Wafer box loading door
By using a combination structure of a rotary actuator driving a crank and a connecting rod, the problem of simultaneously meeting safety protection and operational convenience in the case of limited space in semiconductor equipment is solved by the wafer box loading door, thus achieving efficient movement and control in a confined space.
Patent Information
- Application Number
- CN202423161246.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-20
AI Technical Summary
The existing wafer box loading door design presents a contradiction in meeting the requirements of movement range and installation space, especially in semiconductor equipment where space is limited, making it difficult to simultaneously meet the needs of safety protection and ease of operation.
The system employs a combination structure of a rotary actuator driving a crank and a connecting rod. The rotary actuator drives the crank to rotate, which in turn drives the connecting rod to open and close the sliding door, reducing the space occupied under the frame.
It achieves safety protection and convenient operation in a limited space, saves equipment installation space, and ensures smooth movement and control precision of the sliding door.
Smart Images
Figure CN223612392U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor equipment, especially relates to a wafer box loading door. BACKGROUND
[0002] In the semiconductor manufacturing industry, the wafer without plating film treatment is usually placed on the wafer box lifting device by manual after filling the wafer box, and the wafer box filled with wafer also needs to be taken away by manual after the plating film process is completed. With the start of semiconductor processing, in order to meet the wafer access demand of the mechanical hand, the wafer box lifting device must perform the lifting action. In order to prevent mechanical injury to the operator, a movable loading door must be set in front of the wafer lifting device to provide safety protection. The loading door needs to ensure that the wafer lifting device remains closed during processing, and at the same time does not hinder the manual placement of the wafer box before processing and the taking away operation of the wafer box after processing. The cylinder is widely used as a driving device, but the form of driving by installing the cylinder below the loading door requires that the space height below the loading door must be reserved slightly larger than the movement stroke. In addition, the cylinder size also occupies a large space in the transverse direction. In view of the fact that the semiconductor equipment is usually designed to be compact to save space and cost, and the space height of the lower part of the equipment rack is limited, therefore, it is urgent to design a new type of loading door which meets the dual requirements of movement stroke and installation space. SUMMARY
[0003] The utility model provides a wafer box loading door to solve the above technical problem.
[0004] In order to realize the above purpose, the technical scheme of the utility model is:
[0005] A wafer box loading door, comprising: a movable door, a guide assembly and a driving assembly; the movable door is installed on the rack of the semiconductor equipment, the guide assembly guides the reciprocating motion of the movable door in the vertical direction, and the driving assembly drives the movable door to move.
[0006] The driving assembly comprises: a rotary driver, a crank and a connecting rod installed on the rack; the rotary driver drives the crank to rotate, one end of the connecting rod is rotatably connected with the crank, and the other end is rotatably connected with the movable door.
[0007] Preferably, when the crank and the connecting rod are collinear, the crank is parallel to the movement direction of the movable door.
[0008] Preferably, the guide assembly adopts guide rail.
[0009] Preferably, the rotary driver can adopt motor, rotary cylinder.
[0010] Preferably, a first mounting hole is formed on the first connecting end of the crank, and the output shaft of the rotary driver penetrates into the first mounting hole; a slit extending to the first mounting hole is formed on the end face of the first connecting end of the crank, and a clamping light hole and a clamping threaded hole are further formed on the crank, the clamping light hole and the clamping threaded hole are coaxially arranged, the axial direction of the clamping light hole is perpendicular to the axis of the first mounting hole, and the clamping light hole and the clamping threaded hole are located on the two sides of the slit respectively; the first locking screw is sequentially threaded through the clamping light hole and the slit and then tightly screwed in the clamping threaded hole.
[0011] Preferably, a key groove is formed on the inner wall of the first mounting hole, and the key groove is matched with the key on the output shaft of the rotary driver.
[0012] Preferably, the connecting rod comprises a first joint bearing, a first locking nut, a rod body, a second locking nut and a second joint bearing; the first joint bearing is threadedly connected with one end of the rod body and locked by the first locking nut, and the second joint bearing is threadedly connected with the other end of the rod body and locked by the second locking nut; the first joint bearing is rotationally connected with the crank, and the second joint bearing is rotationally connected with the moving door.
[0013] Preferably, a plurality of second mounting holes are formed on the second connecting end of the crank, and the plurality of second mounting holes are arranged along the length direction of the crank; the first joint bearing is connected with the second mounting hole through a first pin shaft assembly.
[0014] Preferably, the moving door is fixedly connected with an adapter seat, a fixed threaded hole is formed on the adapter seat, and the second locking screw is threaded through the second joint bearing and then tightly screwed in the fixed threaded hole.
[0015] Preferably, a fixed door is further fixedly arranged on the rack, the fixed door is located above the moving door, and the driving assembly drives the moving door to move to a position abutting against the fixed door.
[0016] Beneficial effects:
[0017] The wafer box loading door disclosed in the application drives the crank to rotate through the rotary driver, the crank drives the connecting rod to move and then drives the moving door to move, so that the opening and closing of the moving door are realized; compared with the existing linear driving of the cylinder, the driving assembly of the rotary driver, the crank and the connecting rod can save space when realizing the same stroke of the moving door. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.
[0019] Figure 1 A structure schematic view of a wafer box loading door is disclosed in the utility model.
[0020] Figure 2 A front view of a wafer box loading door is disclosed in the utility model.
[0021] Figure 3 A right view of a wafer box loading door is disclosed in the utility model.
[0022] Figure 4 A Figure 1 A local enlarged view of A in the middle.
[0023] Figure 5 A schematic view of a combination of a crank and a first locking screw of a wafer box loading door is disclosed in the utility model.
[0024] Figure 6 A schematic view of a combination of a connecting rod, a first pin shaft assembly, a second locking screw and an adapter seat of a wafer box loading door is disclosed in the utility model.
[0025] 1, a mobile door; 11, an adapter seat; 2, a guide assembly; 31, a rotary driver; 32, a crank; 321, a first connecting end; 322, a second connecting end; 33, a connecting rod; 331, a first joint bearing; 332, a first locking nut; 333, a rod body; 334, a second locking nut; 335, a second joint bearing; 4, a first locking screw; 5, a first pin shaft assembly; 6, a second locking screw; 7, a fixed door; 9, a rack. DETAILED DESCRIPTION
[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model, obviously, the described embodiments are a part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor fall within the protection scope of the utility model.
[0027] A wafer box loading door is combined with Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6As shown, the moving door 1, the guide assembly 2 and the driving assembly are included; the moving door 1 is installed on the rack 9 of the semiconductor equipment, the guide assembly 2 guides the reciprocating movement of the moving door 1 in the vertical direction, and the driving assembly drives the moving door 1 to move; the driving assembly includes a rotary driver 31, a crank 32 and a connecting rod 33 which are installed on the rack 9; the rotary driver 31 drives the crank 32 to rotate, and one end of the connecting rod 33 is rotationally connected with the crank 32 and the other end is rotationally connected with the moving door 1. The rotary driver 31 drives the crank 32 to rotate and further drives the connecting rod 33 to swing, so as to realize the movement of the connecting rod 33 driving the moving door 1, and realize the opening and closing of the moving door 1. When the moving door 1 is closed, the crank 32 and the connecting rod 33 have length overlap in the vertical direction, which can reduce the requirement for the size of the lower part of the rack 9; when the moving door 1 is opened, the crank 32 and the connecting rod 33 are stretched in the vertical direction with length overlap, so that the stroke of the moving door 1 can be increased. Therefore, compared with the existing linear driving form such as cylinder, the driving assembly of the rotary driver 31, the crank 32 and the connecting rod 33 can save the space of the lower part of the rack 9 and meet the narrow installation space of the semiconductor equipment when realizing the same stroke of the moving door 1.
[0028] Preferably, when the crank 32 is collinear with the connecting rod 33, the crank 32 is parallel to the movement direction of the moving door 1. Thus, the driving assembly, the guide assembly 2 and the moving door 1 form a concentric crank slider mechanism, so that when the crank 32 is collinear and overlaps with the connecting rod 33, the connecting rod 33 drives the moving door 1 to open, further reducing the installation space required by the driving assembly. When the crank 32 is collinear and does not overlap with the connecting rod 33, the length of the crank 32 and the connecting rod 33 is overlapped to meet the maximum stroke of the moving door 1. And the concentric crank slider mechanism overcomes the quick-return characteristic, the speed of the moving door 1 in the forward stroke and the return stroke can remain consistent, which is convenient for the control of opening and closing the door.
[0029] Specifically, the connecting rod 33 is located at the middle of the bottom edge of the moving door 1, avoiding large torsion of the moving door 1.
[0030] Preferably, the guide assembly 2 adopts guide rails, in this embodiment, the guide assembly 2 includes two groups of guide rails installed on the rack 9, and the moving door 1 connects four sliders of the two groups of guide rails, which ensures the stable and smooth movement of the moving door 1.
[0031] Preferably, the rotary driver 31 can adopt a motor or a rotary cylinder.
[0032] Specifically, the rotary driver 31 faces the inside of the rack 9, preventing the rotary driver 31 from interfering with the movement of the wafer box lifting device after extending out of the rack 9. And the rotary driver 31 is located in the lower space under the installation platform of the rack 9, and the lower space can be arranged with pipelines and valves and other related structures of the semiconductor processing equipment.
[0033] Preferably, the first connecting end 321 of the crank 32 is provided with a first mounting hole, and the output shaft of the rotary driver 31 penetrates into the first mounting hole; the end face of the first connecting end 321 of the crank 32 is provided with a slit extending to the first mounting hole, and the crank 32 is further provided with a clamping light hole and a clamping threaded hole, which are coaxially arranged, the axial direction of the clamping light hole is perpendicular to the axis of the first mounting hole, and the clamping light hole and the clamping threaded hole are located on the two sides of the slit, respectively; the first locking screw 4 is screwed in the clamping threaded hole after penetrating through the clamping light hole and the slit in sequence. By tightening the first locking screw 4, the portions of the crank 32 on the two sides of the slit are close to each other, so that the first mounting hole clamps the output shaft of the rotary driver 31, and the fixed connection of the crank 32 and the output shaft of the rotary driver 31 is realized.
[0034] Preferably, the inner wall of the first mounting hole is provided with a key groove, and the key groove cooperates with the key on the output shaft of the rotary driver 31 to ensure that the output shaft of the rotary driver 31 drives the crank 32 to rotate synchronously.
[0035] Preferably, the connecting rod 33 comprises a first joint bearing 331, a first locking nut 332, a rod body 333, a second locking nut 334 and a second joint bearing 335; the first joint bearing 331 is threadedly connected with one end of the rod body 333 and locked by the first locking nut 332, and the second joint bearing 335 is threadedly connected with the other end of the rod body 333 and locked by the second locking nut 334; the first joint bearing 331 is rotationally connected with the crank 32, and the second joint bearing 335 is rotationally connected with the moving door 1. By loosening the first locking nut 332 and the second locking nut 334, the first joint bearing 331 can be adjusted to adjust the length of the rod body 333, and the second joint bearing 335 can be adjusted to adjust the length of the rod body 333, so as to realize the adjustment of the length of the connecting rod 33 and facilitate the installation and adjustment of the movement stroke of the moving door 1. The first joint bearing 331 and the second joint bearing 335 can absorb the installation error to ensure smooth operation of the driving assembly.
[0036] Preferably, the second connecting end 322 of the crank 32 is provided with a plurality of second mounting holes, and the plurality of second mounting holes are arranged along the length direction of the crank 32; the first joint bearing 331 is connected with the second mounting hole through the first pin shaft assembly 5. The plurality of second mounting holes can facilitate the selection of appropriate second mounting holes for installing the connecting rod 33 and adjusting the connection position of the connecting rod 33 and the crank 32 during installation.
[0037] Preferably, the mobile door 1 is fixedly connected with an adapter 11, the adapter 11 is provided with a fixed threaded hole, and the second locking screw 6 is screwed in the fixed threaded hole after passing through the second joint bearing 335. The adapter 11 is used to connect the connecting rod 33 and the mobile door 1, which can avoid the abrasion of the mobile door 1 caused by direct connection, and avoid the entire mobile door 1 being scrapped after the abrasion. The adapter 11 is convenient for maintenance and replacement.
[0038] Preferably, the rack 9 is further provided with a fixed door 7, the fixed door 7 is located above the mobile door 1, and the driving assembly drives the mobile door 1 to move to a position abutting against the fixed door 7. The mobile door 1 is closed by abutting against the fixed door 7, and the mobile door 1 is opened by being separated from the fixed door 7; and the fixed door 7 can limit the position of the mobile door 1, avoiding the mobile door 1 being stretched out of the rack 9 to affect the installation of other mechanisms.
[0039] Specifically, the fixed door 7 and the mobile door 1 are made of acrylic plates, which are convenient for observing the rack 9.
[0040] Finally, it should be noted that: the above examples are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing examples, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing examples, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A wafer cassette loading door, characterized in that, The application relates to a mobile door (1), a guide assembly (2) and a driving assembly; the mobile door (1) is installed on a rack (9) of a semiconductor device; the guide assembly (2) guides the reciprocating movement of the mobile door (1) in the vertical direction; and the driving assembly drives the mobile door (1) to move. The driving assembly comprises a rotary driver (31), a crank (32) and a connecting rod (33) which are installed on the rack (9). The rotary driver (31) drives the crank (32) to rotate; one end of the connecting rod (33) is rotationally connected with the crank (32), and the other end is rotationally connected with the mobile door (1). When the crank (32) is collinear with the connecting rod (33), the crank (32) is parallel to the moving direction of the mobile door (1).
2. The FOUP load door of claim 1, wherein, The guide assembly (2) adopts a guide rail.
3. The FOUP load door of claim 1, wherein, The rotary driver (31) adopts a motor or a rotary cylinder.
4. The FOUP load door of claim 1, wherein, A first mounting hole is formed in a first connecting end (321) of the crank (32), and an output shaft of the rotary driver (31) penetrates the first mounting hole; a slit extending to the first mounting hole is formed in the end face of the first connecting end (321) of the crank (32); a clamping light hole and a clamping threaded hole are further formed in the crank (32) and are coaxially arranged; the axial direction of the clamping light hole is perpendicular to the axis of the first mounting hole; and the clamping light hole and the clamping threaded hole are located on the two sides of the slit respectively; and a first locking screw (4) is sequentially threaded through the clamping light hole and the slit and is tightly screwed in the clamping threaded hole.
5. The FOUP load door of claim 4, wherein, A key groove is formed in the inner wall of the first mounting hole, and the key groove is matched with a key on the output shaft of the rotary driver (31).
6. A front opening shipping box (FOSB) loading door according to claim 5, wherein, The connecting rod (33) comprises a first joint bearing (331), a first locking nut (332), a rod body (333), a second locking nut (334) and a second joint bearing (335); the first joint bearing (331) is threadedly connected with one end of the rod body (333) and is locked by the first locking nut (332); the second joint bearing (335) is threadedly connected with the other end of the rod body (333) and is locked by the second locking nut (334); the first joint bearing (331) is rotationally connected with the crank (32), and the second joint bearing (335) is rotationally connected with the mobile door (1).
7. The FOUP load door of claim 5, wherein, A plurality of second mounting holes are formed in a second connecting end (322) of the crank (32) and are arranged along the length direction of the crank (32); and the first joint bearing (331) is connected with the second mounting holes through a first pin shaft assembly (5).
8. The FOUP load door of claim 7, wherein, An adapter seat (11) is fixedly connected to the mobile door (1), a fixed threaded hole is formed in the adapter seat (11), and a second locking screw (6) is threaded through the second joint bearing (335) and is tightly screwed in the fixed threaded hole.
9. The FOUP load door of claim 7, wherein, 10. The FOUP load door of claim 1, wherein, The rack (9) is further provided with a fixed door (7), the fixed door (7) is located above the movable door (1), and the driving assembly drives the movable door (1) to be movable to a position abutting against the fixed door (7).