Tool for fixing LPCVD (Low Pressure Chemical Vapor Deposition) furnace paddle transmission motor and adjusting tightness of belt

Abstract

A tool for fixing an LPCVD (low pressure chemical vapor deposition) furnace paddle transmission motor and adjusting tightness of a belt relates to the technical field of semiconductor material production and comprises a fixing plate, a first counter bore and a second counter bore are formed in the fixing plate, the motor is vertically mounted on the fixing plate, an eccentric circular base is arranged at the power output end of the motor and penetrates through the first counter bore to be connected with a pinion, and the pinion penetrates through the second counter bore to be connected with a transmission shaft. A guide rail lead screw penetrates through the second counter bore, one end of the guide rail lead screw is connected with a large gear, the large gear and a small gear are installed on the same side of the fixing plate and are in transmission connection through a tooth type synchronous belt, and the distance between the large gear and the small gear is adjusted through a rotating motor. According to the utility model, the motor is convenient and reliable to install, the tightness of the cog belt is easy and convenient to adjust, and the equipment stability is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor material production, especially to a kind of LPCVD furnace paddle conveying motor fixed and adjusting tool of belt tightness. BACKGROUND

[0002] There is an important process in the production process of semiconductor silicon polished wafer, which is back sealing process. One of the main ways of back sealing process is to grow a layer of silicon dioxide or polysilicon film on the back of the silicon wafer by using the principle of low pressure chemical vapor deposition (LPCVD). The main equipment for implementing back sealing process is a low-pressure horizontal back sealing furnace. The working principle is to place the silicon wafer on a paddle, drive the paddle and silicon wafer into the quartz tube through the motor-driven lead screw, use the vacuum pump to pump the furnace tube to create a vacuum environment, then introduce the gas, and control the pressure in the quartz tube by the opening angle of the butterfly valve. Under the appropriate gas and temperature, a layer of silicon dioxide or polysilicon film is generated on the back of the silicon wafer under the specific pressure environment.

[0003] During production, the silicon wafer and paddle are conveyed into the furnace tube by the motor-driven lead screw, and then conveyed out of the furnace tube after the reaction is completed. Currently, the traditional tooling has problems with complex installation process and poor reliability in motor installation and fixation. When adjusting the tightness of the toothed belt, the existing methods mostly rely on complex mechanical structures or repeated disassembly of some components to achieve the adjustment, which is not convenient to operate and difficult to accurately control the tightness, resulting in poor equipment stability and affecting the efficiency and accuracy of LPCVD furnace paddle conveying. UTILITY MODEL CONTENTS

[0004] The technical problem to be solved by the utility model is to provide a tooling for fixing and adjusting the tightness of the belt of the LPCVD furnace paddle conveying motor, which can make the motor installation convenient and reliable, and the toothed belt tightness adjustment simple, thereby improving the equipment stability.

[0005] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of a tooling for fixing and adjusting the tightness of the belt of the LPCVD furnace paddle conveying motor, which includes a fixed plate, the fixed plate has a first counterbore and a second counterbore, a motor is vertically installed on the fixed plate, the motor has a power output end provided with an eccentric circular base, the eccentric circular base passes through the first counterbore and is connected with a pinion, a guide rail lead screw passes through the second counterbore, one end of the guide rail lead screw is connected with a large gear, the large gear and the pinion are installed on the same side of the fixed plate and are connected through a toothed synchronous belt drive, and the distance between the large gear and the pinion is adjusted by rotating the motor.

[0006] Further, the first counterbore is embedded with two-stage annular inner stepped surfaces, the eccentric circular base edge is provided with two-stage annular outer stepped surfaces, the annular inner stepped surfaces are matched with the annular outer stepped surfaces, and the height of the outer stepped side on the outer stepped surface is higher than the height of the inner stepped side on the inner stepped surface when the annular inner stepped surfaces are attached to the annular outer stepped surfaces.

[0007] Further, the first counterbore is embedded with two-stage annular inner stepped surfaces, the eccentric circular base edge is provided with two-stage annular outer stepped surfaces, the annular inner stepped surfaces are matched with the annular outer stepped surfaces, and the height of the outer stepped side on the outer stepped surface is higher than the height of the inner stepped side on the inner stepped surface when the annular inner stepped surfaces are attached to the annular outer stepped surfaces.

[0008] Further, the protruding end of the locking screw fixes the motor on the fixed plate through the compression of the eccentric circular base.

[0009] Further, the fixed plate is provided with a plurality of screw holes for connecting external mechanical components.

[0010] Further, the fixed plate is a square aluminum alloy plate.

[0011] According to the above technical scheme, the application has the following beneficial effects:

[0012] The application is convenient and efficient to install and adjust. Through the ingenious design, the motor base panel is an eccentric circular shape. When adjusting the tightness of the toothed synchronous belt, only three locking screws need to be loosened, and the rotation of the motor can accurately adjust the distance between the motor output end transmission shaft and the guide rail screw. Compared with the traditional tooling, the cumbersome disassembly and reassembly steps are saved, the convenience of adjusting the tightness of the synchronous belt is improved, the equipment maintenance and debugging time is shortened, the toothed synchronous belt always maintains appropriate tension during the operation of the LPCVD furnace paddle conveying system, the problems of slipping and tooth skipping caused by the synchronous belt being too loose or too tight are avoided, the equipment running vibration and noise are reduced, the equipment stability and reliability are significantly improved, the equipment service life is prolonged, and the system is efficiently and stably operated. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is an explosion schematic view of the application structure;

[0014] Figure 2 It is an installation structure schematic view of the application;

[0015] Figure 3 It is a structure schematic view of the fixed plate;

[0016] Figure 4 It is a structure schematic view of the locking screw.

[0017] Marked in the figure: 1. Fixed plate, 11. First counterbore, 1101. Inner step side, 12. Second counterbore, 13. Screw hole, 2. Locking screw, 21. Projecting end, 3. Pinion, 4. Gear, 5. Toothed synchronous belt, 6. Motor, 7. Eccentric round base, 71. Outer step side, 8. Fixing screw, 9. Guide rail screw. DETAILED DESCRIPTION

[0018] The utility model will be further explained in detail below in combination with the drawings and specific embodiments.

[0019] The structure, proportion, size and the like shown in the drawings of the specification are only used to cooperate with the content disclosed in the specification, to be understood and read by those skilled in the art, and are not used to limit the limiting conditions that can be implemented by the utility model, so they do not have substantial technical significance. Any modification of structure, change of proportional relationship or adjustment of size, without affecting the effects that can be produced by the utility model and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed by the utility model.

[0020] At the same time, it needs to be explained that, unless otherwise stated, the meaning of "several" is two or more than two; the orientation or position relationship indicated by the terms "upper", "lower", "left", "right" and the like is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and is not indicative or suggestive of the devices or elements indicated having a specific orientation, being constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. The change or adjustment of the relative relationship, without substantially changing the technical content, is also considered as the scope that can be implemented by the utility model. In addition, the terms "first", "second", "third" and the like are only for the purpose of description, and cannot be understood as indicative or suggestive of relative importance.

[0021] As Figure 1 and Figure 3 shown, a kind of LPCVD furnace paddle conveying motor fixed and adjustment tool of belt tightness, including fixed plate 1, first counterbore 11 and second counterbore 12 are opened in the fixed plate 1, motor 6 is vertically installed on fixed plate 1, the power output end of motor 6 is equipped with an eccentric round base 7, eccentric round base 7 is connected with pinion 3 by passing through first counterbore 11, guide rail screw 9 is passed in the second counterbore 12, guide rail screw 9 one end is connected with gear 4, gear 4 and pinion 3 are installed on the same side of fixed plate 1 and are drivenly connected by toothed synchronous belt 5, the distance between gear 4 and pinion 3 is adjusted by rotating motor 6.

[0022] The first counterbore 11 is embedded with two-stage annular inner step surfaces, the eccentric circular base 7 is provided with two-stage annular outer step surfaces, the annular inner step surfaces are matched with the annular outer step surfaces, and the height of the outer step side 71 on the outer step surface is higher than the height of the inner step side 1101 on the inner step surface when the annular inner step surfaces are attached to the annular outer step surfaces.

[0023] The first counterbore 11 is embedded with two-stage annular inner step surfaces, the eccentric circular base 7 is provided with two-stage annular outer step surfaces, the annular inner step surfaces are matched with the annular outer step surfaces, and the height of the outer step side 71 on the outer step surface is higher than the height of the inner step side 1101 on the inner step surface when the annular inner step surfaces are attached to the annular outer step surfaces.

[0024] The fixed plate 1 is provided with a plurality of screw holes 13 for connecting external mechanical components, and the fixed plate 1 is a square aluminum alloy plate, and in the embodiment, the fixed plate 1 is a rectangular plate.

[0025] When it is necessary to adjust the tightness of the toothed belt, the locking screw 2 is loosened, the motor 6 is rotated, the eccentric seat 7 drives the pinion 3 to approach or move away from the gear wheel 4, the distance between the pinion 3 and the gear wheel 4, i.e. the distance between the output shaft of the motor 6 and the guide rail screw 9, can be accurately adjusted, and the purpose of adjusting the tightness of the toothed belt is achieved.

[0026] It should be noted that the above embodiment is only used to illustrate the present application, but the present application is not limited to the above embodiment, and any simple modification, equivalent change and modification according to the technical essence of the present application to the above embodiment all fall within the protection scope of the present application.

Claims

1. A tool for fixing and adjusting the tightness of the belt of a LPCVD furnace paddle conveyor motor, comprising a fixing plate (1), characterized in that: The fixed plate (1) is provided with a first counterbore (11) and a second counterbore (12), a motor (6) is vertically installed on the fixed plate (1), the power output end of the motor (6) is provided with an eccentric circular base (7), the eccentric circular base (7) is connected with a pinion (3) through the first counterbore (11), a guide rail screw (9) is penetrated in the second counterbore (12), one end of the guide rail screw (9) is connected with a gear wheel (4), the gear wheel (4) and the pinion (3) are installed on the same side of the fixed plate (1) and are drivingly connected through a toothed synchronous belt (5), the distance between the gear wheel (4) and the pinion (3) is adjusted by rotating the motor (6).

2. The tooling for fixing and adjusting the tightness of the belt of a LPCVD furnace paddle conveyor motor according to claim 1, characterized in that: The first counterbore (11) is embedded with two-stage annular inner step surfaces, the eccentric circular base (7) is provided with two-stage annular outer step surfaces, the annular inner step surfaces are matched with the annular outer step surfaces, when the annular inner step surfaces are attached to the annular outer step surfaces, the height of the outer step side (71) on the outer step surface is higher than the height of the inner step side (1101) on the inner step surface.

3. The tooling for fixing and adjusting the tightness of the belt of a LPCVD furnace paddle conveyor motor according to claim 2, characterized in that: The first counterbore (11) is provided with a plurality of locking screws (2) along the circumference on the outer side, the upper part of the locking screw (2) is provided with a protruding end (21).

4. The tooling for fixing and adjusting the tightness of the belt of a LPCVD furnace paddle conveyor motor according to claim 3, characterized in that: The protruding end (21) of the locking screw (2) fixes the motor (6) on the fixed plate (1) by pressing the eccentric circular base (7).

5. The tooling for fixing and adjusting the tightness of the belt of a LPCVD furnace paddle conveyor motor according to claim 1, characterized in that: The fixed plate (1) is provided with a plurality of screw holes (13) for connecting external mechanical components.

6. The tooling for fixing and adjusting the tightness of the belt of a LPCVD furnace paddle conveyor motor according to claim 5, characterized in that: The fixed plate (1) is a square aluminum alloy plate.

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