Quartz tube vacuum extraction equipment

Abstract

The utility model discloses quartz tube vacuum extraction equipment, which relates to the technical field of semiconductor material manufacture, and comprises a vacuum device and a sealing connection device, the vacuum device comprises a base, a primary vacuum pump, a controller and a pipeline I. The sealing connection device has a self-adaptive function, and can be used for extracting vacuum through a plurality of adjustable pressing plates. The clamping force can be automatically adjusted according to the actual outer diameter of the quartz tube, so that the fluororubber sealing ring and the end opening of the quartz tube are always kept in an optimal fit state, the sealing effect is improved, the sealing device can be adapted to the quartz tubes of various specifications, the problems of air leakage, non-uniform vacuum degree and the like in the vacuumizing process are avoided, the reliability of the vacuumizing effect is ensured, and the working efficiency is improved. In the vacuumizing process of the quartz tube, the vacuum degree sensor, the pressure sensor and the temperature sensor monitor internal data of the quartz tube in real time, and when it is monitored that parameters exceed a preset normal range, the controller immediately gives an alarm prompt through the alarm, so that safe and stable operation of equipment is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material manufacturing technology, and in particular to a quartz tube vacuum extraction device. Background Technology

[0002] Quartz tubes are widely used as key basic components in many fields such as semiconductor manufacturing, optical instrument production, and some high-end scientific research experiments. In the semiconductor chip manufacturing process, some key process steps need to be carried out in a high vacuum environment created by quartz tubes. In operations such as optical coating, the vacuum state inside the quartz tube has a crucial impact on the coating quality.

[0003] For example, Chinese patent CN210287587U discloses a high vacuum sealing structure for a quartz tube, including a sealing element disposed at the end of the quartz tube, a first sealing ring and a second sealing ring disposed between the sealing element and the quartz tube, a locking mechanism for locking the sealing element at the end of the quartz tube, an annular gap disposed in the sealing element between the first sealing ring and the second sealing ring, and an air extraction port opened on the sealing element and communicating with the annular gap.

[0004] Existing vacuum extraction equipment has many shortcomings when performing vacuum extraction operations on quartz tubes. Due to the different sizes of quartz tubes, the adaptability of vacuum extraction equipment to quartz tubes is poor. At the same time, it is difficult to ensure the sealing connection, which can easily lead to problems such as air leakage and uneven vacuum, affecting the final use effect. In order to address the above problems, a quartz tube vacuum extraction device is proposed. Utility Model Content

[0005] The purpose of this invention is to solve the problems existing in the prior art by proposing a quartz tube vacuum extraction device.

[0006] To achieve the above objectives, this utility model adopts the following technical solution: a quartz tube vacuum extraction device, comprising a vacuum device and a sealing connection device. The vacuum device includes a base, a primary vacuum pump, a controller, and a first pipe. The sealing connection device includes a suction pipe, a connecting plate, and a clamp. The vacuum device further includes a high vacuum pump and a second pipe. An alarm is fixedly connected to the top of the controller. One end of the suction pipe is fixedly connected to one end of the first pipe, and the other end of the suction pipe is fixedly connected to one end of the second pipe. A fluororubber sealing ring is fixedly connected to one outer edge of the connecting plate. The sealing connection device also includes... The device includes a connecting pipe, a support ring, a gear ring, a fixed ring, a rotating wheel, and a motor. The output end of the motor is fixedly connected to one end of the rotating wheel. One end of the gear ring is rotatably connected to one side of the support ring, and one end of the fixed ring is welded to one side of the support ring. Multiple sliding plates are slidably connected in a ring array on one side of the fixed ring, and pressure plates are fixedly installed on the outer side of the sliding plates. Multiple gear rods are rotatably installed in a ring array on one side of the support ring. The outer side of one end of the gear rod meshes with the outer wall of the sliding plate. The inner edge of the gear ring meshes with the outer side of one end of the gear rod, and the outer edge of the gear ring meshes with the outer wall of the rotating wheel.

[0007] Preferably, one end of the connecting pipe is fixedly connected to the top of the controller, and the other end of the connecting pipe is fixedly connected to the inner side of the connecting plate.

[0008] Preferably, a temperature sensor is fixedly connected to one end of the connecting pipe, a vacuum sensor is fixedly installed on one side of the temperature sensor, and a pressure sensor is fixedly installed on the other side of the temperature sensor.

[0009] Preferably, the vacuum sensor, temperature sensor, and pressure sensor are all electrically connected to the controller via connecting pipes, and one side of the support ring is fixedly installed to the top of the base.

[0010] Preferably, the bottom end of the motor is fixedly installed to the bottom end of the base, and the bottom ends of both the primary vacuum pump and the high vacuum pump are fixedly installed to the top of the base.

[0011] Preferably, one end of the primary vacuum pump is fixedly connected to one end of pipe one, and one end of the high vacuum pump is fixedly connected to one end of pipe two.

[0012] Preferably, the bottom of the controller is fixedly connected to the top of the base.

[0013] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0014] 1. In this utility model, a clamp is used to fix one end of the fluororubber sealing ring to the outer edge of the quartz tube port, ensuring accurate alignment and tightness between the sealing connection device and the quartz tube port. The motor drives the rotating wheel to rotate slowly through the reducer, causing multiple pressure plates to move simultaneously towards the center of the fixed ring until the pressure plates tightly press the fluororubber sealing ring against the outer wall of the quartz tube. This ensures that no air leakage occurs at the connection during vacuuming, facilitating installation and disassembly and guaranteeing the sealing and stability of the connection. The sealing connection device has an adaptive function; through the adjustable multiple pressure plates, the clamping force can be automatically adjusted according to the actual outer diameter of the quartz tube, ensuring that the fluororubber sealing ring and the quartz tube port always maintain the best fit, further improving the sealing effect. It can be adapted to various specifications of quartz tubes, ensuring that no air leakage or uneven vacuum occurs during vacuuming, thus ensuring the reliability of the vacuuming effect.

[0015] 2. In this utility model, when evacuating the quartz tube, the primary vacuum pump first pre-evacuates the quartz tube to quickly remove most of the atmospheric components inside the tube and reduce the pressure inside the tube to a certain level. Then, the high vacuum pump continues to evacuate the quartz tube to further increase the vacuum level inside the quartz tube to a high-precision level, meeting the stringent requirements of different application scenarios. During this process, the vacuum sensor, pressure sensor, and temperature sensor monitor the data inside the quartz tube in real time. The controller receives the data fed back by each sensor. When the monitored parameters exceed the preset normal range, the controller immediately issues an alarm through the alarm device to ensure the safe and stable operation of the equipment. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of a quartz tube vacuum extraction device proposed in this utility model;

[0017] Figure 2 This is a top view of the quartz tube vacuum extraction device proposed in this utility model.

[0018] Figure 3 This is a side view of the gear ring of a quartz tube vacuum extraction device proposed in this utility model.

[0019] Figure 4 This is a front sectional view of a sealing connection device for a quartz tube vacuum extraction device proposed in this utility model.

[0020] Figure 5 This utility model proposes a quartz tube vacuum extraction device. Figure 4 A magnified view of the details at point A in the middle.

[0021] Legend: 1. Vacuum device; 2. Sealing connection device; 11. Base; 12. Primary vacuum pump; 13. High vacuum pump; 14. Controller; 15. Alarm; 16. Pipe 1; 17. Pipe 2; 21. Evacuation pipe; 22. Connecting plate; 23. Connecting pipe; 24. Support ring; 25. Gear ring; 26. Fixing ring; 27. Gear rod; 28. Sliding plate; 29. ​​Pressure plate; 210. Rotating wheel; 211. Motor; 212. Vacuum sensor; 213. Temperature sensor; 214. Pressure sensor; 215. Fluororubber sealing ring; 216. Clamp. Detailed Implementation

[0022] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0023] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0024] Example 1: As Figure 1 and Figure 2 As shown, this utility model provides a quartz tube vacuum extraction device, including a vacuum device 1 and a sealing connection device 2. The vacuum device 1 includes a base 11, a primary vacuum pump 12, a controller 14, and a first pipe 16. The vacuum device 1 also includes a high vacuum pump 13 and a second pipe 17. An alarm 15 is fixedly connected to the top of the controller 14. One end of the suction pipe 21 is fixedly connected to one end of the first pipe 16, and the other end of the suction pipe 21 is fixedly connected to one end of the second pipe 17. The bottom end of the motor 211 is fixedly installed to the bottom end of the base 11. The bottom ends of the primary vacuum pump 12 and the high vacuum pump 13 are both fixedly installed to the top of the base 11. One end of the primary vacuum pump 12 is fixedly connected to one end of the first pipe 16, and one end of the high vacuum pump 13 is fixedly connected to one end of the second pipe 17. The bottom of the controller 14 is fixedly connected to the top of the base 11.

[0025] The specific settings and functions of this embodiment are described below: Key parameters such as the required vacuum target value, evacuation time, and evacuation rate are input through the touch screen of the controller 14. The control system of the controller 14 performs internal calculations and coordination based on the input parameters. First, the primary vacuum pump 12 is started. The primary vacuum pump 12 pre-evacuates the quartz tube through pipe 16 and evacuation pipe 21 to quickly remove most of the atmospheric components inside the tube and reduce the pressure inside the tube to a certain level. Then, the high vacuum pump 13 is started. The high vacuum pump 13 continues to evacuate the quartz tube through pipe 27 and evacuation pipe 21 to further improve the vacuum level inside the quartz tube to the level required for high precision, meeting the strict requirements of different application scenarios.

[0026] Example 2: Figure 1 - Figure 4 As shown, the sealing connection device 2 includes an extraction pipe 21, a connecting plate 22, and a clamp 216. A fluororubber sealing ring 215 is fixedly connected to one outer edge of the connecting plate 22. The sealing connection device 2 also includes a connecting pipe 23, a support ring 24, a gear ring 25, a fixing ring 26, a rotating wheel 210, and a motor 211. The output end of the motor 211 is fixedly connected to one end of the rotating wheel 210. One end of the gear ring 25 is rotatably connected to one side of the support ring 24, and one end of the fixing ring 26 is welded to one side of the support ring 24. Multiple sliding plates 28 are slidably connected in an annular array on one side of the fixing ring 26, and a pressure plate 29 is fixedly installed on the outer side of the sliding plates 28. Multiple gear rods 27 are rotatably installed in an annular array on one side of the support ring 24, and one end of the gear rod 27... The outer side engages with the outer wall of the sliding plate 28, the inner edge of the gear ring 25 engages with the outer side of one end of the gear rod 27, the outer edge of the gear ring 25 engages with the outer wall of the rotating wheel 210, one end of the connecting pipe 23 is fixedly connected to the top of the controller 14, and the other end of the connecting pipe 23 is fixedly connected to the inner side of the connecting plate 22, one end of the connecting pipe 23 is fixedly connected to a temperature sensor 213, one side of the temperature sensor 213 is fixedly installed with a vacuum sensor 212, and the other side of the temperature sensor 213 is fixedly installed with a pressure sensor 214. The vacuum sensor 212, the temperature sensor 213, and the pressure sensor 214 are all electrically connected to the controller 14 through the connecting pipe 23, and one side of the support ring 24 is fixedly installed with the top of the base 11.

[0027] The overall effect of this embodiment is that the sealing connection device 2 has an adaptive function. Through multiple adjustable pressure plates 29, it can automatically adjust the clamping force according to the actual outer diameter of the quartz tube, so that the fluororubber sealing ring 215 and the quartz tube port always maintain the best fit, further improving the sealing effect. It can be adapted to various specifications of quartz tubes, ensuring that there will be no problems such as air leakage or uneven vacuum during the vacuuming process, thus ensuring the reliability of the vacuuming effect. During the vacuuming process, the vacuum sensor 212, pressure sensor 214 and temperature sensor 213 monitor the internal data of the quartz tube in real time. The controller 14 receives the data fed back by each sensor. When the monitored parameters exceed the preset normal range, the controller 14 immediately issues an alarm through the alarm 15 to ensure the safe and stable operation of the equipment.

[0028] The operation and working principle of this device are as follows: First, the operator moves the quartz tube to be evacuated to the corresponding position on the base 11. Based on the outer diameter of the quartz tube, the operator adjusts the adaptive sealing structure of the sealing connection device 2, placing the connecting plate 22 at the end of the quartz tube, so that the fluororubber sealing ring 215 adheres to the outer wall of the quartz tube end. Then, the operator uses clamp 216 to fix one end of the fluororubber sealing ring 215 to the outer edge of the quartz tube end, ensuring accurate alignment and tightness between the sealing connection device 2 and the quartz tube end. The operator then connects the power supply to the controller 14, starting the motor 211. The motor 211 drives the rotating wheel 210 to rotate slowly via the reducer. The outer wall of the rotating wheel 210 meshes with the outer wall of the gear ring 25, the inner wall of the gear ring 25 meshes with the outer wall of the gear rod 27, and one end of the outer wall of the gear rod 27 meshes with the outer side of the sliding plate 28. Therefore, when the rotating wheel 210 drives the gear ring 25 to rotate, according to… The sliding plate 28 and pressure plate 29 slide along the groove of the fixed ring 26, causing multiple pressure plates 29 to move simultaneously toward the center of the fixed ring 26 (when the motor 211 drives the rotating wheel 210 to rotate in the opposite direction, multiple sliding plates 28 and pressure plates 29 move outward simultaneously) until the pressure plates 29 tightly press the fluororubber sealing ring 215 against the outer wall of the quartz tube, ensuring that there is no air leakage at the connection during the vacuuming process. This facilitates installation and disassembly and ensures the sealing and stability of the connection. The sealing connection device 2 has an adaptive function. Through the adjustable multiple pressure plates 29, the clamping force can be automatically adjusted according to the actual outer diameter of the quartz tube, so that the fluororubber sealing ring 215 and the quartz tube end always maintain the best fit, further improving the sealing effect. It can be adapted to various specifications of quartz tubes, ensuring that there are no problems such as air leakage or uneven vacuum during the vacuuming process, and ensuring the reliability of the vacuuming effect.

[0029] After the quartz tube and sealing connection device 2 are sealed and connected, the required vacuum target value, evacuation time, evacuation rate, and other key parameters are input through the touch screen of controller 14. The control system of controller 14 performs internal calculations and coordination based on the input parameters. First, the primary vacuum pump 12 is started. The primary vacuum pump 12 pre-evacuates the quartz tube through pipe 16 and evacuation pipe 21 to quickly remove most of the atmospheric components inside the tube and reduce the pressure inside the tube to a certain level. Then, the high vacuum pump 13 is started. The high vacuum pump 13 continues to evacuate the quartz tube through pipe 27 and evacuation pipe 21 to further improve the vacuum level inside the quartz tube to a high-precision level to meet the strict requirements of different application scenarios. During this process, vacuum sensor 212... Pressure sensor 214 and temperature sensor 213 monitor the internal data of the quartz tube in real time. Controller 14 receives the data from each sensor and dynamically displays the changes in vacuum, pressure, and temperature parameters on the touch screen. When the monitored parameters exceed the preset normal range, controller 14 immediately issues an alarm through alarm 15 to ensure the safe and stable operation of the equipment. When the set vacuum target value is reached, controller 14 automatically stops the operation of high vacuum pump 13. By monitoring the equipment's operating status in real time and accurately through vacuum sensor 212, pressure sensor 214, and temperature sensor 213, operators can easily grasp the situation, optimize the process, and troubleshoot faults, thus realizing intelligent management and operation.

[0030] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the present utility model.

Claims

1. A quartz tube vacuum extraction device, comprising a vacuum device (1) and a sealing connection device (2), wherein the vacuum device (1) comprises a base (11), a primary vacuum pump (12), a controller (14), and a pipeline (16), and the sealing connection device (2) comprises a suction pipe (21), a connecting plate (22), and a clamp (216), characterized in that: The vacuum device (1) also includes a high vacuum pump (13) and a second pipe (17). An alarm (15) is fixedly connected to the top of the controller (14). One end of the suction pipe (21) is fixedly connected to one end of the first pipe (16), and the other end of the suction pipe (21) is fixedly connected to one end of the second pipe (17). A fluororubber sealing ring (215) is fixedly connected to the outer edge of one side of the connecting plate (22). The sealing connection device (2) also includes a connecting pipe (23), a support ring (24), a gear ring (25), a fixing ring (26), a rotating wheel (210), and a motor (211). The output end of the motor (211) is connected to one end of the rotating wheel (210). The gear ring (25) is fixedly connected, with one end of the gear ring (25) rotatably connected to one side of the support ring (24), and one end of the fixed ring (26) is welded to one side of the support ring (24). A plurality of sliding plates (28) are slidably connected in an annular array on one side of the fixed ring (26), and a pressure plate (29) is fixedly installed on the outer side of the sliding plate (28). A plurality of gear rods (27) are rotatably installed in an annular array on one side of the support ring (24). The outer side of one end of the gear rod (27) meshes with the outer wall of the sliding plate (28). The inner edge of the gear ring (25) meshes with the outer side of one end of the gear rod (27), and the outer edge of the gear ring (25) meshes with the outer wall of the rotating wheel (210).

2. The quartz tube vacuum extraction device according to claim 1, characterized in that: One end of the connecting pipe (23) is fixedly connected to the top of the controller (14), and the other end of the connecting pipe (23) is fixedly connected to the inner side of the connecting plate (22).

3. The quartz tube vacuum extraction device according to claim 1, characterized in that: A temperature sensor (213) is fixedly connected to one end of the connecting pipe (23), a vacuum sensor (212) is fixedly installed on one side of the temperature sensor (213), and a pressure sensor (214) is fixedly installed on the other side of the temperature sensor (213).

4. The quartz tube vacuum extraction device according to claim 3, characterized in that: The vacuum sensor (212), temperature sensor (213), and pressure sensor (214) are all electrically connected to the controller (14) through the connecting pipe (23), and one side of the support ring (24) is fixedly installed on the top of the base (11).

5. The quartz tube vacuum extraction device according to claim 1, characterized in that: The bottom end of the motor (211) is fixedly installed with the bottom end of the base (11), and the bottom ends of the primary vacuum pump (12) and the high vacuum pump (13) are both fixedly installed with the top of the base (11).

6. The quartz tube vacuum extraction device according to claim 1, characterized in that: One end of the primary vacuum pump (12) is fixedly connected to one end of pipe one (16), and one end of the high vacuum pump (13) is fixedly connected to one end of pipe two (17).

7. The quartz tube vacuum extraction device according to claim 1, characterized in that: The bottom of the controller (14) is fixedly connected to the top of the base (11).

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