Detachable electrode and single crystal furnace
By designing detachable electrodes, the problem of scrapping caused by electrode end face damage was solved, enabling flexible electrode replacement and recycling of scrap materials, thereby reducing the production cost and resource waste of monocrystalline silicon.
Patent Information
- Application Number
- CN202423079597.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-12
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-12-12
AI Technical Summary
In existing technologies, electrodes are prone to end-face damage during use, resulting in a high scrap rate, which increases the production cost of monocrystalline silicon and wastes resources.
Design a detachable electrode, including a main body and detachably connected first and second ends, which allows for flexible replacement of the electrode ends when the end face is damaged, and the components can be remade using scrap electrode materials to form a new electrode.
The design of detachable electrodes reduces the scrap rate of electrodes, lowers the production cost of monocrystalline silicon, and enables the recycling of scrapped electrode materials, thus reducing resource waste.
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Figure CN223620540U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of single-crystal silicon preparation technology, and in particular to a detachable electrode and a single-crystal furnace. Background Technology
[0002] The electrode is an important component of the single crystal furnace. It is located at the bottom of the single crystal furnace. One end of the electrode is connected to the heater inside the single crystal furnace, and the other end is connected to the copper electrode inside the single crystal furnace. The electrode has good thermal conductivity and electrical conductivity. It can form a stable current channel during the preparation of single crystal silicon, providing the required electrical energy to the heater. In turn, the heater works to generate heat to melt the silicon material and promote single crystal growth.
[0003] However, electrodes are prone to end-face damage during use. Damaged electrodes cannot be used and usually have to be scrapped, resulting in high production costs and significant resource waste for monocrystalline silicon. Utility Model Content
[0004] In view of this, this application provides a detachable electrode and a single crystal furnace to at least solve the problem of high electrode scrap rate in the prior art, which leads to high production cost and significant resource waste in single crystal silicon.
[0005] To achieve the above objectives, the technical solution of this application is implemented as follows:
[0006] This application provides a detachable electrode, including a main body, a first end, and a second end; the first end and the second end are disposed at both ends of the main body, and the first end, the second end, and the main body are coaxially arranged, and at least one of the first end and the second end is detachably connected to the main body; the first end is adapted to be connected to a heater, and the second end is adapted to be connected to an input electrode.
[0007] This application provides a single crystal furnace, including a heater, an input electrode, and a detachable electrode as described above, wherein a first end of the detachable electrode is connected to the heater, and a second end of the detachable electrode is connected to the input electrode.
[0008] Compared with the prior art, the detachable electrode and single crystal furnace described in this application have the following advantages:
[0009] In the detachable electrode of this application, at least one of the first end and the second end is detachably connected to the main body. If the end face of the first or second end is damaged, the electrode end can be flexibly replaced, and the resulting new electrode can continue to be used. This avoids scrapping the entire electrode, helps control the production cost of monocrystalline silicon, and reduces resource waste. Furthermore, the fabrication of the detachable electrode can utilize scrapped electrodes as raw materials to re-fabricate individual components of the main body, the first end, or the second end, and then assemble them into a finished electrode. This achieves the recycling of scrapped electrode materials, further contributing to cost reduction and efficiency improvement.
[0010] The single crystal furnace of this application has the same or similar advantages as the prior art and the aforementioned detachable electrodes, which will not be elaborated here. Attached Figure Description
[0011] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments and descriptions of this application are used to explain this application and do not constitute an undue limitation of this application. In the drawings:
[0012] Figure 1 This is a side view of a detachable electrode according to an embodiment of this application;
[0013] Figure 2 yes Figure 1 A schematic diagram of a cross-section cut along the AA direction;
[0014] Figure 3 This is a cross-sectional view of a detachable electrode with its first end removed, according to an embodiment of this application.
[0015] Figure 4 This is a cross-sectional view of a first end portion in an embodiment of this application;
[0016] Figure 5 This is a cross-sectional view of a detachable electrode with its second end removed, according to an embodiment of this application.
[0017] Figure 6 This is a cross-sectional view of a second end portion in an embodiment of this application;
[0018] Figure 7 This is a cross-sectional view of a main body portion in an embodiment of this application;
[0019] Figure 8 This is a cross-sectional view of another first end portion in an embodiment of this application;
[0020] Figure 9 This is a cross-sectional view of another second end in an embodiment of this application.
[0021] Explanation of reference numerals in the attached figures:
[0022] 1-Main body, 2-First end, 21-First mounting hole, 22-End cap, 3-Second end, 31-Second mounting hole, 32-Assembly end, 4-Exhaust hole, 5-Chip removal hole, 61-First connecting structure, 62-Second connecting structure. Detailed Implementation
[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0024] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.
[0025] The terms "comprising," "including," or any other variations thereof used in the specification and claims of this application are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.
[0026] The following detailed description of a detachable electrode and single crystal furnace provided in this application is illustrated with specific embodiments.
[0027] Figure 1 A side view of a detachable electrode is shown. Figure 2 It shows Figure 1 A schematic diagram of a cross-section taken along the AA direction, see reference. Figure 1 and Figure 2The detachable electrode provided in this application includes a main body 1, a first end 2 and a second end 3; the first end 2 and the second end 3 are disposed at both ends of the main body 1, and the first end 2, the second end 3 and the main body 1 are coaxially arranged, and at least one of the first end 2 and the second end 3 is detachably connected to the main body 1; the first end 2 is adapted to be connected to a heater, and the second end 3 is adapted to be connected to an input electrode.
[0028] Specifically, the detachable electrode in this application mainly refers to the graphite electrode. As the most commonly used electrode in single crystal furnaces, the graphite electrode has good electrical conductivity, which can efficiently conduct current in the thermal field, form a stable current channel, reduce energy loss, and has good high temperature resistance, which can maintain a stable structure in the high temperature thermal field and is not prone to softening, deformation, melting, etc. It also has good chemical stability, which is not prone to chemical reaction with other substances in the thermal field, and has high mechanical strength, which can withstand various stresses in the thermal field, such as the stress generated by thermal expansion, and is not prone to cracking or damage.
[0029] The electrode includes a main body 1, a first end 2, and a second end 3. The first end 2 and the second end 3 are located at both ends of the main body 1 along its axial direction. The axial direction of the main body 1 refers to the length direction of the main body 1, that is, the direction in which the largest part of the main body 1 is located. The main body 1 can be cylindrical, square prism, or other prismatic structures, depending on actual needs, and this embodiment does not impose any restrictions on this. The first end 2 and the second end 3 are located at both ends of the main body 1 along its axial direction, and the first end 2, the second end 3, and the main body 1 are coaxially arranged, that is, the axis of the first end 2, the axis of the second end 3, and the axis of the main body 1 are located on the same straight line.
[0030] The first end 2 is adapted to connect to the heater, whose main function is to melt the crystalline silicon material and maintain the single crystal growth at a suitable temperature. Typically, the bottom of the heater has bolt holes for fasteners to pass through to connect the heater to the electrode. The second end 3 is adapted to connect to the input electrode. In a single crystal furnace, the input electrode is usually a copper electrode. The copper electrode primarily serves to transmit current to the electrode, allowing the heater to operate normally. Simultaneously, the copper electrode also helps to fix the heater in place, reducing the probability of displacement or detachment during use.
[0031] Because the end faces of the electrodes (i.e., the end face of the first end 2 facing away from the main body 1 and the end face of the second end 3 facing away from the main body 1) are in contact with the heater or input electrode, they are prone to friction, collision, vibration, etc. during use, which can easily lead to damage to the electrode end faces. When the end faces are damaged, the conductivity between the input electrode and the heater cannot be guaranteed, which can easily lead to insufficient current, open circuit, etc., causing the heater to be unable to provide a suitable temperature environment, affecting the growth of monocrystalline silicon. Therefore, when the end faces of the electrodes are damaged, they usually have to be scrapped, resulting in high production costs and significant resource waste for monocrystalline silicon. However, the electrode in this embodiment is a detachable electrode, and at least one of the first end 2 and the second end 3 of the electrode is detachably connected to the main body 1. The electrode end faces can be adjusted according to their wear condition.
[0032] The connection method between the first end 2 and the second end 3 and the main body 1 can be flexibly configured. If the end face of the first end 2 is more prone to wear or wears more severely, the first end 2 and the main body 1 can be detachably connected. If the end face of the second end 3 is more prone to wear or wears more severely, the second end 3 and the main body 1 can be detachably connected. If the end faces of both the first end 2 and the second end 3 are both prone to wear or wear more severely, both the first end 2 and the second end 3 can be detachably connected to the main body 1.
[0033] Thus, if the end face of the first end 2 or the second end 3 is damaged, the end of the electrode can be flexibly replaced, and the newly formed electrode can continue to be used, thereby avoiding the scrapping of the entire electrode, helping to control the production cost of monocrystalline silicon and improving resource waste. In addition, the fabrication of the detachable electrode in this embodiment can also utilize the scrapped electrode as raw material to re-fabricate individual components such as the main body 1, the first end 2, or the second end 3, and then assemble the finished electrode. This realizes the recycling of scrapped electrode materials, thereby further reducing the production cost of monocrystalline silicon and improving resource waste.
[0034] Optionally, refer to Figure 2 In some embodiments of this application, the detachable electrode is provided with an exhaust hole 4, which is arranged along the axial direction of the main body 1 and passes through the main body 1, the first end 2 and the second end 3.
[0035] Specifically, during the use of graphite electrodes, the high temperature and current may generate gases or heat. If these gases or heat are not dissipated in time, the internal pressure of the graphite electrode may increase, affecting its performance and even causing safety issues. Therefore, the electrode is provided with an exhaust port 4, which is arranged along the axial direction of the main body 1 and passes through the main body 1, the first end 2, and the second end 3. This allows the gases generated during the use of the graphite electrode to be discharged to the outside of the electrode in a timely manner, thereby maintaining the internal pressure of the graphite electrode within a reasonable range. This helps to maintain good performance of the electrode and improve its safety during use.
[0036] In some embodiments, the diameter of the vent hole 4 is 5% to 15% of the diameter of the main body, such as 5%, 6%, 7%, 8%, 9%, 10%, 11%, 12%, 13%, 14%, or 15%. A larger diameter of the vent hole 4 results in better venting; a smaller diameter results in less impact on electrode strength. Furthermore, the vent hole 4 can be located at the axial center of the main body 1 and extend axially through the main body 1, the first end portion 2, and the second end portion 3. This further helps to balance the venting effect of the vent hole 4 on different parts of the electrode.
[0037] Optionally, refer to Figure 2 In some embodiments of this application, the detachable electrode is provided with a chip removal hole 5, which is located on the side of the main body 1 near the first end 2 or the second end 3. The chip removal hole 5 is arranged radially along the main body 1, with one end of the chip removal hole 5 connected to the exhaust hole 4 and the other end of the chip removal hole 5 penetrating the main body 1.
[0038] Specifically, during the use of graphite electrodes, some debris or residue may be generated. Excessive accumulation of debris or residue can easily aggravate electrode wear and cause a decline in electrode performance. Therefore, the electrode is also provided with chip removal holes 5, which are arranged radially along the main body 1 and extend to the outer peripheral surface of the main body 1, so that debris or residue can be discharged to the outside of the electrode in a timely manner, thereby helping to maintain the cleanliness of the electrode and improve the wear condition of the electrode. At the same time, the chip removal holes 5 are connected to the exhaust holes 4, which can regulate the airflow inside the electrode, help to achieve the balance of air pressure in various parts of the electrode, and further improve the performance of the electrode.
[0039] In some embodiments, the diameter of the chip removal hole 5 is 1% to 8% of the diameter of the main body, such as 1%, 2%, 3%, 4%, 5%, 6%, 7%, or 8%. A larger diameter results in better chip removal, while a smaller diameter has less impact on electrode strength. Furthermore, the chip removal hole 5 can be located at 20% to 40% of the electrode end face (i.e., the end face of the first end 2 facing away from the main body 1 or the end face of the second end 3 facing away from the main body 1) to ensure that debris generated during electrode use can be discharged promptly, thereby maintaining good electrode performance.
[0040] Optionally, refer to Figure 2 In some embodiments of this application, a first mounting hole 21 is provided on the side of the first end 2 facing away from the main body 1, and a second mounting hole 31 is provided on the side of the second end 3 facing away from the main body 1. The first mounting hole 21 is adapted to be connected to the heater, and the second mounting hole 31 is adapted to be connected to the input electrode. Both the first mounting hole 21 and the second mounting hole 31 can be threaded holes, used for fasteners such as bolts and screws to pass through, thereby achieving a fixed connection between the electrode and the heater and the input electrode, such as a copper electrode. Furthermore, the diameters of the first mounting hole 21 and the second mounting hole 31 can be different to distinguish the two ends of the electrode, facilitating the connection between the electrode and the heater and the copper electrode.
[0041] Furthermore, the diameter of the first mounting hole 21 can be set to be 30% to 45% of the radial dimension of the first end 2, and the diameter of the second mounting hole 31 can be set to be about 35% to 60% of the radial dimension of the second end 3. This facilitates the distinction between the first end 2 and the second end 3, while also helping to avoid the first end 2 and the second end 3 from being too large in radial dimension, which would affect the stability of the first end 2 and the second end 3.
[0042] Optionally, refer to Figure 4 In some embodiments of this application, an end cap 22 is provided on the side of the first end portion 2 facing away from the main body portion 1, and the radial dimension of the end cap 22 is larger than the radial dimension of the main body portion 1. Therefore, the first end portion 2 and the second end portion 3 have different shapes and structures, such as... Figure 4 As shown, the first end portion 2 includes an end cap 22 and a second connecting structure 62, as... Figure 6 As shown, the second end 3 includes an assembly end 32 and a second connecting structure 62, thereby visually distinguishing the first end 2 and the second end 3, facilitating the connection of the first end 2 and the second end 3 to the main body 1. Simultaneously, the end cap 22 forms a flange edge, further facilitating the connection of the first end 2 to the heater.
[0043] Optionally, in some embodiments of this application, the axial dimension of the main body 1 is set to be larger than the axial dimensions of the first end portion 2 and the second end portion 3 to improve the overall stability of the electrode. (Refer to...) Figure 4 and Figure 6 As shown, the axial dimension of the first end 2 refers to the axial dimension of the second connecting structure 62 on the first end 2. Figure 4 (as shown in L2) and the axial dimension of end cap 22 ( Figure 4 The sum of L3 (as shown in the figure), the axial dimension of the second end 3 refers to the axial dimension of the second connecting structure 62 on the second end 3 (as shown in the figure). Figure 6 (as shown in L2') and the axial dimension of the assembly end 32 ( Figure 6 The sum of (as shown in L4). Refer to... Figure 7 As shown, the axial dimension of the main body 1 refers to the axial dimension of the first connecting structure 61 on the main body 1. Figure 7 (as shown by L1 and L1' in the figure) and the axial dimensions of the remaining parts on the main body 1 ( Figure 7 The sum of (as shown in L5) is, of course, if the main body 1 has only one end with the first connecting structure 61, then the axial dimension of the main body 1 is the axial dimension of the first connecting structure 61 (as shown in L5). Figure 3 L1 in or Figure 5 The sum of the axial dimensions of L1' (as shown in the figure) and the rest of the part.
[0044] Furthermore, the axial dimension of the detachable electrode is the sum of the axial dimensions of the main body 1, the first end portion 2, and the second end portion 3. It should be noted that when the first connecting structure 61 and the second connecting structure 62 are connected via a shaft-hole fit, the axial dimension of the first connecting structure 61 is approximately equal to the axial dimension of the second connecting structure 62. For example, when the main body 1 is connected to the first end portion 2... Figure 4 The second connecting structure 62 in the middle will be inserted into Figure 3 Within the first connecting structure 61, the surface of the end cap 22 near the second connecting structure 62 abuts against the end face of the main body 1; when the main body 1 is connected to the second end 3, Figure 6 The second connecting structure 62 in the middle will be inserted into Figure 3 Within the first connecting structure 61, the surface of the mounting end 32 near the second connecting structure 62 abuts against the end face of the main body 1. Therefore, after the main body 1 is connected to the first end 2 and the second end 3, the first connecting structure 61 on the main body 1 coincides with the second connecting structure 62 on the first end 2 and the second end 3. Thus, the axial dimension of the detachable electrode can be considered as the sum of the axial dimension (L5+L1+L1') of the main body 1 and L3 and L4.
[0045] Optionally, in some embodiments of this application, the main body 1 is provided with a first connecting structure 61 at at least one end along its axial direction, and at least one of the first end 2 and the second end 3 is provided with a second connecting structure 62, wherein the first connecting structure 61 and the second connecting structure 62 are detachably connected.
[0046] Specifically, the second connecting structure 62 is located at one end of the first end 2 along its axial direction, or the second connecting structure 62 is located at one end of the second end 3 along its axial direction. The main body 1 is detachably connected to the first end 2 or the second end 3 through the first connecting structure 61 and the second connecting structure 62. If the first connecting structure 61 is located at one end of the main body 1 along its axial direction, the main body 1 is detachably connected to the first end 2 or the second end 3. If the first connecting structure 61 is located at both ends of the main body 1 along its axial direction, the main body 1 is detachably connected to the first end 2 and the second end 3, respectively.
[0047] The first connecting structure 61 and the second connecting structure 62 can be assembly structures for fasteners such as bolts and screws, or they can be matching limiting and snapping structures, such as protrusions or slots, or they can be matching shaft hole structures. In some embodiments of this application, one of the first connecting structure 61 and the second connecting structure 62 is a connecting hole, and the other is a connecting shaft. The connecting shaft passes through the connecting hole and is detachably connected to the connecting hole.
[0048] In some embodiments, the main body 1 has a connecting hole at its axial end, and the first end 2 and the second end 3 have connecting shafts at their axial ends, such as... Figure 3 In the cross-sectional view of the detachable electrode removal first end 2 shown, the main body 1 has a connecting hole at one end along its axial direction. Figure 3 As shown in 61), Figure 4 In the cross-sectional view of the first end portion 2 shown, a connecting shaft is provided at one end of the first end portion 2 along its axial direction. Figure 4 As shown in Figure 62), the connecting shaft passes through the connecting hole, thereby achieving a detachable connection between the first end 2 and the main body 1. Figure 5 In the cross-sectional view of the removable electrode removal second end 3 shown, the main body 1 has a connecting hole at the other end along its axial direction. Figure 5 As shown in 61), Figure 6 In the cross-sectional view of the second end portion 3 shown, a connecting shaft is provided at one end of the second end portion 3 along its axial direction. Figure 6 As shown in 62), the connecting shaft passes through the connecting hole, thereby realizing the detachable connection between the second end 3 and the main body 1.
[0049] In other embodiments, the main body 1 has a connecting shaft at its axial end, and the first end 2 and the second end 3 have connecting holes at their axial ends. For example... Figure 7 In the cross-sectional view of the main body 1 shown, connecting shafts are respectively provided at both ends of the main body 1 along its axial direction. Figure 7 As shown in 61), Figure 8 In the cross-sectional view of the first end portion 2 shown, a connecting hole is provided at one end of the first end portion 2 along its axial direction. Figure 8As shown in 62), Figure 9 In the cross-sectional view of the second end portion 3 shown, a connecting hole is provided at one end of the second end portion 3 along its axial direction. Figure 9 (As shown in 62). Alternatively, in some other embodiments, the main body 1 has a connecting shaft at one end along its axial direction and a connecting hole at the other end along its axial direction. One of the first end portion 2 and the second end portion 3 has a connecting hole at one end along its axial direction, and the other has a connecting shaft at one end along its axial direction. All of the above methods can achieve a detachable connection between the main body 1 and the first end portion 2 and the second end portion 3 through a shaft-hole fit, which is simple in connection structure and easy to operate.
[0050] Optionally, in some embodiments of this application, the wall of the connecting hole is threaded, and the outer peripheral surface of the connecting shaft is threaded. The threaded wall of the connecting hole forms a threaded hole, and the outer peripheral surface of the connecting shaft refers to the surface axially surrounding the connecting shaft. The connecting shaft passes through the connecting hole, and the thread on the outer peripheral surface of the connecting shaft engages with the thread on the wall of the connecting hole, thereby achieving a detachable connection between the main body 1 and the first end 2 and the second end 3. This embodiment achieves a detachable connection by threading the connecting shaft to the connecting hole, which facilitates processing, ensures high connection reliability, and helps guarantee the stability of the formed electrode.
[0051] Furthermore, since the electrode needs to be connected to the heater via the first end 2 and the input electrode via the second end 3, and the electrode needs to be energized to operate the heater, adhesive bonding can be avoided to reduce the impact on energizing efficiency. Additionally, due to the high precision requirements of the electrode, a tight connection needs to be achieved between the main body 1 and the first end 2 and the second end 3. To ensure connection accuracy, pin-type connections can be avoided. Furthermore, after use, the electrode material has high hardness and is brittle, making processing difficult; therefore, mortise and tenon structures can be avoided. Considering factors such as energizing efficiency, connection accuracy, and processing difficulty, this embodiment achieves a detachable connection between the main body 1 and the first end 2 and the second end 3 by screwing a connecting shaft into a connecting hole. This effectively improves the aforementioned problems, ensuring that the performance of the connected electrode is nearly identical to that of the original unused electrode during actual use.
[0052] Furthermore, in order to ensure that both the first end 2 and the second end 3 maintain sufficient strength, the radial dimension of the connecting shaft or connecting hole of the first connecting structure 61 can be 50% to 80% of the radial dimension of the main body 1.
[0053] Optionally, in some embodiments of this application, the main body 1 is provided with first connecting structures 61 at both ends along its axial direction. The two first connecting structures 61 have different radial dimensions and / or different axial dimensions. Wherein, the main body 1 is provided with first connecting structures 61 at both ends along its axial direction, and correspondingly, the first end 2 and the second end 3 are provided with second connecting structures 62 at one end along their axial direction, that is, the first end 2 and the second end 3 are detachably connected to the main body 1.
[0054] Furthermore, the radial dimensions of the two first connecting structures 61 on the main body 1 are different. If the first connecting structure 61 is a connecting hole, the inner diameters of the two connecting holes are different; if the first connecting structure 61 is a connecting shaft, the outer diameters of the two connecting shafts are different. Figure 3 and Figure 5 In the cross-sectional view of the detachable electrode shown, the inner diameter of the first connecting structure 61 on the right side of the main body 1 is larger than the inner diameter of the first connecting structure 61 on the left side of the main body 1; or, the axial dimensions of the two first connecting structures 61 on the main body 1 are different, that is, the lengths of the two first connecting structures 61 along the axial direction of the main body 1 are different, such as... Figure 3 and Figure 5 In the cross-sectional view of the detachable electrode shown, the axial dimension of the first connecting structure 61 on the right side of the main body 1 is smaller than the axial dimension of the first connecting structure 61 on the left side of the main body 1; or, the radial and axial dimensions of the two first connecting structures 61 on the main body 1 are different. Any of the above arrangements can help to distinguish the two ends of the main body 1, thereby making it easier to connect the main body 1 with the first end 2 and the second end 3.
[0055] In some embodiments, the axial dimensions of the first end 2 and the second end 3 are set to account for 15% to 25% or 20% to 30% of the axial dimensions of the detachable electrode, with each taking one value; for example, the axial dimensions of the first end 2 can be set to account for 15% to 25% of the axial dimensions of the detachable electrode, and the axial dimensions of the second end 3 can be set to account for 20% to 30% of the axial dimensions of the detachable electrode; or, the axial dimensions of the first end 2 can be set to account for 20% to 30% of the axial dimensions of the detachable electrode, and the axial dimensions of the second end 3 can be set to account for 15% to 25% of the axial dimensions of the detachable electrode. The axial dimensions of the first end 2, the second end 3, and the axial dimensions of the detachable electrode are as described in the previous embodiments, and will not be repeated here.
[0056] Furthermore, since the first end 2 has an end cap 22, the end cap 22 increases the contact area between the first end 2 and the heater. A connection structure can also be provided on the end cap 22 to improve the reliability of the connection between the first end 2 and the heater. Therefore, while ensuring a reliable connection between the first end 2 and the heater, the axial dimension of the first end 2 can be set to be smaller than the axial dimension of the second end 3. That is, the axial dimension of the first end 2 accounts for 15% to 25% of the axial dimension of the detachable electrode, and the axial dimension of the second end 3 accounts for 20% to 30% of the axial dimension of the detachable electrode. This helps save processing material for the first end 2 and facilitates the differentiation between the first end 2 and the second end 3.
[0057] In some embodiments of this application, the axial dimension of the second connecting structure 62 at the first end 2 and the second end 3 is 5% to 10% or 10% to 15% of the axial dimension of the detachable electrode; each takes one value. For example, the axial dimension of the second connecting structure 62 at the first end 2 can be set to 5% to 10% of the axial dimension of the detachable electrode, and the axial dimension of the second connecting structure 62 at the first end 3 can be set to 10% to 15% of the axial dimension of the detachable electrode; or, the axial dimension of the second connecting structure 62 at the first end 2 can be set to 10% to 15% of the axial dimension of the detachable electrode, and the axial dimension of the second connecting structure 62 at the first end 3 can be set to 5% to 10% of the axial dimension of the detachable electrode. Wherein, the second connecting structure 62 refers to the part that connects and mates with the first connecting structure 61 on the main body 1, and the axial dimension of the second connecting structure 62 is as follows: Figure 4 L2 in Figure 6 L2' in Figure 8 L2 in Figure 9 As shown in L2'.
[0058] Furthermore, in conjunction with the aforementioned embodiments, since the axial dimension of the first end 2 is smaller than the axial dimension of the second end 3, the axial dimension of the second connecting structure 62 of the first end 2 can be set to account for 5% to 10% of the axial dimension of the detachable electrode, and the axial dimension of the second connecting structure 62 of the first end 3 can account for 10% to 15% of the axial dimension of the detachable electrode, so that the axial dimension of the second connecting structure 62 is more adapted to the structure of the first end 2 and the second end 3, which helps to maintain the structural stability of the first end 2 and the second end 3.
[0059] This application also provides a single crystal furnace, which is a device that melts crystalline materials using a heater in an inert gas environment (such as nitrogen or helium) and grows dislocation-free single crystals using the Czochralski method. The single crystal furnace includes a furnace body, crucible, heating components, fixing components, a control system, and a cooling system. The furnace body is the main structure of the single crystal furnace and is typically made of high-purity metal to ensure stability at high temperatures. The crucible is a container for holding the crystalline silicon raw material and is typically made of high-purity quartz or graphite. The heating components include a heater, a copper electrode, and a graphite electrode. One end of the graphite electrode is connected to the heater, and the other end is connected to the copper electrode. The copper electrode serves as the input electrode, used to conduct current to heat the crystalline silicon raw material. The graphite electrode employs the detachable electrode described in any of the preceding embodiments. At least one of the first end 2 and the second end 3 of the detachable electrode is detachably connected to the main body 1. In the event of damage to the end face of either the first end 2 or the second end 3, the electrode end can be flexibly replaced, and the resulting new electrode can be reused, thus avoiding the scrapping of the entire electrode and helping to control the crystal production cost of the single crystal furnace. Furthermore, the fabrication of the detachable electrode can utilize scrapped electrodes as raw materials, achieving the recycling of scrapped electrode materials and further contributing to cost reduction and efficiency improvement.
[0060] It should be understood that the phrase "some embodiments" throughout the specification means that a specific feature, structure, or characteristic related to an embodiment is included in at least one embodiment of this application. Therefore, "some embodiments" appearing throughout the specification does not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.
[0061] Finally, it should be noted that the above description is only a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A detachable electrode, characterized in that, Includes a main body, a first end portion, and a second end portion; The first end and the second end are located at both ends of the main body, and the first end, the second end and the main body are coaxially arranged, and at least one of the first end and the second end is detachably connected to the main body; The first end is adapted to be connected to a heater, and the second end is adapted to be connected to an input electrode.
2. The detachable electrode according to claim 1, characterized in that, The detachable electrode is provided with an exhaust hole, which is arranged along the axial direction of the main body and passes through the main body, the first end and the second end.
3. The detachable electrode according to claim 2, characterized in that, The detachable electrode is provided with a chip removal hole, which is located on the side of the main body near the first end or the second end; The chip removal holes are arranged radially along the main body, one end of the chip removal holes is connected to the exhaust holes, and the other end of the chip removal holes penetrates the main body.
4. The detachable electrode according to claim 3, characterized in that, The diameter of the vent hole is 5% to 15% of the diameter of the main body, or the diameter of the chip removal hole is 1% to 8% of the diameter of the main body.
5. The detachable electrode according to claim 1, characterized in that, The axial dimension of the first end is 15% to 25% of the axial dimension of the detachable electrode; the axial dimension of the second end is 20% to 30% of the axial dimension of the detachable electrode; or, The axial dimension of the first end is 20% to 30% of the axial dimension of the detachable electrode; the axial dimension of the second end is 15% to 25% of the axial dimension of the detachable electrode. The axial dimension of the detachable electrode is the sum of the axial dimensions of the main body, the first end, and the second end.
6. The detachable electrode according to claim 1, characterized in that, The first end portion has a first mounting hole on the side opposite to the main body portion, and the second end portion has a second mounting hole on the side opposite to the main body portion. The first mounting hole is adapted to be connected to the heater, and the second mounting hole is adapted to be connected to the input electrode.
7. The detachable electrode according to any one of claims 1 to 6, characterized in that, The first end portion has an end cap on the side opposite to the main body portion, and the radial dimension of the end cap is greater than the radial dimension of the main body portion.
8. The detachable electrode according to claim 6, characterized in that, The main body is provided with a first connecting structure at at least one end along its axial direction, and at least one of the first end and the second end is provided with a second connecting structure, wherein the first connecting structure and the second connecting structure are detachably connected.
9. The detachable electrode according to claim 8, characterized in that, One of the first connecting structure and the second connecting structure is a connecting hole, and the other is a connecting shaft.
10. The detachable electrode according to claim 9, characterized in that, The connecting hole has threads on its wall, and the connecting shaft has threads on its outer circumferential surface.
11. The detachable electrode according to claim 8, characterized in that, The radial dimension of the first connecting structure is 50% to 80% of the radial dimension of the main body; or, The axial dimension of the second connection structure is 5% to 10% or 10% to 15% of the axial dimension of the detachable electrode.
12. A single crystal furnace, characterized in that, It includes a heater, an input electrode, and a detachable electrode as described in any one of claims 1 to 11, wherein a first end of the detachable electrode is connected to the heater, and a second end of the detachable electrode is connected to the input electrode.