Mechanism for keeping driving synchronism of double-cylinder assembly

Abstract

The utility model relates to the technical field of mechanical design, and discloses a mechanism for keeping the driving synchronism of a double-cylinder assembly, which comprises an executive device and a flange arranged on the executive device, the execution device comprises a driving shell, an execution assembly, two first air cylinder assemblies, two second air cylinder assemblies and an air distribution assembly. The driving shell is connected with the flange, the execution assembly is arranged in the driving shell to work, and the two first air cylinder assemblies and the two second air cylinder assemblies are located in the driving shell and connected with the execution assembly. The air distribution assembly is arranged in the driving shell, air flow is distributed into the two first air cylinder assemblies or the two second air cylinder assemblies through two air distribution valves to receive air driving force, power is transmitted to the execution assembly, and linear reciprocating motion of the first air cylinder assemblies and the second air cylinder assemblies is achieved. Through the arrangement of the execution device, synchronous work of the double air cylinders can be achieved, and the problem that the sealing performance of the valve becomes poor due to asynchronism of the double air cylinders is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to mechanical design technical field, concretely relates to a mechanism that keeps the synchronism of double cylinder assembly drive. BACKGROUND

[0002] High vacuum and ultra-high vacuum environment are widely used in semiconductor, optoelectronic, aerospace and scientific research fields, especially in semiconductor manufacturing, the gas isolation and transmission between cavities are extremely strict; as the key device for connecting and isolating between cavities, high vacuum transmission valve plays a crucial role in the vacuum stability and production efficiency of equipment.

[0003] At present, the high vacuum transmission valve on the market mostly adopts pneumatic drive, and the valve plate is pushed by the cylinder to complete the opening and closing action;These transmission valves need to maintain the sealing of the vacuum cavity in the process of frequent opening and closing, and avoid any particle pollution or gas leakage;At the same time, in order to adapt to the operation requirements of high-precision equipment, the transmission valve also needs to have high synchronism and reliability to ensure the coordination of mechanical movement and control system.

[0004] In the prior art, the common transmission valve mostly adopts single cylinder or horizontal double cylinder structure;However, the horizontal double cylinder is difficult to realize the completely synchronous movement of the two cylinders in actual operation due to the influence of mechanical processing and driving control factors;This lack of synchronism will cause the valve plate to move unstably, thereby affecting the sealing and stability, and cannot meet the stringent requirements of semiconductor manufacturing and other high-end industries on the transmission valve.

[0005] It can realize more stable opening and closing action through high-precision synchronous control, thereby improving the sealing and stability, and meeting the requirements of semiconductor industry on high reliability and long service life of vacuum equipment, which has important technical significance and market value. CONTENT OF THE UTILITY MODEL

[0006] In view of the deficiencies of the prior art, the utility model provides a mechanism that keeps the synchronism of double cylinder assembly drive, which solves the problems in the above background art.

[0007] To achieve the above purpose, the utility model realizes through the following technical scheme:

[0008] A mechanism that keeps the synchronism of double cylinder assembly drive, comprising an execution device and a flange provided on the execution device;

[0009] The execution device comprises a drive housing, an execution assembly, two first cylinder assemblies, two second cylinder assemblies and a gas distribution assembly;

[0010] The drive housing is connected with the flange,

[0011] The execution assembly works in the drive housing,

[0012] Two first cylinder assemblies and two second cylinder assemblies are located in a driving shell and connected with an execution assembly;

[0013] The gas distribution assembly is arranged in the driving shell and distributes gas flow into two first cylinder assemblies or two second cylinder assemblies through two gas distribution valves to receive driving force of the gas, and transmits the driving force to the execution assembly to realize linear reciprocating motion of the first cylinder assembly and the second cylinder assembly.

[0014] Optionally, the execution assembly comprises a main shaft, a welded bellows, an execution shaft and a position switch.

[0015] The main shaft is connected with the first cylinder assembly and the second cylinder assembly through the execution shaft to push the first cylinder assembly and the second cylinder assembly to reciprocate.

[0016] One end of the welded bellows is fixedly arranged on the main shaft, and the other end is fixedly arranged on the driving shell.

[0017] The position switch is arranged on the execution shaft.

[0018] Optionally, the first cylinder assembly is connected with the execution assembly, and the second cylinder assembly is connected with the execution assembly through a sliding rod.

[0019] Optionally, the gas distribution assembly comprises an aluminum block body, a check valve and a pilot valve.

[0020] The aluminum block body is connected and fixed with the driving shell through a screw, and a sealing gasket is arranged on the middle part of the connection.

[0021] The check valve is arranged on the aluminum block body.

[0022] The pilot valve is arranged on the upper side of the check valve and is pressed in the aluminum block body through a snap spring.

[0023] Optionally, a micro switch is arranged on the end of the sliding rod away from the second cylinder assembly.

[0024] The utility model provides a mechanism for keeping the driving synchronization of double cylinder assemblies, and has the following beneficial effects:

[0025] 1. By arranging the execution device, the double cylinders can work synchronously, and the problem of poor sealing of the valve caused by the asynchronization of the double cylinders is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of the utility model;

[0027] Figure 2 It is a structural schematic diagram of the execution device of the utility model;

[0028] Figure 3 It is the execution assembly structure schematic view of the utility model;

[0029] Figure 4 It is the first cylinder assembly structure schematic view of the utility model;

[0030] Figure 5 It is the second cylinder assembly structure schematic view of the utility model;

[0031] Figure 6 It is the gas distribution assembly structure schematic view of the utility model.

[0032] In the figure: 1, execution device;11, drive housing;12, execution assembly;121, main shaft;122, welded bellows;123, execution shaft;124, position switch;13, first cylinder assembly;14, second cylinder assembly;15, gas distribution assembly;151, aluminum block body;152, check valve;153, pilot valve;2, flange;101, sliding rod;102, micro switch;103, valve plate. DETAILED DESCRIPTION

[0033] In order to make the technical means, creation features, purposes and effects of the utility model easy to understand, the utility model is further described below in combination with specific embodiments.

[0034] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "transverse", "longitudinal", "end", "edge", "side wall", "upper", "lower", "upper part", "lower part", "directly above", "surface", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", "end", "head", "tail" and the like is the orientation or positional relationship shown based on the drawings, and is only for the convenience of describing the technical scheme of the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0035] The application provides a mechanism for keeping the synchronization of double-cylinder assembly driving, which is as follows:

[0036] Reference can be made to Figure 1 The application mainly comprises two parts of an execution device 1 and a flange 2 arranged on the execution device 1, wherein the double-cylinder assembly driving is realized through the internal execution device 1;The execution device 1 is connected with other components through the flange 2, so as to ensure the stability and fixation of the execution device 1 during operation;The flange can provide a rigid connection point, so as to prevent the execution device 1 from being displaced or loosened due to vibration or external force during operation.

[0037] Referring to Figures 2-3 The execution device 1 comprises a driving housing 11, an execution assembly 12, a first cylinder assembly 13, a second cylinder assembly 14 and a distribution assembly 15; the driving housing 11 is connected with the flange 2, which is used to bear the installation of the internal structure;

[0038] The execution assembly 12 is arranged in the driving housing 11 and works, which mainly comprises a main shaft 121, a welded bellows 122, an execution shaft 123 and a position switch 124; the main shaft 121 is connected with the first cylinder assembly 13 and the second cylinder assembly 14 through the execution shaft 123, which pushes the first cylinder assembly 13 and the second cylinder assembly 14 to do reciprocating motion, and the main shaft 121 is further provided with the welded bellows 122, which realizes flexible motion and air tightness; the execution shaft 123 is used as an intermediate part, which connects the main shaft 121 and the external mechanism (two cylinder assemblies); the position switch 124 is arranged on the execution shaft 123, which realizes position detection through linkage with the execution shaft 123 and feeds back signals to the connected control system.

[0039] Referring to Figures 4-5 The first cylinder assembly 13 and the second cylinder assembly 14 are arranged in the driving housing 11 and connected with the execution assembly 12; specifically, the first cylinder assembly 13 is connected with the execution assembly 12, and the second cylinder assembly 14 is connected with the execution assembly 12 through a sliding rod 101; one end of the sliding rod 101 away from the second cylinder assembly 14 is provided with a micro switch 102, which is triggered by the movement of the cylinder.

[0040] Further, the first cylinder assembly 13 mainly comprises a piston and a piston rod, which is responsible for the main linear pneumatic action; and the second cylinder assembly 14 mainly comprises a split piston and the sliding rod 101, which is used to realize auxiliary or specific pneumatic action; the specific structure is a mature prior art, and thus will not be described in detail.

[0041] Referring to Figures 1-6 The distribution assembly 15 is arranged in the driving housing 11 and divides the airflow into two first cylinder assemblies 13 or two second cylinder assemblies 14 through two distribution valves to receive the driving force of the gas, so as to transmit the power to the execution assembly 12 and realize the predetermined up-down or front-back movement of the first cylinder assembly 13 and the second cylinder assembly 14; wherein the distribution assembly 15 comprises an aluminum block body 151, a check valve 152 and a pilot valve 153; the aluminum block body 151 is connected and fixed with the driving housing 11 through screws, and a sealing gasket is arranged in the middle of the connection; the check valve 152 is arranged on the aluminum block body 151, which provides one-way airflow support and stabilizes the cylinder action; the pilot valve 153 is located on the upper side of the check valve 152 and is pressed in the aluminum block body 151 through a snap spring, which switches the state of the distribution valve through signals and indirectly controls the cylinder action.

[0042] In the utility model, the working steps of the device are as follows:

[0043] Through the external connection system control, the OPEN instruction is opened, the gas in the first cylinder assembly 13 is filled through the gas distribution assembly 15, the piston inside is pushed to move, the actuating shaft 123 is kept in the lower end position, and thus the corresponding gas distribution valve is opened; when the CLOSE instruction is opened, the gas in the first cylinder assembly 13 is reversed, the piston of the first cylinder assembly 13 is pushed to move in the opposite direction, the first cylinder assembly 13 is lifted to the specified height, and thus the corresponding another gas distribution valve is opened; at this time, the gas in the second cylinder assembly 14 is filled, the piston is pushed to move, and the actuating shaft 123 is moved forward and backward to complete the valve closing action; the OPEN instruction is opened again, the gas transported through the gas distribution assembly 15 is switched in direction through the reversing valve, the piston of the second cylinder assembly 14 is reversely moved, the actuating shaft 123 is moved forward and backward again, and the valve opening action is completed; the action of the actuating shaft 123 moving forward and backward triggers the micro switch 102 again, indicating that the action of the second cylinder assembly 14 is completed, and providing a control condition for the next action of the first cylinder assembly 13; the gas direction is switched again, the piston of the first cylinder assembly 13 is pushed to return to the initial position, and thus the first cylinder assembly 13 completes the up and down movement through the actuating shaft 123, and pushes the valve plate 103 to descend to the initial position.

[0044] It is further explained that the control system used above is a common technology, and the application does not further elaborate on the control system.

[0045] The basic principle, main features and advantages of the utility model are shown and described above. It should be understood by those skilled in the art that the utility model is not limited by the above embodiments, and various changes and improvements can be made to the utility model without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model. The protection scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A mechanism for maintaining synchronization of a dual cylinder assembly drive, characterized by: The utility model relates to an execution device (1) and a flange (2) arranged on the execution device (1). The execution device (1) comprises a driving housing (11), an execution assembly (12), two first cylinder assemblies (13), two second cylinder assemblies (14) and a gas distribution assembly (15). The driving housing (11) is connected with the flange (2), The execution assembly (12) works in the driving housing (11), The two first cylinder assemblies (13) and the two second cylinder assemblies (14) are connected with the execution assembly (12) in the driving housing (11). The gas distribution assembly (15) is arranged in the driving housing (11) and distributes gas flow into the two first cylinder assemblies (13) or the two second cylinder assemblies (14) through two gas distribution valves to receive driving force, transmits the driving force to the execution assembly (12) and realizes linear reciprocating motion of the first cylinder assembly (13) and the second cylinder assembly (14).

2. The mechanism to maintain drive synchronization of a twin cylinder assembly of claim 1, wherein: The execution assembly (12) comprises a main shaft (121), a welded bellows (122), an execution shaft (123) and a position switch (124). The main shaft (121) is connected with the first cylinder assembly (13) and the second cylinder assembly (14) through the execution shaft (123) and pushes the first cylinder assembly (13) and the second cylinder assembly (14) to reciprocate. One end of the welded bellows (122) is fixedly installed on the main shaft (121) and the other end is fixedly installed on the driving housing (11). The position switch (124) is arranged on the execution shaft (123).

3. The mechanism to maintain drive synchronization of a twin cylinder assembly of claim 1, wherein: The first cylinder assembly (13) is connected with the execution assembly (12) and the second cylinder assembly (14) is connected with the execution assembly (12) through a sliding rod (101).

4. The mechanism to maintain drive synchronization of a twin cylinder assembly of claim 1, wherein: The gas distribution assembly (15) comprises an aluminum block body (151), a check valve (152) and a pilot valve (153). The aluminum block body (151) is connected and fixed with the driving housing (11) through screws and a sealing gasket is arranged in the middle of the connection. The check valve (152) is arranged on the aluminum block body (151). The pilot valve (153) is located on the upside of the check valve (152) and is pressed in the aluminum block body (151) through a snap spring.

5. The mechanism to maintain drive synchronization of a twin cylinder assembly of claim 3, wherein: One end of the sliding rod (101) away from the second cylinder assembly (14) is provided with a micro switch (102).

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