Piezoelectric actuator and one-dimensional, two-dimensional and three-dimensional piezoelectric deflecting mirrors

Abstract

The utility model provides a piezoelectric actuator and one-dimensional, two-dimensional and three-dimensional piezoelectric deflection mirrors. The piezoelectric driver comprises a substrate layer, an electrode and at least two piezoelectric driving units. The piezoelectric driving units are arranged on the same side of the substrate layer, and the piezoelectric driving units and the substrate layer are of an integrated structure, so that the connection strength between the piezoelectric driving units and the substrate layer is enhanced, and complex installation steps between the piezoelectric driving units and the substrate layer are reduced. Each piezoelectric driving unit is provided with a mounting surface, and the mounting surface is arranged at the movable end of the piezoelectric driving unit; the mounting surface is used for providing a reliable connecting point for the lens of the piezoelectric deflecting mirror, the mounting surface can ensure that the lens is kept stable after being mounted, and the lens can generate accurate deflection or displacement along with the lens when the piezoelectric driving unit does telescopic motion, so that an expected optical adjustment effect is realized. The electrode is electrically connected with the piezoelectric driving unit, and the piezoelectric driving unit can be controlled to stretch out and draw back by applying a proper voltage signal to the electrode.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of piezoelectric drivers, and more particularly relates to a piezoelectric driver and a one-dimensional, two-dimensional or three-dimensional piezoelectric deflection mirror. BACKGROUND

[0002] In the field of optical systems, piezoelectric deflection mirrors are widely used in laser scanning, optical communication, imaging technology and adaptive optical systems as a kind of key precision adjustment element. The core component of the piezoelectric deflection mirror, i.e. the piezoelectric driver, realizes a small mechanical displacement through the piezoelectric effect, so as to accurately control the angle change of the mirror and achieve high-precision adjustment of the direction of the light beam.

[0003] The traditional installation method of the piezoelectric driver often involves a complex positioning and fixing process. Since the piezoelectric driver itself is small in size and has a very high assembly precision requirement, any small installation error may cause a significant decline in the performance of the deflection mirror. CONTENT OF THE INVENTION

[0004] The purpose of the embodiments of the application is to provide a piezoelectric driver and a one-dimensional, two-dimensional or three-dimensional piezoelectric deflection mirror, so as to solve the technical problem of great difficulty in installation and combination of the piezoelectric driver in the prior art.

[0005] To achieve the above purpose, the technical scheme adopted by the application is:

[0006] The application provides a piezoelectric driver, which comprises:

[0007] a substrate layer;

[0008] at least two piezoelectric driving units, which are arranged on the same side of the substrate layer and are in an integrated structure with the substrate layer, the piezoelectric driving unit has a mounting surface, and the mounting surface is arranged at the movable end of the piezoelectric driving unit;

[0009] an electrode, which is electrically connected with the piezoelectric driving unit to drive the corresponding piezoelectric driving unit to stretch or contract.

[0010] As a further improvement of the above technical scheme:

[0011] Optionally, the number of the piezoelectric driving units is two, the two piezoelectric driving units are arranged on the substrate layer in a linear direction and are spaced apart from each other, and the electrode is connected to the opposite side surfaces of the piezoelectric driving units.

[0012] Optionally, the number of piezoelectric driving units is four, each of the piezoelectric driving units is arranged in a rectangular array and spaced from each other, and two piezoelectric driving units in each of the four piezoelectric driving units form a group, the connecting lines of the two piezoelectric driving units in one group are parallel to the connecting lines of the two piezoelectric driving units in another group; the electrode is connected to the lateral end surface of the piezoelectric driving unit facing the outside.

[0013] Optionally, the number of piezoelectric driving units is three, each of the piezoelectric driving units is arranged spaced from each other, and at most two of the piezoelectric driving units are arranged in the same linear direction; the electrode is connected to the lateral end surface of the piezoelectric driving unit facing the outside.

[0014] The application further provides a one-dimensional piezoelectric deflection mirror, comprising a mirror body and the piezoelectric driver, the mirror body is mounted on the mounting surface of the two piezoelectric driving units, and the piezoelectric driver is used to drive the mirror body to rotate around a deflection axis.

[0015] The application further provides a two-dimensional piezoelectric deflection mirror, comprising a mirror body and the piezoelectric driver, the mirror body is mounted on the mounting surface of the four piezoelectric driving units, and the piezoelectric driver is used to drive the mirror body to rotate around two perpendicular deflection axes.

[0016] The application further provides a three-dimensional piezoelectric deflection mirror, comprising a mirror body and the piezoelectric driver, the mirror body is mounted on the mounting surface of the three piezoelectric driving units, and the piezoelectric driver is used to drive the mirror body to rotate around two perpendicular deflection axes and move along the extension direction of the piezoelectric driving unit.

[0017] The piezoelectric driver and the one-dimensional, two-dimensional and three-dimensional piezoelectric deflection mirror provided by the application have the following beneficial effects:

[0018] The piezoelectric driver provided by the application comprises a substrate layer, an electrode and at least two piezoelectric driving units. The substrate layer serves as the base structure of the entire piezoelectric driver, each piezoelectric driving unit is arranged on the same side of the substrate layer, and the piezoelectric driving unit and the substrate layer are integrated, which not only enhances the connection strength between the two, but also reduces the complex installation steps between the two. Each piezoelectric driving unit has a mounting surface, which is arranged on the movable end of the piezoelectric driving unit; the mounting surface is used to provide a reliable connection point for the lens of the piezoelectric deflection mirror, and the mounting surface can ensure that the lens remains stable after installation and that the lens can produce accurate deflection or displacement when the piezoelectric driving unit performs extension and contraction movement, thereby achieving the expected optical adjustment effect. The electrode is electrically connected to the piezoelectric driving unit, and by applying an appropriate voltage signal to the electrode, the piezoelectric driving unit can be controlled to perform extension and contraction movement. The piezoelectric driver provided by the application has the advantages of high structural strength, easy to use and install, etc.

[0019] The one-dimensional, two-dimensional and three-dimensional piezoelectric deflection mirrors provided by the application have the advantages of the piezoelectric driver. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of these drawings.

[0021] Figure 1 A three-dimensional structural schematic view of a first piezoelectric driver provided by the application;

[0022] Figure 2 A three-dimensional structural schematic view of a second piezoelectric driver provided by the application;

[0023] Figure 3 A three-dimensional structural schematic view of a third piezoelectric driver provided by the application;

[0024] Figure 4 A three-dimensional structural schematic view of a green body of the second piezoelectric driver provided by the application.

[0025] In the drawings, various reference signs represent:

[0026] 1, base layer; 2, piezoelectric driving unit;

[0027] 21, mounting surface; 3, electrode. DETAILED DESCRIPTION

[0028] The embodiments of the application will be described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are intended to explain the application, and cannot be understood as a limitation of the application.

[0029] In the description of the application, it should be understood that the orientations or positional relationships indicated by the terms “center”, “longitudinal”, “transverse”, “length”, “width”, “thickness”, “upper”, “lower”, “front”, “rear”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, “outer”, “clockwise”, “counterclockwise” are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the application.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0031] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] Furthermore, the technical solutions of the various embodiments can be combined with each other, but only if they are based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of this utility model.

[0034] In the following description, suffixes such as "module," "part," "component," or "unit" are used only for the purpose of describing this utility model and have no specific meaning in themselves. Therefore, they can be used in combination.

[0035] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0036] like Figures 1 to 4 As shown, this application provides a piezoelectric actuator, including a substrate layer 1, an electrode 3, and at least two piezoelectric driving units 2.

[0037] The base layer 1 serves as a base structure of the entire piezoelectric driver, and each piezoelectric driving unit 2 is arranged on the same side of the base layer 1, and the piezoelectric driving unit 2 and the base layer 1 are integrated, which not only enhances the connection strength between the two, but also reduces the complex installation steps between the two.

[0038] Each piezoelectric driving unit 2 has a mounting surface 21 arranged at the movable end of the piezoelectric driving unit 2; the mounting surface 21 is used to provide a reliable connection point for other components (such as the lens of the piezoelectric deflection mirror), and the mounting surface 21 can ensure that the lens remains stable after installation, and when the piezoelectric driving unit 2 performs extension and contraction movement, the lens can produce accurate deflection or displacement, thereby achieving the expected optical adjustment effect.

[0039] The electrode 3 is electrically connected to the piezoelectric driving unit 2, and by applying a suitable voltage signal to the electrode 3, the piezoelectric driving unit 2 can be controlled to perform extension and contraction movement.

[0040] The piezoelectric driver of the present application has the advantages of high structural strength, easy to use and install, etc.

[0041] As shown in FIG. Figure 1 In one specific embodiment of the present application, the number of piezoelectric driving units 2 is two, and the two piezoelectric driving units 2 are arranged on the base layer 1 in a linear direction and spaced apart from each other, and the electrode 3 is connected to the opposite lateral end faces of the piezoelectric driving units 2, so as to facilitate assembly connection with the external cable.

[0042] Based on the piezoelectric driver with two piezoelectric driving units 2 in the above embodiment, the present application further provides a one-dimensional piezoelectric deflection mirror, which comprises a mirror body (not shown in the figure) and the piezoelectric driver in the above embodiment, and the mirror body is mounted on the mounting surface 21 of the two piezoelectric driving units (a, b), and the two piezoelectric driving units 2 are respectively located on both sides of the deflection axis θx, and by controlling the differential extension and contraction of the two piezoelectric driving units 2, the rotation of the mirror body around the deflection axis θx can be realized. The one-dimensional piezoelectric deflection mirror adjusts the light path in a certain range of line segment, and the length of the line segment depends on the maximum deflection angle of the piezoelectric deflection mirror and the distance between the piezoelectric deflection mirror and the next light receiving position.

[0043] As shown in FIG. Figure 2 In one specific embodiment of the present application, the number of piezoelectric driving units 2 is four, and each piezoelectric driving unit 2 is arranged in a rectangular array and spaced apart from each other; two of the four piezoelectric driving units 2 form a group, and the connecting line of the two piezoelectric driving units 2 in one group is parallel to the connecting line of the two piezoelectric driving units 2 in another group; and the electrode 3 is connected to the lateral end face of the piezoelectric driving unit 2 facing the outside, so as to facilitate assembly connection with the external cable.

[0044] Based on the piezoelectric driver with four piezoelectric driving units 2 in the above embodiment, the application further provides a two-dimensional piezoelectric deflection mirror, which comprises a mirror body (not shown in the figure) and the piezoelectric driver in the above embodiment, the mirror body is mounted on the mounting surface 21 of the four piezoelectric driving units 2, and the piezoelectric driver is used to drive the mirror body to rotate around two perpendicular deflection axes.

[0045] As shown in Figure 2 , the piezoelectric driving units (a, b) are the first group, the piezoelectric driving units (c, d) are the second group, the first group and the second group are respectively arranged on the two sides of the deflection axis θx, and the rotation of the mirror body around the deflection axis θx can be realized by respectively controlling the differential expansion and contraction of the two groups of piezoelectric driving units 2.

[0046] The piezoelectric driving units (a, c) are the third group, the piezoelectric driving units (b, d) are the fourth group, the third group and the fourth group are respectively arranged on the two sides of the deflection axis θy, and the rotation of the mirror body around the deflection axis θy can be realized by respectively controlling the differential expansion and contraction of the two groups of piezoelectric driving units 2.

[0047] The two-dimensional piezoelectric deflection mirror has an optical path adjustment range of a circular surface, and the size of the circular surface depends on the maximum deflection angle of the piezoelectric deflection mirror and the distance between the piezoelectric deflection mirror and the next light receiving position.

[0048] As shown in Figure 3 , in a specific embodiment of the application, the number of piezoelectric driving units 2 is three, each piezoelectric driving unit 2 is arranged at intervals, and at most only two piezoelectric driving units 2 are arranged in the same linear direction, that is, the three piezoelectric driving units 2 are respectively located at the three included angle positions of the triangle. The electrode 3 is connected to the lateral end face of the piezoelectric driving unit 2 facing the outside, so as to be assembled and connected with the external cable.

[0049] Based on the piezoelectric driver with three piezoelectric driving units 2 in the above embodiment, the application further provides a three-dimensional piezoelectric deflection mirror, which comprises a mirror body and the piezoelectric driver in the above embodiment, the mirror body is mounted on the mounting surface 21 of the three piezoelectric driving units 2, and the piezoelectric driver is used to drive the mirror body to rotate around two perpendicular deflection axes and move along the expansion and contraction direction of the piezoelectric driving unit 2.

[0050] As shown in Figure 3 , the piezoelectric driving unit (b) is located on the axis of the deflection axis θx, the piezoelectric driving units (a, c) are respectively located on the two sides of the deflection axis θx, and the rotation of the mirror body around the deflection axis θx can be realized by respectively controlling the differential expansion and contraction of the piezoelectric driving units (a, c).

[0051] Similarly, piezoelectric driving unit (b) is located on one side of the deflection axis θy, piezoelectric driving units (a, c) are located on the other side of the deflection axis θy, and by controlling the differential expansion of piezoelectric driving units (a, b, c) respectively, the rotation of the mirror body around the deflection axis θy can be realized.

[0052] In addition, by controlling the simultaneous expansion and contraction of piezoelectric driving units (a, b, c), the front and back movement of the mirror body along θz can be realized. The three-dimensional piezoelectric deflection mirror can form a conical body in the light path adjustment range, and the area size of the circular cross section of the conical body and the height of the conical body depend on the deflection angle of the piezoelectric deflection mirror, the linear motion range and the distance between the piezoelectric deflection mirror and the next light receiving position.

[0053] Taking the piezoelectric driver with four piezoelectric driving units 2 as an example, the manufacturing method of the piezoelectric driver is as follows:

[0054] First step, slurry casting: select piezoelectric ceramic powder, and cast according to a certain formula and process condition to obtain a green ceramic tape with a thickness of 20-80 μm.

[0055] Second step, printing and laminating: use a printing machine to print the inner electrode patterns on the green ceramic tape after casting and punching using the inner electrode printing screen. Since the product has a interdigital inner electrode structure, the positive and negative electrodes need to be drawn out from the opposite sides of the product, so two kinds of inner electrode patterns need to be printed respectively. The interval of the inner electrode cutting line is 3 mm. In the laminating machine, the two kinds of printed inner electrodes and the blank green ceramic tape are alternately laminated for 40-200 layers according to the set laminating program, and the bottom of the block is all blank green ceramic tape. The green body is formed by isostatic pressing process, and the total thickness of the green body is about 1-5 mm, and the thickness of the pure ceramic green body at the bottom is about 0.6-2.5 mm.

[0056] Third step, cutting: cut the block into individual green bodies according to the cutting line, and the size of the green body is about 3 mm*3 mm.

[0057] Fourth step, glue removal and sintering: remove the glue from the green body in the glue removal furnace, and then place it in the sintering furnace. The inner electrode and the piezoelectric ceramic are matched and co-fired at high temperature to form a ceramic block. The thickness of the product after sintering is about 0.8-4 mm.

[0058] Fifth step, grinding: grind the sintered ceramic block to the appropriate size, for example 2.5 mm*2.5 mm, using a double-sided grinding machine to ensure the flatness of the product surface.

[0059] Sixth step, groove processing: use a precision carving machine to process the piezoelectric driver in zones, and process a 0.5 mm wide cross-shaped groove in the center of the entire product, thereby forming four piezoelectric driving units 2, and leaving a 0.5-2 mm pure ceramic base.

[0060] Step 7: coating end electrode: coating the outer side end face of each partitioned piezoelectric driving unit 2 with an end electrode by a screen printing process, and performing a silver firing process to obtain a stable end electrode.

[0061] Step 8: welding lead wire: alternately welding positive and negative lead wires at both ends of the electrode face of each driving partition of the piezoelectric driver after coating the end electrode;

[0062] Step 9: polarization: placing the piezoelectric driver after welding the lead wire in silicon oil to perform polarization.

[0063] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A piezoelectric actuator, characterized by, The utility model relates to a piezoelectric driver and a mirror device, and relates to the technical field of piezoelectric driver and mirror device. The utility model relates to a piezoelectric driver and a mirror device, and relates to the technical field of piezoelectric driver and mirror device. The utility model relates to a piezoelectric driver and a mirror device, and relates to the technical field of piezoelectric driver and mirror device. The utility model relates to a piezoelectric driver and a mirror device, and relates to the technical field of piezoelectric driver and mirror device.

2. The piezoelectric actuator of claim 1, wherein, The utility model relates to a piezoelectric driver and a mirror device, and relates to the technical field of piezoelectric driver and mirror device.

3. The piezoelectric actuator of claim 1, wherein, The utility model relates to a piezoelectric driver and a mirror device, and relates to the technical field of piezoelectric driver and mirror device.

4. The piezoelectric actuator of claim 1, wherein, The utility model relates to a piezoelectric driver and a mirror device, and relates to the technical field of piezoelectric driver and mirror device.

5. A one-dimensional piezoelectric deflection mirror, characterized by ​ 6. A two-dimensional piezoelectric deflection mirror characterized by, ​ 7. A three-dimensional piezoelectric deflection mirror characterized by, ​

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