Water washing equipment for hydrogen combustion tail gas

Abstract

The utility model discloses a kind of water washing equipment for hydrogen combustion tail gas, including water washing tank, adsorption cavity, liquid-gas separation cavity and tail cavity sequentially communicated from bottom to top, tail gas flows through water washing tank, adsorption cavity, liquid-gas separation cavity and tail cavity under the action of negative pressure in turn;Wherein tail cavity includes conical diameter reducing section, and the conical diameter reducing section is designed as, when tail gas flows through, form venturi effect, to quickly discharge tail gas.The utility model structure is reasonable, tail gas can be discharged rapidly, it is favorable to improve tail gas water washing efficiency.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor tail gas treatment technical field, concretely is a kind of water washing equipment for hydrogen combustion tail gas. BACKGROUND

[0002] With the continuous promotion of sustainable development, the control of pollution sources in various industries is becoming more and more strict, especially the discharge requirements of industrial waste gas are higher, that is, the requirements of tail gas treatment technology are also higher and higher. Among them, a large amount of harmful gases such as hydrogen and other flammable and explosive gases will be produced in the production process of semiconductor industry. The concentration of these tail gases in the workshop exceeds the standard, which will cause great harm to the operators, and direct discharge will also cause great safety risk to the environment, so it is necessary to handle and release it in time. The hydrogen treatment method in the prior art mainly adopts combustion method, and the tail gas after combustion needs to be washed and adsorbed. The pollutants, such as acid, alkali, organic and other harmful tail gas, which are mixed in the tail gas and can be dissolved in water or removed by water chemical reaction, are washed and adsorbed, so as to further improve the tail gas treatment effect.

[0003] In production practice, in order to ensure that the tail gas flows in the set direction in the flow channel of the water washing equipment, a fan is arranged at the outlet end of the water washing equipment to form a negative pressure state in the flow channel. However, in the flow channel far away from the outlet end, the flow rate of the tail gas after the adsorption cavity and the liquid-gas separation cavity is slow, and the tail gas cannot be quickly discharged due to the poor negative pressure environment, which is easy to produce turbulent flow. Increasing the power of the fan will increase the energy consumption, which is poor in economy. UTILITY MODEL CONTENT

[0004] The utility model discloses a kind of water washing equipment for hydrogen combustion tail gas, it solves the technical problem that tail gas cannot be quickly discharged in the tail gas water washing equipment of existing, with the technical effect that tail gas can be quickly discharged, it is beneficial to improve tail gas washing efficiency. The technical scheme as follows is used:

[0005] A kind of water washing equipment for hydrogen combustion tail gas, including water washing box, adsorption cavity, liquid-gas separation cavity and tail cavity sequentially communicated from bottom to top, tail gas flows through water washing box, adsorption cavity, liquid-gas separation cavity and tail cavity under the action of negative pressure in sequence;

[0006] Water washing box, the inner cavity of the water washing box is communicated with water inlet and water outlet, and a plurality of first spray pipes are transversely arranged in the water washing box, a plurality of first spray holes with different orientations are arranged on the first spray pipes to adsorb and wash the flowing tail gas;

[0007] An adsorption cavity is arranged above the water body in the water washing tank and comprises a plurality of hole plates, the hole plates separate the adsorption cavity into a plurality of independent chambers, and at least one of the chambers is provided with adsorption fillers; a plurality of second spray pipes are transversely arranged in the adsorption cavity, and the second spray pipes are provided with a plurality of second spray holes with different orientations to adsorb and wash the tail gas flowing therethrough;

[0008] A liquid-gas separator is fixedly arranged in the liquid-gas separation cavity, and the tail gas mixed with water vapor passes through the liquid-gas separator to realize liquid-gas separation.

[0009] The tail cavity comprises a tapered reduced diameter section, and the tapered reduced diameter section is designed to form a Venturi effect when the tail gas flows therethrough to quickly discharge the tail gas.

[0010] On the basis of the above technical solution, the tapered reduced diameter section is communicated with the first pipe section downward and with the second pipe section upward, the pipe diameters of the first pipe section, the tapered reduced diameter section and the second pipe section decrease in sequence, and the side wall of the first pipe section is further communicated with a compressed air inlet, so that the Venturi effect can be formed when the compressed air passes through the first pipe section, the tapered reduced diameter section and the second pipe section.

[0011] On the basis of the above technical solution, the first pipe section is sleeved with a spray cavity, the spray cavity is arranged close to the tapered reduced diameter section, the outer side wall of the spray cavity is communicated with a spray inlet, the top surface of the spray cavity has an angle that inclines downward from outside to inside, and a plurality of spray outlets are arranged on the top surface of the spray cavity, so that the spray water can be discharged through the spray outlets to form a water curtain on the inner wall surface of the first pipe section.

[0012] On the basis of the above technical solution, the fillers are any one of Rasching rings, Pall rings, cascade rings and Intalox, so as to increase the contact time and contact area of the spray water and the tail gas.

[0013] On the basis of the above technical solution, the hole plates are detachably connected with the inner wall surface of the adsorption cavity, and the adjacent two hole plates are arranged in a staggered manner to slow down the flow speed of the tail gas.

[0014] On the basis of the above technical solution, the water washing tank is further communicated with a combustion chamber upward, and the whole formed by the adsorption cavity, the liquid-gas separation cavity and the tail cavity is arranged side by side with the combustion chamber.

[0015] On the basis of the above technical solution, the inner bottom surface of the water washing tank is provided with a partition plate arranged between the combustion chamber and the adsorption cavity to reduce the diffusion of particulate matters to the adsorption cavity.

[0016] On the basis of the above technical solution, the side wall of the water washing tank is provided with a transparent window for viewing the situation in the water washing tank.

[0017] On the basis of the above technical scheme, the outlet end of the tail cavity is provided with a fan, and the fan is electrically connected with the controller through a frequency converter.

[0018] Advantages

[0019] The utility model discloses a reasonable structure, and the water washing equipment still includes a tail cavity, and the tail cavity includes a tapered reduced diameter section, when tail gas flows through the first pipe section, the tapered reduced diameter section and the second pipe section, a venturi effect is formed, and a negative pressure environment is formed at the tapered reduced diameter section close to the first pipe section, so that the tail gas below rises and quickly passes through the tail cavity, further, the first pipe section is also communicated with a compressed air inlet, so that the venturi effect is more remarkable, and the tail gas with slowed flow rate below is further promoted to rise and quickly pass through the tail cavity. In this way, the burden of the fan can be reduced, and energy consumption can be reduced. In addition, the first pipe section is also provided with a spraying cavity, so that a water curtain can be formed on the inner wall of the first pipe section, and the water washing effect is further improved. In addition, the water tank is also provided with a partition plate, so that the large particles caused by the disturbance of airflow can be prevented from being stirred and then diffused to the adsorption cavity.

[0020] In the utility model, the adsorption cavity is divided into several chambers by a plurality of orifice plates, and the filler in the chamber can reduce the flow rate of the tail gas, greatly increase the contact time and contact area of the tail gas and the spraying water, and be beneficial to improving the water washing and adsorption effect. In addition, the water tank is also provided with a partition plate, so that the large particles caused by the disturbance of airflow can be prevented from being stirred and then diffused to the adsorption cavity. DRAWINGS

[0021] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description. Obviously, the drawings in the following description are only one embodiment of the utility model, and for those skilled in the art, other embodiment drawings can be obtained according to the provided drawings without creating creative labor.

[0022] Figure 1 The utility model of three-dimensional structure schematic diagram;

[0023] Figure 2 The utility model three-dimensional view sectional structure schematic diagram;

[0024] Figure 3 The utility model front view partial sectional structure schematic diagram;

[0025] Figure 4 : Figure 3 The local enlarged structure schematic diagram of place A in the utility model; DETAILED DESCRIPTION

[0026] The following description and drawings are illustrative of specific embodiments thereof and are not intended to limit the scope of the embodiments. Parts and features of some embodiments can be included or substituted in other embodiments. The scope of the embodiments described herein is encompassed by the entire scope of the claims, and all available equivalents of the claims. Herein, the terms "first", "second", and the like, are used to distinguish one element from another, and do not require or imply any actual relationship or order between such elements. In fact, the first element could be named the second element and, conversely, the second element could be named the first element. Also, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a structure, device, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such structure, device, or apparatus. Without further limitation, an element defined by an "includes a" statement does not exclude the presence of additional identical elements in the structure, device, or apparatus that includes the element. Various embodiments are described in a progressive manner, each focusing on the differences from other embodiments, and the same or similar parts between embodiments are referred to each other.

[0027] The terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate the orientation or positional relationship shown in the drawings, and are used herein and in the description only to facilitate the description and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the description herein, unless otherwise specified and limited, the terms "mount", "connect", "connection" should be interpreted broadly, for example, it can be a mechanical connection or an electrical connection, it can be a communication between two elements inside, it can be a direct connection, or an indirect connection through an intermediate medium, and the specific meaning of the above terms can be understood by those skilled in the art according to the specific circumstances.

[0028] Herein, unless otherwise specified, the term "a plurality of" means two or more.

[0029] Herein, the character " / " represents an "or" relationship between the objects before and after it. For example, A / B means: A or B.

[0030] Herein, the term "and / or" is a description of the relationship between the objects, which means that there can be three relationships. For example, A and / or B means: A or B, or, A and B, the three relationships.

[0031] As Figures 1-4The device shown is a water washing device for hydrogen combustion exhaust gas, comprising a water washing tank 1, an adsorption chamber 2, a liquid-gas separation chamber 3, and a tail chamber 4 connected sequentially from bottom to top. A fan is installed at the outlet of the tail chamber 4. The fan is electrically connected to a controller via a frequency converter, allowing for matching of appropriate fan power according to the exhaust gas flow rate, resulting in good energy saving. Under the action of the fan, a negative pressure environment is formed inside the water washing device, and the exhaust gas flows sequentially through the water washing tank 1, adsorption chamber 2, liquid-gas separation chamber 3, and tail chamber 4 under negative pressure.

[0032] The washing tank 1 has an inlet and an outlet connected to its inner cavity. In addition, the inlet is connected to the outlet of the first water pump, which facilitates automatic discharge and replenishment of water, and also allows for convenient recycling of the water in the washing tank 1.

[0033] Several first spray pipes 11 are horizontally placed inside the water washing tank 1. The ends of the first spray pipes 11 are closed, and several first spray holes with different orientations are provided on the side wall of the first spray pipes 11 to adsorb and wash the flowing exhaust gas, while also playing a role in cooling.

[0034] The water washing tank 1 is also connected to a combustion chamber 5, where the exhaust gas containing hydrogen is burned. This is existing technology and will not be investigated further. Figure 2 As shown, the adsorption chamber 2, liquid-gas separation chamber 3 and tail chamber 4 form an integral unit, which is arranged in parallel with the combustion chamber 5. The tail gas containing hydrogen is discharged from the combustion chamber 5 and has a high temperature. When the high-temperature tail gas flows through the water washing box 1, it can be washed and adsorbed by water on the one hand, and can be cooled down rapidly on the other hand, providing favorable conditions for the tail gas to enter the adsorption chamber 2 inside the water washing equipment.

[0035] In addition, a baffle 12 is provided on the inner bottom surface of the washing tank 1. The baffle 12 is located between the combustion chamber 5 and the adsorption chamber 2. The exhaust gas discharged through the combustion chamber 5 enters the water body of the washing tank 1, and the large particles therein settle. In addition, the exhaust gas flow will also cause water disturbance, causing the settled large particles to tumble in the water body. The baffle 12 can reduce the diffusion of particles to the adsorption chamber 2.

[0036] In addition, a transparent viewing window 13 is provided on the side wall of the washing tank 1 for viewing the condition inside the washing tank 1.

[0037] like Figure 2 and 3As shown in the drawings, the adsorption cavity 2 is arranged above the water body in the water washing tank 1, and three perforated plates 22 are arranged in the adsorption cavity 2. One of the perforated plates 22 forms the bottom surface of the adsorption cavity 2, and the other two perforated plates 22 divide the adsorption cavity 2 into three independent chambers. The perforated plate 22 is detachably connected with the inner wall of the adsorption cavity 2, and the adjacent two perforated plates 22 are arranged in a staggered manner to slow down the flow rate of the tail gas. At least one chamber is provided with adsorption filler 23. The filler 23 is any one of Rasching ring, Pall ring, ladder ring and Interox, which can increase the contact time and contact area of the sprayed water and the tail gas, reduce the flow rate of the tail gas, greatly increase the contact time and contact area of the tail gas and the sprayed water, and is beneficial to improve the water washing and adsorption effect.

[0038] As shown in the drawings, Figure 2 and 3 A plurality of second spray pipes 21 are arranged horizontally in the adsorption cavity 2, and a plurality of second spray holes with different orientations are arranged on the second spray pipes 21. The water sprayed from the second spray holes can be evenly attached to the filler 23, further making the tail gas fully contact with the sprayed water, and improving the water washing and adsorption effect. The water discharged through the second spray holes flows back to the water washing tank 1.

[0039] The liquid-gas separator 31 is fixedly arranged in the liquid-gas separation cavity 3. The tail gas mixed with water vapor passes through the liquid-gas separator 31 to realize liquid-gas separation, so as to avoid the water vapor from entering the subsequent process. The liquid-gas separator 31 is a prior art, and those skilled in the art can select it according to the needs, which will not be described here.

[0040] The tail cavity 4 includes a tapered reduced diameter section 42, as shown in the drawings, Figure 2 and 3 The tapered reduced diameter section 42 is communicated with the first pipe section 41 downward, and the tapered reduced diameter section 42 is communicated with the second pipe section 43 upward. The pipe diameters of the first pipe section 41, the tapered reduced diameter section 42 and the second pipe section 43 decrease in turn. When the tail gas flows through the tail cavity 4, the Venturi effect is formed, so that the negative pressure is formed at the first pipe section 41, and the tail gas flowing through the liquid-gas separator 31 is driven to pass through the tail cavity 4 quickly. In addition, the compressed air inlet 411 is communicated with the side wall of the first pipe section 41. The fan is arranged at the compressed air inlet, or the tail gas discharged from other tail gas washing equipment is used as the gas source. When the compressed air passes through the first pipe section 41, the tapered reduced diameter section 42 and the second pipe section 43, the Venturi effect is more obvious, which further promotes the tail gas with slow flow rate to rise and pass through the tail cavity 4 quickly.

[0041] As shown in the drawings, Figure 3 and 4As shown, the first pipe section 41 is sleeved with a spraying cavity 44, the spraying cavity 44 is arranged close to the tapered reduced diameter section 42, the outer side wall of the spraying cavity 44 is communicated with a spraying inlet, the top surface of the spraying cavity 44 has an angle that is inclined downward from outside to inside, and the top surface of the spraying cavity 44 is provided with a plurality of spraying outlets 441, spraying water can be discharged through the spraying outlets 441 to form a water curtain on the inner wall surface of the first pipe section 41, and the water discharged through the spraying outlets 441 can flow back to the water washing box 1.

[0042] The utility model is described above by way of example, but the utility model is not limited to the above specific embodiments, any modification or change based on the utility model belongs to the range of the utility model claimed.

Claims

1. A water scrubbing apparatus for hydrogen combustion exhaust gas, characterized by, It comprises, from bottom to top, a water washing box (1), an adsorption cavity (2), a liquid-gas separation cavity (3) and a tail cavity (4) in sequence, and the tail gas flows through the water washing box (1), the adsorption cavity (2), the liquid-gas separation cavity (3) and the tail cavity (4) in sequence under the action of negative pressure; The water washing box (1) is internally communicated with a water inlet and a water outlet, and a plurality of first spray pipes (11) are horizontally arranged in the water washing box (1), and a plurality of first spray holes with different directions are arranged on the first spray pipes (11) to adsorb and wash the tail gas flowing through. The adsorption cavity (2) is arranged above the water body in the water washing box (1) and comprises a plurality of hole plates (22), the plurality of hole plates (22) separate the adsorption cavity (2) into a plurality of independent chambers, and at least one of the chambers is provided with adsorption fillers (23); a plurality of second spray pipes (21) are horizontally arranged in the adsorption cavity (2), and a plurality of second spray holes with different directions are arranged on the second spray pipes (21) to adsorb and wash the tail gas flowing through. A liquid-gas separator (31) is fixedly arranged in the liquid-gas separation cavity (3), and the tail gas mixed with water vapor passes through the liquid-gas separator (31) to realize liquid-gas separation. The tail cavity (4) comprises a tapered reduced diameter section (42), and the tapered reduced diameter section (42) is designed to form a Venturi effect when the tail gas flows through, so as to quickly discharge the tail gas.

2. The water scrubbing apparatus for hydrogen combustion exhaust gas according to claim 1, characterized by, The tapered reduced diameter section (42) is communicated with a first pipe section (41) downward, and is communicated with a second pipe section (43) upward, and the pipe diameters of the first pipe section (41), the tapered reduced diameter section (42) and the second pipe section (43) decrease in sequence, and the side wall of the first pipe section (41) is further communicated with a compressed air inlet (411), and the Venturi effect can be formed when the compressed air passes through the first pipe section (41), the tapered reduced diameter section (42) and the second pipe section (43).

3. The water scrubbing apparatus for hydrogen combustion exhaust gas according to claim 2, characterized by, A spray cavity (44) is arranged outside the first pipe section (41), the spray cavity (44) is arranged close to the tapered reduced diameter section (42), the outer side wall of the spray cavity (44) is communicated with a spray inlet, the top surface of the spray cavity (44) has a downward inclination angle from outside to inside, and a plurality of spray outlets (441) are arranged on the top surface of the spray cavity (44), and spray water can be discharged through the spray outlets (441) to form a water curtain on the inner wall surface of the first pipe section (41).

4. The water scrubbing apparatus for hydrogen combustion exhaust gas according to any one of claims 1 to 3, characterized by The fillers (23) are any one of Rasching ring, Pall ring, ladder ring and Intalox, which can increase the contact time and contact area of the spray water and the tail gas.

5. The water scrubbing apparatus for hydrogen combustion exhaust gas according to claim 4, characterized by The hole plates (22) are detachably connected with the inner wall surface of the adsorption cavity (2), and adjacent two hole plates (22) are arranged in a staggered manner to slow down the flow speed of the tail gas.

6. The water scrubbing apparatus for hydrogen combustion exhaust gas according to claim 4, characterized by The water washing box (1) is further communicated with a combustion chamber (5) upward, and the whole formed by the adsorption cavity (2), the liquid-gas separation cavity (3) and the tail cavity (4) is arranged side by side with the combustion chamber (5).

7. The water scrubbing apparatus for hydrogen combustion exhaust gas according to claim 6, characterized by The inner bottom surface of the water washing box (1) is provided with a partition plate (12), and the partition plate (12) is arranged between the combustion chamber (5) and the adsorption cavity (2) to reduce the diffusion of particulate matters to the adsorption cavity (2).

8. The water scrubbing apparatus for hydrogen combustion exhaust gas according to claim 7, characterized by, The side wall of the water washing box (1) is provided with a transparent window (13) for checking the situation in the water washing box (1).

9. The water scrubbing apparatus for hydrogen combustion exhaust gas according to any one of claims 5 to 8, characterized by, The outlet end of the tail cavity (4) is provided with a fan, and the fan is electrically connected with the controller through a frequency converter.

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