Probe station

Abstract

The utility model relates to a probe station, and the probe station comprises a supporting seat which comprises a supporting plate and two vertical plates which are arranged at intervals in the X direction, and the two ends, in the X direction, of the supporting plate are erected on the two vertical plates respectively; the first end face, in the Z direction, of the supporting plate and the two vertical plates jointly form a containing space. The X-Y workbench comprises a plurality of first guide rails; a plurality of guide rail mounting surfaces which are spaced in the X direction and extend in the Y direction are arranged on the side, back on to the accommodating space, of the supporting plate, and the first guide rails are mounted on the guide rail mounting surfaces in a one-to-one correspondence manner; the supporting seat further comprises a plurality of first reinforcing ribs extending in the Y direction, and all the first reinforcing ribs are arranged on the first end face in a protruding mode. In the X direction, the guide rail installation faces located between the two vertical plates correspond to the first reinforcing ribs, and the orthographic projection of the first reinforcing ribs on the corresponding guide rail installation faces in the Z direction covers at least part of the corresponding guide rail installation faces. The supporting plate is not prone to deformation, the precision of the X-Y workbench is guaranteed, and the use requirement is met.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of test equipment, in particular to a probe station. BACKGROUND

[0002] The probe station is mainly used for testing in the semiconductor industry, the photoelectric industry, integrated circuits and packaging. During testing, the probe station aligns probes with contacts on electronic components, so that the electronic components are connected to test equipment for testing.

[0003] The probe station comprises a support base and an X-Y workbench arranged on the support base. The X-Y workbench can drive a carrier to move relative to the support base along the X and Y directions, so that the carrier moves to a testing position to facilitate testing of electronic components carried on the carrier.

[0004] In the prior art, the support base is generally a solid structure, resulting in a heavy probe station. In some technologies, the bottom of the support base is provided with a hollow structure to reduce the weight of the support base. However, when the bottom of the support base is provided with a hollow structure, the position of the support base where the guide rail is arranged is easily deformed under the action of a load (such as the self-gravity of the X-Y workbench and the carrier, and the test pressure applied to the carrier when testing electronic components), resulting in poor precision of the X-Y workbench and failing to meet the use requirements. CONTENT OF THE INVENTION

[0005] Therefore, it is necessary to provide a probe station capable of improving the above problems.

[0006] A probe station comprises:

[0007] A support base comprising a support plate and two vertical plates arranged along the X direction at intervals. The two ends of the support plate in the X direction are arranged on the two vertical plates, respectively. A first end surface of the support plate along the Z direction and the two vertical plates jointly form an accommodation space.

[0008] An X-Y workbench comprising a plurality of first guide rails. An end surface of the support plate away from the accommodation space is provided with a plurality of guide rail mounting surfaces extending along the Y direction at intervals along the X direction. Each first guide rail is installed on each guide rail mounting surface.

[0009] The support base further comprises a plurality of first reinforcing ribs extending along the Y direction. Each first reinforcing rib is protruding from the first end surface. In the X direction, each guide rail mounting surface between the two vertical plates is arranged corresponding to a first reinforcing rib. In the Z direction, the orthographic projection of each first reinforcing rib on the corresponding guide rail mounting surface covers at least part of the corresponding guide rail mounting surface.

[0010] The probe table has the following advantages. Since the first reinforcing ribs are arranged on the rail mounting surfaces between the two vertical plates in the X direction, and the orthographic projections of the first reinforcing ribs on the rail mounting surfaces corresponding to the first reinforcing ribs cover at least part of the rail mounting surfaces in the Z direction, when the X-Y table is mounted on the support plate through the first rails, the first reinforcing ribs can effectively support the X-Y table and the stage and the like from bottom to top of the rail mounting surfaces, reduce the deformation of the area of the support plate having the rail mounting surfaces, ensure the movement and positioning accuracy of the X-Y table, and thus ensure the test accuracy of the electronic components. It can be seen that the probe table provided by the present application is not prone to deformation of the support plate even if the bottom of the support base is hollow, that is, the entire support base is not prone to deformation, the accuracy of the X-Y table is ensured, and the use requirement is met.

[0011] In one of the embodiments, in the Z direction, the orthographic projections of the first reinforcing ribs on the rail mounting surfaces corresponding to the first reinforcing ribs cover the entire rail mounting surface.

[0012] In one of the embodiments, two of the first rails are arranged above the two vertical plates in the Z direction, and the remaining first rails are located between the two vertical plates in the X direction.

[0013] In one of the embodiments, the X-Y table includes four first rails, and the four first rails are uniformly spaced apart in the X direction.

[0014] The probe table further includes a first driving assembly arranged on the support plate, the first driving assembly is located between the middle two first rails in the X direction, and the first driving assembly is used to drive the first moving table of the X-Y table to move relative to the support base in the Y direction.

[0015] In one of the embodiments, the support plate includes a plate body and a plurality of protrusions, the protrusions are arranged on the side of the plate body provided with the X-Y table in the Z direction, and the surface of each protrusion away from the plate body forms a rail mounting surface.

[0016] And / or,

[0017] The extension length of the first rail in the Y direction is the same as that of the support plate, and both ends of the two vertical plates in the Y direction are recessed on the support plate.

[0018] In one of the embodiments, each vertical plate is provided with a plurality of recesses on the side away from the accommodation space, and the recesses are sequentially and spaced apart in the Y direction.

[0019] In one embodiment, the upright plate has a plurality of first connecting plates on the side opposite to the receiving space, and each pair of adjacent recesses are provided on both sides of a first connecting plate along the Y direction, and the first connecting plate is provided with a through hole along the Y direction.

[0020] In one embodiment, the support base further includes a plurality of connecting bars, each of which is spaced apart along the Y direction and extends along the X direction;

[0021] Each of the connecting strips is connected at both ends along the X direction to the ends of the two upright plates that are away from the support plate in the Z direction.

[0022] In one embodiment, the support base further includes a second connecting plate that extends along the Y direction and connects at least a portion of the ends of the connecting strip in the X direction.

[0023] In one embodiment, the XY worktable further includes a first movable stage, a first slider, a second guide rail, a second slider, and a second movable stage. The first movable stage is connected to the first guide rail via the first slider. The second guide rail is disposed on the side of the first movable stage opposite to the first guide rail and extends along the X direction. The second movable stage is connected to the second guide rail via the second slider.

[0024] The first movable stage includes a stage body, on which a slider mounting surface is provided. The first slider is mounted on the slider mounting surface. The first movable stage also includes a connecting rib plate, which is disposed on the stage body. At least a portion of the slider mounting surfaces are connected by the connecting rib plate extending along the X direction or the Y direction. Attached Figure Description

[0025] Figure 1 This is a structural diagram of a probe station provided in an embodiment of this application;

[0026] Figure 2 for Figure 1 The diagram shows a structural view of the probe station from another perspective.

[0027] Figure 3 for Figure 1 The diagram shows another view of the probe station.

[0028] Figure 4 for Figure 1 A cross-sectional view of the support base of the probe station shown;

[0029] Figure 5 for Figure 4 A top view of the support base shown;

[0030] Figure 6 Figure 1 is a perspective view of a probe station according to the present application; Figure 4 Figure 2 is a perspective view of a support base of the probe station shown in Figure 1;

[0031] Figure 7 Figure 3 is a perspective view of the probe station shown in Figure 1 from another angle; Figure 1 Figure 4 is a perspective view of the probe station shown in Figure 1 from yet another angle;

[0032] Figure 8 Figure 5 is a perspective view of the probe station shown in Figure 1 from still another angle; Figure 1 Figure 6 is a front view of the support base shown in Figure 2;

[0033] Figure 9 Figure 7 is a bottom view of the support base shown in Figure 2; Figure 4 Figure 8 is a front view of the support base shown in Figure 2;

[0034] Figure 10 Figure 9 is a bottom view of the support base shown in Figure 2; Figure 4 Figure 10 is a front view of the support base shown in Figure 2;

[0035] Figure 11 Figure 11 is a perspective view of a first moving stage of the probe station shown in Figure 1. Figure 1

[0036] BRIEF DESCRIPTION OF THE DRAWINGS

[0037] 100, probe station; 10, support base; 11, support plate; 111, support surface; 112, rail mounting surface; 113, plate body; 114, protruding strip; 12, vertical plate; 121, missing portion; 13, first reinforcing rib; 14, accommodating space; 15, second reinforcing rib; 16, recessed portion; 17, first connecting plate; 171, through hole; 18, connecting strip; 19, second connecting plate; 20, X-Y stage; 21, first rail; 22, first moving stage; 221, stage body; 2211, slider mounting surface; 222, connecting rib plate; 23, second rail; 24, second moving stage; 25, first slider; 30, first driving assembly; 40, second driving assembly; 50, ground foot; 60, caster. DETAILED DESCRIPTION

[0038] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the present application can be practiced in a variety of ways beyond the specific embodiments described herein without departing from the spirit of the present application, and it is intended that the present application cover all such variations as fall within the scope of the appended claims.

[0039] ​In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0040] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0041] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0042] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0043] It is to be noted that when an element is referred to as being "fixed" or "set" on another element, it can be directly on the other element or there can be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be an intervening element. The terms "vertical", "horizontal", "upper", "lower", "left", "right", and similar terms as used herein are for the purpose of description only and are not intended to be limiting.

[0044] Referring to Figure 1 and Figure 2 An embodiment of the present application provides a probe station 100, which comprises a support base 10 and an X-Y table 20 arranged on the support base 10. Specifically, the probe station 100 further comprises a carrier (not shown in the figure) arranged on the X-Y table 20, and the X-Y table 20 is capable of moving the carrier relative to the support base 10 in the X and Y directions, so as to realize accurate movement and positioning of electronic components carried on the carrier in the plane.

[0045] Optionally, the electronic components carried by the carrier are wafers, and when the X-Y table 20 moves the carrier to a test position, a tester is aligned with the contacts of the wafers on the carrier through probes, so as to test the wafers.

[0046] In some embodiments, the support base 10 is made of cast iron. Cast iron is firm and not easy to deform, and can maintain stable flatness and dimensional accuracy for a long time. Cast iron also has certain corrosion resistance, can adapt to various working environments, and the surface of cast iron is relatively wear-resistant and can withstand frequent use and friction. At the same time, compared with other materials, cast iron has a lower cost. In addition, cast iron has a certain damping effect, which helps to reduce the influence of vibration during processing on accuracy.

[0047] It should be understood that in other embodiments, the support base 10 can also be made of other materials, such as steel or marble, etc.

[0048] Referring to Figure 3 , the support base 10 comprises a support plate 11 and two vertical plates 12, and the two vertical plates 12 are arranged in the X direction with a certain interval, and the two ends of the support plate 11 in the X direction are arranged on the two vertical plates 12 respectively. The support plate 11 and the two vertical plates 12 can be integrally formed or separately formed. The end face of the support plate 11 away from the vertical plate 12 in the Z direction (i.e. the end face of the support plate 11 away from the accommodation space 14) forms a support surface 111, and the first end face of the support plate 11 away from the support surface 111 and the two vertical plates 12 together form an accommodation space 14. Electrical components, etc. can be accommodated in the accommodation space 14. It should be noted that the X direction, the Y direction and the Z direction are perpendicular to each other.

[0049] Referring to Figure 1 , Figure 4 and Figure 5 , the X-Y worktable 20 comprises a plurality of first guide rails 21, the support surface 111 is provided with a plurality of guide rail mounting surfaces 112 which are spaced apart along the X direction and each extends along the Y direction, and each first guide rail 21 is mounted on a corresponding guide rail mounting surface 112. Since the guide rail mounting surfaces 112 extend along the Y direction, the first guide rails 21 mounted on the guide rail mounting surfaces 112 also extend along the Y direction. Referring to Figure 6 , the X-Y worktable 20 further comprises a first sliding block 25 which is slidably connected with the first guide rails 21, and the first moving table 22 in the X-Y worktable 20 is slidably connected with the first guide rails 21 through the first sliding block 25, so as to move along the Y direction relative to the support base 10, thus achieving the movement of the stage mounted on the X-Y worktable 20 along the Y direction.

[0050] Further, referring to Figure 4 , the support base 10 further comprises a plurality of first reinforcing ribs 13, each of which is protruded from the first end surface and located in the accommodating space 14. Each of the first reinforcing ribs 13 extends along the Y direction; along the X direction, each guide rail mounting surface 112 located between two vertical plates 12 is arranged corresponding to a first reinforcing rib 13; and in the Z direction, the orthographic projection of the first reinforcing rib 13 on the corresponding guide rail mounting surface 112 covers at least part of the guide rail mounting surface 112.

[0051] It should be noted that, along the X direction, each guide rail mounting surface 112 located between two vertical plates 12 is arranged corresponding to a first reinforcing rib 13, which means that part or all of the guide rail mounting surfaces 112 are located between two vertical plates 12 in the X direction, and all of the guide rail mounting surfaces 112 located between two vertical plates 12 in the X direction are each corresponding to a first reinforcing rib 13 in the Z direction.

[0052] It should be further noted that, if only part of the guide rail mounting surfaces 112 are located between two vertical plates 12 in the X direction, the remaining guide rail mounting surfaces 112 are generally arranged at positions opposite to the vertical plates 12 in the Z direction of the support plate 11. When the guide rail mounting surfaces 112 are arranged at the positions, the area of the support plate 11 corresponding to the guide rail mounting surfaces 112 is less likely to be deformed under the support of the vertical plates 12.

[0053] Since the X-Y worktable 20 is in contact with the support plate 11 through the first guide rail 21, the self-gravity of the X-Y worktable 20, the self-gravity of the carrier, and the test pressure during the test of the electronic components, etc. are all applied to the guide rail mounting surface 112 of the support plate 11 through the first guide rail 21. In this way, the area of the support plate 11 provided with the guide rail mounting surface 112 is prone to deformation under the action of these loads, and when the support plate 11 is deformed, the movement and positioning accuracy of the X-Y worktable 20 thereon is poor, which adversely affects the test.

[0054] Since the guide rail mounting surface 112 between the two vertical plates 12 in the X direction is correspondingly provided with the first reinforcing rib 13, and the orthogonal projection of the first reinforcing rib 13 on the guide rail mounting surface 112 in the Z direction covers at least part of the guide rail mounting surface 112, when the X-Y worktable is mounted on the support plate 11 through the first guide rail 21, the first reinforcing rib 13 can support the X-Y worktable and the carrier, etc. from below to above of the guide rail mounting surface 112, reducing the deformation of the area of the support plate 11 provided with the guide rail mounting surface 112, ensuring the movement and positioning accuracy of the X-Y worktable 20, and thus ensuring the test accuracy of the test of the electronic components. It can be seen that the probe table 100 provided in the embodiment is not prone to deformation of the support plate 11 even if the bottom of the support base 10 is hollow, that is, the entire support base 10 is not prone to deformation, ensuring the accuracy of the X-Y worktable 20 and meeting the use requirements.

[0055] In some embodiments, the orthogonal projection of the first reinforcing rib 13 on the guide rail mounting surface 112 in the Z direction covers the entire guide rail mounting surface 112, so as to ensure the supporting effect of the first reinforcing rib 13 on the area of the support plate 11 provided with the guide rail mounting surface 112. Alternatively, the orthogonal projection of the first reinforcing rib 13 on the guide rail mounting surface 112 in the Z direction coincides with the guide rail mounting surface 112; or the orthogonal projection of the first reinforcing rib 13 on the guide rail mounting surface 112 in the Z direction is wider than the guide rail mounting surface 112.

[0056] Alternatively, two of the first guide rails 21 included in the X-Y worktable 20 are respectively opposite to the two vertical plates 12 in the Z direction, that is, the two first guide rails 21 are respectively arranged above the two vertical plates 12, and the remaining first guide rails 21 are opposite to the accommodation space 14 in the Z direction. At this time, the number of first reinforcing ribs 13 is 2 less than the number of first guide rails 21. By arranging the two first guide rails 21 to be respectively opposite to the two vertical plates 12, the number of first guide rails 21 opposite to the accommodation space 14 can be reduced, and the size of the support base 10 in the X direction can be reduced.

[0057] Preferably, the X-Y worktable 20 comprises four first guide rails 21, which are arranged in the X direction and are spaced apart. Two of the first guide rails 21 are arranged above the two vertical plates 12, and the other two first guide rails 21 are opposite the receiving space 14. In this case, the number of the first reinforcing ribs 13 is two. The probe table 100 further comprises a first driving assembly 30 arranged on the support plate 10. The first driving assembly 30 is located between the two first guide rails 21 in the X direction and is used to drive the first moving table 22 of the X-Y worktable 20 to move in the Y direction. As can be seen, the number of the first guide rails 21 is even, and the first driving assembly 30 is located at the middle position of the even number of first guide rails 21, i.e., the first driving assembly 30 is located at the middle position of the support plate 10 in the X direction. In this way, the influence of the offset of the first driving assembly 30 on the rigidity and accuracy of the X-Y worktable 20 can be avoided. At the same time, the four first guide rails 21 are respectively arranged on the four guide rail mounting surfaces 112, so that the support plate 11 has four areas for supporting the X-Y worktable 20. Compared with the case of two areas for supporting, the deformation amount of the support plate 11 in the areas can be reduced.

[0058] In some embodiments, referring back to Figure 4 , the support plate 11 comprises a plate body 113 and a plurality of protrusions 114. Each protrusion 114 is protruded from one side of the plate body 113 on which the X-Y worktable 20 is arranged in the Z direction. The surface of each protrusion 114 away from the plate body 113 forms a guide rail mounting surface 112. In this way, the area of the support plate 11 on which the guide rail mounting surfaces 112 are arranged has more material and a greater thickness in the Z direction, so that the deformation of the support plate 11 can be further reduced.

[0059] Optionally, referring back to Figure 7 and Figure 8 , the support base 10 further comprises a plurality of second reinforcing ribs 15 arranged in the receiving space 14. The plurality of second reinforcing ribs 15 are protruded from the first end surface and are arranged in the Y direction and extend in the X direction. When there are a plurality of first reinforcing ribs 13, each second reinforcing rib 15 can connect the plurality of first reinforcing ribs 13. The second reinforcing ribs 15 can reinforce the support plate 11 together with the first reinforcing ribs 13, so that the deformation of the support plate 11 under load can be further reduced.

[0060] Continuing to refer to Figure 7 , each vertical plate 12 has a plurality of recesses 16 arranged on the side away from the receiving space 14 and are arranged in the Y direction and are spaced apart. As an option, the recesses 16 are arranged close to the support plate 11. In this way, by arranging the recesses 16 on the side of the vertical plate 12 away from the receiving space 14, the material and weight of the support base 10 can be saved while ensuring that the support base 10 meets the deformation requirement.

[0061] Further, continuing to refer toFigure 4 and Figure 7 The side of the vertical plate 12 away from the accommodating space has a plurality of first connecting plates 17, each adjacent two recesses 16 are arranged on both sides of a first connecting plate 17 along the Y direction, and the first connecting plate 17 is provided with a through hole 171 along the Y direction. By providing the through hole 171 on the first connecting plate 17, the material of the support base 10 can be further saved and the weight of the support base 10 can be further reduced while ensuring that the support base 10 meets the deformation requirement.

[0062] The X-Y workbench 20 can move the carrier to the test position along the Y direction, and the test position is located at the middle part of the support plate 11 in the Y direction. The first guide rail 21 has the same extension length as the support plate 11 in the Y direction, and both ends of the two vertical plates 12 in the Y direction are recessed in the support plate 11, that is, both ends of the support plate 11 in the Y direction exceed the vertical plate 12, that is, the two ends of the vertical plate 12 in the Y direction form a missing part 121 (see Figure 9 ), so that the length of both ends in the Y direction does not exceed the vertical plate 12. Since the test position is located at the middle part of the support plate 11 in the Y direction, the middle part is subjected to a larger force, and the two sides are subjected to a smaller force, and the positions of both ends of the vertical plate 12 are not easy to deform. In this way, by recessing both ends of the vertical plate 12 in the vertical plate 12, the material of the support base 10 can be further saved and the weight of the support base 10 can be further reduced while ensuring that the support base 10 meets the deformation requirement.

[0063] Referring to Figure 10 The support base 10 further comprises a plurality of connecting strips 18, each of which is arranged at intervals along the Y direction and extends along the X direction. Both ends of each connecting strip 18 in the X direction are connected to one end of the two vertical plates 12 away from the support plate 11 in the Z direction. When the vertical plate 12 is subjected to the force applied by the components thereon, the two ends of the two vertical plates 12 away from the support plate 11 have a tendency to move away from each other. Since the two ends of the connecting strip 18 are connected to the two vertical plates 12 respectively, the vertical plate 12 can be pulled to the middle, reducing the deformation caused by the two vertical plates 12 moving away from each other.

[0064] Further, the support base 10 further comprises a second connecting plate 19, which extends along the Y direction and connects at least part of the end portions of the connecting strips 18 in the X direction. Generally, the carrier moves to the edge position in the X direction to take electronic components, and at this time the edge position of the connecting plate in the X direction is subjected to a larger force. By providing the second connecting plate 19, at least part of the end portions of the connecting strips 18 in the X direction are connected, which can increase the ability of the connecting strips 18 to resist deformation.

[0065] In some embodiments, referring to Figure 1The X-Y worktable 20 further comprises a first moving table 22, a second guide rail 23, a second slider and a second moving table 24. The first moving table 22 is arranged on the side of the support plate 11 facing away from the accommodating space and is connected to the first guide rail 21 through the first slider 25. The first driving assembly 30 can drive the first moving table 22 to move along the Y direction relative to the support base 10. The second guide rail 23 extends along the X direction and is arranged on the side of the first moving table 22 facing away from the first guide rail 21, and the second moving table 24 is connected to the second guide rail 23 through the second slider. The carrier is arranged on the second moving table 24. When the first moving table 22 moves along the Y direction relative to the support base 10, the carrier can be driven to move along the Y direction, and when the second moving table 24 moves along the X direction relative to the first moving table 22, the carrier can be driven to move along the X direction. In this way, the X-Y worktable 20 can drive the carrier to move along the X direction and the Y direction relative to the support base 10.

[0066] Optionally, referring to Figure 11 The first moving table 22 comprises a table body 221, and a slider mounting surface 2211 is arranged on the table body 221, and the first slider 25 is mounted on the slider mounting surface 2211. The first moving table 22 further comprises a connecting rib plate 222 arranged on the table body 221, and at least part of the slider mounting surfaces 2211 are connected through the connecting rib plate 222 extending along the X direction or the Y direction. In this way, the load can be dispersed between the connected slider mounting surfaces 2211, and the deformation amount of the maximum deformation region of the first moving table 22 is reduced.

[0067] Further, each two adjacent slider mounting surfaces 2211 are connected through the connecting rib plate 222 extending along the X direction or the Y direction, and at this time, the load can be dispersed between the slider mounting surfaces 2211, and the deformation amount of the maximum deformation region of the first moving table 22 is further reduced.

[0068] In some embodiments, the probe table 100 further comprises a second driving assembly arranged on the side of the first moving table 22 facing the second moving table 24, for driving the second moving table 24 to move along the X direction relative to the first moving table 22.

[0069] The first driving assembly 30 and the second driving assembly each comprise a linear motor assembly. The linear motor is a motor that uses a different working principle from the traditional rotary motor, and its rotating mode is linear motion. The linear motor comprises a stator and a rotor. The stator is the static component of the linear motor, comprising a stator core and a winding. The rotor is the dynamic component of the linear motor, usually comprising a magnet and a magnet bearing.

[0070] The probe station 100 further comprises a ground foot 50 connected with the vertical plate 20, and the probe station 100 is arranged on the ground or work surface through the ground foot 50. The probe station 100 further comprises a caster 60 connected with the vertical plate 20, and the probe station 100 is moved on the ground or work surface through the caster 60.

[0071] Further, the probe station 100 further comprises a needle card support, which is installed on the support surface 111 and has a receiving space for receiving the X-Y worktable 20. Specifically, the needle card support comprises a needle card platform for fixing a probe card.

[0072] In a preferred embodiment of the present application, the support base 10 comprises a support plate 11 and two vertical plates 12, which are supported below the two ends of the support plate 11 in the X direction. The support plate 11 comprises a plate body 113 and four protrusions 114, and each protrusion 114 is provided with a guide rail mounting surface 112. Among them, two guide rail mounting surfaces 112 are arranged opposite to the two vertical plates 12 respectively, and the remaining two guide rail mounting surfaces 112 are opposite to the receiving space 14.

[0073] The X-Y worktable 20 comprises four first guide rails 21, which are respectively installed on the four guide rail mounting surfaces 112, and the extension length of each first guide rail 21 in the Y direction is the same as that of the support plate 11. The two ends of the two vertical plates 12 in the Y direction are recessed in the support plate 11. The first driving assembly 30 is installed on the support plate 11 and located between the middle two first guide rails 21 in the X direction.

[0074] The support base 10 further comprises two first reinforcing ribs 13 and a plurality of second reinforcing ribs 15, and the two first reinforcing ribs 13 are protruded on the first end surface of the support plate 11 and located in the receiving space 14. The two guide rail mounting surfaces 112 opposite to the receiving space 14 are arranged one by one corresponding to the two first reinforcing ribs 13, and the orthogonal projection of the first reinforcing rib 13 on the guide rail mounting surface 112 corresponding thereto in the Z direction coincides with the guide rail mounting surface 112. The outer side of the connection between each vertical plate 12 and the support plate 11 is provided with a plurality of recessed portions 16, which are sequentially and spaced apart in the Y direction. The side of the vertical plate 12 away from the receiving space has a plurality of first connecting plates 17, and each adjacent two recessed portions 16 are arranged on both sides of a first connecting plate 17 in the Y direction, and the first connecting plate 17 is provided with a through hole 171 penetrating in the Y direction.

[0075] The support base 10 further comprises a plurality of connecting strips 18, and the two ends of each connecting strip 18 in the X direction are connected with the ends of the two vertical plates 12 away from the support plate 11 in the Z direction. The support base 10 further comprises a second connecting plate 19, which connects the end portions of at least part of the connecting strips 18 in the X direction.

[0076] The X-Y worktable 20 further comprises a first moving table 22, a first sliding block 25, a second guide rail 23, a second sliding block and a second moving table 24. The first moving table 22 is connected with the first guide rail 21 through the first sliding block 25. The first driving assembly 30 can drive the first moving table 22 to move along the Y direction relative to the support base 10. The second guide rail 23 is arranged on the first moving table 22, and the second moving table 24 is connected with the second guide rail 23 through the second sliding block. The probe table 100 further comprises a carrier, and the carrier is arranged on the second moving table 24. The probe table 100 further comprises a second driving assembly, and the second driving assembly is arranged on the first moving table 22 and used for driving the second moving table 24 to move along the X direction relative to the first moving table 22.

[0077] The first moving table 22 comprises a table body 221, and a sliding block mounting surface 2211 is arranged on the table body 221. The first sliding block 25 is mounted on the sliding block mounting surface 2211. The first moving table 22 further comprises a connecting rib plate 222, and the connecting rib plate 222 is arranged on the table body 221. At least part of the sliding block mounting surfaces 2211 are connected through the connecting rib plate 222 extending along the X direction or the Y direction.

[0078] The technical features of the above-described embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above-described embodiments are not described, but as long as the combinations of the technical features do not exist contradictions, they should be considered as the scope of the present application.

[0079] The above-described embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as the limitation of the scope of the utility model patent. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A probe station, characterized in that, The probe table comprises: a support base comprising a support plate and two vertical plates arranged at intervals along the X direction, two ends of the support plate in the X direction are respectively arranged on the two vertical plates, and a first end surface of the support plate along the Z direction and the two vertical plates jointly form a containing space; an X-Y table comprising a plurality of first guide rails; an end surface of the support plate away from the containing space is provided with a plurality of guide rail mounting surfaces arranged at intervals along the X direction and extending along the Y direction, and each first guide rail is installed on each guide rail mounting surface in one-to-one correspondence; wherein the support base further comprises a plurality of first reinforcing ribs extending along the Y direction, each first reinforcing rib is protruding on the first end surface; along the X direction, each guide rail mounting surface located between the two vertical plates is provided in correspondence with a first reinforcing rib; in the Z direction, the orthogonal projection of each first reinforcing rib on the guide rail mounting surface corresponding thereto covers at least part of the corresponding guide rail mounting surface.

2. The probe station of claim 1, wherein, In the Z direction, the orthogonal projection of each first reinforcing rib on the guide rail mounting surface corresponding thereto covers the entire corresponding guide rail mounting surface.

3. The probe station of claim 1, wherein, Two first guide rails are respectively arranged above the two vertical plates in the Z direction, and the remaining first guide rails are located between the two vertical plates in the X direction.

4. The probe station of claim 3, wherein, The X-Y table comprises four first guide rails, and the four first guide rails are uniformly arranged at intervals along the X direction; The probe table further comprises a first driving assembly arranged on the support plate, the first driving assembly is located between the middle two first guide rails in the X direction, and the first driving assembly is used to drive a first moving table of the X-Y table to move relative to the support base along the Y direction.

5. The probe station of claim 1, wherein, The support plate comprises a plate body and a plurality of protrusions, the protrusions are protruding on the side of the plate body provided with the X-Y table in the Z direction, and the surface of each protrusion away from the plate body forms a guide rail mounting surface; and / or, The extension length of the first guide rail in the Y direction is the same as that of the support plate, and both ends of the two vertical plates in the Y direction are recessed on the support plate.

6. The probe station of claim 1, wherein Each vertical plate is provided with a plurality of recesses on the side away from the containing space, and the plurality of recesses are arranged at intervals along the Y direction.

7. The probe station of claim 6, wherein, The side of the vertical plate away from the containing space has a plurality of first connecting plates, each adjacent two recesses are arranged on both sides of a first connecting plate along the Y direction, and the first connecting plate is provided with a through hole extending along the Y direction.

8. The probe station of any of claims 1-7, wherein, The support base further comprises a plurality of connecting strips, each connecting strip is arranged at intervals along the Y direction and extends along the X direction; Both ends of each connecting strip along the X direction are connected to one end of the two vertical plates away from the support plate in the Z direction.

9. The probe station of claim 8, wherein, The support base further comprises a second connecting plate extending along the Y direction and connecting at least part of the end portions of the connecting strips in the X direction.

10. Probe station according to any of claims 1-7, characterized in that The X-Y worktable further comprises a first moving table, a first slider, a second guide rail, a second slider and a second moving table, the first moving table is connected with the first guide rail through the first slider, the second guide rail is arranged on the side of the first moving table away from the first guide rail and extends along the X direction, and the second moving table is connected with the second guide rail through the second slider. The first moving table comprises a table body, the table body is provided with a slider mounting surface, the first slider is mounted on the slider mounting surface, and the first moving table further comprises a connecting rib plate, the connecting rib plate is arranged on the table body, and at least part of the slider mounting surfaces are connected through the connecting rib plates extending along the X direction or the Y direction.

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