Fixator and structure for installing temperature sensor

Abstract

The utility model relates to a fixer and a structure for installing a temperature sensor. The fixator comprises a fixing support which comprises a fixing support body and a first mounting hole penetrating through the fixing support body in the first direction, and the fixing support body comprises a first surface and a second surface which are oppositely distributed in the first direction; the fastening assembly is connected to the first surface of the fixing support body and comprises an elastic fixing structure, the elastic fixing structure comprises an elastic fixing body and a second mounting hole located in the elastic fixing body, and the first mounting hole and the second mounting hole communicate with each other and are aligned in the first direction; the elastic fixing body can expand and contract in the radial direction of the second mounting hole. According to the utility model, the temperature sensor cannot rotate along with the rotation of the compression nut, the end part of the temperature sensor is prevented from tilting, and the accuracy and reliability of temperature detection of the temperature sensor are ensured.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a fixture and a structure for mounting a temperature sensor. Background Technology

[0002] Semiconductor processing equipment such as epitaxial wafers typically includes at least one temperature sensor, such as a thermocouple, to monitor the temperature during semiconductor processing. The thermocouple is installed by passing its probe end (the front end) through the circular channel of the rear flange. After adjusting the sensor to the appropriate position, the clamping nut is tightened to secure it to the flange. Because the front end of the thermocouple is irregularly shaped, it must be kept horizontal during installation. Currently, the installer holds the end of the thermocouple with one hand and tightens the clamping nut with the other. This process requires repeated checks of the distance between the exposed part of the thermocouple and the rear flange, and without specific tools for measurement, relying solely on a ruler makes the operation cumbersome, time-consuming, and labor-intensive. In addition, when the clamping nut is manually tightened, temperature sensors such as thermocouples will also rotate with the clamping nut, causing the front end of the temperature sensors such as thermocouples to tilt up. In severe cases, the tilted front end will push against the sealing ring of the outer ring of the bearing base, causing the outer sealing ring to tilt up, thereby affecting the smooth implementation of the semiconductor processing technology.

[0003] Therefore, ensuring the accuracy of the installation position of temperature sensors in semiconductor processing devices, reducing the difficulty of temperature sensor installation, and improving the installation efficiency of temperature sensors, thereby ensuring the accuracy and reliability of temperature detection in semiconductor processing, are urgent technical problems that need to be solved. Summary of the Invention

[0004] This invention provides a fixture and a structure for mounting a temperature sensor, which ensures the accuracy of the temperature sensor's mounting position in a semiconductor processing device, reduces the difficulty of installing the temperature sensor, and improves the installation efficiency of the temperature sensor, thereby ensuring the accuracy and reliability of temperature detection in semiconductor processing.

[0005] According to some embodiments, the present invention provides a fixator, comprising:

[0006] A fixed bracket includes a fixed bracket body and a first mounting hole penetrating the fixed bracket body along a first direction. The fixed bracket body includes a first surface and a second surface that are distributed opposite to each other along the first direction.

[0007] A fastening assembly is connected to the first surface of the fixed bracket body. The fastening assembly includes an elastic fixing structure, which includes an elastic fixing body and a second mounting hole located within the elastic fixing body. The first mounting hole and the second mounting hole are interconnected and aligned along the first direction. The elastic fixing body is capable of expanding and contracting along the radial direction of the second mounting hole.

[0008] In some embodiments, the fixing bracket body further includes:

[0009] The receiving cavity extends along the first direction from the second surface of the fixed bracket body into the interior of the fixed bracket body, and the receiving cavity communicates with the first mounting hole.

[0010] In some embodiments, the fastening assembly further includes:

[0011] The track groove is located on the first surface of the fixed bracket body, and the track groove is distributed around the outer periphery of the first mounting hole;

[0012] The first connector has one end located inside the track groove and the other end connected to the elastic fixed body, and the first connector can slide freely along the track groove.

[0013] In some embodiments, the track groove includes a plurality of sub-grooves distributed around the outer periphery of the first mounting hole, each of the sub-grooves extending radially along the first mounting hole;

[0014] Multiple first connectors are distributed one-to-one in multiple sub-slots, and each first connector can slide freely in the sub-slot along the radial direction of the first mounting hole.

[0015] In some embodiments, the resilient fixing body includes:

[0016] Multiple sub-fixing components are connected one-to-one with multiple first connecting components, and the multiple sub-fixing components are arranged in a ring to form the second mounting hole;

[0017] A plurality of second connectors are located between and connected to adjacent sub-fixing members, wherein the second connectors are elastic connectors.

[0018] In some embodiments, the second connecting member is a spring.

[0019] In some embodiments, the projection of the sub-fixing member onto the first surface is a fan-shaped ring, and the inner side of the sub-fixing member facing the second mounting hole is covered with elastic rubber.

[0020] In some embodiments, the first connector is a rigid connector, and the first connector is centrally connected to the sub-fixing member.

[0021] According to other embodiments, the present invention also provides a structure for mounting a temperature sensor, comprising:

[0022] The fixture described above is used to secure a temperature sensor passing through the first mounting hole and the second mounting hole;

[0023] The locator includes a telescopic bracket that extends along a first direction and is capable of telescopic movement along the first direction, and the telescopic bracket has scale markings.

[0024] In some embodiments, the telescopic support includes:

[0025] A first support extends along the first direction and is capable of telescopic movement along the first direction, and the first support has a plurality of scale markings arranged along the first direction.

[0026] The second bracket is fixedly connected to the end of the first bracket. The second bracket extends along a second direction. The end of the second bracket opposite to the first bracket has a positioning element that can engage with the groove at the end of the temperature sensor. The second direction intersects the first direction perpendicularly.

[0027] In some embodiments, the second support is an elastic support, and the second support is capable of telescopic movement along the second direction.

[0028] In some embodiments, the locator further includes:

[0029] The base includes a top surface and a bottom surface that are distributed opposite to each other along the first direction. Two first supports are fixed at intervals on the top surface of the base, and two second supports are connected one-to-one to the ends of the two first supports that are away from the base.

[0030] In some embodiments, it also includes:

[0031] A ratchet wrench is used to tighten a clamping nut, which is used to fit onto the temperature sensor, and a retainer is used to secure the temperature sensor that passes through the clamping nut.

[0032] The present invention provides a fixture and a structure for mounting a temperature sensor. The fixture includes a fixing bracket and a fastening assembly on the fixing bracket. The fastening assembly includes an elastic fixing structure, which comprises an elastic fixing body and a second mounting hole located within the elastic fixing body. The first mounting hole and the second mounting hole are interconnected and aligned along a first direction. The elastic fixing body can automatically expand and contract along the radial direction of the second mounting hole, thereby fixing the temperature sensor to be installed through the first and second mounting holes. When the clamping nut for fixing the temperature sensor is tightened, the elastic fixing body can automatically expand and contract with the rotation of the clamping nut, preventing the temperature sensor from rotating with the clamping nut. This avoids the end (e.g., the front end) of the temperature sensor from warping, thus preventing the temperature sensor from contacting structures such as sealing rings within the reaction chamber, ensuring the accuracy and reliability of the temperature detected by the temperature sensor. Moreover, after the temperature sensor is fixed by the fixture, there is no need to manually pull the end of the temperature sensor during the tightening of the clamping nut, and there is no need to repeatedly check the installation position of the temperature sensor, which saves labor costs and improves the installation efficiency and yield of the temperature sensor. Attached Figure Description

[0033] Figure 1 This is a top view of the fixator in a specific embodiment of this utility model;

[0034] Figure 2 This is a cross-sectional schematic diagram of the fixator in a specific embodiment of this utility model;

[0035] Figure 3 This is a schematic diagram of the structure of a semiconductor processing device with a temperature sensor in a specific embodiment of this utility model;

[0036] Figure 4 This is a schematic diagram of the structure for installing a temperature sensor in a specific embodiment of this utility model. Detailed Implementation

[0037] The following detailed description, in conjunction with the accompanying drawings, describes the specific implementation of the fixture and the structure for mounting the temperature sensor provided by this utility model.

[0038] This specific embodiment provides a fixator. Figure 1 This is a top view of the fixator in a specific embodiment of this utility model. Figure 2 This is a cross-sectional schematic diagram of the fixator in a specific embodiment of this utility model. (See diagram below.) Figure 1 and Figure 2 As shown, the fastener includes:

[0039] A fixed bracket includes a fixed bracket body 10 and a first mounting hole 16 penetrating the fixed bracket body 10 along a first direction D1. The fixed bracket body 10 includes a first surface 101 and a second surface 102 that are relatively distributed along the first direction D1.

[0040] A fastening assembly is connected to the first surface 101 of the fixed bracket body 10. The fastening assembly includes an elastic fixing structure, which includes an elastic fixing body and a second mounting hole 13 located within the elastic fixing body. The first mounting hole 16 and the second mounting hole 13 are interconnected and aligned along the first direction D1. The elastic fixing body is capable of expanding and contracting along the radial direction of the second mounting hole 13.

[0041] Specifically, the fixing bracket can be a rigid bracket to enhance the structural stability of the fixture. The fixing bracket includes a fixing bracket body 10 and a first mounting hole 16 located in the middle of the fixing bracket body 10. The fastening assembly is disposed on the first surface 101 of the fixing bracket body 10. The fastening assembly includes an elastic fixing structure, which includes an elastic fixing body and a second mounting hole 13 located within the elastic fixing body. The first mounting hole 16 and the second mounting hole 13 communicate with each other and are aligned along the first direction D1, that is, the second mounting hole 13 is located above the first mounting hole 16 and the second mounting hole 13 and the first mounting hole 16 are aligned and communicated along the first direction D1. In one example, the diameter (i.e., inner diameter) of the first mounting hole 16 is equal to the diameter (i.e., inner diameter) of the second mounting hole 13 in the initial state, wherein the initial state refers to the natural state of the fixture when the temperature sensor is not fixed and the fixture is waiting to be fixed. In another example, the diameter of the first mounting hole 16 is greater than the diameter of the second mounting hole 13 in the initial state, and the diameter of the second mounting hole 13 in the initial state is smaller than the width of the area to be fixed in the temperature sensor to be fixed, so that the temperature sensor can be engaged and fixed after passing through the second mounting hole 13.

[0042] For example, when installing a temperature sensor into the processing chamber, after the front end of the temperature sensor passes through the first flange located at the end of the processing chamber and enters the chamber, a clamping nut and the retainer are sequentially fitted onto the end of the temperature sensor, so that the temperature sensor continuously passes through the clamping nut, the first mounting hole 16, and the second mounting hole 13, thereby fixing the temperature sensor within the first mounting hole 16 and the second mounting hole 13. Subsequently, when the clamping nut is tightened to fix the temperature sensor to the first flange, the elastic fixing body can automatically expand and contract with the rotation of the clamping nut, thus preventing the temperature sensor from rotating with the clamping nut, avoiding the end (e.g., the front end) of the temperature sensor from warping up, thereby preventing the temperature sensor from contacting structures such as sealing rings within the reaction chamber, ensuring the accuracy and reliability of the temperature detection by the temperature sensor. In one example, the temperature sensor is a thermocouple.

[0043] In some embodiments, the fixing bracket body 10 further includes:

[0044] The receiving cavity 20 extends along the first direction D1 from the second surface 102 of the fixed bracket body 10 into the interior of the fixed bracket body 10, and the receiving cavity 20 communicates with the first mounting hole 16.

[0045] Specifically, the fixing bracket body 10 further includes a receiving cavity 20 extending along the first direction D1 from the second surface 102 of the fixing bracket body 10 into the interior of the fixing bracket body 10. The receiving cavity 20 communicates with the first mounting hole 16, allowing the temperature sensor to continuously pass through the first mounting hole 16 and the receiving cavity 20. The receiving cavity 20 is used to accommodate the clamping nut and a portion of the temperature sensor sleeved within the clamping nut, thereby confining the clamping nut within the receiving cavity 20. This prevents the clamping nut from contacting the retainer and the temperature sensor when tightening the clamping nut, further ensuring that the temperature sensor does not rotate with the rotation of the clamping nut. In one example, the inner diameter of the receiving cavity 20 is larger than the diameter of the clamping nut.

[0046] In some embodiments, the fastening assembly further includes:

[0047] The track groove is located on the first surface 101 of the fixed bracket body 10, and the track groove is distributed around the outer periphery of the first mounting hole 16.

[0048] The first connector 17 has one end located in the track groove and the other end connected to the elastic fixing body, and the first connector 17 can slide freely along the track groove.

[0049] In some embodiments, the track groove includes a plurality of sub-grooves 11 distributed around the outer periphery of the first mounting hole 16, each of the sub-grooves 11 extending in the radial direction of the first mounting hole 16;

[0050] Multiple first connectors 17 are distributed one-to-one in multiple sub-slots 11, and each first connector 17 can slide freely in the radial direction of the first mounting hole 16 within the sub-slot 11.

[0051] In some embodiments, the resilient fixing body includes:

[0052] Multiple sub-fixing members 12 are connected one-to-one with multiple first connecting members 17, and the multiple sub-fixing members 12 are arranged in a ring to form the second mounting hole 13;

[0053] A plurality of second connectors 15 are located between and connected to adjacent sub-fixing members 12, wherein the second connectors 15 are elastic connectors.

[0054] In some embodiments, the second connector 15 is a spring, which, while further securing the temperature sensor, limits the inner diameter range of the second mounting hole 13, preventing the inner diameter of the second mounting hole 13 from becoming too large after expansion and thus failing to secure the temperature sensor stably.

[0055] Specifically, the fastening assembly further includes a plurality of sub-grooves 11 located on the first surface 101 of the fixing bracket body 10, and the plurality of sub-grooves 11 are independently distributed around the outer periphery of the first mounting hole 16 to form the track groove. In one example, the sub-grooves 11 do not penetrate the fixing bracket body 10 along the first direction D1. A plurality of sub-fixing members 12 are independently arranged in a ring to form the second mounting hole 13. A second connecting member 15 located between adjacent sub-fixing members 12 connects two adjacent sub-fixing members 12. In one example, the center of the projection of the second mounting hole 13 onto the first surface 101 of the fixing bracket body 10 coincides with the center of the first mounting hole 16. A first connecting member 17 extends along the first direction D1, and one end of the first connecting member 17 is located in the sub-groove 11, and the other end is fixedly connected to the elastic fixing body. A plurality of first connecting members 17 are connected to a plurality of sub-fixing members 12 in a one-to-one correspondence. The first connector 17 can slide freely within the sub-groove 11 along the radial direction of the first mounting hole 16, thereby causing the sub-fixing member 12 connected to the first connector 17 to slide along the radial direction of the first mounting hole 16, thus realizing the expansion and contraction of the diameter of the second mounting hole 13. Here, the radial direction of the first mounting hole 16 refers to the direction parallel to the first surface 101 of the fixing bracket body 10, for example... Figure 1 and Figure 2 The second direction D2 and the third direction D3 are both perpendicular to the first direction D1, and the second direction D2 intersects the third direction D3 (e.g., perpendicularly or obliquely). In this specific embodiment, "multiple" refers to two or more.

[0056] The following explanation uses an example where the second connector 15 is a spring and the diameter of the second mounting hole 13 in the initial state is smaller than the width of the area to be fixed in the temperature sensor to be fixed. For example, when the temperature sensor passes through the first flange, the first mounting hole 16, and the second mounting hole 13, as the temperature sensor is inserted, it applies pressure to the sub-fixing member 12, thereby pushing the first connector 17 to move the sub-fixing member 12 radially away from the second mounting hole 13, thus expanding the second mounting hole 13 and allowing the temperature sensor to pass smoothly through the second mounting hole 13. After the clamping nut is fitted onto the temperature sensor, when the clamping nut is tightened with a ratchet wrench or other tools, the rotation of the ratchet wrench or other tools causes the clamping nut to rotate. Through the reciprocating movement of the first connecting member 17 in the sub-groove 11 along the radial direction of the second mounting hole 13 and the extension and contraction of the spring (i.e., the second connecting member 15), the second mounting hole 13 is expanded and contracted, thereby reducing or suppressing the tilting of the end (including the front and the rear) of the temperature sensor, so that the temperature sensor always remains in a horizontal state.

[0057] In some embodiments, the projection of the sub-fixing member 12 on the first surface 101 is a fan-shaped ring, and the inner side of the sub-fixing member 12 facing the second mounting hole 13 is covered with elastic rubber to buffer the temperature sensor and avoid damage to the temperature sensor.

[0058] In some embodiments, the first connector 17 is a rigid connector, and the first connector 17 is connected to the center of the sub-fixing member 12 to ensure the uniformity of force on the sub-fixing member 12.

[0059] This specific embodiment also provides a structure for mounting a temperature sensor. Figure 3 This is a schematic diagram of the structure of a semiconductor processing device with a temperature sensor according to a specific embodiment of this utility model. Figure 4 This is a schematic diagram of the structure for mounting a temperature sensor according to a specific embodiment of this utility model. The structure of the fixture in the structure for mounting the temperature sensor can be found in [reference needed]. Figure 1 and Figure 2 .like Figures 1-4 As shown, the structure for mounting the temperature sensor includes:

[0060] The fixture described above is used to secure a temperature sensor passing through the first mounting hole 16 and the second mounting hole 13;

[0061] The locator includes a telescopic bracket that extends along the first direction D1 and is capable of telescopic movement along the first direction D1, and the telescopic bracket has scale markings.

[0062] In some embodiments, the telescopic support includes:

[0063] A first bracket 42 extends along the first direction D1 and is capable of telescopic movement along the first direction D1, and the first bracket 42 has a plurality of scale markings arranged along the first direction D1.

[0064] The second bracket 43 is fixedly connected to the end of the first bracket 42. The second bracket 43 extends along the second direction D2. The end of the second bracket 43 opposite to the first bracket 42 has a positioning member 44. The positioning member 44 can be engaged in the groove at the end of the temperature sensor. The second direction D2 intersects the first direction D1 perpendicularly.

[0065] Specifically, by setting up the locator including the first bracket 42 and the second bracket 43, with the first bracket 42 extending along the first direction D1 and capable of telescopic movement along the first direction D1, and having multiple scale markings arranged along the first direction D1 on the first bracket 42, the installation position of the temperature sensor can be positioned during installation. This avoids the need for repeated manual confirmation of the temperature sensor's installation position during installation, thereby improving not only the accuracy of the installation position but also significantly increasing the installation efficiency of the temperature sensor. The positioning element 44 at the end of the second bracket 43 in the locator can engage with the groove at the end of the temperature sensor, thereby limiting the temperature sensor to a preset position determined by the scale markings on the first bracket 42, avoiding the tedious operation of repeated positioning.

[0066] In some embodiments, the second bracket 43 is an elastic bracket, and the second bracket 43 is capable of telescopic movement along the second direction D2.

[0067] To prevent the locator from shaking during the positioning process, thereby further improving the accuracy and reliability of positioning, in some embodiments, the locator further includes:

[0068] The base includes a top surface and a bottom surface that are relatively distributed along the first direction D1. Two first supports 42 are fixed at intervals on the top surface of the base. Two second supports 43 are connected one-to-one to the ends of the two first supports 42 that are away from the base. The stability of the positioner during the positioning process is improved by the base abutting against the first flange.

[0069] To further reduce the installation difficulty of temperature sensors and improve the consistency of tightening multiple temperature sensors, in some embodiments, the structure for mounting the temperature sensors further includes:

[0070] A ratchet wrench 41 is used to tighten a clamping nut 40, which is used to be fitted onto the temperature sensor, and a retainer is used to fix the temperature sensor that passes through the clamping nut 40.

[0071] For example, such as Figure 3 As shown, the semiconductor processing device with temperature sensors includes a processing chamber 30, a base 37 located within the processing chamber 30, a base ring 35 distributed around the outer periphery of the base 37, a central sensor 34 located at the center of the base 37, and a first temperature sensor 31, a second temperature sensor 32, and a third temperature sensor 33 located on the base ring 35. The first temperature sensor 31, the second temperature sensor 32, and the third temperature sensor 33 are distributed at different positions on the base ring 35 to measure the temperature at different positions on the base ring 35. The processing chamber 30 also has a first flange 36 at its end. The front ends (i.e., measuring ends) of the first temperature sensor 31, the second temperature sensor 32, and the third temperature sensor 33 all pass through the first flange 36 and extend to the base ring 35. The ends (i.e., signal output ends) of the first temperature sensor 31, the second temperature sensor 32, and the third temperature sensor 33 are all located on the side of the first flange 36 away from the processing chamber 30.

[0072] The following description uses the installation of the first temperature sensor 31 into the semiconductor processing device with the temperature sensor as an example. For example, after the front end 311 of the first temperature sensor 31 passes through the first flange 36 located at the end of the processing chamber 30 and enters the processing chamber 30, the clamping nut 40 is sequentially fitted from the end 312 of the first temperature sensor 31. The position of the first temperature sensor 31 is adjusted to a preset position by the scale markings on the first bracket 42 in the locator abutting against the surface of the first flange 36. The positioning member 44 at the end of the second bracket 43 is engaged in the groove of the end 312 of the first temperature sensor 31 to fix the position of the first temperature sensor 31. Next, the retainer is fitted onto the first temperature sensor 31 from its end 312, so that the first temperature sensor 31 is connected to the first mounting hole 16 and the second mounting hole 13, thereby fixing the first temperature sensor 31 within the first mounting hole 16 and the second mounting hole 13. The second surface 102 of the retainer's fixing bracket body 10 abuts against the surface of the first flange 36, so that the clamping nut 40 is located within the receiving cavity 20 of the retainer. Then, when the clamping nut 40 is tightened using the ratchet wrench 41 to fix the first temperature sensor to the first flange 36, the elastic fixing body can automatically expand and contract with the rotation of the clamping nut 40, thereby preventing the first temperature sensor 31 from rotating with the clamping nut 40. This avoids the end (e.g., the front end 311) of the first temperature sensor 31 from tilting up, eliminating the problem of positional deviation of the first temperature sensor 31 due to the rotation of the clamping nut 40. After tightening the clamping nut 40, remove the retainer, the positioner, and the ratchet wrench 41.

[0073] The fixture and structure for mounting a temperature sensor provided in this specific embodiment, by setting a fixing bracket and a fastening assembly on the fixing bracket in the fixture, the fastening assembly includes an elastic fixing structure, the elastic fixing structure includes an elastic fixing body and a second mounting hole located in the elastic fixing body, the first mounting hole and the second mounting hole are interconnected and aligned along the first direction, the elastic fixing body can automatically expand and contract along the radial direction of the second mounting hole, thereby fixing the temperature sensor to be installed through the first mounting hole and the second mounting hole, and when tightening the clamping nut for fixing the temperature sensor, the elastic fixing body can automatically expand and contract with the rotation of the clamping nut, thereby preventing the temperature sensor from rotating with the clamping nut, avoiding the end (e.g., the front end) of the temperature sensor from tilting up, thereby preventing the temperature sensor from contacting the sealing ring or other structures in the reaction chamber, ensuring the accuracy and reliability of the temperature sensor in detecting temperature. Moreover, in this specific embodiment, after the temperature sensor is fixed by the fixture, it is not necessary to manually pull the end of the temperature sensor during the tightening of the clamping nut, and it is not necessary to repeatedly confirm the installation position of the temperature sensor, which saves labor costs and improves the installation efficiency and installation yield of the temperature sensor.

[0074] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A fastener, characterized in that, include: A fixed bracket includes a fixed bracket body and a first mounting hole penetrating the fixed bracket body along a first direction. The fixed bracket body includes a first surface and a second surface that are distributed opposite to each other along the first direction. A fastening assembly is connected to the first surface of the fixed bracket body. The fastening assembly includes an elastic fixing structure, which includes an elastic fixing body and a second mounting hole located within the elastic fixing body. The first mounting hole and the second mounting hole are interconnected and aligned along the first direction. The elastic fixing body is capable of expanding and contracting along the radial direction of the second mounting hole.

2. The fixator according to claim 1, characterized in that, The fixed bracket body further includes a receiving cavity extending from the second surface of the fixed bracket body into the interior of the fixed bracket body along the first direction, and the receiving cavity is in communication with the first mounting hole.

3. The fixator according to claim 1, characterized in that, The fastening assembly also includes: The track groove is located on the first surface of the fixed bracket body, and the track groove is distributed around the outer periphery of the first mounting hole; The first connector has one end located inside the track groove and the other end connected to the elastic fixed body, and the first connector can slide freely along the track groove.

4. The fixator according to claim 3, characterized in that, The track groove includes a plurality of sub-grooves distributed around the outer periphery of the first mounting hole, each of the sub-grooves extending radially along the first mounting hole; Multiple first connectors are distributed one-to-one in multiple sub-slots, and each first connector can slide freely in the sub-slot along the radial direction of the first mounting hole.

5. The fixator according to claim 4, characterized in that, The elastic fixing body includes: Multiple sub-fixing components are connected one-to-one with multiple first connecting components, and the multiple sub-fixing components are arranged in a ring to form the second mounting hole; A plurality of second connectors are located between and connected to adjacent sub-fixing members, wherein the second connectors are elastic connectors.

6. The fixator according to claim 5, characterized in that, The second connecting component is a spring.

7. The fixator according to claim 5, characterized in that, The projection of the sub-fixing member on the first surface is a fan-shaped ring, and the inner side of the sub-fixing member facing the second mounting hole is covered with elastic rubber.

8. The fixator according to claim 7, characterized in that, The first connector is a rigid connector, and the first connector is centrally connected to the sub-fixed member.

9. A structure for mounting a temperature sensor, characterized in that, include: The fixture as described in claim 1 is used to fix a temperature sensor passing through the first mounting hole and the second mounting hole; The locator includes a telescopic bracket that extends along a first direction and is capable of telescopic movement along the first direction, and the telescopic bracket has scale markings.

10. The structure for mounting a temperature sensor according to claim 9, characterized in that, The telescopic support includes: A first support extends along the first direction and is capable of telescopic movement along the first direction, and the first support has a plurality of scale markings arranged along the first direction. The second bracket is fixedly connected to the end of the first bracket. The second bracket extends along a second direction. The end of the second bracket opposite to the first bracket has a positioning element that can engage with the groove at the end of the temperature sensor. The second direction intersects the first direction perpendicularly.

11. The structure for mounting a temperature sensor according to claim 10, characterized in that, The second support is an elastic support, and the second support can extend and retract along the second direction.

12. The structure for mounting a temperature sensor according to claim 10, characterized in that, The locator also includes: The base includes a top surface and a bottom surface that are distributed opposite to each other along the first direction. Two first supports are fixed at intervals on the top surface of the base, and two second supports are connected one-to-one to the ends of the two first supports that are away from the base.

13. The structure for mounting a temperature sensor according to claim 9, characterized in that, Also includes: A ratchet wrench is used to tighten a clamping nut, which is used to fit onto the temperature sensor, and a retainer is used to secure the temperature sensor that passes through the clamping nut.

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