protection device further comprises a switch, which is electrically connected with the controller. The vacuum pump protection device further comprises a display, which is electrically connected with the controller, and displays the current rotating speed of the power piece.

6. The vacuum pump protection device of claim 1, wherein, The vacuum pump protection device further comprises a housing, in which the power piece, the detector, the controller and the power supply are arranged, and the connecting piece extends out of the housing.

7. The vacuum pump protection device of claim 1, wherein, The vacuum pump protection device further comprises a fixing piece, which fixedly connects the housing and the shell of the vacuum pump.

8. The vacuum pump protection device of claim 1, wherein, The fixing piece comprises:

9. Vacuum pump protection device according to claim 8, characterized in that two baffles, which are arranged in parallel, and the shell is placed between the two baffles; and 10. Vacuum pump protection device according to claim 9, characterized in that a bolt, which fixedly connects the shell and one of the baffles, and the other baffle has a preset distance from the shell. ​ ​

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