A device for protecting a wafer box check valve filter paper during cleaning
By setting a protective mechanism on the wafer box support, and using components such as flexible water-blocking blocks and drive motors to seal the one-way valve body, the problems of water wetting the filter paper and high nitrogen consumption are solved, achieving low-cost and high-efficiency filter paper protection.
Patent Information
- Application Number
- CN202423048011.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-09
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-09
AI Technical Summary
In existing devices, water easily wets the filter paper during the cleaning of the wafer cassette check valve, resulting in a shortened lifespan. Furthermore, the nitrogen consumption during secondary drying is high, increasing operating costs.
A device including a wafer box support and a protective mechanism was designed. By using components such as flexible water-blocking blocks and drive motors, water is prevented from entering the wafer box by blocking and shielding the one-way valve body. Combined with water guides, excess water is discharged, simplifying the structure and reducing power requirements.
It effectively prevents the filter paper from getting wet, reduces usage costs, simplifies the structure, reduces nitrogen consumption, and extends the filter paper's lifespan.
Smart Images
Figure CN223612373U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to wafer box cleaning technical field, and specifically is a device of protecting wafer box check valve filter paper when cleaning. BACKGROUND
[0002] Wafer box is a very precise container, used for protecting and transporting semiconductor wafers, and the wafer is the basic material for manufacturing semiconductor devices, which is very thin and very fragile, and the front opening wafer box is one kind of wafer box, and the check valve is one of the components of the front opening wafer box, used for one-way ventilation, and the filter paper with one-way water repellency is arranged inside, and the water repellent surface faces the inside of the front opening wafer box, and the front opening wafer box cleaning needs to go through the steps of hot water spraying, hot air drying, nitrogen filling and secondary drying, and the check valve filter paper is easily wetted by water during the wafer box cleaning, and usually the spray angle in the hot water spraying during the front opening wafer box cleaning is adjusted to reduce the water amount entering the check valve, and the water in the check valve is removed in the subsequent nitrogen filling and secondary drying step to completely dry the filter paper, and a blowing mechanism is added to blow air to the check valve in the hot air drying step during the front opening wafer box cleaning to dry the filter paper without increasing the nitrogen consumption.
[0003] The existing device for protecting wafer box check valve filter paper when cleaning has certain disadvantages in use, and a small amount of water will still wet the filter paper to reduce the service life of the filter paper, and the filter paper is not completely dried during the secondary drying, so a large amount of nitrogen needs to be filled to increase the use cost, and if the blowing mechanism is added, the overall structure is complex due to the need of arranging the gas pipeline, the processing cost is high, the maintenance cost is high, a small amount of water will still wet the filter paper to reduce the service life of the filter paper, and the device cannot meet the needs of people. UTILITY MODEL CONTENTS
[0004] The utility model aims at solving one of the technical problems in the prior art, and therefore proposes a device for protecting wafer box check valve filter paper when cleaning.
[0005] A device for protecting wafer box check valve filter paper when cleaning is applied to a front opening wafer box, which comprises a wafer box support seat capable of rotating and a protection mechanism arranged on the wafer box support seat, and the wafer box support seat rotates along a center line, wherein a side surface of the front opening wafer box is symmetrically provided with a plurality of groups of check valve bodies, the protection mechanism comprises a water blocking support vertically arranged on one side of the front opening wafer box and a plurality of groups of flexible water blocking blocks symmetrically arranged on the water blocking support, the flexible water blocking blocks block the inlets of the check valve bodies to avoid water entering the inside of the front opening wafer box through the check valve bodies to cause the filter paper to be wet, and one end surface of the flexible water blocking block can be attached to the inlet of the check valve body.
[0006] As a further scheme of the utility model: the water retaining support is vertically installed on one side of the upper end face of the wafer box support seat, a through groove is formed in the water retaining support, the through groove can enable the sprayed hot water to clean the wafer box support seat, and the flexible water retaining block is made of waterproof material.
[0007] As a further scheme of the utility model: the flexible water retaining block is in the circular truncated cone structure, the flexible water retaining block is arranged in alignment with the one-way valve body, and the circular bottom surface with the large diameter of the flexible water retaining block is attached to the one-way valve body.
[0008] As a further scheme of the utility model: the upper end face of the wafer box support seat is provided with a plurality of limiting blocks for supporting and limiting the front opening wafer box, the upper end of the limiting block is provided with a limiting groove attached to the lower end of the four corners of the front opening wafer box, and the limiting block can limit and fix the front opening wafer box.
[0009] As a further scheme of the utility model: the protection mechanism further includes a protection box arranged on one side of the water retaining support, a protection cover movably arranged on the other side of the water retaining support, and a driving motor detachably installed in the protection box and capable of controlling the rotation of the protection cover, the protection box protects the driving motor inside, the driving motor is a waterproof motor, the protection cover is arranged on the outer side of the flexible water retaining block, the protection cover is provided with a groove matched with the flexible water retaining block, and the driving motor controls the protection cover to shield and protect the one-way valve body.
[0010] As a further scheme of the utility model: the protection mechanism further includes a reinforcing member movably installed on the protection cover, a tooth ring member arranged on one side of the reinforcing member, and a gear rotatably arranged on one side of the water retaining support and engaged with the tooth ring member, the output shaft of the driving motor penetrates one side of the protection box and is connected with the rotating shaft of the gear, the driving motor drives the tooth ring member to rotate by 180 degrees through the gear, and the tooth ring member drives the protection cover to rotate through the reinforcing member.
[0011] As a further scheme of the utility model: the tooth ring member is provided with an opening groove corresponding to the protection cover, the opening groove can attach the one-way valve body to one side of the flexible water retaining block, a rotating groove for the rotation of the reinforcing member is formed in the water retaining support, the reinforcing member is in the arc structure, and the one side of the water retaining support is provided with a mounting plate for fixing the protection box.
[0012] As a further scheme of the utility model: the inner wall of the protection cover is vertically provided with a water guide member, a connecting groove matched with the one-way valve body is formed in the water guide member, and the water guide member can reduce the flow of hot water on the one-way valve body to the connection between the one-way valve body and the flexible water retaining block.
[0013] Compared with the prior art, the utility model has the advantages that:
[0014] (1)The utility model discloses a wafer box support seat and protection mechanism are set up, and wafer box support seat and limiting block are positioned fixed to front opening wafer box, and flexible water baffle and water baffle support are blocked to one -way valve main part, and drive motor, gear, ring gear and reinforcing piece control protection cover and one -way valve main part are shielded, and water guide piece is water -guided to one -way valve main part, thereby avoiding when front opening wafer box is cleaned, one -way valve water -inlet causes filter paper wet water to reduce life, possesses power -free, fluid supply demand design, saves long -term use cost, and flexible water baffle and protection cover cooperate, and front opening wafer box is placed or taken out on wafer box support seat easily. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1 It is the whole schematic diagram of the utility model.
[0016] Figure 2 It is the partial structure diagram of wafer box support seat and protection mechanism in the utility model.
[0017] Figure 3 It is the partial structure diagram of wafer box support seat and protection mechanism in the utility model Figure 2 It is the close -up of A in the middle.
[0018] Figure 4 It is the partial structure diagram of water baffle support and flexible water baffle in the utility model.
[0019] Figure 5 It is the partial structure diagram of protection cover and ring gear in the utility model.
[0020] Figure 6 It is the partial structure diagram of front opening wafer box and one -way valve main part in the utility model.
[0021] In the drawing: 1, front opening wafer box;2, wafer box support seat;3, one -way valve main part;4, water baffle support;5, flexible water baffle;6, limiting block;7, protection box;8, protection cover;9, drive motor;10, reinforcing piece;11, ring gear;12, gear;13, mounting plate;14, water guide piece;15, through slot. DETAILED DESCRIPTION
[0022] The technical scheme of the utility model will be described clearly and completely in combination with examples, and obviously, the described examples are only a part of the examples of the utility model, not all the examples. Based on the examples in the utility model, all other examples obtained by the ordinary skill in the art without making creative labor belong to the scope of protection of the utility model.
[0023] Example one
[0024] Please refer to Figure 1 -Figure 4 The application provides a device for protecting filter paper of a wafer box check valve during cleaning, which is applied to a front opening wafer box 1 and comprises a wafer box support seat 2 capable of rotating and a protection mechanism arranged on the wafer box support seat 2, wherein the wafer box support seat 2 rotates along a center line; wherein a side surface of the front opening wafer box 1 is symmetrically provided with a plurality of groups of check valve bodies 3; the protection mechanism comprises a water blocking support 4 vertically arranged on one side of the front opening wafer box 1 and a plurality of groups of flexible water blocking blocks 5 symmetrically arranged on the water blocking support 4, the flexible water blocking blocks 5 block inlets of the check valve bodies 3, so that water cannot enter the inside of the front opening wafer box 1 through the check valve bodies 3 and cause the filter paper to be wet; and one end surface of the flexible water blocking block 5 can be attached to the inlet of the check valve body 3.
[0025] In the embodiment, the water blocking support 4 is vertically arranged on one side of the upper end surface of the wafer box support seat 2, the water blocking support 4 is provided with a through groove 15, the through groove 15 can enable the hot water to clean the wafer box support seat 2, and the flexible water blocking block 5 is made of waterproof material.
[0026] In the embodiment, the flexible water blocking block 5 has a circular truncated cone structure, the flexible water blocking block 5 is arranged in alignment with the check valve body 3, and the circular bottom surface with a large diameter of the flexible water blocking block 5 is attached to the check valve body 3.
[0027] In the embodiment, the upper end surface of the wafer box support seat 2 is provided with a plurality of groups of limiting blocks 6 for supporting and limiting the front opening wafer box 1, the upper end of the limiting block 6 is provided with a limiting groove attached to the lower end of the four corners of the front opening wafer box 1, and the limiting block 6 can limit and fix the front opening wafer box 1.
[0028] In conclusion, the front opening wafer box 1 is aligned with the wafer box support seat 2, the front opening wafer box 1 is connected with the limiting block 6, one end surface of the check valve body 3 is attached to one end surface of the flexible water blocking block 5, the flexible water blocking block 5 blocks the check valve body 3, when the front opening wafer box 1 is cleaned, the flexible water blocking block 5 can block water from the front and side surfaces, so that the water cannot enter the check valve body 3, thereby avoiding the filter paper from being wet.
[0029] Embodiment two
[0030] Reference Figure 2 - Figure 6In the second embodiment of the utility model, the protection mechanism further comprises a protection box 7 arranged on one side of the water blocking support 4, a protection cover 8 movably arranged on the other side of the water blocking support 4, and a driving motor 9 detachably installed in the protection box 7 and used for controlling the rotation of the protection cover 8, the protection box 7 is used for protecting the driving motor 9, the driving motor 9 is a waterproof motor, the protection cover 8 is arranged on the outer side of the flexible water blocking block 5, the protection cover 8 is provided with a groove matched with the flexible water blocking block 5, and the driving motor 9 controls the protection cover 8 to shield and protect the one-way valve body 3.
[0031] In the embodiment, the protection mechanism further comprises a reinforcing piece 10 movably arranged on the protection cover 8, a tooth ring 11 arranged on one side of the reinforcing piece 10, and a gear 12 rotatably arranged on one side of the water blocking support 4 and engaged with the tooth ring 11, the output shaft of the driving motor 9 penetrates one side of the protection box 7 and is connected with the rotating shaft of the gear 12, the driving motor 9 drives the tooth ring 11 to rotate 180 degrees through the gear 12, and the tooth ring 11 drives the protection cover 8 to rotate through the reinforcing piece 10.
[0032] In the embodiment, the tooth ring 11 is provided with an open groove corresponding to the protection cover 8, the open groove can make the one-way valve body 3 adhere to one side of the flexible water blocking block 5, the water blocking support 4 is provided with a rotating groove for the rotation of the reinforcing piece 10, the reinforcing piece 10 is arranged in an arc shape, and one side of the water blocking support 4 is provided with a mounting plate 13 used for fixing the protection box 7.
[0033] In the embodiment, the inner wall of the protection cover 8 is vertically provided with a water guide 14, the water guide 14 is provided with a connecting groove matched with the one-way valve body 3, and the water guide 14 can reduce the flow of hot water on the one-way valve body 3 to the connecting position of the one-way valve body 3 and the flexible water blocking block 5.
[0034] In conclusion, the one-way valve body 3 is connected with the flexible water blocking block 5, the one-way valve body 3 is connected with the water guide 14, the driving motor 9 is started, the gear 12 is driven to rotate, the gear 12 drives the tooth ring 11 to rotate, the tooth ring 11 drives the reinforcing piece 10 to rotate in the rotating groove, the reinforcing piece 10 drives the protection cover 8 to rotate, the protection cover 8 is shielded above the one-way valve body 3, the water guide 14 is rotated above the one-way valve body 3, and the water guide 14 guides the hot water flowing to the connecting position of the one-way valve body 3 and the flexible water blocking block 5.
[0035] Embodiment three
[0036] Refer to Figure 1 - Figure 6 Embodiment one and embodiment two are combined to obtain the embodiment.
[0037] The wafer box support seat 2 and the limiting block 6 limit and fix the front opening wafer box 1, the flexible water blocking block 5 and the water blocking support 4 block the one-way valve body 3, the driving motor 9, the gear 12, the gear ring 11 and the reinforcing piece 10 control the protective cover 8 to shield the one-way valve body 3, and the water guide 14 guides water to the one-way valve body 3.
[0038] The above examples are only used to illustrate the technical method of the utility model and are not limited. Although the utility model has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical method of the utility model can be modified or replaced equivalently without departing from the spirit and scope of the technical method of the utility model.
Claims
1. A device for protecting a filter paper of a unidirectional valve of a wafer box during cleaning, applied to a front opening wafer box (1), characterized in that, The utility model relates to a front opening wafer box protection mechanism, including: Rotatable wafer box support seat (2) and the protection mechanism of setting on wafer box support seat (2); Wherein, the side of front opening wafer box (1) is provided with several groups of check valve body (3) symmetry; The protection mechanism includes the water retaining support (4) vertically installed at one side of front opening wafer box (1) and several groups of flexible water retaining blocks (5) symmetrically installed on water retaining support (4); One end surface of the flexible water retaining block (5) can be attached to the inlet of the check valve body (3).
2. The apparatus for protecting the filter paper of the one-way valve of the FOUP during cleaning according to claim 1, wherein The water retaining support (4) is vertically installed on one side of the upper end surface of the wafer box support seat (2), and the water retaining support (4) is provided with a through slot (15). The flexible water retaining block (5) is made of waterproof material.
3. The apparatus for protecting the filter paper of the one-way valve of the FOUP during cleaning according to claim 1, wherein The flexible water retaining block (5) is in a circular truncated cone structure, and the flexible water retaining block (5) is aligned with the check valve body (3). The large-diameter circular bottom surface of the flexible water retaining block (5) is attached to the check valve body (3).
4. The apparatus for protecting the filter paper of the one-way valve of the FOUP during cleaning according to claim 1, wherein The upper end surface of the wafer box support seat (2) is provided with a plurality of limiting blocks (6) for supporting and limiting the front opening wafer box (1). The upper end of the limiting block (6) is provided with a limiting groove attached to the lower end of the front opening wafer box (1).
5. The apparatus for protecting the filter paper of the one-way valve of the FOUP during cleaning according to claim 1, wherein The protection mechanism further includes a protection box (7) provided on one side of the water retaining support (4), a protection cover (8) movably provided on the other side of the water retaining support (4), and a drive motor (9) detachably installed in the protection box (7) and capable of controlling the rotation of the protection cover (8). The protection cover (8) is provided outside the flexible water retaining block (5), and the protection cover (8) is provided with a groove matched with the flexible water retaining block (5).
6. The apparatus for protecting the filter paper of the one-way valve of the FOUP during cleaning according to claim 5, wherein The protection mechanism further includes a reinforcing member (10) connected perpendicularly to the protection cover (8), a toothed ring member (11) provided on one side of the reinforcing member (10), and a gear (12) rotatably provided on one side of the water retaining support (4) and engaged with the toothed ring member (11). The output shaft of the drive motor (9) penetrates one side of the protection box (7) and is connected to the rotating shaft of the gear (12).
7. The apparatus for protecting the filter paper of a FOUP unidirectional valve during cleaning according to claim 6, wherein The toothed ring member (11) is provided with an opening groove corresponding to the protection cover (8). The water retaining support (4) is provided with a rotating groove for the rotation of the reinforcing member (10). The reinforcing member (10) is in an arc shape. One side of the water retaining support (4) is provided with a mounting plate (13) for fixing the protection box (7).
8. The apparatus for protecting the filter paper of a FOUP unidirectional valve during cleaning according to claim 5, wherein, The inner wall of the protection cover (8) is vertically provided with a water guide member (14), and the water guide member (14) is provided with a connecting groove matched with the check valve body (3).