Water retaining cover structure and grinding equipment

Abstract

The utility model discloses a water retaining cover structure and grinding equipment, the water retaining cover structure is applied to the grinding equipment, the grinding equipment comprises a grinding head, a grinding head connecting flange, a driving mechanism, a driving mechanism main shaft and a clamp, and the water retaining cover structure comprises a first water retaining ring and a second water retaining ring, the fixing assembly is detachably mounted on a driving mechanism of the grinding equipment; the second water retaining ring is connected with the lower end of the first water retaining ring, the first water retaining ring and the second water retaining ring are located on the outer sides of the driving mechanism main shaft and the clamp, and the first water retaining ring and the second water retaining ring are both annular. The annular first water retaining ring and the annular second water retaining ring are arranged on the outer side of the driving mechanism main shaft and the outer side of the clamp to prevent grinding liquid or cleaning liquid from permeating into the driving mechanism main shaft and the connecting position of the grinding head connecting flange and the driving mechanism main shaft, so that the rusting risk of grinding equipment is reduced, and the grinding effect is guaranteed; and the product quality is guaranteed.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically to a water shield structure and grinding equipment. Background Technology

[0002] In the grinding process of semiconductor manufacturing, when moisturizing the grinding head or polishing head of the grinding equipment, the cleaning solution (such as deionized water) used to moisturize the grinding head can splash into the connection between the grinding head flange assembly and the main shaft of the grinding head drive mechanism. It can also seep into the connection through gaps, leaving liquid residue under the main shaft of the drive mechanism and on the top of the grinding head. This poses a risk of rusting of related components, ultimately affecting the grinding effect and reducing product quality. Utility Model Content

[0003] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0004] To address the existing problems, this application provides a water-blocking cover structure for use in grinding equipment. The grinding equipment includes a grinding head, a grinding head connecting flange, a drive mechanism, a drive mechanism spindle, and a clamp located outside the grinding head connecting flange and the drive mechanism spindle. The water-blocking cover structure comprises:

[0005] The first water-blocking ring has a fixing component at its top, which is detachably mounted on the drive mechanism of the grinding equipment.

[0006] The second water-blocking ring is connected to the lower end of the first water-blocking ring. The first and second water-blocking rings are located on the outside of the main shaft of the drive mechanism and the clamp. Both the first and second water-blocking rings are annular.

[0007] In one example, the diameters of both the first and second water-retaining rings are smaller than the diameter of the grinding head, and there is a gap between the bottom end of the second water-retaining ring and the top surface of the grinding head.

[0008] In one example, the second water-blocking ring is located inside the first water-blocking ring, and the top of the second water-blocking ring is connected to the inner wall of the first water-blocking ring.

[0009] In one example, the second water-blocking ring is made of a flexible material, and the bottom end of the second water-blocking ring can be folded upward and fitted onto the outer periphery of the first water-blocking ring. The second water-blocking ring is configured such that the bottom end of the second water-blocking ring can move upward relative to the first water-blocking ring.

[0010] In one example, the inner wall of the first water-blocking ring is provided with a groove that spirals upward from the bottom of the first water-blocking ring, and the outer wall of the second water-blocking ring is provided with a protrusion that mates with the groove. The second water-blocking ring can rotate relative to the first water-blocking ring, thereby causing the protrusion to move in the groove, so that the second water-blocking ring moves vertically relative to the first water-blocking ring.

[0011] In one instance, the first and / or second water-retaining rings are made of polytetrafluoroethylene (PTFE).

[0012] In one instance, the second water-retaining ring was made of silicone.

[0013] In one example, the height of the water shield structure ranges from 85mm to 90mm.

[0014] In one example, the fixing component includes a fixing ring and a retainer disposed on the fixing ring. The fixing ring has a through hole through which the main shaft of the drive mechanism passes, and the retainer is used to connect to the drive mechanism.

[0015] This application also provides a grinding apparatus, which includes a grinding head, a grinding head connecting flange, a drive mechanism, a drive mechanism spindle, and a clamp located outside the grinding head connecting flange and the drive mechanism spindle, as well as the aforementioned water baffle structure.

[0016] The water baffle structure and grinding equipment of this application embodiment, by setting a first water baffle ring and a second water baffle ring connected to the outside of the drive mechanism spindle and the clamp, and the first water baffle ring and the second water baffle ring are annular to surround the drive mechanism spindle and the clamp, can prevent the grinding liquid or cleaning liquid from seeping into the interior of the drive mechanism spindle and the connection between the grinding head connecting flange and the drive mechanism spindle when the grinding equipment is in working or cleaning state, thereby reducing the risk of rusting of the grinding equipment, ensuring the grinding effect, and thus ensuring product quality. At the same time, the first water baffle ring can be detachably installed on the drive mechanism of the grinding equipment, which is convenient for operators to switch between daily grinding operations, grinding equipment cleaning operations and grinding equipment maintenance. Attached Figure Description

[0017] The following drawings, which are incorporated herein by reference and are used to understand this application, illustrate embodiments of the invention and their descriptions to explain the principles of the invention.

[0018] In the attached image:

[0019] Figure 1 This diagram illustrates the overall structure of the connection between the grinding head and the drive mechanism in a prior art grinding device.

[0020] Figure 2This application shows a schematic diagram of the structure of a water-blocking cover and a grinding device according to a specific embodiment;

[0021] Figure 3 This paper shows a schematic diagram of the fixing component in a water-blocking cover structure according to a specific embodiment of the present application;

[0022] Figure 4 This paper shows a cross-sectional schematic diagram of a water-blocking cover structure according to a specific embodiment of the present application in the working state or cleaning state of the grinding equipment;

[0023] Figure 5 This paper shows a cross-sectional schematic diagram of a water-blocking cover structure according to a specific embodiment of the present application during the maintenance of a grinding equipment;

[0024] Figure 6 This paper shows a schematic diagram of the structure of the first water-blocking ring of a water-blocking cover structure according to a specific embodiment of the present application;

[0025] Figure 7 This invention provides a schematic diagram of the structure of the second water-blocking ring of a water-blocking cover structure according to a specific embodiment of the present application.

[0026] Figure 8 It shows the use of Figure 6 and Figure 7 The diagram shows a cross-sectional view of the water-blocking cover structure during the maintenance of the grinding equipment, with the first and second water-blocking rings shown, and a partial enlarged view of the second water-blocking ring at the protrusion.

[0027] In the attached image:

[0028] 10 grinding heads;

[0029] 20 Grinding head connection flange;

[0030] 30 drive mechanism;

[0031] 40 drive mechanism spindle;

[0032] 50 clamps;

[0033] 60 First water-blocking ring;

[0034] 601 Fixing Component;

[0035] 6011 retaining ring;

[0036] 6012 Fixture;

[0037] 602 groove;

[0038] 70 Second water-blocking ring;

[0039] 701 protrusion. Detailed Implementation

[0040] The present application will now be described more fully with reference to the accompanying drawings, in which embodiments of the present application are illustrated. However, the present application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of the present application to those skilled in the art. In the drawings, for clarity, the dimensions and relative dimensions of layers and regions may be exaggerated. The same reference numerals denote the same elements throughout.

[0041] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this application, the first element, component, area, layer, or portion discussed below may be referred to as the second element, component, area, layer, or portion.

[0042] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0043] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. When used herein, the singular forms “a,” “an,” and “ / the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0044] Embodiments of the application are described herein with reference to cross-sectional views illustrating ideal embodiments (and intermediate structures). Thus, variations from the shapes shown can be anticipated due to, for example, manufacturing techniques and / or tolerances. Therefore, embodiments of the application should not be limited to the specific shapes of the regions shown herein, but include shape deviations due to, for example, manufacturing processes. For example, implantation regions shown as rectangular typically have rounded or curved features at their edges and / or implantation concentration gradients, rather than a binary change from implantation regions to non-implantation regions. Similarly, buried regions formed by implantation can result in some implantation in the region between the buried region and the surface traversed during implantation. Therefore, the regions shown in the figures are substantially schematic, and their shapes are not intended to show the actual shapes of the regions of the device and are not intended to limit the scope of the application.

[0045] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art. It will also be understood that terms as defined in commonly used dictionaries shall be interpreted as having a meaning consistent with their meaning in the relevant field and / or the context of this specification, and not as in an ideal or overly formal sense, unless expressly defined herein.

[0046] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0047] like Figure 1The diagram shows the overall structure of a grinding device connecting a grinding head and a drive mechanism. The device includes a grinding head 10, a grinding head connecting flange 20, a drive mechanism spindle 40, a drive mechanism 30, and a clamp 50 that secures the drive mechanism spindle to the grinding head connecting flange 20, preventing the grinding head from falling off during operation. The grinding head connecting flange 20 connects the grinding head 10 and the drive mechanism spindle 40. It has multiple pores, with sealing rings embedded inside to prevent water ingress. The grinding head connecting flange also includes an air film assembly, which is used to fix and seal a multi-zone flexible air film. This assembly is in direct contact with the wafer and maintains a consistent grinding rate at different radii on the wafer by applying different loads to the multiple pores.

[0048] When moisturizing the grinding head of the grinding equipment, the cleaning solution (such as deionized water) used to moisturize the grinding head may splash onto the connection between the grinding head flange assembly and the main shaft of the grinding head drive mechanism, and seep into the connection through gaps, leaving liquid residue on the top of the grinding head. The residual liquid may seep into the air passage of the pores, which may result in the risk that the pore pressure on the wafer surface is inconsistent with expectations, thus affecting the grinding effect.

[0049] Because the water used to moisturize the grinding head seeps into the connection through the gaps, if the area below the drive mechanism spindle is in contact with water for a long time, there is a risk of rust on the surface of the drive mechanism spindle. In addition, moisture can spread to the drive mechanism above the drive mechanism spindle through the gaps, and the internal hardware of the drive mechanism is also at risk of rusting. The overflow of rusty water will affect the chamber environment of the machine, causing abnormal particles, which will cause defects on the wafer surface. In severe cases, it may cause the wafer to be scrapped, seriously affecting product quality.

[0050] Therefore, in view of the aforementioned technical problems, this application proposes a water-blocking cover structure and a grinding device, which is applied to a grinding device. The grinding device includes a grinding head, a grinding head connecting flange, a drive mechanism, a drive mechanism spindle, and a clamp located outside the grinding head connecting flange and the drive mechanism spindle. The water-blocking cover structure includes:

[0051] The first water-blocking ring has a fixing component at its top, which is detachably mounted on the drive mechanism of the grinding equipment.

[0052] The second water-blocking ring is connected to the lower end of the first water-blocking ring. The first and second water-blocking rings are located on the outside of the main shaft of the drive mechanism and the clamp. Both the first and second water-blocking rings are annular.

[0053] The water-blocking cover structure and grinding equipment of this application embodiment, by setting a first water-blocking ring and a second water-blocking ring connected to the outside of the drive mechanism spindle and the clamp, and both the first water-blocking ring and the second water-blocking ring are annular to surround the drive mechanism spindle and the clamp, can prevent the grinding liquid or cleaning liquid from seeping into the interior of the drive mechanism spindle and the connection between the grinding head connecting flange and the drive mechanism spindle when the grinding equipment is in working or cleaning state, thereby reducing the risk of rusting of the grinding equipment, ensuring the grinding effect, and thus ensuring product quality. At the same time, the first water-blocking ring can be detachably installed on the drive mechanism of the grinding equipment, which is convenient for operators to switch between daily grinding operations, grinding equipment cleaning operations and grinding equipment maintenance.

[0054] To fully understand this application, a structure will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0055] Below, for reference Figures 2 to 8 The water-blocking cover structure and grinding equipment of this application are described in detail.

[0056] like Figure 2 As shown, one embodiment of this application provides a water-blocking cover structure applied to a grinding equipment. The grinding equipment includes a grinding head 10, a grinding head connecting flange 20, a drive mechanism spindle 40, a drive mechanism 30, and a clamp 50 located outside the grinding head connecting flange and the drive mechanism spindle. The water-blocking cover structure includes a first water-blocking ring 60 and a second water-blocking ring 70 connected to the lower end of the first water-blocking ring 60. Both the first and second water-blocking rings 60 are annular. A fixing component 601 is provided at the top of the first water-blocking ring 60, and the fixing component 601 is detachably mounted on the drive mechanism of the grinding equipment, thereby allowing the first water-blocking ring 60 to be detachably mounted on the drive mechanism 30 of the grinding equipment, for example, mounted on the drive mechanism cover plate. When the grinding equipment is in working or cleaning state, the first water-blocking ring 60 and the second water-blocking ring 70 are located outside the drive mechanism spindle 40 and the clamp 50 to prevent grinding fluid or cleaning fluid from seeping into the interior of the drive mechanism spindle 40 and the connection between the grinding head connecting flange 20 and the drive mechanism spindle 40.

[0057] In some examples, such as Figure 3 The fixing assembly 601 shown includes a fixing ring 6011 and a retainer 6012 disposed on the fixing ring. The fixing ring 6011 has a through hole, for example, the through hole can be located in the middle of the fixing ring. The size of the through hole matches the size of the drive mechanism spindle. The drive mechanism spindle passes through the through hole. The retainer 6012 is used to connect with the drive mechanism 30. In a specific example, continuing as... Figure 3The fixture shown consists of eight evenly spaced recessed screws on the fixing ring 6011. These screws are fixed to the cover plate of the drive mechanism 30, thereby connecting the fixture 6012 to the drive mechanism 30. Since grinding fluid is used in the grinding chamber to assist grinding, and the grinding fluid is often acidic or alkaline, the material of the first water-retaining ring is preferably acid- and alkali-resistant and corrosion-resistant. In some examples, the material of the first water-retaining ring includes, but is not limited to, polytetrafluoroethylene (PTFE).

[0058] In some examples, the diameters of both the first and second water-blocking rings are smaller than the diameter of the grinding head, ensuring that the outer edge of the water-blocking structure does not extend beyond the grinding head. If the outer edge of the water-blocking structure extends beyond the grinding head, cleaning fluid may splash from the bottom of the water-blocking structure into its interior, affecting the water-blocking effect. A gap exists between the bottom end of the second water-blocking ring and the top surface of the grinding head to prevent contact between the second water-blocking ring and the top surface of the grinding head, thus avoiding the risk of scratches, wear, or peeling on the top surface of the grinding head. In a specific embodiment, when the grinding equipment is in working or cleaning mode, the distance between the bottom of the drive mechanism cover plate and the top of the grinding head is 92mm, and the distance from the bottom of the drive mechanism cover plate to the top of the clamp is 85mm. Theoretically, the height of the water-blocking structure can be selected from 85mm to 92mm. However, when the height of the water-blocking structure is 92mm, there is a risk of defects caused by friction between the water-blocking structure and the top of the grinding head. Therefore, a gap should exist between the bottom end of the second water-blocking ring and the top surface of the grinding head to prevent the second water-blocking ring from contacting the top surface of the grinding head. To prevent friction between the bottom of the water-blocking shield structure and the top of the grinding head, the dimensions of the water-blocking shield structure are limited based on the distance from the bottom of the drive mechanism's cover plate to the top of the grinding head and the distance from the bottom of the drive mechanism's cover plate to the bottom of the clamp. For example, the height of the water-blocking shield structure ranges from 85mm to 90mm, such as 85mm, 86mm, or 90mm.

[0059] In some examples, such as Figure 4 As shown, the second water-blocking ring 70 is located inside the first water-blocking ring 60, and the top of the second water-blocking ring 70 is connected to the inner wall of the first water-blocking ring 60. That is, the diameter of the first water-blocking ring 60 is larger than the diameter of the second water-blocking ring 70. The second water-blocking ring 70 is configured such that its bottom end can move upwards relative to the first water-blocking ring 60. When the grinding equipment needs maintenance, the bottom end of the second water-blocking ring 70 moves upwards relative to the first water-blocking ring 60 until the clamp 50 is exposed, thus facilitating maintenance of the grinding equipment by the operator. The first water-blocking ring 60 and the second water-blocking ring 70 are connected by a connecting assembly. In one specific embodiment, as shown... Figure 4 and Figure 5As shown, a support plate is provided at the lower end of the inner wall of the first water-blocking ring 60, and a connector (such as a protrusion) is provided on the outer wall of the top of the second water-blocking ring 70. The connector of the second water-blocking ring 70 is placed on the support plate of the first water-blocking ring 60, thereby connecting the first water-blocking ring 60 and the second water-blocking ring 70 into a whole to form a water-blocking cover structure.

[0060] In some examples, such as Figure 5 As shown, the second water-retaining ring 70 is made of a flexible material. During maintenance of the grinding equipment, the bottom of the second water-retaining ring 70 can be folded upwards and fitted around the outer periphery of the first water-retaining ring 60, thus exposing the clamp 50. The second water-retaining ring 70 is made of a flexible material, that is, a relatively soft material, such as silicone. This reduces the risk of wafer defects caused by friction between the bottom of the second water-retaining ring 70 and the top of the grinding head 10. Furthermore, during maintenance, because the material of the second water-retaining ring 70 is relatively soft, the operator can fold it upwards and fit it around the outer periphery of the first water-retaining ring 60. When the grinding equipment is in operation or cleaning mode, the clamp 50 rotates with the grinding head 10. When the second water-retaining ring 70 is made of a relatively soft material, to prevent the second water-retaining ring 70 from being rolled away by the clamp 50, the material of the first water-retaining ring 60 must have a certain degree of hardness to maintain the overall shape of the second water-retaining ring 70.

[0061] The second water-retaining ring can also be made of a harder material. In some examples, the material of the second water-retaining ring includes, but is not limited to, polytetrafluoroethylene (PTFE). If a harder material is chosen, the second water-retaining ring cannot be folded or rolled up when the grinding equipment is being repaired. In this case, the first and second water-retaining rings need to be optimized.

[0062] In some examples, such as Figure 6 As shown, the inner wall of the first water-blocking ring 60 is provided with a groove 602, which extends spirally upward from the bottom of the first water-blocking ring 60, as... Figure 7 As shown, the outer wall of the second water-retaining ring 70 is provided with a protrusion 701 that mates with the groove 602. When the grinding equipment needs maintenance, such as... Figure 8As shown, the second water-blocking ring 70 can rotate relative to the first water-blocking ring 60, causing the protrusion 701 to move within the groove 602. This allows the second water-blocking ring 70 to move vertically relative to the first water-blocking ring 60 to the top of the groove 602, where the protrusion 701 engages with the groove 602, exposing the clamp 50 and facilitating maintenance by personnel. During grinding operations, the protrusion on the second water-blocking ring 70 engages with the bottom of the groove 602 on the first water-blocking ring 60, shielding the clamp 50 and preventing grinding fluid or cleaning fluid from seeping into the drive mechanism spindle 40 and the connection between the grinding head connecting flange 20 and the drive mechanism spindle 40. This prevents rusting and allows grinding fluid or cleaning fluid to seep into the air passage, affecting the grinding effect and consequently product quality. For example, the groove can be multiple, with each groove corresponding to two protrusions.

[0063] When the second water-retaining ring is made of a rigid material, there is a risk of defects arising from friction with the top of the grinding head. Therefore, precise control of the manufacturing dimensions is required. In a specific embodiment, such as... Figure 6 and Figure 8 As shown, the first water-blocking ring 60 has a wall thickness of about 10mm, the groove 602 has a depth of about 5mm, the second water-blocking ring 70 has a wall thickness of about 10mm, and symmetrical protrusions with dimensions of 5mm*5mm*5mm are provided on the outer wall of the second water-blocking ring 70. The inner wall of the first water-blocking ring 60 fits into the outer wall of the second water-blocking ring 70 to prevent the second water-blocking ring 70 from slipping off.

[0064] This application also provides a grinding apparatus, which includes a grinding head, a grinding head connecting flange, a drive mechanism, a drive mechanism spindle, and a clamp located outside the grinding head connecting flange and the drive mechanism spindle, as well as the aforementioned water baffle structure.

[0065] This concludes the introduction to the water shield structure and grinding equipment of this application. The complete water shield structure and grinding equipment may also include other components, which will not be described in detail here.

[0066] In summary, according to the water baffle structure and grinding equipment of this application, by setting a first water baffle ring and a second water baffle ring connected to each other on the outside of the main shaft and the fixture, and both the first water baffle ring and the second water baffle ring are annular to surround the main shaft of the drive mechanism and the fixture, when the grinding equipment is in working or cleaning state, the first water baffle ring and the second water baffle ring can prevent the grinding fluid or cleaning fluid from seeping into the interior of the main shaft of the drive mechanism and the interior of the connection between the grinding head connecting flange and the main shaft of the drive mechanism, thereby reducing the risk of rusting of the grinding equipment, ensuring the grinding effect, and thus ensuring product quality. At the same time, the first water baffle ring can be detachably installed on the drive mechanism of the grinding equipment, and the second water baffle ring is made of soft material or the first water baffle ring and the second water baffle ring are fitted with grooves and protrusions, which makes it convenient for operators to switch between daily grinding operations, grinding operations, and grinding equipment maintenance.

[0067] Although several embodiments have been described herein, it should be understood that many other modifications and embodiments will arise in the mind of those skilled in the art, all of which will fall within the spirit and scope of the concept disclosed herein. More specifically, various modifications and changes may be made in terms of the arrangement and / or components of the subject matter within the scope of this disclosure, the drawings, and the appended claims. In addition to modifications and changes in the components and / or arrangement, the use of alternative methods will also be obvious to those skilled in the art.

Claims

1. A water-blocking cover structure, characterized in that, Applied to grinding equipment, the grinding equipment includes a grinding head, a grinding head connecting flange, a drive mechanism, a drive mechanism spindle, and a clamp located outside the grinding head connecting flange and the drive mechanism spindle. The water-blocking cover structure includes: A first water-blocking ring, the top of which is provided with a fixing component, the fixing component being detachably mounted on the drive mechanism of the grinding equipment; The second water-blocking ring is connected to the lower end of the first water-blocking ring. The first water-blocking ring and the second water-blocking ring are located outside the main shaft of the drive mechanism and the clamp. Both the first water-blocking ring and the second water-blocking ring are annular.

2. The water-blocking cover structure as described in claim 1, characterized in that, The diameters of both the first and second water-blocking rings are smaller than the diameter of the grinding head, and there is a gap between the bottom end of the second water-blocking ring and the top surface of the grinding head.

3. The water-blocking cover structure as described in claim 1, characterized in that, The top of the second water-blocking ring is located inside the first water-blocking ring, and the top of the second water-blocking ring is connected to the inner wall of the first water-blocking ring. The second water-blocking ring is configured such that the bottom of the second water-blocking ring can move upward relative to the first water-blocking ring.

4. The water-blocking cover structure as described in claim 3, characterized in that, The second water-blocking ring is made of a flexible material, and the bottom end of the second water-blocking ring can be folded upward and fitted onto the outer periphery of the first water-blocking ring.

5. The water-blocking cover structure as described in claim 3, characterized in that, The inner wall of the first water-blocking ring is provided with a groove, which extends spirally upward from the bottom of the first water-blocking ring. The outer wall of the second water-blocking ring is provided with a protrusion that cooperates with the groove. The second water-blocking ring can rotate relative to the first water-blocking ring and drive the protrusion to move in the groove, so that the second water-blocking ring moves vertically relative to the first water-blocking ring.

6. The water-blocking cover structure as described in claim 1, characterized in that, The material of the first water-retaining ring and / or the second water-retaining ring includes polytetrafluoroethylene.

7. The water-blocking cover structure as described in claim 4, characterized in that, The second water-retaining ring is made of silicone.

8. The water-blocking cover structure as described in claim 1, characterized in that, The height of the water-blocking cover structure ranges from 85mm to 90mm.

9. The water-blocking cover structure as described in claim 1, characterized in that, The fixing component includes a fixing ring and a retainer disposed on the fixing ring. The fixing ring has a through hole through which the main shaft of the drive mechanism passes. The retainer is used to connect with the drive mechanism.

10. A grinding apparatus, comprising a grinding head, a grinding head connecting flange, a drive mechanism, a drive mechanism spindle, and a clamp located outside the grinding head connecting flange and the drive mechanism spindle, characterized in that, It also includes the water-blocking cover structure as described in any one of claims 1-9.

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