Wafer box turnover machine
By designing a wafer box flipping machine, the automatic flipping of wafer boxes is achieved by using a clamping and flipping mechanism, which solves the problem of the wafer box opening direction not matching the robot arm, improves the automation level of the production line and reduces labor costs.
Patent Information
- Application Number
- CN202422749202.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-12
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-11-12
AI Technical Summary
On automated wafer cell storage production lines, the opening direction of the wafer cells is inconsistent with the extension and retraction direction of the robotic arm, requiring manual intervention to flip them, which reduces the automation level of the production line and increases labor costs.
A wafer cassette flipping machine was designed, including a bottom support mechanism, a fixed platform, a clamping mechanism, and a flipping mechanism. The clamping mechanism clamps the wafer cassette and the flipping mechanism automatically flips it to ensure that the opening of the wafer cassette is aligned with the robot arm.
It improved the automation level of the production line, reduced labor costs, enabled automated flipping of wafer cells, and improved production efficiency.
Smart Images
Figure CN223612405U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor devices, in particular to a wafer box turnover machine. BACKGROUND
[0002] On the wafer box automatic storage production line, the wafer needs to be taken out from the wafer box to carry out the action such as defect detection, cleaning spin-drying, batch division and batch combination. When taking out, the wafer box opening needs to be aligned with the telescopic direction of the wafer robot arm, however, the opening direction of the wafer box carried by the handling robot of the previous station on the production line is different from the telescopic direction of the robot arm, manual intervention is needed for turnover, which reduces the degree of automation of the production line and increases the labor cost.
[0003] Therefore, a wafer box turnover machine is provided. UTILITY MODEL CONTENTS
[0004] The utility model aims at providing a wafer box turnover machine, which aims at solving or improving at least one of the above technical problems.
[0005] To achieve the above-mentioned purpose, the utility model provides the following scheme: the utility model provides a wafer box turnover machine, which comprises:
[0006] A bottom support mechanism;
[0007] A fixed carrier, one side of the fixed carrier is rotatably connected with the bottom support mechanism through a rotating shaft;
[0008] A clamping mechanism, the clamping mechanism comprises oppositely arranged fixed limiting clamping plates and movable limiting clamping plates, the fixed limiting clamping plates and the movable limiting clamping plates are arranged on the fixed carrier respectively, the fixed carrier is provided with a spacing adjusting assembly, the spacing adjusting assembly is connected with the movable limiting clamping plate for driving the movable limiting clamping plate to approach or move away from the fixed limiting clamping plate;
[0009] A turnover mechanism, the turnover mechanism is arranged on the bottom support mechanism, and the turnover mechanism is connected with the fixed carrier for driving the fixed carrier to rotate around the rotating shaft.
[0010] Optionally, the fixed limiting clamping plate is located on one side of the top of the fixed carrier, the spacing adjusting assembly comprises a clamping and abutting cylinder fixed to the bottom of the fixed carrier, the piston rod of the clamping and abutting cylinder is fixed to the bottom of the movable limiting clamping plate, and the movable limiting clamping plate is located on the side of the fixed carrier away from the fixed limiting clamping plate.
[0011] Optionally, the top of the fixed platform is provided with two sets of abutting components, the fixed limiting clamping plate and the movable limiting clamping plate are used for clamping the front and back of the wafer box, and the two sets of abutting components are used for limiting the left and right of the wafer box.
[0012] Optionally, the abutting block is provided with an inclined surface above the side wall of the wafer box, so that the abutting block is in contact with the side wall of the wafer box above and has a gap with the side wall of the wafer box below.
[0013] Optionally, the bottom support mechanism comprises a support frame, two support rods are fixedly connected to the top of the support frame, the rotating shaft is fixedly connected to one of the support rods, and the fixed platform is located above the two support rods.
[0014] Optionally, the turnover mechanism comprises a turnover cylinder, the cylinder body end of the turnover cylinder is hinged to the support frame, the piston rod of the turnover cylinder is hinged to the bottom of the fixed platform, the rotating shaft, the connection points of the turnover cylinder and the support frame and the connection points of the turnover cylinder and the fixed platform form a triangular structure, and the connection points of the turnover cylinder and the fixed platform are located between the rotating shaft and the connection points of the turnover cylinder and the support frame.
[0015] Optionally, the opposite sides of the movable limiting clamping plate and the fixed limiting clamping plate are respectively fixedly connected with buffer plates.
[0016] Optionally, the fixed limiting clamping plate and the abutting block are fixedly connected to the top of the fixed platform through bolts, and long waist holes are formed in the fixed platform for allowing the bolts to pass through.
[0017] The utility model discloses the following technical effects: the wafer box is placed on the fixed platform of carrying robot, and the wafer box is close to the fixed limiting clamping plate on one side, the movable limiting clamping plate is moved through the interval adjusting component, and the movable limiting clamping plate and the fixed limiting clamping plate clamp the wafer box, then the fixed platform is driven to rotate around the rotating shaft through the turnover mechanism, the automatic turnover of the wafer box is realized, thereby the automation degree of production line is improved, and the artificial cost is reduced. BRIEF DESCRIPTION OF DRAWINGS
[0018] The drawings constituting a part of this application are used to provide further understanding of the application, the illustrative embodiment of the application and the description thereof are used to explain the application, and do not constitute improper limitation to the application.
[0019] Figure 1 It is the structural schematic diagram of the utility model.
[0020] In the figure: 1, fixed platform; 2, rotating shaft; 3, support frame; 4, overturning cylinder; 5, connecting block; 6, valve distribution disc; 7, electromagnetic valve; 8, throttle valve; 9, seat sensor; 10, RFID sensor; 11, wafer box; 12, abutting block; 13, fixed limiting clamp plate; 14, buffer plate; 15, movable limiting clamp plate; 16, overturning positioning block; 17, clamping cylinder. DETAILED DESCRIPTION
[0021] The technical solutions in the embodiments of the utility model will be apparently and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.
[0022] In order to make the above-mentioned purposes, features and advantages of the utility model more apparent, obvious and easy to understand, the utility model will be further described in detail below with reference to the drawings and specific embodiments.
[0023] Referring to Figure 1 The utility model provides a wafer box overturning machine, comprising:
[0024] Bottom support mechanism;
[0025] Fixed platform 1, one side of fixed platform 1 is rotatably connected with bottom support mechanism through rotating shaft 2;
[0026] Clamping mechanism, the clamping mechanism includes oppositely arranged fixed limiting clamp plate 13 and movable limiting clamp plate 15, and the fixed limiting clamp plate 13 and the movable limiting clamp plate 15 are arranged on the fixed platform 1 respectively, the fixed platform 1 is provided with spacing adjustment assembly, and the spacing adjustment assembly is connected with the movable limiting clamp plate 15 for driving the movable limiting clamp plate 15 to approach or move away from the fixed limiting clamp plate 13;
[0027] Overturning mechanism, the overturning mechanism is arranged on the bottom support mechanism, and the overturning mechanism is connected with the fixed platform 1 for driving the fixed platform 1 to rotate around the rotating shaft 2;
[0028] In actual use, a plurality of fixed platforms 1 can be arranged on one bottom support mechanism, so that a plurality of wafer boxes 11 are placed in turn for overturning, and in the embodiment, four fixed platforms 1 are arranged;
[0029] The carrying robot places the wafer box 11 on the fixed platform 1, one side of the wafer box 11 is close to the fixed limiting plate 13, the moving limiting plate 15 is driven to move by the spacing adjusting assembly, the moving limiting plate 15 and the fixed limiting plate 13 clamp the wafer box 11; then the fixed platform 1 is driven to rotate around the rotating shaft 2 by the turnover mechanism, the automatic turnover of the wafer box 11 is realized, thereby the automation degree of the production line is improved and the labor cost is reduced.
[0030] In some optional embodiments, the fixed limiting plate 13 is located on one side of the top of the fixed platform 1, the spacing adjusting assembly includes a clamping and abutting cylinder 17 fixed on the bottom of the fixed platform 1, the piston rod of the clamping and abutting cylinder 17 is fixed on the bottom of the moving limiting plate 15, and the moving limiting plate 15 is located on the side of the fixed platform 1 away from the fixed limiting plate 13.
[0031] In some optional embodiments, the top of the fixed platform 1 is provided with two groups of abutting assemblies, the fixed limiting plate 13 and the moving limiting plate 15 are used for clamping the front and back of the wafer box 11, and the two groups of abutting assemblies are used for limiting the left and right of the wafer box 11. The abutting assembly includes a plurality of abutting blocks 12, and the abutting block 12 is in contact with the side wall of the wafer box 11.
[0032] In the embodiment, two abutting blocks 12 are arranged on the left and right sides of the wafer box 11 respectively, the wafer box 11 is placed between the abutting blocks 12 on the two sides, and then the clamping action is performed.
[0033] In some optional embodiments, the upper side of the abutting block 12 close to the side wall of the wafer box 11 is an inclined surface, so that the upper side of the abutting block 12 is provided with a gap with the side wall of the wafer box 11, and the lower side is in contact with the side wall of the wafer box 11.
[0034] By arranging the upper side of the abutting block 12 close to the side wall of the wafer box 11 as an inclined surface, the guiding effect is achieved. In the embodiment, the inclination angle of the inclined surface is 50°, when the wafer box 11 is slightly deviated in the left and right positions, under the guiding effect of the inclined surface and the gravity of the wafer box 11 itself, the wafer box 11 can be automatically corrected.
[0035] In some optional embodiments, the bottom support mechanism includes a support frame 3, two support rods are fixed on the upper side of the support frame 3, the rotating shaft 2 is fixed on one of the support rods, the fixed platform 1 is rotationally connected with the rotating shaft 2, and the fixed platform 1 is located on the upper side of the two support rods.
[0036] In this embodiment, the support frame 3 is an aluminum profile frame, four fixed platforms 1 are arranged on the support frame 3, the top of the support rod is fixedly connected with a turnover positioning block 16, the fixed platform 1 is rotationally connected with the turnover positioning block 16 on one side through the rotating shaft 2, when the fixed platform 1 is in a horizontal state, the fixed platform 1 is in contact with the top of the turnover positioning block 16, so that the turnover positioning block 16 supports the fixed platform 1, two turnover positioning blocks 16 are arranged below one side of each fixed platform 1, and the clamping cylinder 17 is located between the two turnover positioning blocks 16.
[0037] Two seat sensors 9 are arranged on the back of the fixed platform 1 in a diagonal direction, which are used to detect whether there is a wafer box 11 on the fixed platform 1, and the back of the fixed platform 1 is also fixedly connected with an RFID sensor 10, which is used to read the information of the incoming wafer box 11, and the center line of the RFID sensor 10 and the radio frequency tag on the wafer box 11 are aligned.
[0038] In some optional embodiments, the turnover mechanism includes a turnover cylinder 4, the cylinder body end of the turnover cylinder 4 is hinged to the support frame 3, the piston rod of the turnover cylinder 4 is hinged to the bottom of the fixed platform 1, the connecting points of the rotating shaft 2, the turnover cylinder 4 and the support frame 3, and the connecting point of the turnover cylinder 4 and the fixed platform 1 form a triangular structure, and the connecting point of the turnover cylinder 4 and the fixed platform 1 is located between the rotating shaft 2 and the connecting point of the turnover cylinder 4 and the support frame 3.
[0039] The turnover cylinder 4 is hinged to the bottom of the fixed platform 1 through the connecting block 5, a gas distribution disc 6 is designed on the lower part of the support frame 3, an electromagnetic valve 7 and a throttle valve 8 are fixed on the gas distribution disc 6, and the electromagnetic valve 7 and the throttle valve 8 are used to control the actions of the turnover cylinder 4 and the clamping cylinder 17.
[0040] In some optional embodiments, the opposite sides of the movable limiting clamping plate 15 and the fixed limiting clamping plate 13 are respectively fixedly connected with buffer plates 14.
[0041] In this embodiment, the buffer plate 14 is a polyurethane buffer plate, which plays a buffering role and protects the wafer box 11 to avoid injury.
[0042] In some optional embodiments, the fixed limiting clamping plate 13 and the abutting block 12 are respectively fixedly connected to the top of the fixed platform 1 through bolts, and long waist holes are formed in the fixed platform 1 for the bolts to pass through.
[0043] By arranging the long waist holes, the installation position of the bolts on the fixed platform 1 can be changed, so that the working distance can be adjusted to adapt to wafer boxes of different shapes and sizes.
[0044] The utility model discloses a fixed limit clamping plate 13 and mobile limit clamping plate 15 embrace tightly wafer box 11, and the piston rod of turning over cylinder 4 is stretched out, and wafer box is turned 90, and the convenient wafer robot takes and puts wafer, saves time and manpower and reduces cost, and the device structure is simple, and the energy consumption is low.
[0045] In the description of the utility model, need understanding is, the orientation or position relation that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" etc. are indicated is based on the orientation or position relation shown in the drawing, only is for the convenience of describing the utility model, and is not the device or element that the indicated is indicated or implied must have a particular orientation, constructs and operates with a particular orientation, therefore can not be understood as the limitation to the utility model.
[0046] The above embodiment is only the preferred mode of the utility model, and does not limit the scope of the utility model, and various deformations and improvements of the technical scheme of the utility model made by the ordinary skill in the art without departing from the design spirit of the utility model should fall into the protection scope determined by the utility model claims.
Claims
1. A wafer cell flipping machine, characterized in that, Include: Bottom support mechanism; Fixed platform (1), one side of the fixed platform (1) is rotatably connected with the bottom support mechanism through the rotating shaft (2); Clamping mechanism, the clamping mechanism includes oppositely arranged fixed limiting clamping plate (13) and movable limiting clamping plate (15), the fixed limiting clamping plate (13) and the movable limiting clamping plate (15) are arranged on the fixed platform (1) respectively, the fixed platform (1) is provided with spacing adjusting assembly, the spacing adjusting assembly is connected with the movable limiting clamping plate (15) for driving the movable limiting clamping plate (15) to approach or away from the fixed limiting clamping plate (13); The turnover mechanism is arranged on the bottom support mechanism, and the turnover mechanism is connected with the fixed platform (1) for driving the fixed platform (1) to rotate around the rotating shaft (2).
2. The wafer cassette flipper machine of claim 1, wherein: The fixed limiting clamping plate (13) is located on one side of the top of the fixed platform (1), the spacing adjusting assembly includes a clamping cylinder (17) fixed to the bottom of the fixed platform (1), the piston rod of the clamping cylinder (17) is fixed to the bottom of the movable limiting clamping plate (15), and the movable limiting clamping plate (15) is located on the side of the fixed platform (1) away from the fixed limiting clamping plate (13).
3. The wafer cassette flipper machine of claim 1, wherein: Two sets of abutting components are arranged on the top of the fixed platform (1), the fixed limiting clamping plate (13) and the movable limiting clamping plate (15) are used for clamping the front and back of the wafer box (11), and the two sets of abutting components are used for limiting the left and right sides of the wafer box (11), the abutting component includes a plurality of abutting blocks (12), and the abutting block (12) is in contact with the side wall of the wafer box (11).
4. The wafer cassette flipper machine of claim 3, wherein: The abutting block (12) is inclined to the side wall of the wafer box (11), so that the abutting block (12) has a gap with the side wall of the wafer box (11) above the side wall, and is in contact with the side wall of the wafer box (11) below.
5. The wafer cassette flipper machine of claim 1, wherein: The bottom support mechanism includes a support frame (3), two support rods are fixed to the upper side of the support frame (3), the rotating shaft (2) is fixed to one of the support rods, and the fixed platform (1) is located above the two support rods.
6. The wafer cassette flipper machine of claim 5, wherein: The turnover mechanism includes a turnover cylinder (4), the cylinder body end of the turnover cylinder (4) is hinged to the support frame (3), the piston rod of the turnover cylinder (4) is hinged to the bottom of the fixed platform (1), the rotating shaft (2), the connection point of the turnover cylinder (4) and the support frame (3), and the connection point of the turnover cylinder (4) and the fixed platform (1) form a triangular structure, and the connection point of the turnover cylinder (4) and the fixed platform (1) is located between the rotating shaft (2) and the connection point of the turnover cylinder (4) and the support frame (3).
7. The wafer cassette flipper machine of claim 1, wherein: The movable limiting clamping plate (15) and the fixed limiting clamping plate (13) are respectively fixed with buffer plates (14) on the opposite sides.
8. The wafer cassette flipper machine of claim 3, wherein: The fixed limiting clamping plate (13) and the abutting block (12) are respectively fixed on the top of the fixed platform (1) through bolts, and long waist holes are formed in the fixed platform (1) for the bolts to pass through.